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公开(公告)号：US06208794B1
公开(公告)日：2001-03-27
申请号：US09411981
申请日：1999-10-04
IPC分类号： G02B610
CPC分类号： G02B6/4246 , G02B6/12004 , G02B2006/12121 , G02B2006/12123 , H01S5/0262
摘要： A semiconductor electro-optical monolithic component includes at least first and second sections (20, 30) each having respectively a first wave guide (21) and a second wave guide (31) transmitting light, the wave guides being etched in the form of strips and confined between an upper cladding layer (11) doped with carriers of a first type and a lower layer (10A, 10B) doped with carriers of a second type, a third section (40) being disposed between the first and second sections (20, 30) and having a third guide not transmitting light, the third guide being disposed so as to couple the first guide (21) to the said second guide (31). An absorbent layer (70), having a photoluminescence wavelength at least equal to the smallest wavelength of the waves propagating in the first and second wave guides (21, 31), is placed in the said lower layer (10A, 10B) doped with carriers of the second type; the said lower layer (10A, 10B) having an index lower than that of the absorbent layer (70) and that of the said second and third guides (31).
摘要翻译： 半导体电光单片部件至少包括分别具有第一波导（21）和第二波导（31）的第一和第二部分（20,30），所述第一波导（21）和第二波导（31）透射光，所述波导以带状 并且限制在掺杂有第一类型的载流子的上覆层（11）和掺杂有第二类型载体的下层（10A，10B）之间，第三部分（40）设置在第一和第二部分（20）之间 ，30）并且具有不透光的第三引导件，所述第三引导件设置成将所述第一引导件（21）联接到所述第二引导件（31）。 具有至少等于在第一和第二波导（21,31）中传播的波的最小波长的光致发光波长的吸收层（70）放置在掺杂载体的所述下层（10A，10B）中 的第二种类型 所述下层（10A，10B）的折射率低于吸收层（70）和所述第二和第三导向件（31）的折射率。
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公开(公告)号：US07167498B2
公开(公告)日：2007-01-23
申请号：US10845772
申请日：2004-05-14
申请人： Franck Mallecot , Christine Chaumont , Joël Jacquet , Arnaud Leroy , Antonina Plais , Joe Harari , Didier Decoster
发明人： Franck Mallecot , Christine Chaumont , Joël Jacquet , Arnaud Leroy , Antonina Plais , Joe Harari , Didier Decoster
IPC分类号： H01S5/00
CPC分类号： H01S5/0262
摘要： A semiconductor electrooptic monolithic component comprising successively a first section capable of emitting light at a first wavelength and including a first active layer, a second section capable of absorbing light at the said first wavelength and including a second active layer, and a third section capable of detecting light at a second wavelength and including a third active layer. The component is characterized in that the second active layer is designed to ensure in the said second section an absorption higher than that which would be allowed by an active layer identical to the said first layer.
摘要翻译： 一种半导体电光单片组件，包括连续地包括能够发射第一波长的光并包括第一有源层的第一部分，能够吸收所述第一波长的光并包括第二有源层的第二部分，以及第三部分， 检测第二波长的光并包括第三有源层。 该部件的特征在于，第二有源层设计成确保在所述第二部分中的吸收高于与所述第一层相同的有源层允许的吸收。
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公开(公告)号：US06521471B1
公开(公告)日：2003-02-18
申请号：US09650737
申请日：2000-08-30
IPC分类号： H01L2100
CPC分类号： H01S5/0262
摘要： The invention concerns a semiconductor opto-electronic component comprising at least two optically active structures (20, 30), at least one of which consists of a detector (30), characterized in that the detector or detectors (30) comprise a first active portion (33) able to detect a signal at a given wavelength and a second inactive portion (34) only slightly sensitive to the signal to be detected and exposed to the non-guided stray light conveyed in the component.
摘要翻译： 本发明涉及包括至少两个光学活性结构（20,30）的半导体光电子部件，其中至少一个由检测器（30）组成，其特征在于，检测器（30）包括第一有源部分 （33），其能够检测给定波长的信号和仅对所检测的信号稍微敏感并暴露于在部件中传送的未引导杂散光的第二非活性部分（34）。
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公开(公告)号：US06236794B1
公开(公告)日：2001-05-22
申请号：US09327533
申请日：1999-06-08
IPC分类号： G02B610
CPC分类号： G02B6/12007 , G02B6/12004 , G02B2006/12121 , G02B2006/12123 , G02B2006/12142 , H01S5/0262 , H01S5/0265 , H01S5/0625
摘要： The invention relates to a semiconductor electro-optical monolithic component. The component is made up of at least two sections, each of which has a respective waveguide, the waveguides being etched in the form of ridges, disposed in line, and buried in a cladding layer. The sections are electrically isolated from one other by a resistive zone. At the interface between two sections, the waveguides are locally of an extended width not less than the width of the resistive zone.
摘要翻译： 本发明涉及一种半导体电光单片组件。 该部件由至少两个部分组成，每个部分具有相应的波导，波导被以脊线的形式蚀刻，并且埋设在包覆层中。 这些部分通过电阻区域彼此电隔离。 在两部分之间的界面处，波导局部地具有不小于电阻区宽度的延伸宽度。
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公开(公告)号：US06584807B1
公开(公告)日：2003-07-01
申请号：US08822642
申请日：1997-03-24
IPC分类号： C03B2000
CPC分类号： H01L21/316 , G02B6/122 , G02B6/134 , G02B6/30 , G02B2006/12176
摘要： A method of fabricating a component having a crystalline silicon substrate includes the steps of depositing a layer of silica onto a crystalline silicon substrate, this silica layer being doped with dopants, and then treating the substrate. Before the doped silica layer is deposited, a barrier layer is formed on the substrate, consisting of a barrier material opposing diffusion of the dopants. The doped silica layer is deposited onto this barrier layer. The invention finds one particular application in connecting flat bundles of fibers in communication networks.
