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1.发明授权Method for representing logical status changes of a plurality of adjacent circuit nodes in an integrated circuit in a logic image employing a pulsed electron probe 失效用于表示使用脉冲电子探针的逻辑图像中的集成电路中的多个相邻电路节点的逻辑状态变化的方法
公开(公告)号：US4471302A
公开(公告)日：1984-09-11
申请号：US341106
申请日：1982-01-20
IPC分类号： G01R19/155 , G01Q10/06 , G01Q30/02 , G01Q30/04 , G01R19/145 , G01R31/28 , G01R31/302 , G01R31/305 , G01R31/00 , G01N23/00 , G06F11/32
CPC分类号： B82Y15/00 , G01R31/305
摘要： A method for representing logic changes of state occurring at a plurality of adjacent circuit nodes in an integrated circuit in the form of a logic image employs a pulsed electron probe which always scans a same path in the x-direction on the integrated circuit and the phase of the electron pulses comprising the pulsed electron probe is continuously shifted for each new scanning operation. The integrated circuit can be imaged up to the edge of a recording or field of view limit and it is only at this limit that the y-deflection of the pulsed electron probe is fixed. Very small spacings, such as those occurring between adjacent integrated circuit tracks, can thus be reliably imaged on the picture screen of the scanning electron microscope.
摘要翻译： 以逻辑图像的形式表示在集成电路中的多个相邻电路节点处发生的状态的逻辑变化的方法采用脉冲式电子探针，该脉冲电子探针总是沿着集成电路和相位上的x方向扫描相同的路径 包含脉冲电子探针的电子脉冲在每次新的扫描操作中连续移动。 集成电路可以成像到记录或视场限制的边缘，并且只有在这个限制下，脉冲电子探针的y偏转是固定的。 因此，可以在扫描电子显微镜的图像屏幕上可靠地成像诸如在相邻的集成电路轨道之间发生的那些非常小的间隔。
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2.发明授权
公开(公告)号：US4460866A
公开(公告)日：1984-07-17
申请号：US284827
申请日：1981-07-20
IPC分类号： G01R27/02 , G01Q30/02 , G01R27/00 , G01R31/305
CPC分类号： G01R27/00 , G01R31/305
摘要： A method for measuring a resistance and a capacitance of an electronic component utilizes electron beam measuring technology to impress a current I.sub.A by means of a pulsed electron beam on the component. A potential curve U(t) which arises during the pulse on the electronic component as a result of the impressed current is utilized together with the known current to determine the resistance R and the capacitance C by means of an appropriate selection of two measuring points U(t.sub.1) and U(t.sub.2) on the potential curve.BACKGROUND OF THE INVENTIONThe invention relates to a method for measuring resistances and capacitances of eletronic components.Up to now, the measurement of resistances and capacitances of electronic components was carried out with a mechanical probe. The smallest measurable capacitance according to this method amounted to 1 pF. The loading effects associated with such probes affects accurate measurement.
摘要翻译： 用于测量电子部件的电阻和电容的方法利用电子束测量技术，通过脉冲电子束对部件上的电流IA进行印制。 在电子元件上由于外加电流产生的脉冲期间产生的电位曲线U（t）与已知电流一起被利用，以通过适当选择两个测量点U来确定电阻R和电容C （t1）和U（t2）。
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3.发明授权
公开(公告)号：US4686466A
公开(公告)日：1987-08-11
申请号：US705983
申请日：1985-02-27
IPC分类号： H01J37/28 , G01R31/305 , G01T1/28 , H01J37/26 , G01R31/00
CPC分类号： G01R31/305 , H01J37/266
摘要： A method for setting voltage resolution in particle beam measuring devices wherein band width of a measured signal processing is modified. In order to set a desired voltage resolution simply, reliably, and with high precision, a signal noise of the measured signal is measured. This signal noise is compared to a desired value for the measured signal resolution, and the band width of the measured signal processing is modified such that the signal noise of the measured signal is less than or equal to the desired value for the measured signal resolution.
