公开(公告)号：US09673269B2

公开(公告)日：2017-06-06

申请号：US13225451

申请日：2011-09-04

申请人： Emmanuel Defay ,  Gwenaël Le Rhun ,  Aurélien Suhm

发明人： Emmanuel Defay ,  Gwenaël Le Rhun ,  Aurélien Suhm

IPC分类号： H01L21/02 ,  H01G4/005 ,  H01L49/02

CPC分类号： H01L28/55 ,  H01L21/02197 ,  H01L21/02282 ,  H01L28/40 ,  H01L28/65

摘要： An integrated capacitor comprises a layer of dielectric material known as functional dielectric material based on crystallized material of perovskite type, between at least one first electrode known as a bottom electrode at the surface of a substrate and at least one second electrode known as a top electrode, said electrodes being electrically insulated by a layer of electrically insulating material in order to allow at least one contact on the top electrode. The electrically insulating material is made of an amorphous dielectric material of perovskite type having a dielectric constant lower than that of the crystallized material of perovskite type. The contact is formed from an etched contacting layer in contact with the electrically insulating dielectric layer level with its surface parallel to the plane of the layers. A process for manufacturing such an integrated capacitor is also provided.

公开(公告)号：US09190599B2

公开(公告)日：2015-11-17

申请号：US12881955

申请日：2010-09-14

申请人： Emmanuel Defay ,  Gwenaël Le Rhun

发明人： Emmanuel Defay ,  Gwenaël Le Rhun

IPC分类号： H01L41/31 ,  H01L41/08 ,  H01L41/09 ,  H01L41/053 ,  H01L41/25 ,  H01L41/43 ,  H01L41/317 ,  H01L41/47 ,  H01L41/29 ,  H01L41/318 ,  H01L41/314 ,  B41J2/14 ,  B41J2/16 ,  H01L41/047

CPC分类号： H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  H01L41/047 ,  H01L41/053 ,  H01L41/25 ,  H01L41/29 ,  H01L41/314 ,  H01L41/317 ,  H01L41/318 ,  H01L41/43 ,  H01L41/47 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49156 ,  Y10T29/49401

摘要： In a process for fabricating a membrane, including, on a substrate, a thin-film multilayer including a film of piezoelectric material placed between a top electrode film and a bottom electrode film and an elastic film supporting said piezoelectric film, the process includes: determining at least one concavity/convexity curvature of said membrane along an axis parallel to the plane of the films so that at least one inflection point is defined, said point allowing a first region and a second region, corresponding to a concave part and a convex part or vice versa, to be isolated; depositing, on the surface of the substrate, a thin-film multilayer including at least one film of piezoelectric material, one bottom electrode film and one top electrode film; and structuring at least one of the electrode films to define at least said first membrane region, in which an electric field perpendicular to the plane of the films may be applied, and at least said second region, in which an electric field parallel to the plane of the films may be applied.

摘要翻译： 在制造膜的方法中，包括在基板上的包括放置在顶电极膜和底电极膜之间的压电材料膜的薄膜多层膜和支撑所述压电膜的弹性膜，所述方法包括：确定 所述膜沿着平行于所述膜的平面的轴线的至少一个凹凸曲率，使得至少一个拐点被限定，所述点允许对应于凹部和凸部的第一区域和第二区域 或反之亦然，被隔离; 在基板的表面上沉积包括至少一层压电材料薄膜，一个底部电极薄膜和一个顶部电极薄膜的薄膜多层膜; 并且构造至少一个所述电极膜以至少限定所述第一膜区域，其中可以施加垂直于所述膜的平面的电场，以及至少所述第二区域，其中平行于所述平面的电场 的膜可以被应用。