公开(公告)号：US5661400A

公开(公告)日：1997-08-26

申请号：US629170

申请日：1996-04-08

申请人： Erich Plies ,  Alejandro Valenzuela

发明人： Erich Plies ,  Alejandro Valenzuela

IPC分类号： G01R33/34 ,  A61B5/055 ,  G01R33/341 ,  H01F6/06 ,  G01V3/00

CPC分类号： G01R33/341 ,  G01R33/34023

摘要： An antenna for nuclear magnetic resonance tomography has at least one annulus antenna surrounded by a passive layer of superconductor material, so that an optimally uniform magnetic field and an optimally high signal-to-noise ratio are assured during operation.

摘要翻译： 用于核磁共振断层摄影的天线具有由超导体材料的无源层包围的至少一个环形天线，使得在操作期间确保最佳均匀的磁场和最佳高的信噪比。

公开(公告)号：US4785176A

公开(公告)日：1988-11-15

申请号：US30964

申请日：1987-03-27

申请人： Juergen Frosien ,  Erich Plies

发明人： Juergen Frosien ,  Erich Plies

IPC分类号： H01J37/12 ,  G01Q30/02 ,  H01J37/10 ,  H01J37/141 ,  H01J37/145 ,  H01J49/06

CPC分类号： H01J37/10 ,  H01J37/145

摘要： An electrostatic-magnetic lens is provided having either a symmetrical or asymmetrical magnetic lens which is overlaid with an electrostatic immersion lens. One electrode of the immersion lens is formed as a hollow cylinder, which is within an upper pole piece of the magnetic lens concentrically relative to the axis of symmetry thereof and extending into the region of the pole piece gap. The lower pole piece of the magnetic lens is preferably at a ground potential and clad with the beam guiding tube for protection against contamination and forming the lower electrode of the electrostatic immersion lens.

摘要翻译： 提供具有与静电浸没透镜重叠的对称或非对称磁性透镜的静电磁透镜。 浸没透镜的一个电极形成为中空圆柱体，其位于磁性透镜的上极片内，相对于其对称轴线同心并延伸到极片间隙的区域中。 磁透镜的下极片优选为接地电位，并与光束引导管一起包围以防止污染并形成静电浸没透镜的下电极。

公开(公告)号：US4769543A

公开(公告)日：1988-09-06

申请号：US23857

申请日：1987-03-09

申请人： Erich Plies

发明人： Erich Plies

IPC分类号： H01L21/66 ,  G01N23/22 ,  G01R31/302 ,  G01R31/305 ,  H01J37/147 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J49/48 ,  H01J49/00

CPC分类号： G01R31/305 ,  H01J37/1474 ,  H01J37/268 ,  H01J49/488

摘要： A spectrometer-lens for particle beam apparatus is formed by a short focal length magnetic lens having an integrated electrostatic retarding field spectrometer and a single-stage deflection unit arranged within said lens. To avoid deflecting secondary particles that are triggered at a specimen by a primary particle beam, nearly uniform electrical and magnetic deflection fields are generated by the deflection unit oriented relative to one another such that their field vectors reside perpendicular to one another and respectively perpendicular to a velocity vector of the secondary particles attracted from the specimen.

摘要翻译： 用于粒子束装置的光谱仪透镜由具有集成静电延迟场光谱仪的短焦距磁透镜和布置在所述透镜内的单级偏转单元形成。 为了避免通过初级粒子束偏转在样本处触发的二次粒子，由相对于彼此定向的偏转单元产生几乎均匀的电和磁偏转场，使得它们的场矢量彼此垂直并分别垂直于 从样品吸引的二次粒子的速度矢量。

公开(公告)号：US4629899A

公开(公告)日：1986-12-16

申请号：US817167

申请日：1986-01-08

申请人： Erich Plies

发明人： Erich Plies

IPC分类号： G21K1/08 ,  G21K1/093 ,  G21K5/04 ,  H01J37/141 ,  H01J37/30 ,  H01L21/027 ,  H05H7/00 ,  H05H3/00

CPC分类号： H01J37/141 ,  G21K1/08 ,  G21K5/04

摘要： An apparatus for deflecting and focusing a beam of neutral particles for operating on extremely small workpieces, such as for doping or inscribing micro-electronic components, has a deflection system for generating at least one magnetic field through which the beam of neutral particles is directed for focusing and shaping of the beam on the workpiece. The lens system may include one or more six-pole or eight-pole lenses.

