公开(公告)号：US20160107880A1

公开(公告)日：2016-04-21

申请号：US14970933

申请日：2015-12-16

Applicant: FUJIFILM Corporation

Inventor： Takahiro SANO ,  Takayuki NAONO

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0072 ,  B81B2203/0127 ,  B81B2203/0353 ,  B81B2203/04 ,  B81C1/00666 ,  B81C2201/0112 ,  B81C2201/0169 ,  B81C2201/017 ,  B81C2201/0176 ,  G01C19/56 ,  G01P15/09 ,  G01P2015/084 ,  H01L41/0815 ,  H01L41/1138 ,  H01L41/319 ,  H03H9/17 ,  H03H2003/027 ,  H03H2003/0414 ,  H04R17/10 ,  H04R31/00 ,  H04R2201/003

Abstract: A producing method for a diaphragm-type resonant MEMS device includes forming a first silicon oxide film, forming a second silicon oxide film, forming a lower electrode, forming a piezoelectric film, forming an upper electrode, laminating the first silicon oxide film, the second silicon oxide film, the lower electrode, the piezoelectric film, and the upper electrode in this order on a first surface of a silicon substrate, and etching the opposite side surface of the first surface of the silicon substrate by deep reactive ion etching to form a diaphragm structure, in which the proportion R2 of the film thickness t2 of the second silicon oxide film with respect to the sum of the film thickness t1 of the first silicon oxide film and the film thickness t2 of the second silicon oxide film satisfies the following condition: 0.10 μm≦t1≦2.00 μm; and R2≧0.70.

Abstract translation: 一种膜片式谐振MEMS器件的制造方法，包括：形成第一氧化硅膜，形成第二氧化硅膜，形成下部电极，形成压电膜，形成上部电极，层叠第一氧化硅膜，第二氧化硅膜 氧化硅膜，下电极，压电膜和上电极，在硅衬底的第一表面上，并且通过深反应离子蚀刻蚀刻硅衬底的第一表面的相对侧表面，以形成 膜结构，其中第二氧化硅膜的膜厚度t2的比例R2相对于第一氧化硅膜的膜厚度t1与第二氧化硅膜的膜厚度t2之和的比例满足以下条件 ：0.10μm＆nlE; t1＆nlE;2.00μm; R2≥0.70。

公开(公告)号：US20200342798A1

公开(公告)日：2020-10-29

申请号：US16929099

申请日：2020-07-14

Applicant: FUJIFILM CORPORATION

Inventor： Takahiro SANO ,  Masayuki NAYA

IPC: G09G3/02 ,  G06T7/70 ,  G06T11/00 ,  G02B27/14 ,  B43L13/18

Abstract: The handwriting support device includes a beam splitter that reflects light from an image display surface such that a virtual image of an image displayed on the image display surface is visible on a writing surface facing the image display surface and transmits the light from a writing surface side such that the writing surface side is visible, a memory and a processor being configure to perform control for non-display of an image object, which overlaps with a real object on the writing surface and does not overlap with a tip of the writing instrument, among a plurality of image objects in a case where a first image including the plurality of image objects indicating writing target regions is displayed on the image display surface and the real object including the writing instrument is inserted into a space between the beam splitter and the writing surface.

公开(公告)号：US20200183453A1

公开(公告)日：2020-06-11

申请号：US16788249

申请日：2020-02-11

Applicant: FUJIFILM CORPORATION

Inventor： Takahiro SANO ,  Masayuki NAYA

IPC: G06F1/16 ,  G06F3/0354 ,  G02B5/08 ,  G06F3/041

Abstract: A handwriting support device includes a half mirror; an image display surface; a writing surface, a virtual image of an image displayed on the image display surface being projected on the writing surface. In a case where a real object is inserted onto the writing surface, the image display control unit causes a non-display processed image to be displayed on the image display surface, the non-display processed image being obtained by at least a partial region, of a region of the first image corresponding to a vertically projected region of the real object on the writing surface, being subjected to non-display processing. In the handwriting support device, an image, which is a virtual image of the non-display processed image in which at least a part of an inside of the vertically projected region of the real object is non-displayed, is projected onto the writing surface.

