公开(公告)号：US20090286360A1

公开(公告)日：2009-11-19

申请号：US12079008

申请日：2008-03-24

申请人： Gyoo-Chul Jo ,  Kwang-Nam Kim

发明人： Gyoo-Chul Jo ,  Kwang-Nam Kim

IPC分类号： H01L21/336 ,  C09K13/06

CPC分类号： C23F1/18 ,  C23F1/26 ,  H01L21/32134 ,  H01L29/458 ,  H01L29/4908 ,  H01L29/66765 ,  H01L51/0023

摘要： The present embodiments relate to an etchant and a method of fabricating an electric device including a thin film transistor. The etchant includes a fluorine ion (F−) source, hydrogen peroxide (H2O2), a sulfate, a phosphate, an azole-based compound, and a solvent. The etchant and method of fabricating an electric device including a thin film transistor, can etch a multi-layered film including copper layer, and a titanium or titanium alloy layer in a batch and can provide a thin film transistor having a good pattern profile at high yield. When reusing the etchant, uniform etching performance can be maintained with a long replacement period of the etchant, and therefore costs can be saved.

摘要翻译： 本实施例涉及蚀刻剂和制造包括薄膜晶体管的电子器件的方法。 蚀刻剂包括氟离子（F-）源，过氧化氢（H 2 O 2），硫酸盐，磷酸盐，唑类化合物和溶剂。 制造包括薄膜晶体管的电子器件的蚀刻剂和方法可以一次蚀刻包括铜层的多层膜和钛或钛合金层，并且可以提供在高温下具有良好图案轮廓的薄膜晶体管 产量。 当重复使用蚀刻剂时，可以以较长的蚀刻剂更换周期来保持均匀的蚀刻性能，因此可以节省成本。

公开(公告)号：US20120318306A1

公开(公告)日：2012-12-20

申请号：US13243954

申请日：2011-09-23

申请人： Beung-Hwa Jeong ,  Kwang-Nam Kim ,  Gyoo-Chul Jo

发明人： Beung-Hwa Jeong ,  Kwang-Nam Kim ,  Gyoo-Chul Jo

IPC分类号： B08B3/08 ,  B08B7/04 ,  B08B3/02

CPC分类号： B08B3/02 ,  B08B3/08 ,  B08B7/04 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/6776

摘要： An apparatus for cleaning a substrate is disclosed. The apparatus includes a first chamber through which a substrate is conveyed, a second chamber where an oxide film formed on the substrate conveyed from the first chamber is removed; and a third chamber that discharges the substrate conveyed from the second chamber to the outside after rinsing the substrate, wherein the first chamber and the third chamber are disposed on top and on bottom.

摘要翻译： 公开了一种用于清洁衬底的设备。 该装置包括：第一室，其中输送基板;第二室，其中形成在从第一室输送的基板上的氧化膜被去除; 以及第三室，其在冲洗所述基板之后将从所述第二室输送的所述基板排出到外部，其中所述第一室和所述第三室设置在顶部和底部。

公开(公告)号：US07737033B2

公开(公告)日：2010-06-15

申请号：US12079008

申请日：2008-03-24

申请人： Gyoo-Chul Jo ,  Kwang-Nam Kim

发明人： Gyoo-Chul Jo ,  Kwang-Nam Kim

IPC分类号： H01L21/44 ,  C23F1/00

CPC分类号： C23F1/18 ,  C23F1/26 ,  H01L21/32134 ,  H01L29/458 ,  H01L29/4908 ,  H01L29/66765 ,  H01L51/0023

摘要： The present embodiments relate to an etchant and a method of fabricating an electric device including a thin film transistor. The etchant includes a fluorine ion (F−) source, hydrogen peroxide (H2O2), a sulfate, a phosphate, an azole-based compound, and a solvent. The etchant and method of fabricating an electric device including a thin film transistor, can etch a multi-layered film including copper layer, and a titanium or titanium alloy layer in a batch and can provide a thin film transistor having a good pattern profile at high yield. When reusing the etchant, uniform etching performance can be maintained with a long replacement period of the etchant, and therefore costs can be saved.

