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公开(公告)号：US07358822B2
公开(公告)日：2008-04-15
申请号：US11275653
申请日：2006-01-20
申请人： Keith Aubin , Bojan (Rob) Ilic , Maxim Zalalutdinov , Robert B. Reichenbach , Jeevak M. Parpia , Harold G. Craighead
发明人： Keith Aubin , Bojan (Rob) Ilic , Maxim Zalalutdinov , Robert B. Reichenbach , Jeevak M. Parpia , Harold G. Craighead
IPC分类号： H03L1/00
CPC分类号： H03B5/30 , B81B3/0029 , B81B2203/0118 , H03H9/02259 , H03H9/2457 , H03H2009/02511
摘要： The temperature of a remote portion of device having a microelectromechanical oscillator is modulated to create oscillation of the oscillators. In one embodiment, a localized heat source is placed on a device layer of a multilayered stack, consisting of device, sacrificial and substrate layers. The localized heat source may be a laser beam in one embodiment. The oscillator is supported by the device layer and may be formed in the device layer in various embodiments. The oscillator may be spaced apart from the localized heat source.
摘要翻译： 具有微机电振荡器的装置的远端部分的温度被调制以产生振荡器的振荡。 在一个实施例中，将局部热源放置在由器件，牺牲层和衬底层组成的多层叠层的器件层上。 在一个实施例中，局部热源可以是激光束。 振荡器由器件层支撑，并且可以在各种实施例中形成在器件层中。 振荡器可以与局部热源间隔开。
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公开(公告)号：US20080245135A1
公开(公告)日：2008-10-09
申请号：US11940865
申请日：2007-11-15
IPC分类号： G01N29/036 , G01N33/02
CPC分类号： G01N5/02 , B01L3/5027 , B01L2300/0663 , G01N29/022 , G01N29/036 , G01N29/222 , G01N29/4418 , G01N29/46 , G01N2291/014 , G01N2291/0427
摘要： A device includes a microfluidic channel and a nanoelectromechanical mass detector encapsulated within the microfluidic channel. Multiple microfluidic channels may be included with multiple nano electromechanical mass detectors encapsulated within each microfluidic channel. A method of detecting masses includes delivering a sample via the microfluidic channel to the nano electromechanical mass detectors and creating a pressure within the microfluidic channel that significantly reduces viscous damping effects on the mass detector. The detector may be actuated and response measured.
摘要翻译： 装置包括微流体通道和封装在微流体通道内的纳米机电质量检测器。 多个微流体通道可以包含在每个微流体通道内的多个纳米机电质量检测器中。 检测质量的方法包括将样品经由微流体通道输送到纳米机电质量检测器并在微流体通道内产生压力，其显着降低对质量检测器的粘性阻尼效应。 可以启动检测器并测量响应。
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公开(公告)号：US07939273B2
公开(公告)日：2011-05-10
申请号：US12721978
申请日：2010-03-11
IPC分类号： G01N33/53
CPC分类号： G01N29/022 , G01N29/036 , G01N29/2418 , G01N29/348 , G01N33/54373 , G01N33/569 , G01N2291/0224 , G01N2291/0256 , G01N2291/0427 , Y10S435/808
摘要： A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.
摘要翻译： 一种用于基于谐振微加工结构（例如悬臂梁）的频率差来检测质量的系统和方法。 高尺寸比悬臂梁涂覆有固定的结合配偶体，其结合到预定的细胞或分子。 确定具有固定的结合配偶体的悬臂的第一共振频率。 当将悬臂暴露于与结合配偶体结合的溶液时，悬臂梁的质量增加。 确定第二谐振频率，并且差分谐振频率为检测靶细胞或分子提供依据。 悬臂可能被外部驱动或环境噪声驱动。 光束的频率响应可以使用反射光和两个光电检测器或通过使用单个光电检测器的干涉光学地确定。
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公开(公告)号：US20110020834A1
公开(公告)日：2011-01-27
申请号：US12721978
申请日：2010-03-11
CPC分类号： G01N29/022 , G01N29/036 , G01N29/2418 , G01N29/348 , G01N33/54373 , G01N33/569 , G01N2291/0224 , G01N2291/0256 , G01N2291/0427 , Y10S435/808
摘要： A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.
