-
公开(公告)号：US20180174796A1
公开(公告)日：2018-06-21
申请号：US15580403
申请日：2015-06-29
摘要： In a device for performing observation with a charged particle microscope at an atmospheric pressure using a diaphragm, while there was a demand that a distance between the diaphragm and a sample be reduced as much as possible, there was a problem that a limit for how close the diaphragm and the sample can be brought to each other was unknown in the past. In the present invention, a height adjustment member is used, and the position of a diaphragm in a charged particle beam device with respect to the height adjustment member is defined as the specific point of an optical device, so that the positional relationship between the height adjustment member and the diaphragm in the optical device is reproduced, and the height of a sample table with a Z-axis driving mechanism is adjusted so as to locate the surface of the sample at the position of the specific point of the optical device. According to this, the distance between the diaphragm and the sample can be safely and simply adjusted, and thus, an object is to adjust the distance between the diaphragm and the sample so that the distance is reduced as much as possible or the distance is fixed every time the sample is replaced.
-
公开(公告)号：US20160071685A1
公开(公告)日：2016-03-10
申请号：US14782695
申请日：2014-03-05
CPC分类号： H01J37/16 , H01J37/026 , H01J37/18 , H01J37/20 , H01J37/26 , H01J2237/0213 , H01J2237/022 , H01J2237/2003 , H01J2237/2006
摘要： In a SEM device which enables observations under an atmospheric pressure, in the event that a diaphragm is damaged during an observation of a sample, air flows into a charged particle optical barrel from the vicinity of the sample, due to the differential pressure between the inside of the charged particle optical barrel under vacuum and the vicinity of the sample under the atmospheric pressure. At this time, the sample may be sucked into the charged particle optical barrel. In this case, a charged particle optical system and a detector are contaminated thereby, which causes performance degradation or failures of the charged particle microscope. For coping therewith, it is necessary to prevent the charged particle optical barrel from being contaminated, without inducing a time lag, with a simple structure. In a charged particle beam device adapted to place a sample in a non-vacuum environment, there is provided a filter member which is placed on the path of a primary charged particle beam at least in a state where the primary charged particle beam is directed to the sample and, further, is adapted to transmit or pass, therethrough, the primary charged particle beam and secondary charged particles derived from the sample, while intercepting at least a portion of a scattering substance which is scattered in the event of a fracture of the diaphragm.
摘要翻译： 在能够在大气压下进行观察的SEM装置中，在样品观察期间膜片损伤的情况下，由于内部的压差，空气从样品附近流入带电粒子光学镜筒 的带电粒子光学筒在真空下和样品在大气压附近。 此时，样品可以被吸入带电粒子光学筒中。 在这种情况下，带电粒子光学系统和检测器被污染，导致带电粒子显微镜的性能下降或失效。 为了应对，需要以简单的结构防止带电粒子光学筒被污染，而不会引起时间滞后。 在适于将样品置于非真空环境中的带电粒子束装置中，设置有过滤构件，其至少在初级带电粒子束被引导到 样品，并且还适于透射或通过从样品衍生的初级带电粒子束和二次带电粒子，同时截留至少一部分在发生断裂的情况下散射的散射物质 隔膜
-
3.发明申请公开(公告)号：US20160329188A1
公开(公告)日：2016-11-10
申请号：US15109481
申请日：2014-12-24
IPC分类号： H01J37/28 , H01J37/22 , H01J37/244
CPC分类号： H01J37/28 , H01J37/18 , H01J37/226 , H01J37/244 , H01J2237/24455 , H01J2237/2448 , H01J2237/2608
摘要： Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal (512) associated with light emitted from a light-emitting member (500) that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (6). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal (518) caused by reflected charged particles or secondary charged particles (517) from the sample (6).
摘要翻译： 提供了能够以简单的方式观察样品的内部和表面的带电粒子束装置。 该带电粒子束装置以透射带电粒子图像模式和二次带电粒子图像模式工作。 在透射带电粒子图像模式中，透射带电粒子图像是根据与从发射元件（500）发射的光相关联的检测信号（512）产生的，该发光元件（500）在被透射的透射带电粒子照射时发光 样品（6）的内部。 在二次带电粒子图像模式中，基于由来自样品（6）的反射带电粒子或二次带电粒子（517）引起的检测信号（518）产生二次带电粒子图像。
-
公开(公告)号：US20160203944A1
公开(公告)日：2016-07-14
申请号：US14912521
申请日：2014-03-10
CPC分类号： H01J37/16 , H01J37/18 , H01J37/20 , H01J37/263 , H01J37/28 , H01J2237/164 , H01J2237/202 , H01J2237/28
摘要： Disclosed is a charged particle beam apparatus wherein a partitioning film capable of transmitting a charged particle beam is provided between a charged particle optical system and a sample, said charged particle beam apparatus eliminating a contact between the sample and the partitioning film even in the cases where the sample has recesses and protrusions. On the basis of detection signals or an image generated on the basis of the detection signals, a distance between a sample and a partitioning film is monitored, said detection signals being outputted from a detector that detects secondary charged particles discharged from the sample due to irradiation of a primary charged particle beam.