摘要翻译： 本实施例涉及蚀刻剂和制造包括薄膜晶体管的电子器件的方法。 蚀刻剂包括氟离子（F-）源，过氧化氢（H 2 O 2），硫酸盐，磷酸盐，唑类化合物和溶剂。 制造包括薄膜晶体管的电子器件的蚀刻剂和方法可以一次蚀刻包括铜层的多层膜和钛或钛合金层，并且可以提供在高温下具有良好图案轮廓的薄膜晶体管 产量。 当重复使用蚀刻剂时，可以以较长的蚀刻剂更换周期来保持均匀的蚀刻性能，因此可以节省成本。

公开(公告)号：US08940101B2

公开(公告)日：2015-01-27

申请号：US13243954

申请日：2011-09-23

申请人： Beung-Hwa Jeong ,  Kwang-Nam Kim ,  Gyoo-Chul Jo

发明人： Beung-Hwa Jeong ,  Kwang-Nam Kim ,  Gyoo-Chul Jo

IPC分类号： B08B1/02 ,  B08B3/02 ,  B08B3/08 ,  B08B7/04 ,  H01L21/67 ,  H01L21/677

CPC分类号： B08B3/02 ,  B08B3/08 ,  B08B7/04 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/6776

摘要： An apparatus for cleaning a substrate is disclosed. The apparatus includes a first chamber through which a substrate is conveyed, a second chamber where an oxide film formed on the substrate conveyed from the first chamber is removed; and a third chamber that discharges the substrate conveyed from the second chamber to the outside after rinsing the substrate, wherein the first chamber and the third chamber are disposed on top and on bottom.

摘要翻译： 公开了一种用于清洁衬底的设备。 该装置包括：第一室，其中输送基板;第二室，其中形成在从第一室输送的基板上的氧化膜被去除; 以及第三室，其在冲洗所述基板之后将从所述第二室输送的所述基板排出到外部，其中所述第一室和所述第三室设置在顶部和底部。

公开(公告)号：US08022618B2

公开(公告)日：2011-09-20

申请号：US12200791

申请日：2008-08-28

申请人： Gyoo-Chul Jo ,  Kwang-Nam Kim

发明人： Gyoo-Chul Jo ,  Kwang-Nam Kim

IPC分类号： H01L51/00

CPC分类号： H01L27/3276 ,  H01L27/3246 ,  H01L27/3279

摘要： An organic light emitting display apparatus including: a substrate having a display area; a thin film transistor (TFT) disposed in the display area of the substrate; an electrode power supply line disposed outside the display area of the substrate; a first insulating layer covering the TFT and having a first open portion through which a portion or a whole top surface of the electrode power supply line is exposed; and a second insulating layer disposed on the first insulating layer and having a second open portion through which the first open portion of the first insulating layer is exposed, so that the second insulating layer does not contact the electrode power supply line.

摘要翻译： 一种有机发光显示装置，包括：具有显示区域的基板; 设置在所述基板的显示区域中的薄膜晶体管（TFT）; 设置在所述基板的显示区域的外侧的电极电源线; 覆盖所述TFT并具有第一开口部的第一绝缘层，所述电极电源线的一部分或整个上表面暴露在所述第一开口部中; 以及第二绝缘层，其设置在所述第一绝缘层上并且具有第二开口部，所述第一绝缘层的所述第一开口部分暴露于所述第二开口部分，使得所述第二绝缘层不接触所述电极电源线。

公开(公告)号：US20090058280A1

公开(公告)日：2009-03-05

申请号：US12200791

申请日：2008-08-28

申请人： Gyoo-Chul Jo ,  Kwang-Nam Kim

发明人： Gyoo-Chul Jo ,  Kwang-Nam Kim

IPC分类号： H01J1/62 ,  G09G3/30

CPC分类号： H01L27/3276 ,  H01L27/3246 ,  H01L27/3279

摘要： An organic light emitting display apparatus including: a substrate having a display area; a thin film transistor (TFT) disposed in the display area of the substrate; an electrode power supply line disposed outside the display area of the substrate; a first insulating layer covering the TFT and having a first open portion through which a portion or a whole top surface of the electrode power supply line is exposed; and a second insulating layer disposed on the first insulating layer and having a second open portion through which the first open portion of the first insulating layer is exposed, so that the second insulating layer does not contact the electrode power supply line.

摘要翻译： 一种有机发光显示装置，包括：具有显示区域的基板; 设置在所述基板的显示区域中的薄膜晶体管（TFT）; 设置在所述基板的显示区域的外侧的电极电源线; 覆盖所述TFT并具有第一开口部的第一绝缘层，所述电极电源线的一部分或整个上表面暴露在所述第一开口部中; 以及第二绝缘层，其设置在所述第一绝缘层上并且具有第二开口部，所述第一绝缘层的所述第一开口部分暴露于所述第二开口部分，使得所述第二绝缘层不接触所述电极电源线。

