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公开(公告)号:US10326049B1
公开(公告)日:2019-06-18
申请号:US16055584
申请日:2018-08-06
发明人: Kung-Hsieh Hsu , Ming-Sen Hsu
CPC分类号: H01L33/06 , H01L33/145 , H01L33/32
摘要: An UV light-emitting diode includes a patterned substrate, a template layer, a growth layer, a first n-type semiconductor layer, an intrinsic semiconductor layer, a second n-type semiconductor layer, a plurality of layers of multiple quantum wells, a barrier layer, a first electron blocking layer, a second electron blocking layer, a first p-type semiconductor layer and a second p-type semiconductor layer in sequence from a bottom layer to a top layer. Whereas the aforementioned layers all include Group III nitride materials and the number of layers for the plurality of layers of multiple quantum wells is at least five layers. Because the first n-type semiconductor layer, the first p-type semiconductor layer, and the plurality of layers of multiple quantum wells all contain aluminum, short-wavelength UV light is emitted when a current is applied.
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公开(公告)号:US20170062655A1
公开(公告)日:2017-03-02
申请号:US14836679
申请日:2015-08-26
发明人: Kung-Hsieh Hsu , Cheng-Yu Chiu , Ming-Sen Hsu , Chun-Hung Chen , Chun-Yi Lee
IPC分类号: H01L33/12
CPC分类号: H01L21/0254 , C30B25/18 , H01L21/0242 , H01L21/0243 , H01L33/007
摘要: A sapphire substrate with patterned structure includes a sapphire base; a plurality of the cavities formed on a surface of the sapphire base; and a template layer. The plurality of the cavities are periodically arranged at a predetermined distance from each other, and each of the plurality of the cavities has a bottom surface and a top opening. Each of the plurality of the cavities comprises at least a first and a second inclined surfaces, and the first and the second inclined surfaces are inclined by a first and a second angles respectively with respect to the bottom surface of the plurality of the cavities.
摘要翻译: 具有图案结构的蓝宝石衬底包括蓝宝石基底; 形成在蓝宝石基底的表面上的多个空腔; 和模板层。 多个空腔周期性地以彼此相隔预定的距离布置,并且多个空腔中的每一个具有底面和顶部开口。 多个空腔中的每一个至少包括第一和第二倾斜表面,并且第一和第二倾斜表面分别相对于多个空腔的底表面倾斜第一和第二角度。
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公开(公告)号:US10326046B2
公开(公告)日:2019-06-18
申请号:US15255429
申请日:2016-09-02
发明人: Kung-Hsieh Hsu , Ming-Sen Hsu
摘要: A growth method of aluminum gallium nitride is disclosed. The method includes the steps of: providing a substrate; forming a first aluminum gallium nitride layer on the substrate at a first temperature; and forming a second aluminum gallium nitride layer, on the first aluminum gallium nitride layer, at a second temperature. The first temperature is higher than the second temperature.
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公开(公告)号:US20180258550A1
公开(公告)日:2018-09-13
申请号:US15635796
申请日:2017-06-28
发明人: Kung-Hsieh Hsu , Ming-Sen Hsu
CPC分类号: C30B25/18 , C23C16/34 , C30B25/183 , C30B29/403 , H01L21/02378 , H01L21/02381 , H01L21/0242 , H01L21/02458 , H01L21/0254 , H01L21/0262
摘要: The present application provides a growth method of aluminum nitride (AlN), including the following steps: providing a substrate; using a metal organic chemical vapor deposition (MOCVD) device to simultaneously supply metal source gas, nitrogen source gas and group VI element source gas to the substrate to form an AlN nucleation layer on the substrate; and using the MOCVD device to simultaneously supply the nitrogen source gas and the metal source gas to the AlN nucleation layer to form an AlN crystalline layer on the AlN nucleation layer.
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公开(公告)号:US09812322B2
公开(公告)日:2017-11-07
申请号:US14836679
申请日:2015-08-26
发明人: Kung-Hsieh Hsu , Cheng-Yu Chiu , Ming-Sen Hsu , Chun-Hung Chen , Chun-Yi Lee
CPC分类号: H01L21/0254 , C30B25/18 , H01L21/0242 , H01L21/0243 , H01L33/007
摘要: A sapphire substrate with patterned structure includes a sapphire base; a plurality of the cavities formed on a surface of the sapphire base; and a template layer. The plurality of the cavities are periodically arranged at a predetermined distance from each other, and each of the plurality of the cavities has a bottom surface and a top opening. Each of the plurality of the cavities comprises at least a first and a second inclined surfaces, and the first and the second inclined surfaces are inclined by a first and a second angles respectively with respect to the bottom surface of the plurality of the cavities.
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公开(公告)号:US09666429B1
公开(公告)日:2017-05-30
申请号:US15171774
申请日:2016-06-02
发明人: Kung-Hsieh Hsu , Ming-Sen Hsu
CPC分类号: H01L21/0243 , H01L21/02458 , H01L21/0254 , H01L21/02647 , H01L33/0066 , H01L33/0075 , H01L33/20
摘要: A method for growing Group III nitride is provided, which includes the following steps. A plurality of notches separated from each other are formed at the epitaxial substrate surface via the pattering process. The plurality of notches each has at least one stepping structure with a predetermined inclination angle, wherein the stepping structure in each notch gradually descends towards the center of the corresponding notch. The Group III nitride is grown on the epitaxial substrate via epitaxy process. Wherein, the Group III nitride growing at an upper portion of the epitaxial substrate restricts the vertical growth of the Group III nitride growing at the lower portion of the epitaxial substrate, and the Group III nitride growing at the lower portion of the epitaxial substrate promotes the lateral growth of the Group III nitride growing at the upper portion of the epitaxial substrate.
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