ABRASIVE, POLISHING COMPOSITION, AND POLISHING METHOD

    公开(公告)号:US20190153263A1

    公开(公告)日:2019-05-23

    申请号:US16096290

    申请日:2017-01-27

    IPC分类号: C09G1/02 C09K3/14

    摘要: Provided are an abrasive, a polishing composition, and a polishing method capable of polishing the surface of an alloy or metal oxide at a sufficient polishing removal rate and providing a high-quality mirror surface. The abrasive contains alumina having an α-conversion rate of 80% or more and having a 50% particle diameter, in a volume-based cumulative particle diameter distribution, of 0.15 μm or more to 0.35 μm or less. The polishing composition contains this abrasive and has a pH of 7 or less. These abrasive and polishing composition are used for polishing polishing objects containing at least one of an alloy and a metal oxide.

    POLISHING PAD AND POLISHING METHOD USING SAME

    公开(公告)号:US20210347007A1

    公开(公告)日:2021-11-11

    申请号:US17280607

    申请日:2019-09-12

    IPC分类号: B24B37/24 B24B37/22 B24B37/26

    摘要: There are provided a polishing pad and a polishing method using the same that are useful for removing the surface waviness of a curved resin-painted surface at a high polishing removal rate. A polishing pad (10) according to one aspect of the present invention includes a layer having a polishing surface (30). The layer having the polishing surface (30) has a sparse and dense structure in which a proportion of a sparse portion of the polishing surface (30) is 52% or more and 96% or less, and is composed of a sheet material having an A hardness of 70 or more measured according to JIS K 6253.