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1.发明授权Method for representing logical status changes of a plurality of adjacent circuit nodes in an integrated circuit in a logic image employing a pulsed electron probe 失效用于表示使用脉冲电子探针的逻辑图像中的集成电路中的多个相邻电路节点的逻辑状态变化的方法
公开(公告)号：US4471302A
公开(公告)日：1984-09-11
申请号：US341106
申请日：1982-01-20
IPC分类号： G01R19/155 , G01Q10/06 , G01Q30/02 , G01Q30/04 , G01R19/145 , G01R31/28 , G01R31/302 , G01R31/305 , G01R31/00 , G01N23/00 , G06F11/32
CPC分类号： B82Y15/00 , G01R31/305
摘要： A method for representing logic changes of state occurring at a plurality of adjacent circuit nodes in an integrated circuit in the form of a logic image employs a pulsed electron probe which always scans a same path in the x-direction on the integrated circuit and the phase of the electron pulses comprising the pulsed electron probe is continuously shifted for each new scanning operation. The integrated circuit can be imaged up to the edge of a recording or field of view limit and it is only at this limit that the y-deflection of the pulsed electron probe is fixed. Very small spacings, such as those occurring between adjacent integrated circuit tracks, can thus be reliably imaged on the picture screen of the scanning electron microscope.
摘要翻译： 以逻辑图像的形式表示在集成电路中的多个相邻电路节点处发生的状态的逻辑变化的方法采用脉冲式电子探针，该脉冲电子探针总是沿着集成电路和相位上的x方向扫描相同的路径 包含脉冲电子探针的电子脉冲在每次新的扫描操作中连续移动。 集成电路可以成像到记录或视场限制的边缘，并且只有在这个限制下，脉冲电子探针的y偏转是固定的。 因此，可以在扫描电子显微镜的图像屏幕上可靠地成像诸如在相邻的集成电路轨道之间发生的那些非常小的间隔。
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2.发明授权
公开(公告)号：US4460866A
公开(公告)日：1984-07-17
申请号：US284827
申请日：1981-07-20
IPC分类号： G01R27/02 , G01Q30/02 , G01R27/00 , G01R31/305
CPC分类号： G01R27/00 , G01R31/305
摘要： A method for measuring a resistance and a capacitance of an electronic component utilizes electron beam measuring technology to impress a current I.sub.A by means of a pulsed electron beam on the component. A potential curve U(t) which arises during the pulse on the electronic component as a result of the impressed current is utilized together with the known current to determine the resistance R and the capacitance C by means of an appropriate selection of two measuring points U(t.sub.1) and U(t.sub.2) on the potential curve.BACKGROUND OF THE INVENTIONThe invention relates to a method for measuring resistances and capacitances of eletronic components.Up to now, the measurement of resistances and capacitances of electronic components was carried out with a mechanical probe. The smallest measurable capacitance according to this method amounted to 1 pF. The loading effects associated with such probes affects accurate measurement.
摘要翻译： 用于测量电子部件的电阻和电容的方法利用电子束测量技术，通过脉冲电子束对部件上的电流IA进行印制。 在电子元件上由于外加电流产生的脉冲期间产生的电位曲线U（t）与已知电流一起被利用，以通过适当选择两个测量点U来确定电阻R和电容C （t1）和U（t2）。
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3.发明授权SAW-component having a reduced temperature path and method for the production thereof 有权具有降低温度路径的SAW组件及其制造方法公开(公告)号：US07589452B2
公开(公告)日：2009-09-15
申请号：US11574904
申请日：2005-08-18
申请人： Markus Hauser , Ulrich Knauer , Anton Leidl , Evelyn Riha , Gerd Riha , Ulrike Rösler , Werner Ruile , Clemens Ruppel , Gerd Scholl , Ulrich Wolff
发明人： Markus Hauser , Ulrich Knauer , Anton Leidl , Evelyn Riha , Gerd Riha , Ulrike Rösler , Werner Ruile , Clemens Ruppel , Gerd Scholl , Ulrich Wolff
IPC分类号： H03H9/25
CPC分类号： H03H9/08 , H03H3/10 , H03H9/02574 , H03H9/02834 , H03H9/02984
摘要： Elements and methods for forming elements that operate with acoustic waves are disclosed. The element includes a piezoelectric electric substrate that has a first thermal coefficient of expansion, electrically conducting element structures on an upper side of the substrate, a compensation layer on an underside of the substrate, and an SiO2 layer over the element structures.
