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公开(公告)号：US20070187850A1
公开(公告)日：2007-08-16
申请号：US11355617
申请日：2006-02-16
申请人： Fernando Tomasel , Justin Mauck , Juan Gonzales
发明人： Fernando Tomasel , Justin Mauck , Juan Gonzales
IPC分类号： B01F3/04
CPC分类号： F22B1/28 , F22B3/04 , Y10S261/65
摘要： A system and method for providing a vapor are described. In one variation, liquid is placed in a containment vessel, and a pressure in the containment vessel is reduced below atmospheric pressure. The pressure in the vessel is monitored and the liquid is heated in response to the sensed pressure falling below a desired level. When needed, the vapor is delivered from the liquid containment vessel to the external system.
摘要翻译： 描述了一种用于提供蒸汽的系统和方法。 在一个变型中，将液体放置在容纳容器中，并且将容纳容器中的压力降低到大气压以下。 监测容器中的压力并响应于感测到的压力低于期望水平而加热液体。 当需要时，蒸汽从液体容纳容器输送到外部系统。
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2.发明授权Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements 有权质量流量控制器具有与第二对热敏元件相对的第一对热敏元件公开(公告)号：US07971480B2
公开(公告)日：2011-07-05
申请号：US12250205
申请日：2008-10-13
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F1/6842 , G01F1/696 , G01F5/00 , G05D7/0635 , Y10T137/0324 , Y10T137/7737
摘要： One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion.
摘要翻译： 本发明的一个实施例涉及一种热传感器及其使用方法。 一个热传感器适于输出不受外部纵向和正交热梯度影响的信号。 在一个实施例中，质量流量控制器热传感器包括具有上游管部分，管弯曲部分和下游管部分的毛细管，该下游部分基本上平行于上游部分。 在一个实施例中，上游管部分和下游管部分之间的距离不大于上游部分和下游部分长度的一半，第一对热敏元件耦合到上游管部分和第二对热敏元件 耦合到下游管部分。
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公开(公告)号：US20100089459A1
公开(公告)日：2010-04-15
申请号：US12250205
申请日：2008-10-13
CPC分类号： G01F1/6847 , G01F1/6842 , G01F1/696 , G01F5/00 , G05D7/0635 , Y10T137/0324 , Y10T137/7737
摘要： One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion.
摘要翻译： 本发明的一个实施例涉及一种热传感器及其使用方法。 一个热传感器适于输出不受外部纵向和正交热梯度影响的信号。 在一个实施例中，质量流量控制器热传感器包括具有上游管部分，管弯曲部分和下游管部分的毛细管，该下游部分基本上平行于上游部分。 在一个实施例中，上游管部分和下游管部分之间的距离不大于上游部分和下游部分长度的一半，第一对热敏元件耦合到上游管部分和第二对热敏元件 耦合到下游管部分。
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公开(公告)号：US06953143B2
公开(公告)日：2005-10-11
申请号：US10412367
申请日：2003-04-11
申请人： Justin Mauck , Steve Dillon
发明人： Justin Mauck , Steve Dillon
CPC分类号： H01J37/32522 , B23K20/08
摘要： A method and apparatus are described for making a coldplate. A first component of, for example copper, is explosion welded to a second component of, for example aluminum. The first metal component has a top surface opposite the second metal component and at least one channel proximate the top surface adapted to carry a cooling fluid. The coldplate can be used as an interior wall for a plasma chamber.
摘要翻译： 描述了制造冷板的方法和装置。 例如铜的第一组分被爆炸焊接到例如铝的第二组分。 第一金属部件具有与第二金属部件相对的顶表面和靠近顶表面的至少一个通道，适于承载冷却流体。 冷板可用作等离子体室的内壁。
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公开(公告)号：US20180370263A1
公开(公告)日：2018-12-27
申请号：US16102392
申请日：2018-08-13
摘要： The present teachings relate to various embodiments of a gas enclosure system that can have various components comprising a particle control system that can provide a low-particle zone proximal to a substrate. Various components of a particle control system can include a gas circulation and filtration system, a low-particle-generating motion system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. In addition to maintaining substantially low levels for each species of various reactive species, including various reactive atmospheric gases, such as water vapor and oxygen, for various embodiments of a gas enclosure system that have a particle control system, an on-substrate particle specification can be readily met. Accordingly, processing of various substrates in an inert, low-particle gas environment according to systems and methods of the present teachings can have substantially lower manufacturing defects.
