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    HIGH SENSITIVITY MECHANICAL RESONANT SENSOR
    1.
    发明申请
    HIGH SENSITIVITY MECHANICAL RESONANT SENSOR 有权
    高灵敏度机械谐振传感器

    公开(公告)号：US20110020834A1

    公开(公告)日：2011-01-27

    申请号：US12721978

    申请日：2010-03-11

    申请人： Harold G. Craighead ,  Bojan (Rob) Ilic ,  David Alan Czaplewski ,  Robert H. Hall

    发明人： Harold G. Craighead ,  Bojan (Rob) Ilic ,  David Alan Czaplewski ,  Robert H. Hall

    IPC分类号： G01N33/53 ,  C12M1/34

    CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/2418 ,  G01N29/348 ,  G01N33/54373 ,  G01N33/569 ,  G01N2291/0224 ,  G01N2291/0256 ,  G01N2291/0427 ,  Y10S435/808

    摘要： A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.

    摘要翻译： 一种用于基于谐振微加工结构（例如悬臂梁）的频率差来检测质量的系统和方法。 高尺寸比悬臂梁涂覆有固定的结合配偶体，其结合到预定的细胞或分子。 确定具有固定的结合配偶体的悬臂的第一共振频率。 当将悬臂暴露于与结合配偶体结合的溶液时，悬臂梁的质量增加。 确定第二谐振频率，并且差分谐振频率为检测靶细胞或分子提供依据。 悬臂可能被外部驱动或环境噪声驱动。 光束的频率响应可以使用反射光和两个光电检测器或通过使用单个光电检测器的干涉光学地确定。

    High sensitivity mechanical resonant sensor
    2.
    发明授权
    High sensitivity mechanical resonant sensor 有权
    高灵敏度机械谐振传感器

    公开(公告)号：US07939273B2

    公开(公告)日：2011-05-10

    申请号：US12721978

    申请日：2010-03-11

    申请人： Harold G. Craighead ,  Bojan (Rob) Ilic ,  David A. Czaplewski ,  Robert H. Hall

    发明人： Harold G. Craighead ,  Bojan (Rob) Ilic ,  David A. Czaplewski ,  Robert H. Hall

    IPC分类号： G01N33/53

    CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/2418 ,  G01N29/348 ,  G01N33/54373 ,  G01N33/569 ,  G01N2291/0224 ,  G01N2291/0256 ,  G01N2291/0427 ,  Y10S435/808

    摘要： A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.

    摘要翻译： 一种用于基于谐振微加工结构（例如悬臂梁）的频率差来检测质量的系统和方法。 高尺寸比悬臂梁涂覆有固定的结合配偶体，其结合到预定的细胞或分子。 确定具有固定的结合配偶体的悬臂的第一共振频率。 当将悬臂暴露于与结合配偶体结合的溶液时，悬臂梁的质量增加。 确定第二谐振频率，并且差分谐振频率为检测靶细胞或分子提供依据。 悬臂可能被外部驱动或环境噪声驱动。 光束的频率响应可以使用反射光和两个光电检测器或通过使用单个光电检测器的干涉光学地确定。

    High sensitivity mechanical resonant sensor
    3.
    发明授权
    High sensitivity mechanical resonant sensor 有权
    高灵敏度机械谐振传感器

    公开(公告)号：US07691583B2

    公开(公告)日：2010-04-06

    申请号：US11343488

    申请日：2006-01-31

    申请人： Harold G. Craighead ,  Bojan Ilic ,  David Alan Czaplewski ,  Robert H. Hall

    发明人： Harold G. Craighead ,  Bojan Ilic ,  David Alan Czaplewski ,  Robert H. Hall

    IPC分类号： G01N33/53

    CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/2418 ,  G01N29/348 ,  G01N33/54373 ,  G01N33/569 ,  G01N2291/0224 ,  G01N2291/0256 ,  G01N2291/0427 ,  Y10S435/808

    摘要： A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.