摘要翻译： 公开了用于形成用声波操作的元件的元件和方法。 元件包括具有第一热膨胀系数的压电基板，在基板的上侧上的导电元件结构，在基板的下侧上的补偿层，以及元件结构上的SiO 2层。
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4.发明申请Component Working with Acoustic Waves having Reduced Temperature Coefficient of Frequencies and Method for Producing Same 有权使用具有降低的温度系数频率的声波的组件以及用于产生相同的方法公开(公告)号：US20130200960A1
公开(公告)日：2013-08-08
申请号：US13814906
申请日：2011-07-25
申请人： Wolfgang Sauer , Andreas Bergmann , Michael Jakob , Markus Mayer , Karl-Christian Wagner , Ulrich Knauer
发明人： Wolfgang Sauer , Andreas Bergmann , Michael Jakob , Markus Mayer , Karl-Christian Wagner , Ulrich Knauer
CPC分类号： H03H9/54 , H03H3/10 , H03H9/02094 , H03H9/02559 , H03H9/02818 , H03H9/02834 , H03H9/1452 , H03H9/70 , H03H9/72 , H03H9/725
摘要： A component is designed to work with acoustic waves. Embodiments have an improved temperature gradient of the frequency range and have increased performance strength. To this end, the component includes a stack of layers having a lower bonding layer, an electrode layer, an upper bonding layer, a compensation layer, and a trimming layer.
摘要翻译： 组件设计用于声波工作。 实施例具有改进的频率范围的温度梯度并且具有增加的性能强度。 为此，组件包括具有下结合层，电极层，上粘结层，补偿层和修剪层的层叠。
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公开(公告)号：US07459991B2
公开(公告)日：2008-12-02
申请号：US10542970
申请日：2003-12-16
申请人： Werner Ruile , Ulrike Roesler , Ulrich Wolff , Anton Leidl , Gerd Scholl , Markus Hauser , Ulrich Knauer
发明人： Werner Ruile , Ulrike Roesler , Ulrich Wolff , Anton Leidl , Gerd Scholl , Markus Hauser , Ulrich Knauer
IPC分类号： H03H9/72 , H01L41/083
CPC分类号： H03H9/02929 , H03H9/02834 , H03H9/14538
摘要： An apparatus including a piezoelectric substrate having at least one transducer electrode structure. The structure having a metallization formed by one or more metals with a mean specific density that is at least 50% higher than that of aluminum. The structure having a compensation layer that is applied fully or partially over the metallization. The compensation layer is of a material having a temperature dependence of elastic constants that counteracts the temperature coefficient of frequency of the substrate. The compensation layer has a thickness that is less than 15% of an acoustic wavelength of a wave capable of propagation in the structure.
摘要翻译： 一种包括具有至少一个换能器电极结构的压电基片的装置。 该结构具有由一种或多种平均比密度比铝高至少50％的金属形成的金属化。 该结构具有完全或部分地施加在金属化之上的补偿层。 补偿层是具有与基板的频率的温度系数抵消的弹性常数的温度依赖性的材料。 补偿层的厚度小于能够在结构中传播的波的声波长的15％。
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公开(公告)号：US20060103486A1
公开(公告)日：2006-05-18
申请号：US10542970
申请日：2003-12-16
申请人： Werner Ruile , Ulrike Roesler , Ulrich Wolff , Anton Leidl , Gerd Scholl , Markus Hauser , Ulrich Knauer
发明人： Werner Ruile , Ulrike Roesler , Ulrich Wolff , Anton Leidl , Gerd Scholl , Markus Hauser , Ulrich Knauer
IPC分类号： H03H9/70
CPC分类号： H03H9/02929 , H03H9/02834 , H03H9/14538
摘要： SAW component with improved temperature coefficient of frequency To reduce losses in a SAW component assembled on a piezoelectric substrate (S), the mass load on the metallization (M) is increased until the propagation velocity of the surface wave comes to rest below the propagation velocity of the fast shear wave. To limit the increase in the temperature coefficient of frequency in this process, a metallization with a significantly higher specific density than [that of] Al is used. The temperature coefficient of frequency of the component is simultaneously reduced by a compensation layer (K) applied to essentially the entire surface, said compensation layer being made of a material having a temperature dependency of the elastic coefficient that counteracts that of the substrate-metallization combination.
