SAW component having an improved temperature coefficient
    3.
    发明授权
    SAW component having an improved temperature coefficient 有权
    具有改善的温度系数的SAW组件

    公开(公告)号:US07459991B2

    公开(公告)日:2008-12-02

    申请号:US10542970

    申请日:2003-12-16

    IPC分类号: H03H9/72 H01L41/083

    摘要: An apparatus including a piezoelectric substrate having at least one transducer electrode structure. The structure having a metallization formed by one or more metals with a mean specific density that is at least 50% higher than that of aluminum. The structure having a compensation layer that is applied fully or partially over the metallization. The compensation layer is of a material having a temperature dependence of elastic constants that counteracts the temperature coefficient of frequency of the substrate. The compensation layer has a thickness that is less than 15% of an acoustic wavelength of a wave capable of propagation in the structure.

    摘要翻译: 一种包括具有至少一个换能器电极结构的压电基片的装置。 该结构具有由一种或多种平均比密度比铝高至少50%的金属形成的金属化。 该结构具有完全或部分地施加在金属化之上的补偿层。 补偿层是具有与基板的频率的温度系数抵消的弹性常数的温度依赖性的材料。 补偿层的厚度小于能够在结构中传播的波的声波长的15%。

    Saw component having an improved temperature coefficient
    4.
    发明申请
    Saw component having an improved temperature coefficient 有权
    具有改善温度系数的锯组件

    公开(公告)号:US20060103486A1

    公开(公告)日:2006-05-18

    申请号:US10542970

    申请日:2003-12-16

    IPC分类号: H03H9/70

    摘要: SAW component with improved temperature coefficient of frequency To reduce losses in a SAW component assembled on a piezoelectric substrate (S), the mass load on the metallization (M) is increased until the propagation velocity of the surface wave comes to rest below the propagation velocity of the fast shear wave. To limit the increase in the temperature coefficient of frequency in this process, a metallization with a significantly higher specific density than [that of] Al is used. The temperature coefficient of frequency of the component is simultaneously reduced by a compensation layer (K) applied to essentially the entire surface, said compensation layer being made of a material having a temperature dependency of the elastic coefficient that counteracts that of the substrate-metallization combination.

    摘要翻译: 具有改善的频率温度系数的SAW组件为了减少组装在压电衬底(S)上的SAW元件的损耗,金属化(M)上的质量负载增加,直到表面波的传播速度降到低于传播速度 的快剪切波。 为了限制该过程中的频率温度系数的增加,使用比[Al]的比密度显着更高的金属化。 通过施加到基本上整个表面的补偿层(K)同时降低部件的频率的温度系数,所述补偿层由具有与基板金属化组合的弹性系数抵消的弹性系数的温度依赖性的材料制成 。