摘要翻译： 用于偏转和聚焦用于在非常小的工件上操作的中性粒子束的装置，例如用于掺杂或刻录微电子部件的装置具有用于产生至少一个磁场的偏转系统，中性粒子束通过该磁场被引导 工件上的梁的聚焦和成形。 透镜系统可以包括一个或多个六极或八极透镜。

公开(公告)号：US4439685A

公开(公告)日：1984-03-27

申请号：US290473

申请日：1981-08-06

申请人： Erich Plies

发明人： Erich Plies

IPC分类号： H01J37/04 ,  H01J37/12 ,  H01J37/30 ,  H01J37/305 ,  H01L21/027 ,  G21K1/08 ,  H01J3/14

CPC分类号： H01J37/12 ,  H01J37/045 ,  H01J37/3007

摘要： A corpuscular beam blanking system for generating high-frequency corpuscular pulses with monochromator effect utilizes a three-electrode Einzel-lens designed as a filter lens and which is employed as a blanking lens. A "breathing" effect of a probe spot of the corpuscular beam is avoided and a monochromator effect is achieved with a blanking pin-hole diaphragm positioned after the blanking lens.

摘要翻译： 用于产生具有单色器效应的高频红细胞脉冲的红细胞束消隐系统利用设计为滤光镜的三电极Einzel透镜，并用作消隐透镜。 避免了红细胞束的探针点的“呼吸”效应，并且通过位于消隐透镜之后的消隐针孔光阑实现单色仪效果。

公开(公告)号：US5030829A

公开(公告)日：1991-07-09

申请号：US346921

申请日：1989-05-03

申请人： Erich Plies ,  Joerg Quincke

发明人： Erich Plies ,  Joerg Quincke

IPC分类号： G01R31/302 ,  G01R31/308 ,  G01R31/319 ,  H01L21/66 ,  H01L27/08

CPC分类号： G01R31/308

摘要： Latch-up propagation is periodically triggered and the intensity of infrared radiation emanating from a CMOS circuit is successively detected at a plurality of measuring points covering the circuit in a grid-like manner at prescribed points in time after the appearance of the trigger signal which triggers latch-up and a measured value representing the intensity of infrared radiation is recorded in a location-dependent manner. The measured values are monitored with a display and the intensity thereof is utilized as the brightness control for the picture elements. Also, the measured values are stored in an image store.

摘要翻译： 周期性地触发锁定传播，并且在出现触发信号的规定时间点之后，以覆盖电路的多个测量点连续检测从CMOS电路发出的红外辐射的强度。 以位置相关的方式记录闩锁和表示红外线辐射强度的测量值。 测量值用显示器监视，其强度被用作图像元素的亮度控制。 此外，测量值存储在图像存储中。

公开(公告)号：US5012100A

公开(公告)日：1991-04-30

申请号：US346920

申请日：1989-05-03

申请人： Erich Plies ,  Joerg Quincke

发明人： Erich Plies ,  Joerg Quincke

IPC分类号： G01R31/302 ,  G01R31/308 ,  G01R31/319 ,  H01L21/66 ,  H01L27/08

CPC分类号： G01R31/308

摘要： Since known methods for investigating latch-up propagation have only a comparatively slight chronological resolution, a method and apparatus are proposed in which latch-up is periodically triggered and the intensity of the infrared radiation emanating from an integrated circuit is sensed at a plurality of measuring points that cover the circuit in a grid-like manner in order to respectively determine, at the measuring points, within what time span the intensity of the infrared radiation reaches a threshold, and to respectively register a measured value representing the time interval in a location-dependent manner.