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6.发明授权公开(公告)号：US06946063B1
公开(公告)日：2005-09-20
申请号：US10374306
申请日：2003-02-25
CPC分类号： B23P15/26 , B21C37/155 , B21D53/085 , B21J9/06 , B23P11/00 , F28F1/22 , F28F2275/025 , Y10T29/49375 , Y10T29/4981
摘要： In one aspect of the invention is a method to construct plasma chambers with improved wall resistance to deterioration. In one embodiment of the invention, a chamber is made of an aluminum alloy having low concentrations of elements that form non-soluble, intermetallic particles to address coating/substrate issues, has swaged-in cooling tubes to reduce thermal stress by improving thermal resistance, and has a plurality of dielectric gaps to decrease ion bombardment.
摘要翻译： 本发明的一个方面是一种构建具有改善的耐劣化的壁电阻的等离子体室的方法。 在本发明的一个实施方案中，室由具有低浓度元素的铝合金制成，其形成不可溶的金属间颗粒以解决涂层/衬底问题，具有挤压冷却管以通过改善热阻来降低热应力， 并且具有多个电介质间隙以减少离子轰击。
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7.发明申请METHOD AND APPARATUS FOR PREVENTING THE FORMATION OF A PLASMA-INHIBITING SUBSTANCE 有权用于防止形成等离子体抑制物质的方法和装置公开(公告)号：US20080127893A1
公开(公告)日：2008-06-05
申请号：US11566610
申请日：2006-12-04
IPC分类号： C23C16/00
CPC分类号： H01J37/32357 , H01J37/32495
摘要： A system and method for preventing formation of a plasma-inhibiting substance within a plasma chamber is provided. In one embodiment, an apparatus that includes a barrier component configured to be disposed within a plasma chamber. The barrier component includes a wall that defines a plasma formation region where a chemically-reducing species is formed from a fluid. A portion of the wall is formed of a substance that is substantially inert to the chemically-reducing species. The wall prevents the chemically-reducing species from interacting with an inner surface of the plasma chamber to form a conductive substance. The barrier component also includes an opening in fluid communication with the plasma formation region. The fluid is introduced into the plasma formation region via the opening.
摘要翻译： 提供了一种用于防止在等离子体室内形成等离子体抑制物质的系统和方法。 在一个实施例中，一种包括被配置为设置在等离子体室内的屏障部件的装置。 阻挡部件包括限定等离子体形成区域的壁，其中由流体形成化学还原物质。 壁的一部分由对化学还原物质基本上惰性的物质形成。 该壁防止化学还原物质与等离子体室的内表面相互作用以形成导电物质。 阻挡部件还包括与等离子体形成区域流体连通的开口。 流体经由开口引入等离子体形成区域。
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8.发明授权Method and apparatus for preventing the formation of a plasma-inhibiting substance 有权防止形成等离子体抑制物质的方法和装置公开(公告)号：US07942112B2
公开(公告)日：2011-05-17
申请号：US11566610
申请日：2006-12-04
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306 , H05B31/26
CPC分类号： H01J37/32357 , H01J37/32495
摘要： A system and method for preventing formation of a plasma-inhibiting substance within a plasma chamber is provided. In one embodiment, an apparatus that includes a barrier component configured to be disposed within a plasma chamber. The barrier component includes a wall that defines a plasma formation region where a chemically-reducing species is formed from a fluid. A portion of the wall is formed of a substance that is substantially inert to the chemically-reducing species. The wall prevents the chemically-reducing species from interacting with an inner surface of the plasma chamber to form a conductive substance. The barrier component also includes an opening in fluid communication with the plasma formation region. The fluid is introduced into the plasma formation region via the opening.
