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公开(公告)号:US20170370752A1
公开(公告)日:2017-12-28
申请号:US15638171
申请日:2017-06-29
发明人: Shinobu TASHIRO , Keiji HANZAWA , Noboru TOKUYASU , Takeshi MORINO , Ryosuke DOI , Akira UENODAN
IPC分类号: G01F1/684 , G01F15/02 , G01F15/00 , G01F1/699 , F02D41/18 , G01F1/698 , G01F1/696 , G01F15/04 , G01F5/00
CPC分类号: G01F1/6842 , F02D41/187 , G01F1/6845 , G01F1/696 , G01F1/6965 , G01F1/698 , G01F1/699 , G01F5/00 , G01F15/006 , G01F15/02 , G01F15/04 , G01F15/043
摘要: Provided is a thermal flow meter to improve the measurement accuracy of a temperature detector provided in a thermal flow meter is a thermal flow meter to improve the measurement accuracy of a temperature detector provided in a thermal flow meter. The thermal flow meter includes a bypass passage through which a measurement target gas 30 flowing through a main passage flows, and a circuit package 400 which includes a measurement circuit for measuring a flow rate of the measurement target gas 30 flowing through the bypass passage and a temperature detecting portion 452 for detecting a temperature of the measurement target gas. The circuit package 400 includes a circuit package body which is molded by a resin to internally envelope the measurement circuit and a protrusion 424 molded by the resin. The temperature detecting portion 452 is provided in the leading end portion of the protrusion 424, and at least the leading end portion of the protrusion protrudes to the outside from a housing 302.
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公开(公告)号:US20170336232A1
公开(公告)日:2017-11-23
申请号:US15659309
申请日:2017-07-25
发明人: Shinobu TASHIRO , Keiji HANZAWA , Noboru TOKUYASU , Takeshi MORINO , Ryosuke DOI , Akira UENODAN
摘要: It is an object of the present invention to improve a measurement accuracy of a thermal flowmeter. A circuit package 401 is such that a measurement surface 430 and a backside of measurement surface 431 of a rear surface thereof are located in a bypass passage, and the bypass passage is configured to allow a measurement target gas 30 to flow upon dividing the measurement target gas 30 into a flow path 386 at a side of the measurement surface 430 of the circuit package and a flow path 387 at a side of the backside of measurement surface 431 of a rear surface of the measurement surface 430, and an inflow-side end surface of the circuit package for dividing the measurement target gas 30 has different shapes at the side of the measurement surface and at the side of the backside of measurement surface. The inflow-side end surface of the circuit package for dividing the measurement target gas 30 is formed with a reference line 700 dividing the measurement target gas 30, and an end surface 701a at the side of the measurement surface with respect to the reference line and an end surface 701b at the side of the backside of measurement surface with respect to the reference line are formed to be asymmetrical.
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公开(公告)号:US20160241014A1
公开(公告)日:2016-08-18
申请号:US15029639
申请日:2014-10-03
CPC分类号: H02H3/18 , G01R15/146 , H01L27/0248 , H01L27/0629 , H01L27/0647 , H01L28/20 , H01L28/40 , H01L29/861 , H02H3/24 , H02H11/002
摘要: Provided is a sensor device that suppresses a malfunction caused by a negative surge or a voltage drop. A sensor device includes a sensor element having an electrical characteristic varying according to a physical amount, a signal processing circuit configured to process an output signal of the sensor element, a transistor element interposed between a power source terminal and the signal processing circuit, a resistive element configured to connect a drain and a gate of the transistor element, or a collector and a base of the transistor element, and an element having threshold voltage for connecting the gate or the base of the transistor element to a GND. The element regulates current flowing from the resistive element in a direction of the GND, in a case in which supply voltage to the signal processing circuit falls below the threshold voltage.
摘要翻译: 提供抑制由负浪涌或电压降引起的故障的传感器装置。 传感器装置包括具有根据物理量而变化的电特性的传感器元件,被配置为处理传感器元件的输出信号的信号处理电路,插在电源端子和信号处理电路之间的晶体管元件,电阻 元件,被配置为连接晶体管元件的漏极和栅极,或晶体管元件的集电极和基极,以及具有用于将晶体管元件的栅极或基极连接到GND的阈值电压的元件。 在信号处理电路的电源电压低于阈值电压的情况下,该元件调节从电阻元件沿GND方向流动的电流。
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公开(公告)号:US20160161312A1
公开(公告)日:2016-06-09
申请号:US14907118
申请日:2014-02-03
CPC分类号: G01F1/684 , G01F1/6842 , G01F1/692 , G01F5/00 , G01F15/14
摘要: An object of the present invention is to provide a thermal-type air flow meter with a high measurement accuracy by reducing influence of a thermal stress generated in a resistor in an LSI while securing a high positioning accuracy flow rate detection unit. Thus, a thermal-type air flow meter is provided with: a sensor assembly 100 including an LSI 3 having a resistor 7 and a flow rate detection unit 4a which are configured by insert molding so as to expose at least a part of the flow rate detection unit 4a, a housing 301 which has secondary passages 305i, 305o and 305s, and houses the sensor assembly 100 by allowing the flow rate detection unit 4a to be arranged in the secondary passage 305s, the sensor assembly 100 being molded using a first resin, and the housing 301 being molded using a second resin, the sensor assembly 100 being fixed to the housing 301 using the second resin; and resin structures 20 and 21 which cause a tensile stress in a direction parallel to a surface on which the flow rate detection unit 4a is exposed with respect to the sensor assembly 100.