公开(公告)号：US08378349B2

公开(公告)日：2013-02-19

申请号：US12902629

申请日：2010-10-12

申请人： Moo-Soon Ko ,  Jae-Ho Yoo ,  Gyoo-Chul Jo

发明人： Moo-Soon Ko ,  Jae-Ho Yoo ,  Gyoo-Chul Jo

IPC分类号： H01L21/00

CPC分类号： H01L51/5265 ,  H01L27/3211 ,  H01L27/3246 ,  H01L51/5215 ,  H01L51/5218

摘要： An organic light emitting display apparatus and a method of manufacturing the same. The display apparatus includes first, second, and third sub-pixels formed on a substrate. The first sub-pixel includes a first pixel electrode, a first transmissive conductive layer formed on the first pixel electrode, a second transmissive conductive layer formed on the first transmissive conductive layer, a first organic light emitting layer formed on the second transmissive conductive layer, and a counter electrode formed on the first organic light emitting layer. The second sub-pixel includes a second pixel electrode, the first transmissive conductive layer formed on the second pixel electrode, a first protector covering an edge of the first transmissive conductive layer, a second organic light emitting layer electrically connected to the first transmissive conductive layer, and the counter electrode formed on the second organic light emitting layer. The third sub-pixel includes a third pixel electrode, a second protector covering an outer edge of the third pixel electrode, a third protector formed on the second protector, a third organic light emitting layer electrically connected to the third pixel electrode, and the counter electrode formed on the third organic light emitting layer.

摘要翻译： 一种有机发光显示装置及其制造方法。 显示装置包括形成在基板上的第一，第二和第三子像素。 第一子像素包括第一像素电极，形成在第一像素电极上的第一透射导电层，形成在第一透射导电层上的第二透射导电层，形成在第二透射导电层上的第一有机发光层， 以及形成在第一有机发光层上的对电极。 第二子像素包括第二像素电极，形成在第二像素电极上的第一透射导电层，覆盖第一透射导电层的边缘的第一保护器，与第一透射导电层电连接的第二有机发光层 以及形成在第二有机发光层上的对电极。 第三子像素包括第三像素电极，覆盖第三像素电极的外边缘的第二保护器，形成在第二保护器上的第三保护器，与第三像素电极电连接的第三有机发光层， 电极，形成在第三有机发光层上。

公开(公告)号：US08158467B2

公开(公告)日：2012-04-17

申请号：US12699452

申请日：2010-02-03

申请人： Gee-Sung Chae ,  Gyoo-Chul Jo ,  Yong-Sup Hwang

发明人： Gee-Sung Chae ,  Gyoo-Chul Jo ,  Yong-Sup Hwang

IPC分类号： H01L21/00

CPC分类号： G02F1/1368 ,  G02F2001/136295

摘要： A liquid crystal display device includes a plurality of gate lines and data lines on a first substrate defining a plurality of pixel regions, a thin film transistor within the pixel regions, a pixel electrode within the pixel regions, and at least one TiOx layer provided with the thin film transistor.

摘要翻译： 一种液晶显示装置包括在限定多个像素区域的第一基板上的多条栅极线和数据线，像素区域内的薄膜晶体管，像素区域内的像素电极以及设置有像素区域的至少一个TiOx层 薄膜晶体管。

公开(公告)号：US20110212557A1

公开(公告)日：2011-09-01

申请号：US13100883

申请日：2011-05-04

申请人： Won-Ho CHO ,  Gyoo-Chul Jo ,  Gue-Tai Lee ,  Jin-Gyu Kang ,  Beung-Hwa Jeong ,  Jin-Young Kim

发明人： Won-Ho CHO ,  Gyoo-Chul Jo ,  Gue-Tai Lee ,  Jin-Gyu Kang ,  Beung-Hwa Jeong ,  Jin-Young Kim

IPC分类号： H01L33/62

CPC分类号： G02F1/136286 ,  G02F2001/13629 ,  G02F2001/136295

摘要： The present invention is an array substrate for use in a liquid crystal display device, which includes a gate electrode, a gate line and a gate pad on a substrate, wherein the gate electrode, the gate line and the gate pad have a double-layered structure consisting of a first metal layer and a first barrier metal layer in series from the substrate, and wherein the first metal is one of aluminum and aluminum alloy; a gate insulation layer on the substrate covering the gate electrode, gate line and gate pad; an active layer and an ohmic contact layer sequentially formed on the gate insulation layer and over the gate electrode; a data line on the gate insulation layer perpendicularly crossing the gate line, source and drain electrodes contacting the ohmic contact layer, and a data pad on the gate insulation layer, wherein the data line, the source and drain electrode and the data pad have a double-layered structure consisting of a second barrier metal layer and a second metal layer of copper; a passivation layer formed on the gate insulation layer to cover the data line, source and drain electrodes, and data pad, wherein the passivation layer has a drain contact hole exposing a portion of the drain electrode, a gate pad contact hole exposing a portion of the gate pad, and a data pad contact hole exposing a portion of the data pad; and a pixel electrode, a gate pad terminal and a data pad terminal on the passivation layer, all of which are formed of a transparent conductive material on the passivation layer.

