公开(公告)号：US06590917B2

公开(公告)日：2003-07-08

申请号：US09321711

申请日：1999-05-28

申请人： Hideo Nakayama ,  Akira Sakamoto ,  Takeshi Nakamura ,  Fumio Koyama

发明人： Hideo Nakayama ,  Akira Sakamoto ,  Takeshi Nakamura ,  Fumio Koyama

IPC分类号： H01S520

CPC分类号： H01S5/18361 ,  H01S5/18308 ,  H01S5/18311 ,  H01S5/18394 ,  H01S5/423 ,  H01S2301/163 ,  H01S2301/166

摘要： A surface emitting laser and a surface emitting laser array capable of high-luminance optical output in fundamental transverse mode, which can be produced easily with good reproducibility and with small position variation. The surface emitting laser has an active layer region composed of an active layer and upper and lower spacer layers deposited on both sides thereof and reflection layers deposited on both sides of the active layer region, an upper reflecting layer deposited on the upper spacer layer of the active layer region, a lower reflecting layer deposited on the lower spacer layer of the active layer region, and a secondary cavity formed by a first mode control layer and a second mode control layer placed on the periphery of the region of emission of the laser beam at the upper reflecting layer.

摘要翻译： 表面发射激光器和表面发射激光器阵列，其能够在基本横向模式下具有高亮度光学输出，其可以容易地以良好的再现性和小的位置变化产生。表面发射激光器具有由有源层 并且沉积在其两侧上的上隔离层和下间隔层以及沉积在有源层区两侧的反射层，沉积在有源层区的上间隔层上的上反射层，沉积在下间隔层上的下反射层 以及由位于上反射层的激光束的发射区域的周围的第一模式控制层和第二模式控制层形成的次级空腔。

公开(公告)号：US07221828B2

公开(公告)日：2007-05-22

申请号：US10861353

申请日：2004-06-07

申请人： Hideo Nakayama ,  Takeshi Nakamura ,  Akira Sakamoto ,  Akemi Murakami

发明人： Hideo Nakayama ,  Takeshi Nakamura ,  Akira Sakamoto ,  Akemi Murakami

IPC分类号： G02B6/30 ,  H01S3/04 ,  H01L27/15

CPC分类号： G02B6/4202 ,  G02B6/29367 ,  G02B6/2938 ,  G02B6/4204 ,  G02B6/4226 ,  G02B6/4234

摘要： A module for an optical wavelength division multiplexing communication includes semiconductor lasers emitting lights of wavelengths, a support member on which the semiconductor lasers are mounted, an optical fiber to which the lights emitted from the semiconductor lasers are incident, and a component that positions the optical fiber with respect to the support member and fixes the optical fiber thereto.

摘要翻译： 用于光波分复用通信的模块包括发射波长的半导体激光器，安装有半导体激光器的支撑部件，从半导体激光器发射的光入射到其上的光纤，以及将光学 纤维相对于支撑构件固定在其上。

公开(公告)号：US09166370B2

公开(公告)日：2015-10-20

申请号：US13456909

申请日：2012-04-26

申请人： Takashi Kondo ,  Hideo Nakayama ,  Kazutaka Takeda ,  Fumio Koyama

发明人： Takashi Kondo ,  Hideo Nakayama ,  Kazutaka Takeda ,  Fumio Koyama

IPC分类号： H01S5/00 ,  H01S5/183 ,  H01S5/10 ,  H01S5/32 ,  H01S5/20

CPC分类号： H01S5/18358 ,  H01S5/1039 ,  H01S5/18311 ,  H01S5/209 ,  H01S5/3211

摘要： A vertical cavity surface emitting laser includes a first semiconductor multilayer reflector, a resonator, and a second semiconductor multilayer reflector. The first semiconductor multilayer reflector is formed on a substrate and is configured by stacking a high refractive index layer having a relatively high refractive index and a low refractive index layer having a relatively low refractive index. The resonator includes an active layer formed on the first semiconductor multilayer reflector. The second semiconductor multilayer reflector is configured by stacking the high refractive index layer and the low refractive index layer. The resonator includes a pair of spacer layers disposed vertically on the active layer and a resonator extension area formed at one side of the pair of spacer layers. The resonator extension area contains a material in which an energy level with a crystal defect is higher than a general energy level without the crystal defect.