摘要翻译： 一种用于设置测量信号处理的带宽被修改的粒子束测量装置中的电压分辨率的方法。 为了简单，可靠地且高精度地设置所需的电压分辨率，测量测量信号的信号噪声。 将该信号噪声与测量信号分辨率的期望值进行比较，并且修改测量信号处理的带宽，使得测量信号的信号噪声小于或等于测量信号分辨率的期望值。
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4.发明授权
公开(公告)号：US4675602A
公开(公告)日：1987-06-23
申请号：US706105
申请日：1985-02-27
IPC分类号： H01J37/28 , G01Q10/06 , G01R31/302 , G01R31/305 , G01T1/28 , H01J37/04 , H01J37/244 , H01J37/26 , H01L21/66 , G01N23/225
CPC分类号： G01R31/305 , H01J37/266
摘要： A method for automatically setting an operating point in signal curve measurements with particle beam measuring apparatus. An automatic setting of the operating point is provided when no specific point in time is known at which a reference potential is present at a measuring location. Given stroboscopically keyed primary particles, a periodic signal curve, which also comprises a specific reference potential in addition to other potentials, is applied to the measuring location. The keying phase of the keyed primary particles is varied with respect to the periodic signal curve. The periodic signal curve is quantitatively registered in this fashion. The phase point of the qualitatively registered signal curve which corresponds to the specific reference potential at the measuring location is identified. A keying phase of the primary particles is kept constant during the setting of the operating point, and is kept constant to phase points at which the reference potential is present at the measuring location.
摘要翻译： 一种使用粒子束测量装置自动设定信号曲线测量中的工作点的方法。 当没有特定的时间点已知在测量位置处存在参考电位时，提供工作点的自动设置。 给定频率键控的初级粒子，除了其他电位之外，还包括特定参考电位的周期信号曲线被应用于测量位置。 键控一次粒子的键控阶段相对于周期信号曲线而变化。 周期信号曲线以这种方式定量地登记。 识别与测量位置处的特定参考电位相对应的定性登记信号曲线的相位点。 初始粒子的键控阶段在工作点的设定期间保持恒定，并且保持恒定到参考电位存在于测量位置处的相位点。
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公开(公告)号：US20070262255A1
公开(公告)日：2007-11-15
申请号：US10587137
申请日：2005-01-21
申请人： Hans-Peter Feuerbaum
发明人： Hans-Peter Feuerbaum
摘要： The present invention relates to a focussing lens (100) for focussing a charged particle beam (7) onto a specimen (3) at a predetermined landing angle (42; 42′; 42) comprising at least one first electrode (26, 105, 105a) having a first aperture (106) to generate a focussing electric field (110) for focussing the charged particle beam (7) onto the specimen (3); and a correcting electrode having a curved surface (115) to compensate for landing angle dependent distortions of the focussing electric field (110) caused by the specimen (3). With the curved surface (115) of the correcting electrode it is possible to improve the focussing of a charged particle beam at landing angles that differ from the perpendicular landing angle.
摘要翻译： 本发明涉及一种用于以预定的着陆角（42; 42'; 42）将带电粒子束（7）聚焦到样本（3）上的聚焦透镜（100），包括至少一个第一电极（26,105， 105a）具有第一孔径（106）以产生用于将带电粒子束（7）聚焦到样本（3）上的聚焦电场（110）; 以及具有弯曲表面（115）的校正电极，用于补偿由样本（3）引起的聚焦电场（110）的着落角度相关的失真。 利用校正电极的弯曲表面（115），可以改善与垂直着陆角不同的着色角度的带电粒子束的聚焦。
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公开(公告)号：US4808821A
公开(公告)日：1989-02-28
申请号：US874498
申请日：1986-06-16
IPC分类号： H01J37/28 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01R31/28 , G01R31/305 , H01J37/10 , H01J37/147 , H01J37/244 , H01J37/26 , H01J49/06 , H01J49/44 , H01J49/48 , H01J37/05
CPC分类号： H01J49/06 , G01R31/305 , H01J37/1474 , H01J37/268 , H01J49/488
摘要： A spectrometer objective is composed of a short focal length, asymmetrical objective lens comprising an integrated electrostatic opposing field spectrometer and a single-stage deflection system arranged within the magnetic lens. Since the deflection of primary electrons occurs within the spectrometer objective, the space for a two-state deflection system employed in conventional systems between a condenser lens and an objective lens can be eliminated. The extremely-short structural length of the electron beam measuring apparatus which is thereby obtainable, in turn, has a beneficial effect on the influence of the lateral Boersch effect on probe diameter, this influence increasing with the length of the electron-optical beam path.