摘要翻译： 具有改善的频率温度系数的SAW组件为了减少组装在压电衬底（S）上的SAW元件的损耗，金属化（M）上的质量负载增加，直到表面波的传播速度降到低于传播速度 的快剪切波。 为了限制该过程中的频率温度系数的增加，使用比[Al]的比密度显着更高的金属化。 通过施加到基本上整个表面的补偿层（K）同时降低部件的频率的温度系数，所述补偿层由具有与基板金属化组合的弹性系数抵消的弹性系数的温度依赖性的材料制成 。
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公开(公告)号：US20130126466A1
公开(公告)日：2013-05-23
申请号：US13639527
申请日：2011-04-13
申请人： Charles Binninger , Christoph Eggs , Bruno Fuerbacher , Ulrich Knauer , Manfred Maisch , Helmut Zottl
发明人： Charles Binninger , Christoph Eggs , Bruno Fuerbacher , Ulrich Knauer , Manfred Maisch , Helmut Zottl
IPC分类号： B81C1/00
CPC分类号： B81C1/00396 , H03H3/10 , H03H9/02834
摘要： A method for producing a dielectric layer on the surface of a component is described. In particular embodiments, a dielectric layer having a planar surface can be generated over a substrate topography having raised structures. In a trimming process, a component property, which depends on the thickness or the third topography of the dielectric layer, is adjusted.
摘要翻译： 描述了在部件表面上制造电介质层的方法。 在特定实施例中，具有平坦表面的电介质层可以在具有凸起结构的衬底形貌上产生。 在修整过程中，调整取决于电介质层的厚度或第三形貌的组分特性。
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8.发明授权公开(公告)号：US09173305B2
公开(公告)日：2015-10-27
申请号：US13509181
申请日：2010-12-01
申请人： Charles Binninger , Ulrich Knauer , Helmut Zottl , Werner Ruile , Tomasz Jewula , Rudolf Nuessl
发明人： Charles Binninger , Ulrich Knauer , Helmut Zottl , Werner Ruile , Tomasz Jewula , Rudolf Nuessl
CPC分类号： H01L41/0477 , H01L23/49844 , H01L23/49866 , H01L41/0472 , H01L41/1873 , H01L41/29 , H01L2924/0002 , H03H9/02929 , H03H9/14538 , H05K1/0265 , H05K1/0306 , H05K1/09 , H05K3/048 , H05K3/388 , H05K2201/0338 , H01L2924/00
摘要： A metallization can be used for components working with acoustic waves. The metallization includes a base having a bottom layer comprising titanium, and an upper layer comprising copper. A top layer of the metallization disposed on the base comprises aluminum.
摘要翻译： 金属化可以用于声波工作的部件。 金属化包括具有包含钛的底层的基底和包含铜的上层。 设置在基座上的金属化的顶层包括铝。
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9.发明授权公开(公告)号：US07345409B2
公开(公告)日：2008-03-18
申请号：US10504625
申请日：2003-02-07
申请人： Anton Leidl , Ulrich Knauer , Werner Ruile , Lijun Peng
发明人： Anton Leidl , Ulrich Knauer , Werner Ruile , Lijun Peng
IPC分类号： H01L41/08
CPC分类号： H03H9/02929 , H03H9/02897
摘要： For a component operating with acoustic waves, it is proposed to arrange the electrode structure over a mechanically stable adaptation layer that serves to dissipate the electromechanical stresses. Further improvements of the output compatibility are achieved with additional intermediate layers and passivation layers applied on the sides or the entire surface over the electrode structure.
摘要翻译： 对于使用声波操作的部件，建议将电极结构布置在用于消散机电应力的机械稳定适应层上。 通过施加在电极结构上的侧面或整个表面上的附加中间层和钝化层来实现输出兼容性的进一步改进。
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公开(公告)号：US09394163B2
公开(公告)日：2016-07-19
申请号：US13639527
申请日：2011-04-13
申请人： Charles Binninger , Christoph Eggs , Bruno Fuerbacher , Ulrich Knauer , Manfred Maisch , Helmut Zottl
发明人： Charles Binninger , Christoph Eggs , Bruno Fuerbacher , Ulrich Knauer , Manfred Maisch , Helmut Zottl
CPC分类号： B81C1/00396 , H03H3/10 , H03H9/02834
摘要： A method for producing a dielectric layer on the surface of a component is described. In particular embodiments, a dielectric layer having a planar surface can be generated over a substrate topography having raised structures. In a trimming process, a component property, which depends on the thickness or the third topography of the dielectric layer, is adjusted.
摘要翻译： 描述了在部件表面上制造电介质层的方法。 在特定实施例中，具有平坦表面的电介质层可以在具有凸起结构的衬底形貌上产生。 在修整过程中，调整取决于电介质层的厚度或第三形貌的组分特性。
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