摘要翻译： 垂直腔表面发射激光器包括第一半导体多层反射器，谐振器和第二半导体多层反射器。 第一半导体多层反射器形成在基板上，并且通过堆叠具有较高折射率的高折射率层和折射率相对较低的低折射率层而构成。 谐振器包括形成在第一半导体多层反射器上的有源层。 第二半导体多层反射器通过层叠高折射率层和低折射率层而构成。 谐振器包括垂直于有源层设置的一对间隔层和形成在一对间隔层的一侧的谐振器延伸区域。 谐振器延伸区域包含其中具有晶体缺陷的能级高于没有晶体缺陷的一般能级的材料。

公开(公告)号：US20090016732A1

公开(公告)日：2009-01-15

申请号：US12036570

申请日：2008-02-25

申请人： Osamu Ueno ,  Akira Sakamoto ,  Kazuhiro Sakai ,  Hideo Nakayama ,  Akemi Murakami

发明人： Osamu Ueno ,  Akira Sakamoto ,  Kazuhiro Sakai ,  Hideo Nakayama ,  Akemi Murakami

IPC分类号： H04B10/00 ,  H01S5/042

CPC分类号： H04B10/504 ,  H01S5/0427 ,  H01S5/06812 ,  H01S5/18311

摘要： Provided is a method for driving a surface emitting semiconductor laser including an active region that generates light, a resonator structure disposed such that it sandwiches the active region, and a driving electrode that provides power to the active region. The surface emitting semiconductor laser has an internal resistance defined by voltage and current applied to the driving electrode. The method includes applying a modulation signal to the driving electrode, in which the modulation signal has a current amplitude defined by a first current value and a second current value that is greater than the first current value. The modulation signal is in a negative gradient region in which the internal resistance decreases in contrast to the increase of the current.

摘要翻译： 提供了一种用于驱动表面发射半导体激光器的方法，所述表面发射半导体激光器包括产生光的有源区，设置成使其夹持有源区的谐振器结构以及向有源区提供电力的驱动电极。 表面发射半导体激光器具有由施加到驱动电极的电压和电流限定的内部电阻。 该方法包括将调制信号施加到驱动电极，其中调制信号具有由第一电流值定义的电流幅度和大于第一电流值的第二电流值。 与电流增加相反，调制信号处于负梯度区域，其中内阻减小。

公开(公告)号：US20050180688A1

公开(公告)日：2005-08-18

申请号：US11041442

申请日：2005-01-25

申请人： Osamu Ueno ,  Masao Funada ,  Masaaki Miura ,  Tsutomu Hamada ,  Shinya Kyozuka ,  Osamu Takanashi ,  Hideo Nakayama ,  Jun Sakurai ,  Akira Sakamoto

发明人： Osamu Ueno ,  Masao Funada ,  Masaaki Miura ,  Tsutomu Hamada ,  Shinya Kyozuka ,  Osamu Takanashi ,  Hideo Nakayama ,  Jun Sakurai ,  Akira Sakamoto

IPC分类号： G02B6/26 ,  G02B6/42 ,  H01S5/022 ,  H01S5/183

CPC分类号： G02B6/4206 ,  G02B6/4202 ,  G02B6/4292

摘要： The first and second light-emitting regions are provided on the light source. When the first optical fiber having the first core diameter is connected, the light emitted from the first light-emitting region enters the first core. When the second optical fiber having a greater core diameter than the first core diameter is connected, the lights emitted from the first and second light-emitting regions enter the second core. It is thus possible to connect the optical transmission device with multiple optical fibers having different core diameters. It is thus possible to provide the optical transmission device and the communication device, which are low in cost and high in convenience.