摘要翻译: 本发明的目的是提供一种在确保高定位精度的流量检测单元的同时,通过减小在LSI中的电阻器中产生的热应力的影响来提供具有高测量精度的热式空气流量计。 因此,热式空气流量计设置有:传感器组件100,其包括具有电阻器7和流量检测单元4a的LSI 3,其通过嵌件成型构成,以暴露至少一部分流量 检测单元4a,具有次级通道305i,305o和305s的壳体301,并且通过允许流量检测单元4a布置在次通道305s中来容纳传感器组件100,传感器组件100使用第一树脂 并且壳体301使用第二树脂模制,传感器组件100使用第二树脂固定到壳体301; 以及在平行于流量检测单元4a相对于传感器组件100露出的表面的方向上引起拉伸应力的树脂结构20和21。
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公开(公告)号:US20210148743A1
公开(公告)日:2021-05-20
申请号:US16637654
申请日:2018-07-17
发明人: Akira UENODAN , Takayuki YOGO , Tsubasa WATANABE , Takahiro MIKI , Shinobu TASHIRO , Hiroaki HOSHIKA
摘要: Provided is a thermal-type flowmeter which can prevent a reduction of flow rate accuracy and reliability, and an increase of cost of the thermal-type flowmeter compared to the related art, and can add a function of an electrostatic scattering mechanism. The thermal-type flowmeter of the present invention includes a sub-passage into which part of a measurement target gas flowing in a main passage is taken, a flow rate detection element of a flow measurement unit which is disposed in the sub-passage, a circuit package which supports the flow rate detection element, and a substrate to which the circuit package is fixed. The flow rate detection element includes a detection surface to detect a flow rate of the measurement target gas. The detection surface is disposed to face the circuit substrate.
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公开(公告)号:US20190120674A1
公开(公告)日:2019-04-25
申请号:US15765939
申请日:2016-10-05
摘要: The present invention addresses the problem of obtaining a thermal flow meter capable of reducing a pulsation error by preventing a discharge port and a main outlet from being blocked by a vortex during a transient period and reducing a difference between flow speed distributions in normal and pulsation states. This thermal flow meter is provided with a housing disposed in a main passage; and a sub passage provided in the housing. In addition, in the housing, a first outlet and a second outlet of the sub passage are disposed in a downstream end portion of the housing, and a curved surface section is provided adjacent to the first and second outlets.
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公开(公告)号:US20170328754A1
公开(公告)日:2017-11-16
申请号:US15535179
申请日:2015-11-26
发明人: Noriyuki SAKUMA , Yasuo ONOSE , Shinobu TASHIRO , Ryosuke DOI
CPC分类号: G01F1/6845 , B81B1/00 , G01F1/692
摘要: Degradation of reliability of a thermal fluid flow sensor, caused by generation of a crack in an insulating film is prevented in the thermal fluid flow sensor including a detection section and a circuit section formed on the same substrate when stress adjustment is performed by forming a deep concave portion in an interlayer insulating film in the detection section and forming the insulating film having a tensile stress thereon. As a means thereof, stair-like step is provided in a side wall of a concave portion, formed in the interlayer insulating film on a diaphragm. Accordingly, each depth of a first concave portion and a second concave portion, which form the concave portion, is reduced, and coatability of the insulating film for the stress adjustment, which covers a side wall and a bottom face of the concave portion, is improved.