摘要翻译： 本发明是一种用于液晶显示装置的阵列基板，其包括在基板上的栅电极，栅极线和栅极焊盘，其中栅电极，栅极线和栅极焊盘具有双层 结构由第一金属层和与基板串联的第一阻挡金属层组成，其中第一金属是铝和铝合金之一; 覆盖栅电极，栅极线和栅极焊盘的基板上的栅极绝缘层; 依次形成在栅极绝缘层上和栅电极上的有源层和欧姆接触层; 垂直于栅极线的栅极绝缘层上的数据线，与欧姆接触层接触的源极和漏极以及栅极绝缘层上的数据焊盘，其中数据线，源极和漏极以及数据焊盘具有 由第二阻挡金属层和铜的第二金属层组成的双层结构; 形成在所述栅极绝缘层上以覆盖所述数据线，源极和漏极以及数据焊盘的钝化层，其中所述钝化层具有暴露所述漏电极的一部分的漏极接触孔， 栅极焊盘和暴露数据焊盘的一部分的数据焊盘接触孔; 以及钝化层上的像素电极，栅极焊盘端子和数据焊盘端子，所有这些都由钝化层上的透明导电材料形成。

公开(公告)号：US07605877B2

公开(公告)日：2009-10-20

申请号：US10875559

申请日：2004-06-25

申请人： Won-Ho Cho ,  Gyoo-Chul Jo ,  Gue-Tai Lee ,  Jin-Gyu Kang ,  Beung-Hwa Jeong ,  Jin-Young Kim

发明人： Won-Ho Cho ,  Gyoo-Chul Jo ,  Gue-Tai Lee ,  Jin-Gyu Kang ,  Beung-Hwa Jeong ,  Jin-Young Kim

IPC分类号： G02F1/136

CPC分类号： G02F1/136286 ,  G02F2001/13629 ,  G02F2001/136295

摘要： The present invention is an array substrate for use in a liquid crystal display device, which includes a gate electrode, a gate line and a gate pad on a substrate, wherein the gate electrode, the gate line and the gate pad have a double-layered structure consisting of a first metal layer and a first barrier metal layer in series from the substrate, and wherein the first metal is one of aluminum and aluminum alloy; a gate insulation layer on the substrate covering the gate electrode, gate line and gate pad; an active layer and an ohmic contact layer sequentially formed on the gate insulation layer and over the gate electrode; a data line on the gate insulation layer perpendicularly crossing the gate line, source and drain electrodes contacting the ohmic contact layer, and a data pad on the gate insulation layer, wherein the data line, the source and drain electrode and the data pad have a double-layered structure consisting of a second barrier metal layer and a second metal layer of copper; a passivation layer formed on the gate insulation layer to cover the data line, source and drain electrodes, and data pad, wherein the passivation layer has a drain contact hole exposing a portion of the drain electrode, a gate pad contact hole exposing a portion of the gate pad, and a data pad contact hole exposing a portion of the data pad; and a pixel electrode, a gate pad terminal and a data pad terminal on the passivation layer, all of which are formed of a transparent conductive material on the passivation layer.

摘要翻译： 本发明是一种用于液晶显示装置的阵列基板，其包括在基板上的栅电极，栅极线和栅极焊盘，其中栅电极，栅极线和栅极焊盘具有双层 结构由第一金属层和与基板串联的第一阻挡金属层组成，其中第一金属是铝和铝合金之一; 覆盖栅电极，栅极线和栅极焊盘的基板上的栅极绝缘层; 依次形成在栅极绝缘层上和栅电极上的有源层和欧姆接触层; 垂直于栅极线的栅极绝缘层上的数据线，与欧姆接触层接触的源极和漏极以及栅极绝缘层上的数据焊盘，其中数据线，源极和漏极以及数据焊盘具有 由第二阻挡金属层和铜的第二金属层组成的双层结构; 形成在所述栅极绝缘层上以覆盖所述数据线，源极和漏极以及数据焊盘的钝化层，其中所述钝化层具有暴露所述漏电极的一部分的漏极接触孔， 栅极焊盘和暴露数据焊盘的一部分的数据焊盘接触孔; 以及钝化层上的像素电极，栅极焊盘端子和数据焊盘端子，所有这些都由钝化层上的透明导电材料形成。