摘要翻译： 第一发光区域和第二发光区域设置在光源上。 当连接具有第一纤芯直径的第一光纤时，从第一发光区域发射的光线进入第一芯体。 当连接具有比第一纤芯直径更大的芯径的第二光纤时，从第一和第二发光区域发射的光进入第二芯。 因此，可以将光传输装置与具有不同芯径的多根光纤连接。 因此，可以提供成本低，便利性高的光传输装置和通信装置。

公开(公告)号：US08023539B2

公开(公告)日：2011-09-20

申请号：US12036570

申请日：2008-02-25

申请人： Osamu Ueno ,  Akira Sakamoto ,  Kazuhiro Sakai ,  Hideo Nakayama ,  Akemi Murakami

发明人： Osamu Ueno ,  Akira Sakamoto ,  Kazuhiro Sakai ,  Hideo Nakayama ,  Akemi Murakami

IPC分类号： H01S3/10 ,  H01S3/13 ,  H01S3/00

CPC分类号： H04B10/504 ,  H01S5/0427 ,  H01S5/06812 ,  H01S5/18311

摘要： Provided is a method for driving a surface emitting semiconductor laser including an active region that generates light, a resonator structure disposed such that it sandwiches the active region, and a driving electrode that provides power to the active region. The surface emitting semiconductor laser has an internal resistance defined by voltage and current applied to the driving electrode. The method includes applying a modulation signal to the driving electrode, in which the modulation signal has a current amplitude defined by a first current value and a second current value that is greater than the first current value. The modulation signal is in a negative gradient region in which the internal resistance decreases in contrast to the increase of the current.

摘要翻译： 提供了一种用于驱动表面发射半导体激光器的方法，所述表面发射半导体激光器包括产生光的有源区，设置成使其夹持有源区的谐振器结构以及向有源区提供电力的驱动电极。 表面发射半导体激光器具有由施加到驱动电极的电压和电流限定的内部电阻。 该方法包括将调制信号施加到驱动电极，其中调制信号具有由第一电流值定义的电流幅度和大于第一电流值的第二电流值。 与电流增加相反，调制信号处于负梯度区域，其中内阻减小。

公开(公告)号：US07079562B2

公开(公告)日：2006-07-18

申请号：US11105464

申请日：2005-04-14

申请人： Akira Sakamoto ,  Hideo Nakayama ,  Yasuaki Miyamoto ,  Jun Sakurai

发明人： Akira Sakamoto ,  Hideo Nakayama ,  Yasuaki Miyamoto ,  Jun Sakurai

IPC分类号： H01S5/00

CPC分类号： H01S5/18311 ,  H01S5/18358 ,  H01S5/2086

摘要： A method of fabricating a surface emitting semiconductor laser includes a first step of forming, on a substrate, multiple monitor-use semiconductor layers having stripes radiating from a center of the substrate, and a laser portion that includes semiconductor layers and is located on the periphery of the multiple monitor-use semiconductor layers, a second step of monitoring oxidized conditions on the multiple monitor-use semiconductor layers when a selectively oxidized region is formed in the laser portion, and a third step of controlling oxidization of the selectively oxidized region on the basis of the oxidized conditions thus monitored.

摘要翻译： 一种制造表面发射半导体激光器的方法包括：第一步骤，在衬底上形成具有从衬底的中心辐射的条带的多个监视用半导体层，以及包括半导体层并位于外围的激光部分 多个监视用半导体层的第二步骤，在激光部中形成选择性氧化区域时，在多个监视用半导体层上监测氧化条件的第二工序，以及控制上述选择氧化区域的氧化的第三工序 由此监测的氧化条件的基础。

公开(公告)号：US07078257B2

公开(公告)日：2006-07-18

申请号：US10384607

申请日：2003-03-11

申请人： Akira Sakamoto ,  Hideo Nakayama ,  Yasuaki Miyamoto ,  Jun Sakurai

发明人： Akira Sakamoto ,  Hideo Nakayama ,  Yasuaki Miyamoto ,  Jun Sakurai

IPC分类号： H01L21/00

CPC分类号： H01S5/18311 ,  H01S5/18358 ,  H01S5/2086

摘要： A method of fabricating a surface emitting semiconductor laser includes a first step of forming, on a substrate, multiple monitor-use semiconductor layers having stripes radiating from a center of the substrate, and a laser portion that includes semiconductor layers and is located on the periphery of the multiple monitor-use semiconductor layers, a second step of monitoring oxidized conditions on the multiple monitor-use semiconductor layers when a selectively oxidized region is formed in the laser portion, and a third step of controlling oxidization of the selectively oxidized region on the basis of the oxidized conditions thus monitored.