公开(公告)号：US20200001646A1

公开(公告)日：2020-01-02

申请号：US16568372

申请日：2019-09-12

Applicant: FUJIFILM Corporation

Inventor： Takahiro SANO ,  Masayuki Naya

IPC: B43L13/18 ,  G03B21/132 ,  H05B37/02

Abstract: An autograph support device includes a supporting member that supports an image carrier having a planar image display surface such that the image display surface that displays a mirror image of an image displayed on a planar writing surface is located above the writing surface of a writing medium having the planar writing surface; and a half mirror that is disposed between the writing surface and the image display surface and has a mirror surface facing the image display surface . The image display surface and the writing surface are disposed at an equal optical distance from the mirror surface of the half mirror interposed therebetween. A writing surface lighting fixture that radiates light from the mirror surface side toward the writing surface side to illuminate the writing surface is provided on the writing surface side from the mirror surface.

公开(公告)号：US20190222941A1

公开(公告)日：2019-07-18

申请号：US16365119

申请日：2019-03-26

Applicant: FUJIFILM Corporation

Inventor： Yoshikazu HISHINUMA ,  Takayuki NAONO ,  Takahiro SANO

IPC: H04R17/02 ,  H01L41/187 ,  H01L41/113 ,  H01L41/047

Abstract: A piezoelectric microphone includes a plate, a support portion that is provided around the plate, connection portions that connect the plate and the support portion on two or more sides of the plate, and a detection portion including a lower electrode, a piezoelectric film, and an upper electrode which are stacked in this order. The detection portion is stacked on the connection portion . An inflection point of a cross-sectional deformation curve in a case in which the plate and the connection portion are deformed by sound pressure is present in a region in which the detection portion is not stacked.

公开(公告)号：US20200018720A1

公开(公告)日：2020-01-16

申请号：US16582055

申请日：2019-09-25

Applicant: FUJIFILM Corporation

Inventor： Fumihiko MOCHIZUKI ,  Takahiro SANO ,  Koji TAKAKU ,  Yasuhiro AIKI

IPC: G01N27/416 ,  G01N33/00 ,  G01N33/483

Abstract: A gas detection method using a gas detection element obtained by laminating a fixed support, a first electrode (2), a dielectric sensor (3), a second electrode (4), and a gas adsorption film (5), in this order, the method including: a step of applying a first signal resonantly driving the dielectric sensor (3) between electrodes of the first electrode (1) and the second electrode (3), and detecting gas adsorbed on the gas adsorption film based on a change of a resonant frequency of the dielectric sensor; and a step of heating the dielectric sensor (3) by applying a second signal between the electrodes after the detection of gas and desorbing gas adsorbed in the gas adsorption film; a gas detection system capable of performing the method; and a gas desorption method appropriate for applying this gas detection method.

公开(公告)号：US20200000078A1

公开(公告)日：2020-01-02

申请号：US16569801

申请日：2019-09-13

Applicant: FUJIFILM Corporation

Inventor： Yasuhiro AIKI ,  Takahiro SANO ,  Fumihiko MOCHIZUKI ,  Koji TAKAKU

IPC: A01M1/02 ,  G01N27/414 ,  G01N27/22

Abstract: Provided are an insect detection method that includes detecting an intrinsic gas emitted by an insect using a gas sensor including a gas adsorption membrane, the gas sensor being selected from a resonant sensor, an electrical resistance sensor, and a field effect transistor sensor; a gas sensor for insect detection and a gas sensor array for insect detection, which are suitable to be used for this method; and an electric machine product having the gas sensor or gas sensor array mounted therein.

公开(公告)号：US20180108829A1

公开(公告)日：2018-04-19

申请号：US15846272

申请日：2017-12-19

Applicant: FUJIFILM Corporation

Inventor： Takayuki NAONO ,  Takahiro SANO

IPC: H01L41/312 ,  H01L41/09 ,  H01L41/187 ,  H01L41/08 ,  H01L41/047 ,  H01L41/316

CPC classification number: H01L41/312 ,  B06B1/0688 ,  H01L41/0471 ,  H01L41/0805 ,  H01L41/09 ,  H01L41/094 ,  H01L41/187 ,  H01L41/1875 ,  H01L41/316

Abstract: A first lamination step of forming lower electrode films on both surfaces of a diaphragm and directly forming a first Pb-containing perovskite oxide film which has a larger thermal expansion coefficient than that of the diaphragm and has a columnar structure on a front surface of the lower electrode film; and a second lamination step of directly forming a second Pb-containing perovskite oxide film on a front surface of the lower electrode film are sequentially performed. The second Pb-containing perovskite oxide film is formed under a condition that a difference between a molar ratio RA1 of Pb to a B-site element in the first Pb-containing perovskite oxide film and a molar ratio RB1 of Pb to a B-site element in the second Pb-containing perovskite oxide film Ether the second lamination step is 0.056 or less.