摘要翻译： 制造具有晶体硅衬底的部件的方法包括以下步骤：在结晶硅衬底上沉积二氧化硅层，该二氧化硅层掺杂有掺杂剂，然后处理衬底。 在沉积掺杂二氧化硅层之前，在由与掺杂剂扩散相反的阻挡材料组成的衬底上形成阻挡层。 掺杂的二氧化硅层沉积在该阻挡层上。 本发明在通信网络中连接扁平的光纤束方面发现了一个特殊的应用。
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公开(公告)号：US6093939A
公开(公告)日：2000-07-25
申请号：US28816
申请日：1998-02-24
申请人： Claude Artigue , Denis Tregoat , Franck Mallecot , Emmanuel Grard
发明人： Claude Artigue , Denis Tregoat , Franck Mallecot , Emmanuel Grard
CPC分类号： G02B6/42
摘要： A hybrid optical device includes a passive component coupled optically to an active component, the passive component being formed in layers of silica on a substrate made of silica, the layers and the substrate thus forming a silica-on-silica structure. The hybrid optical device includes an intermediate element having good thermal conductivity and a coefficient of thermal expansion similar to that of the active component, wherein the active component is fixed to the intermediate element prior to insertion into the cavity, and the intermediate element is fixed to the structure so that the active component is located inside the cavity and is coupled optically to the passive component.
摘要翻译： 混合光学器件包括光学耦合到有源部件的无源部件，被动部件由二氧化硅制成的衬底上的二氧化硅层形成，所述层和衬底由此形成二氧化硅 - 二氧化硅结构。 混合光学装置包括具有良好的导热性和类似于有源部件的热膨胀系数的中间元件，其中有源部件在插入空腔之前固定到中间元件，并且中间元件被固定到 所述结构使得所述有源部件位于所述腔内并且与所述被动部件光学耦合。
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7.发明授权Method of making a mark on a wafer such as a semiconductor wafer incorporating a buried structure 失效在诸如包括掩埋结构的半导体晶片的晶片上制造标记的方法
公开(公告)号：US5616522A
公开(公告)日：1997-04-01
申请号：US518274
申请日：1995-08-23
申请人： Franck Mallecot , Claude Artigue , Denis LeClerc , Lionel Legouezigou , Francis Poingt , Fr ed eric Pommereau
发明人： Franck Mallecot , Claude Artigue , Denis LeClerc , Lionel Legouezigou , Francis Poingt , Fr ed eric Pommereau
IPC分类号： H01L23/544 , H01L21/027
CPC分类号： H01L23/544 , H01L2924/0002 , Y10S438/975
摘要： For end-to-end alignment of two optical waveguides one of which is in the form of a strip buried in a semiconductor wafer, a longitudinal lateral mark is used constituted by the flank of a valley etched in the wafer and self-aligned to the strip formed beforehand. To achieve this self-alignment a protection layer is deposited in the area in which the mark is to be formed, a register layer is deposited on top of the protection layer and a photosensitive resin is deposited on top of these layers and the substrate. First selective etching eliminates the register layer at the location of the valley of the mark. Second and third selective etching respectively etch the lateral channels of the strip and then the valley of the mark.
摘要翻译： 对于两个光波导的端对准对准，其中一个波导是埋在半导体晶片中的条形，纵向横向标记由在晶片中蚀刻的谷的侧面构成，并与 预先形成条。 为了实现这种自对准，在要形成标记的区域中沉积保护层，在保护层的顶部上沉积对准层，并且在这些层和基底的顶部上沉积光敏树脂。 第一选择性蚀刻消除了标记谷的位置处的寄存层。 第二和第三选择性蚀刻分别蚀刻条带的横向通道，然后蚀刻标记的谷。
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公开(公告)号：US06233383B1
公开(公告)日：2001-05-15
申请号：US09292305
申请日：1999-04-15
申请人： Claude Artigue , Franck Mallecot , Denis Tregoat , Anton Ambrosy
发明人： Claude Artigue , Franck Mallecot , Denis Tregoat , Anton Ambrosy
IPC分类号： G02B626
摘要： A method is disclosed of assembling an optical module comprising at least two optical components whose waveguides are optically coupled to each other. Positioning one waveguide relative to the other one relies on two contact surfaces on the respective optical components cooperating with each other. A first contact surface includes a vertical bearing plane in the same horizontal plane as the optical axis of the waveguide of one of the optical components. A second contact surface includes a vertical bearing plane in the same horizontal plane as the optical axis of the waveguide of the other optical component.
摘要翻译： 公开了一种组装光学模块的方法，该光学模块包括至少两个光学部件，其波导彼此光学耦合。 相对于另一个定位一个波导依赖于彼此协作的相应光学部件上的两个接触表面。 第一接触表面包括在与其中一个光学部件的波导的光轴相同的水平平面中的垂直轴承平面。 第二接触表面包括在与另一光学部件的波导的光轴相同的水平平面中的垂直轴承平面。
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