摘要翻译： 一种制造表面发射半导体激光器的方法包括：第一步骤，在衬底上形成具有从衬底的中心辐射的条带的多个监视用半导体层，以及包括半导体层并位于外围的激光部分 多个监视用半导体层的第二步骤，在激光部中形成选择性氧化区域时，在多个监视用半导体层上监测氧化条件的第二工序，以及控制上述选择氧化区域的氧化的第三工序 由此监测的氧化条件的基础。

公开(公告)号：US20050180476A1

公开(公告)日：2005-08-18

申请号：US11105450

申请日：2005-04-14

申请人： Akira Sakamoto ,  Hideo Nakayama ,  Yasuaki Miyamoto ,  Jun Sakurai

发明人： Akira Sakamoto ,  Hideo Nakayama ,  Yasuaki Miyamoto ,  Jun Sakurai

IPC分类号： H01L21/66 ,  H01S5/183 ,  H01S5/20 ,  H01S5/22 ,  H01S5/323 ,  H01S5/00

CPC分类号： H01S5/18311 ,  H01S5/18358 ,  H01S5/2086

摘要： A method of fabricating a surface emitting semiconductor laser includes a first step of forming, on a substrate, multiple monitor-use semiconductor layers having stripes radiating from a center of the substrate, and a laser portion that includes semiconductor layers and is located on the periphery of the multiple monitor-use semiconductor layers, a second step of monitoring oxidized conditions on the multiple monitor-use semiconductor layers when a selectively oxidized region is formed in the laser portion, and a third step of controlling oxidization of the selectively oxidized region on the basis of the oxidized conditions thus monitored.

摘要翻译： 一种制造表面发射半导体激光器的方法包括：第一步骤，在衬底上形成具有从衬底的中心辐射的条带的多个监视用半导体层，以及包括半导体层并位于外围的激光部分 多个监视用半导体层的第二步骤，在激光部中形成选择性氧化区域时，在多个监视用半导体层上监测氧化条件的第二工序，以及控制上述选择氧化区域的氧化的第三工序 由此监测的氧化条件的基础。

公开(公告)号：US20050185688A1

公开(公告)日：2005-08-25

申请号：US11111717

申请日：2005-04-22

申请人： Hideo Nakayama ,  Akira Sakamoto

发明人： Hideo Nakayama ,  Akira Sakamoto

IPC分类号： H01L21/66 ,  H01L21/00 ,  H01L21/3065 ,  H01L21/31 ,  H01S3/08 ,  H01S5/00 ,  H01S5/026 ,  H01S5/183 ,  H01S5/343

CPC分类号： H01S5/18311 ,  B82Y20/00 ,  H01S5/0042 ,  H01S5/18338 ,  H01S5/1835 ,  H01S5/18358 ,  H01S5/3432 ,  H01S2301/176

摘要： A method of fabricating a surface emitting semiconductor laser includes the following steps. A first laminate of semiconductor layers and a second laminate of semiconductor layers are formed on a substrate. The first laminate includes a first reflection mirror layer of a first conduction type, an active region, a III-V semiconductor layer containing Al, and a second reflection mirror layer of a second conduction type, the second laminate being used for monitoring and having an oxidizable region. The first and second laminates are etched so as to form mesas on the substrate in which side surface of the III-V semiconductor layer contained in the first laminate is exposed. Oxidization of the III-V semiconductor layer from the side surface is started at an oxidization rate. During oxidization, a reflectance of the second laminate for monitoring or its variation is monitored, and oxidization of the III-V semiconductor layer is terminated after a constant time from a time when the reflectance or its variation reaches a corresponding given value.

摘要翻译： 制造表面发射半导体激光器的方法包括以下步骤。 半导体层的第一层叠体和半导体层的第二层叠体形成在基板上。 第一层压体包括第一导电类型的第一反射镜层，有源区，含有Al的III-V半导体层和第二导电类型的第二反射镜层，第二层压板用于监测并具有 可氧化区域。 对第一和​​第二层压体进行蚀刻，以在第一层压体中包含的III-V半导体层的侧表面露出的基板上形成台面。 从侧面氧化III-V半导体层以氧化速率开始。 在氧化期间，监测用于监测或其变化的第二层压体的反射率，并且在从反射率或其变化达到相应给定值的时间起经过恒定时间之后，III-V半导体层的氧化终止。