摘要翻译： 公开了一种带电粒子束装置，其中在带电粒子光学系统和样品之间提供能够传输带电粒子束的分隔膜，所述带电粒子束装置消除了样品与分隔膜之间的接触，即使在 样品具有凹凸。 基于检测信号或基于检测信号生成的图像，监测样品和分隔膜之间的距离，所述检测信号从检测器输出，该检测器检测由于照射而从样品排出的二次带电粒子 的初级带电粒子束。
-
公开(公告)号：US20180122617A1
公开(公告)日：2018-05-03
申请号：US15855370
申请日：2017-12-27
发明人： Shinsuke KAWANISHI , Yusuke OMINAMI
CPC分类号： H01J37/18 , H01J37/16 , H01J37/28 , H01J2237/0213 , H01J2237/022 , H01J2237/164 , H01J2237/182 , H01J2237/2605
摘要： In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.
-
公开(公告)号：US20160343538A1
公开(公告)日：2016-11-24
申请号：US15111907
申请日：2015-02-10
CPC分类号： H01J37/18 , H01J37/16 , H01J37/28 , H01J2237/0213 , H01J2237/022 , H01J2237/164 , H01J2237/182 , H01J2237/2605
摘要： In a scanning electron microscope, an atmospheric pressure space having a specimen arranged therein and a vacuum space arranged on a charged particle optical system side are isolated from each other using an isolation film that transmits charged particle beams. The scanning electron microscope has an electron optical lens barrel, a chassis, and an isolation film. The electron optical lens barrel radiates a primary electron beam onto a specimen. The chassis is directly bonded to the inside of the electron optical lens barrel and has an inside that turns into a lower vacuum state than the inside of the electron optical lens barrel at least during the radiation of the primary electron beam. The isolation film isolates a space in an atmospheric pressure atmosphere having a specimen mounted therein and the inside of the chassis in a lower vacuum state, and transmits the primary charged particle beam.
摘要翻译： 在扫描型电子显微镜中，使用透过带电粒子束的隔离膜将具有布置在其中的试样的空气压力空间和布置在带电粒子光学系统侧的真空空间彼此隔离。 扫描电子显微镜具有电子光学镜筒，底盘和隔离膜。 电子光学镜筒将一次电子束辐射到样品上。 底盘直接接合到电子光学镜筒的内部，并且至少在一次电子束的辐射期间具有变成比电子光学镜筒的内部更低的真空状态的内部。 隔离膜将具有安装在其中的试样的大气压气氛中的空间与底盘的内部隔离，并且透射初级带电粒子束。
-
7.发明申请Charged-Particle-Beam Device, Specimen-Image Acquisition Method, and Program Recording Medium 有权带电粒子束装置，样本图像采集方法和程序记录介质公开(公告)号：US20160336145A1
公开(公告)日：2016-11-17
申请号：US15110284
申请日：2014-12-03
CPC分类号： H01J37/222 , H01J37/185 , H01J37/20 , H01J37/28 , H01J2237/164 , H01J2237/221 , H01J2237/2608 , H01J2237/2806
摘要： A charged-particle-beam device is provided with a data processing unit that removes, from a detector signal, the effect that scattering of a primary charged-particle beam before the primary charged-particle beam reaches a specimen has on the spot shape of the primary charged-particle beam. For example, when using an electron microscope to observe a specimen in a non-vacuum atmosphere, the effect that scattering of a primary charged-particle beam due to a barrier film or a gas present in a non-vacuum space has on the spot shape of the primary charged-particle beam is removed from a signal acquired by a detector. This makes it easy to obtain high-quality images.
摘要翻译： 带电粒子束装置设置有数据处理单元，该数据处理单元从检测器信号中去除在初级带电粒子束到达样本之前的初级带电粒子束的散射具有的斑点形状 初级带电粒子束。 例如，当使用电子显微镜在非真空气氛中观察样品时，由于阻挡膜或存在于非真空空间中的气体引起的初级带电粒子束的散射的影响具有点形状 的初级带电粒子束从由检测器获取的信号中去除。 这使得获得高质量图像变得容易。
-
8.发明申请INSPECTION OR OBSERVATION APPARATUS AND SAMPLE INSPECTION OR OBSERVATION METHOD 审中-公开检查或观察装置和样本检查或观察方法公开(公告)号：US20150083908A1
公开(公告)日：2015-03-26
申请号：US14562260
申请日：2014-12-05
CPC分类号： H01J37/18 , H01J37/16 , H01J37/20 , H01J37/22 , H01J37/226 , H01J37/261 , H01J37/28 , H01J2237/166 , H01J2237/182 , H01J2237/2007 , H01J2237/204 , H01J2237/2602 , H01J2237/2608
摘要： A sample observation method uses a charged particle beam apparatus comprising a charged particle optical column irradiating a charged particle beam, a vacuum chamber, and a sample chamber being capable of storing a sample. The method includes maintaining a pressure of the sample chamber higher than that of the vacuum chamber by a thin film which permits the charged particle beam to be transmitted, determining a relation between a height of a lower surface of the thin film and a height of a lower end of a lens barrel of an optical microscope, measuring a distance between the sample and the lens barrel, and setting a distance between the sample and thin film based on the relation and the distance.
摘要翻译： 样品观察方法使用带电粒子束装置，其包括照射带电粒子束的带电粒子光学柱，真空室和能够存储样品的样品室。 该方法包括通过允许带电粒子束透射的薄膜来保持样品室的压力高于真空室的压力，确定薄膜下表面的高度与薄膜的高度之间的关系 基于光学显微镜的镜筒的下端，测量样品和镜筒之间的距离，并根据关系和距离设定样品和薄膜之间的距离。
-
-
-
-
-
-
-
搜索结果
8 条记录 (耗时 0.026 秒)