摘要翻译： 光谱仪物镜由包括集成静电相对场光谱仪的短焦距不对称物镜和布置在磁透镜内的单级偏转系统组成。 由于一次电子的偏转发生在光谱仪物镜内，因此可以消除在聚光透镜和物镜之间的常规系统中采用的两状态偏转系统的空间。 由此可以获得电子束测量装置的极短的结构长度，对横向Boersch效应对探针直径的影响具有有益的影响，这种影响随着电子束光路的长度而增加。
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公开(公告)号：US4683376A
公开(公告)日：1987-07-28
申请号：US773863
申请日：1985-09-09
申请人： Hans-Peter Feuerbaum
发明人： Hans-Peter Feuerbaum
IPC分类号： G01R19/00 , G01Q30/02 , G01R31/302 , G01R31/305 , H01J37/05 , H01J37/26 , G01N23/00
CPC分类号： H01J37/05 , G01R31/305 , H01J37/268
摘要： An electrostatic opposing field spectrometer has an extraction electrode (AN) and an opposing field electrode arrangement with a pair of planar opposing field electrodes (EG1 and EG2) mounted to an outer electrode part (EM) at either end of a truncated conical shaped bore extending therethrough, where the smaller opening of the bore is in the direction of the extraction electrode (AN). The planar opposing field electrodes (EG1 and EG2), in conjunction with the bore surface, generates substantially spherical equi-potential lines (A1 and A2) which transmit a larger solid angle distribution of secondary electrons (SE) triggered at a measuring point (M) on the specimen surface (PR).
摘要翻译： 静电相对场光谱仪具有提取电极（AN）和相对的场电极装置，其具有一对平面相对的场电极（EG1和EG2），其安装到在截锥形孔延伸的任一端的外电极部分（EM） 其中孔的较小开口沿着提取电极（AN）的方向。 平面相对的场电极（EG1和EG2）与孔表面一起产生基本上球形的等电位线（A1和A2），其传播在测量点（M）处触发的二次电子（SE）的较大立体角分布 ）在样品表面（PR）上。
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公开(公告)号：US07045781B2
公开(公告)日：2006-05-16
申请号：US10759392
申请日：2004-01-16
IPC分类号： H01J37/28
CPC分类号： H01J37/285 , H01J37/265 , H01J37/28 , H01J2237/0435 , H01J2237/049 , H01J2237/2855 , H01J2237/2857
摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam to a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.
摘要翻译： 提供一种带电粒子束装置，其包括用于产生带电粒子的主束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主光束的准直之间切换 适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度，用于聚集所述带电粒子的一次束的聚光透镜，用于偏转所述带电粒子的一次束的扫描装置 用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。 此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。
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9.发明授权
公开(公告)号：US5834773A
公开(公告)日：1998-11-10
申请号：US659337
申请日：1996-06-06
IPC分类号： G01R31/26 , B81C99/00 , G01M11/00 , G01R31/302 , G01R31/305 , G09G3/00 , H01J9/42 , H01L21/66 , H01L29/66 , H01S5/00 , G01R31/265
CPC分类号： G09G3/006 , G01R31/305
摘要： The invention relates to a method as well as to apparatus for testing the function of microstructure elements, wherein the microstructure element is driven for testing the emission and/or mechanical properties and the corpuscles emitted or reflected by it are detected and evaluated.
摘要翻译： 本发明涉及一种方法以及用于测试微结构元件功能的装置，其中驱动微结构元件以测试发射和/或机械性质，并且检测和评估由其发射或反射的小体。
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10.发明授权Secondary electron spectrometer for measuring voltages on a sample utilizing an electron probe 失效二次电子光谱仪，用于使用电子探针测量样品上的电压
公开(公告)号：US4514682A
公开(公告)日：1985-04-30
申请号：US398542
申请日：1982-07-15
申请人： Hans-Peter Feuerbaum
发明人： Hans-Peter Feuerbaum
IPC分类号： G01R31/26 , G01Q30/02 , G01R31/302 , H01J37/252 , H01J49/08 , H01J49/44 , H01L21/66 , G01N27/00
摘要： An improved secondary electron spectrometer for measuring voltages occurring on a specimen, such as an integrated circuit chip, utilizing an electron probe has a grating structure for measuring the energy distribution of the secondary electrons independently of the angular distribution of the secondary electrons at the measuring point on the specimen. If the secondary electron spectrometer has an extraction electrode and a deceleration electrode, the grating structure is spherically symmetric.
摘要翻译： 用于测量在诸如集成电路芯片的样本上发生的电压的改进的二次电子光谱仪利用电子探针具有用于独立于测量点处的二次电子的角分布来测量二次电子的能量分布的光栅结构 在标本上。 如果二次电子光谱仪具有提取电极和减速电极，则光栅结构是球形对称的。
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