摘要翻译： 由于用于调查闭锁传播的已知方法仅具有相对较小的时间顺序分辨率，因此提出了一种方法和装置，其中周期性地触发闩锁，并且在多个测量中感测到从集成电路发出的红外辐射的强度 以网格状方式覆盖电路的点，以便在测量点处分别确定红外辐射的强度达到阈值的时间跨度，并分别在表示时间间隔的位置上注册表示时间间隔的测量值 依赖的方式。

公开(公告)号：US4963823A

公开(公告)日：1990-10-16

申请号：US349432

申请日：1989-05-09

申请人： Johann Otto ,  Erich Plies

发明人： Johann Otto ,  Erich Plies

IPC分类号： G01Q60/00 ,  H01J37/04 ,  H01J37/147 ,  H01J37/153 ,  H01J37/26

CPC分类号： H01J37/147 ,  H01J37/04 ,  H01J37/268

摘要： Conventional beam blanking system generate electron pulses having a minimum width of about 100 through 200 ps. Although a reduction of the pulse width to a few tens of picoseconds is fundamentally possible, the reduction of the probe current accompanying this would result to a considerable lengthening of the measuring times. In the invention a photo-cathode (PK) is charged by a pulsed laser beam (LA) which is attached to the column of an electron beam measuring instrument and the photo-electron source is stigmatically imaged onto the beam axis (OA1) using a focusing deflection unit (SFM). A sector field magnet is used as a focusing deflection unit (SFM).

摘要翻译： 常规的束消隐系统产生具有约100至200ps的最小宽度的电子脉冲。 尽管将脉冲宽度减小到几十皮秒是根本上可能的，但伴随此的探针电流的减少将导致测量时间的显着延长。 在本发明中，光电阴极（PK）由脉冲激光束（LA）充电，该脉冲激光束（LA）附着到电子束测量仪的色谱柱上，光电子源使用 聚焦偏转单元（SFM）。 扇区磁铁用作聚焦偏转单元（SFM）。

公开(公告)号：US4788495A

公开(公告)日：1988-11-29

申请号：US845517

申请日：1986-03-28

申请人： Erich Plies

发明人： Erich Plies

IPC分类号： G01R31/26 ,  G01Q10/00 ,  G01R31/302 ,  G01R31/305 ,  H01J37/28 ,  H01L21/66 ,  G01R13/02 ,  G01N23/00

CPC分类号： G01R31/305

摘要： For indirect identification of an intensity distribution of particle beam pulses generated in a particle beam measuring instrument by use of a beam blanking system, a signal s(t) known in terms of its time-dependency is periodically fed into a specimen and stroboscopically sampled according to the sampling principle. The desired intensity distribution of the particle beam pulses is subsequently calculated by de-convolution of the measured signal h(t) recorded by the measuring chain.

摘要翻译： 对于通过使用束消隐系统在粒子束测量仪器中产生的粒子束脉冲的强度分布的间接识别，将根据其时间依赖性已知的信号s（t）周期性地馈送到样本中并根据 以抽样原则。 随后通过由测量链记录的测量信号h（t）的去卷积来计算粒子束脉冲的期望强度分布。

公开(公告)号：US4507559A

公开(公告)日：1985-03-26

申请号：US499482

申请日：1983-05-31

申请人： Erich Plies

发明人： Erich Plies

IPC分类号： H01J37/12 ,  H01J3/30 ,  H01J29/74 ,  H01J37/04 ,  G21K1/08 ,  H01J3/14

CPC分类号： H01J37/045

摘要： A deflection structure for a corpuscular beam blanking system has two deflection electrodes, a first of which is supplied with a chronologically varying potential, the second of which being connected to a chronologically constant potential for generating standard corpuscular beam pulses. The structure further includes auxiliary electrodes disposed in front of and behind the deflection electrodes in the direction of beam travel for reducing the energy spread of the corpuscular beam, the auxiliary electrodes being supplied with a static voltage.

摘要翻译： 用于粒子束消隐系统的偏转结构具有两个偏转电极，其中第一偏转电极被提供具有按时间顺序变化的电位，其中第二偏转电极连接到时间上恒定的电位以产生标准的粒子束脉冲。 该结构还包括辅助电极，其设置在光束行进方向上的偏转电极的前方和后方，用于减少红细胞束的能量扩散，辅助电极被供给静电压。