摘要翻译： 提供了一种用于防止在等离子体室内形成等离子体抑制物质的系统和方法。 在一个实施例中，一种包括被配置为设置在等离子体室内的屏障部件的装置。 阻挡部件包括限定等离子体形成区域的壁，其中由流体形成化学还原物质。 壁的一部分由对化学还原物质基本上惰性的物质形成。 该壁防止化学还原物质与等离子体室的内表面相互作用以形成导电物质。 阻挡部件还包括与等离子体形成区域流体连通的开口。 流体经由开口引入等离子体形成区域。
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公开(公告)号：US06802366B1
公开(公告)日：2004-10-12
申请号：US10284821
申请日：2002-10-31
申请人： Steve Dillon , Justin Mauck
发明人： Steve Dillon , Justin Mauck
IPC分类号： F28F100
CPC分类号： B23P15/26 , B21C37/155 , B21D53/085 , B21J9/06 , B23P11/00 , F28F1/22 , F28F2275/025 , Y10T29/49375 , Y10T29/4981
摘要： A method and apparatus are described for inserting a cooling tube into a metal component to remove heat generated at the surface by flowing fluid through the tube, thereby cooling the metal component. A cooling tube is placed into a groove of a metal component having first and second surfaces, where the width of the groove at the surfaces is approximately equal to the outer diameter of the cooling tube. The metal component also has two ridges: a first ridge on one end of the groove at the first surface of the metal component, and a second ridge on the other end of the groove at the second surface of the metal component. After the cooling tube is placed in the groove of the metal component, the cooling tube is swaged into the groove of the metal component by applying pressure to the first and second ridges until the first ridge, second ridge, and cooling tube are flush with the top surface.
摘要翻译： 描述了一种用于将冷却管插入金属部件中以通过使流体流过管而在表面产生的热量从而冷却金属部件的方法和装置。 冷却管被放置在具有第一和第二表面的金属部件的槽中，其中表面处的槽的宽度大致等于冷却管的外径。 金属部件还具有两个脊：在金属部件的第一表面处的槽的一端上的第一脊和在金属部件的第二表面处的槽的另一端上的第二脊。 在将冷却管放置在金属部件的槽中之后，通过向第一和第二脊施加压力将冷却管模锻到金属部件的槽中，直到第一脊，第二脊和冷却管与 顶面。
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公开(公告)号：US06776567B2
公开(公告)日：2004-08-17
申请号：US10404797
申请日：2003-04-01
申请人： Brian Johnson , Edward Ng , Justin Mauck , Edward R. Dykes , Joseph Arthur Kraus
发明人： Brian Johnson , Edward Ng , Justin Mauck , Edward R. Dykes , Joseph Arthur Kraus
IPC分类号： B65G4907
CPC分类号： H01L21/67259 , H01L21/67126 , Y10S414/135 , Y10S414/136 , Y10S414/139
摘要： In a first aspect, a valve/sensor assembly is provided that includes a door assembly. The door assembly has (1) a first position adapted to seal an opening of a chamber; (2) a second position adapted to allow at least a blade of a substrate handler to extend through the opening of the chamber; and (3) a mounting mechanism adapted to couple the door assembly to the chamber. The valve/sensor assembly also includes a sensor system having a transmitter and a receiver adapted to detect a presence of a substrate and to communicate through at least a portion of the door assembly. Systems, methods and computer program products are provided in accordance with this and other aspects.
摘要翻译： 在第一方面，提供一种包括门组件的阀/传感器组件。 门组件具有（1）适于密封腔室的开口的第一位置; （2）第二位置，其适于允许至少一个衬底处理器的刀片延伸通过所述腔室的开口; 和（3）适于将门组件连接到腔室的安装机构。 阀/传感器组件还包括具有发射器和接收器的传感器系统，该发射器和接收器适于检测衬底的存在并且通过门组件的至少一部分进行通信。 根据本方面和其他方面提供系统，方法和计算机程序产品。
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