    摘要翻译： 一种用于基于谐振微加工结构（例如悬臂梁）的频率差来检测质量的系统和方法。 高尺寸比悬臂梁涂覆有固定的结合配偶体，其结合到预定的细胞或分子。 确定具有固定的结合配偶体的悬臂的第一共振频率。 当将悬臂暴露于与结合配偶体结合的溶液时，悬臂梁的质量增加。 确定第二谐振频率，并且差分谐振频率为检测靶细胞或分子提供依据。 悬臂可能被外部驱动或环境噪声驱动。 光束的频率响应可以使用反射光和两个光电检测器或通过使用单个光电检测器的干涉光学地确定。

    High sensitivity mechanical resonant sensor
    4.
    发明授权
    High sensitivity mechanical resonant sensor 有权
    高灵敏度机械谐振传感器

    公开(公告)号：US07148017B1

    公开(公告)日：2006-12-12

    申请号：US09712795

    申请日：2000-11-14

    申请人： Harold G. Craighead ,  Bojan Ilic ,  David Alan Czaplewski ,  Robert H. Hall

    发明人： Harold G. Craighead ,  Bojan Ilic ,  David Alan Czaplewski ,  Robert H. Hall

    IPC分类号： G01N33/53

    CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/2418 ,  G01N29/348 ,  G01N33/54373 ,  G01N33/569 ,  G01N2291/0224 ,  G01N2291/0256 ,  G01N2291/0427 ,  Y10S435/808

    摘要： A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.

    摘要翻译： 一种用于基于谐振微加工结构（例如悬臂梁）的频率差来检测质量的系统和方法。 高尺寸比悬臂梁涂覆有固定的结合配偶体，其结合到预定的细胞或分子。 确定具有固定的结合配偶体的悬臂的第一共振频率。 当将悬臂暴露于与结合配偶体结合的溶液时，悬臂梁的质量增加。 确定第二谐振频率，并且差分谐振频率为检测靶细胞或分子提供依据。 悬臂可能被外部驱动或环境噪声驱动。 光束的频率响应可以使用反射光和两个光电检测器或通过使用单个光电检测器的干涉光学地确定。

    MICROFLUIDIC ENCAPSULATED NEMS RESONATORS
    6.
    发明申请
    MICROFLUIDIC ENCAPSULATED NEMS RESONATORS 审中-公开
    微流感密封NEMS谐振器

    公开(公告)号：US20080245135A1

    公开(公告)日：2008-10-09

    申请号：US11940865

    申请日：2007-11-15

    申请人： Keith Aubin ,  Bojan (Rob) Ilic ,  Seung-Min Park ,  Harold G. Craighead

    发明人： Keith Aubin ,  Bojan (Rob) Ilic ,  Seung-Min Park ,  Harold G. Craighead

    IPC分类号： G01N29/036 ,  G01N33/02

    CPC分类号： G01N5/02 ,  B01L3/5027 ,  B01L2300/0663 ,  G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N29/4418 ,  G01N29/46 ,  G01N2291/014 ,  G01N2291/0427

    摘要： A device includes a microfluidic channel and a nanoelectromechanical mass detector encapsulated within the microfluidic channel. Multiple microfluidic channels may be included with multiple nano electromechanical mass detectors encapsulated within each microfluidic channel. A method of detecting masses includes delivering a sample via the microfluidic channel to the nano electromechanical mass detectors and creating a pressure within the microfluidic channel that significantly reduces viscous damping effects on the mass detector. The detector may be actuated and response measured.