摘要翻译： 一种用于基于谐振微加工结构（例如悬臂梁）的频率差来检测质量的系统和方法。 高尺寸比悬臂梁涂覆有固定的结合配偶体，其结合到预定的细胞或分子。 确定具有固定的结合配偶体的悬臂的第一共振频率。 当将悬臂暴露于与结合配偶体结合的溶液时，悬臂梁的质量增加。 确定第二谐振频率，并且差分谐振频率为检测靶细胞或分子提供依据。 悬臂可能被外部驱动或环境噪声驱动。 光束的频率响应可以使用反射光和两个光电检测器或通过使用单个光电检测器的干涉光学地确定。
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公开(公告)号：US07409851B2
公开(公告)日：2008-08-12
申请号：US11093008
申请日：2005-03-29
IPC分类号： G01N29/02
CPC分类号： G01N29/022 , B82Y30/00 , B82Y35/00 , G01N29/036 , G01N29/2418 , G01N2291/02491 , G01N2291/0255 , G01N2291/0256 , G01N2291/0427
摘要： Prefabricated catalyzing adsorption sites are incorporated into small oscillators. In one embodiment, the sites are formed of precisely positioned gold anchors on surface micromachined oscillators. The micromachined oscillators may be formed of silicon, such as polysilicon, or silicon nitride in various embodiments. The sites allow special control of chemical surface functionality for the detection of analytes of interest. Thiolate molecules may be adsorbed from solution onto the gold anchors, creating a dense thiol monolayer with a tail end group pointing outwards from the surface of the gold anchor. This results in a thiolate self-assembled monolayer (SAM), creating a strong interaction between the functional group and the gold anchor.
摘要翻译： 预制的催化吸附位点并入小振荡器。 在一个实施例中，这些位置由精确定位的金锚形成在表面微机械振荡器上。 在各种实施例中，微机械振荡器可以由诸如多晶硅或氮化硅的硅形成。 这些位点允许特殊的化学表面功能控制来检测感兴趣的分析物。 硫醇分子可以从溶液中吸附到金锚上，形成一个致密的硫醇单层，尾端组从金锚的表面向外指向。 这导致硫醇自组装单层（SAM），在功能基团和金锚之间产生强烈的相互作用。
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公开(公告)号：US07274835B2
公开(公告)日：2007-09-25
申请号：US10781339
申请日：2004-02-18
IPC分类号： G02B6/26
CPC分类号： G01D5/266 , G01D5/268 , G02B6/305 , G02B6/3502 , G02B6/3566 , G02B6/3578
摘要： A substrate incorporates a mechanical cantilever resonator with passive integrated optics for motion detection. The resonator acts as a waveguide, and enables optical detection of deflection/displacement amplitude, including oscillations. In one embodiment, the cantilever comprises a silicon waveguide suspended over a substrate. A reflector structure faces a free end of the suspending cantilever, or a waveguide is supported facing the free end of the suspended cantilever to receive light transmitted through the silicon waveguide cantilever. Deflection/displacement of the cantilever results in modulation of the light received from its free end that is representative of the displacement. Ring resonators may be used to couple different wavelength light to the waveguides, allowing formation of an array of cantilevers.
摘要翻译： 基板采用机械悬臂谐振器和无源集成光学元件进行运动检测。 谐振器用作波导，并且能够光学检测包括振荡在内的偏转/位移振幅。 在一个实施例中，悬臂包括悬挂在衬底上的硅波导。 反射器结构面向悬臂悬臂的自由端，或者波导面向悬臂悬臂的自由端被支撑，以接收透过硅波导悬臂的光。 悬臂的偏转/位移导致从其自由端接收的代表位移的光的调制。 环形谐振器可用于将不同波长的光耦合到波导，从而形成悬臂阵列。
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