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公开(公告)号:US20170176230A1
公开(公告)日:2017-06-22
申请号:US15451572
申请日:2017-03-07
发明人: Noboru TOKUYASU , Shinobu TASHIRO , Keiji HANZAWA , Tsutomu KONO
CPC分类号: G01F1/696 , F02D41/18 , F02M35/1038 , F02M35/10386 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6965 , G01F1/698 , G01F1/699 , G01F5/00 , G01F15/006 , G01F15/02 , G01F15/04 , G01F15/043 , G01F15/14 , G01F15/185
摘要: To obtain a thermal flow meter capable of providing thermal insulation without degrading responsiveness of a temperature detection element. A thermal flow meter 300 of the present invention includes an air flow sensing portion 602 that detects a flow rate by performing heat transfer with a measurement target gas passing through the main passage 124 using a heat transfer surface, a temperature detection element 518 that detects a temperature of the measurement target gas, a circuit package 400 obtained by connecting a processing unit 604 that processes signals of the air flow sensing portion 602 and the temperature detection element 518 to a lead and sealing the processing unit 604 using a first molding resin through a first molding process, and a housing 302 where the circuit package 400 is fixed using a second molding resin through a second molding process, wherein, in the circuit package 400, a thickness of a temperature detecting portion 452 for sealing the temperature detection element 518 is thinner than that of a package body portion 426 for sealing the processing unit 604.
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公开(公告)号:US20160282162A1
公开(公告)日:2016-09-29
申请号:US14778397
申请日:2014-01-29
CPC分类号: G01F1/6847 , G01F1/6842 , G01F1/692 , G01F1/696 , G01F5/00 , G01P5/12
摘要: In order to provide a thermal flow meter capable of preventing adherence of contaminants to an air flow sensing portion, the thermal flow meter (300) of the invention includes a bypass passage for flowing a measurement target gas (30) received from a main passage (124) and an air flow sensing portion (602) for measuring a flow rate of the measurement target gas (30) by performing heat transfer with the measurement target gas (30) flowing through the bypass passage through a heat transfer surface (437). The air flow sensing portion (602) is provided to be exposed to an exposed surface (402) arranged along a flow direction of the measurement target gas (30) inside the bypass passage is embedded, the mount support surface (402) has a stage (407) formed to surround a periphery of the air flow sensing portion (602), and an inner portion surrounded by the stage protrudes more than an outer portion of the stage.
摘要翻译: 为了提供能够防止污染物与气流感测部分的粘附的热流量计,本发明的热流量计(300)包括用于使从主通道接收的测量目标气体(30)流动的旁路通道( 124)和用于通过使流过旁通通路的测量对象气体(30)通过传热面(437)进行传热来测量测量对象气体(30)的流量的气流感测部(602)。 空气流动检测部分602被设置为暴露于沿旁路通道内部的测量目标气体30的流动方向布置的暴露表面402,安装支撑表面402具有一个阶段 (407),其形成为围绕所述气流感测部(602)的周边,并且由所述台围绕的内部部分比所述台的外部突出。
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公开(公告)号:US20150355006A1
公开(公告)日:2015-12-10
申请号:US14407775
申请日:2013-05-29
发明人: Shinobu TASHIRO , Keiji HANZAWA , Noboru TOKUYASU , Takeshi MORINO , Ryosuke DOI , Akira UENODAN
CPC分类号: G01F1/6842 , G01F1/684 , G01F1/696 , G01F15/14
摘要: It is an object of the present invention to improve a measurement accuracy of a thermal flow meter. A circuit package 401 is such that a measurement surface 430 and a backside of measurement surface 431 of a rear surface thereof are located in a bypass passage, and the bypass passage is configured to allow a measurement target gas 30 to flow upon dividing the measurement target gas 30 into a flow path 386 at a side of the measurement surface 430 of the circuit package and a flow path 387 at a side of the backside of measurement surface 431 of a rear surface of the measurement surface 430, and an inflow-side end surface of the circuit package for dividing the measurement target gas 30 has different shapes at the side of the measurement surface and at the side of the backside of measurement surface. The inflow-side end surface of the circuit package for dividing the measurement target gas 30 is formed with a reference line 700 dividing the measurement target gas 30, and an end surface 701a at the side of the measurement surface with respect to the reference line and an end surface 701b at the side of the backside of measurement surface with respect to the reference line are formed to be asymmetrical.
摘要翻译: 本发明的目的是提高热流量计的测量精度。 电路封装401使得测量表面430及其后表面的测量表面431的后侧位于旁路通道中,并且旁路通道被构造成允许测量目标气体30在划分测量目标时流动 气体30进入电路封装的测量表面430侧的流路386和测量表面430的后表面的测量表面431的后侧的流动通道387,以及流入侧端 用于划分测量目标气体30的电路封装的表面在测量表面侧和测量表面的背面侧具有不同的形状。 用于划分测量对象气体30的电路封装的流入侧端面由分配测量对象气体30的基准线700和测量表面侧的相对于基准线的端面701a形成, 在测量表面的背面侧相对于基准线的端面701b形成为不对称的。
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