    摘要翻译： 装置包括微流体通道和封装在微流体通道内的纳米机电质量检测器。 多个微流体通道可以包含在每个微流体通道内的多个纳米机电质量检测器中。 检测质量的方法包括将样品经由微流体通道输送到纳米机电质量检测器并在微流体通道内产生压力，其显着降低对质量检测器的粘性阻尼效应。 可以启动检测器并测量响应。

    Detection of small bound mass
    7.
    发明授权
    Detection of small bound mass 有权
    检测小的束缚质量

    公开(公告)号：US07409851B2

    公开(公告)日：2008-08-12

    申请号：US11093008

    申请日：2005-03-29

    申请人： Bojan (Rob) Ilic ,  Harold G. Craighead

    发明人： Bojan (Rob) Ilic ,  Harold G. Craighead

    IPC分类号： G01N29/02

    CPC分类号： G01N29/022 ,  B82Y30/00 ,  B82Y35/00 ,  G01N29/036 ,  G01N29/2418 ,  G01N2291/02491 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0427

    摘要： Prefabricated catalyzing adsorption sites are incorporated into small oscillators. In one embodiment, the sites are formed of precisely positioned gold anchors on surface micromachined oscillators. The micromachined oscillators may be formed of silicon, such as polysilicon, or silicon nitride in various embodiments. The sites allow special control of chemical surface functionality for the detection of analytes of interest. Thiolate molecules may be adsorbed from solution onto the gold anchors, creating a dense thiol monolayer with a tail end group pointing outwards from the surface of the gold anchor. This results in a thiolate self-assembled monolayer (SAM), creating a strong interaction between the functional group and the gold anchor.

    摘要翻译： 预制的催化吸附位点并入小振荡器。 在一个实施例中，这些位置由精确定位的金锚形成在表面微机械振荡器上。 在各种实施例中，微机械振荡器可以由诸如多晶硅或氮化硅的硅形成。 这些位点允许特殊的化学表面功能控制来检测感兴趣的分析物。 硫醇分子可以从溶液中吸附到金锚上，形成一个致密的硫醇单层，尾端组从金锚的表面向外指向。 这导致硫醇自组装单层（SAM），在功能基团和​​金锚之间产生强烈的相互作用。

    Heat pumped parametric MEMS device
    8.
    发明授权
    Heat pumped parametric MEMS device 有权
    热泵参数MEMS器件

    公开(公告)号：US07654140B2

    公开(公告)日：2010-02-02

    申请号：US10097178

    申请日：2002-03-12

    申请人： Maxim Zalalutdinov ,  Anatoli Olkhovets ,  Alan T. Zehnder ,  Bojan Ilic ,  David Alan Czaplewski ,  Lidija Sekaric ,  Jeevak M. Parpia ,  Harold G. Craighead

    发明人： Maxim Zalalutdinov ,  Anatoli Olkhovets ,  Alan T. Zehnder ,  Bojan Ilic ,  David Alan Czaplewski ,  Lidija Sekaric ,  Jeevak M. Parpia ,  Harold G. Craighead

    IPC分类号： G01N29/12

    CPC分类号： H02N1/006

    摘要： A micro-electrical mechanical oscillator has a resonant frequency of oscillation that is varied by application of heat. The resonant frequency is varied at a frequency different from the resonant frequency of the oscillator to amplify oscillations. In one embodiment, the oscillator is disc of material supported by a pillar of much smaller diameter than the disc. The periphery of the disc is heated by a laser to provide a time varying shift of the resonant frequency (or equivalently the stiffness) of the disc. Feedback from movement of the disc is used to modulate the intensity of the laser, and thus the stiffness of the disc to provide parametric amplification of sensed vibrations, using heating as a pump. Various other shapes of micro-electrical mechanical oscillators are used in other embodiment, including an array of such oscillators on a substrate, each having different resonant frequencies.

    摘要翻译： 微电机械振荡器具有通过施加热量而变化的振荡的谐振频率。 谐振频率以与振荡器的谐振频率不同的频率变化以放大振荡。 在一个实施例中，振荡器是由比该盘小得多的直径支柱支撑的材料盘。 盘的周边被激光加热，以提供盘的共振频率（或等效的刚度）的时变位移。 使用盘的运动的反馈来调制激光的强度，并因此调节光盘的刚度，以使用加热作为泵来提供所感测的振动的参数放大。 在另一实施例中使用各种其他形状的微电机械振荡器，包括在衬底上的每个具有不同谐振频率的这种振荡器的阵列。