Method and apparatus for truing and trued grinding tool
    1.
    发明授权
    Method and apparatus for truing and trued grinding tool 失效
    研磨和修整研磨工具的方法和装置

    公开(公告)号:US5472371A

    公开(公告)日:1995-12-05

    申请号:US240210

    申请日:1994-05-09

    CPC分类号: B24B1/00 B24B53/00

    摘要: By grinding the grinding surface of a diamond grinding tool which is formed in a predetermined shape by securing diamond abrasive grains by bond circularly or flat with high accuracy by the processing type truing method, uniformly dressing the above bond surface so as to project diamond abrasive grains, lapping the tips of the diamond abrasive grains projected from the above bond by the lapping type truing method so as to make the cutting edge height constant, the run,out of the grinding surface can be controlled to the order of submicrons and the cutting edges which are tips of the diamond abrasive grains can be aligned precisely.

    摘要翻译: 通过研磨通过加工类型修整方法以高精度通过粘结圆环或平坦的金刚石磨粒来形成预定形状的金刚石研磨工具的研磨表面,均匀地修整上述粘结表面以投射金刚石磨粒 通过研磨抛光方法研磨从上述结合物投射出的金刚石磨粒的尖端,使切削刃高度保持恒定,磨削表面的流程可以控制在亚微米级和切削刃的数量级 这些金刚石磨粒的尖端可以精确对准。

    Method for measuring dimensions and alignment of thin film magnetic head and apparatus therefor
    3.
    发明授权
    Method for measuring dimensions and alignment of thin film magnetic head and apparatus therefor 失效
    测量薄膜磁头尺寸和对准方法及其设备

    公开(公告)号:US06831277B1

    公开(公告)日:2004-12-14

    申请号:US09437265

    申请日:1999-11-10

    IPC分类号: G01B1100

    摘要: A method of measuring variation in dimensions and alignment error of thin film magnetic heads formed on a raw bar cut-off from a substrate is provided. Such method comprises illuminating a MR element and a resistance detector element which is formed for monitoring a lapping process, both of which are formed on the raw bar, with illuminating light whose wavelength is 300 nm or less; forming an image by imaging light reflected from the elements; and converting the image to an image signal through photoelectric conversion so as to detect variation in dimensions of the MR element and the resistance detector element formed on the raw bar, and alignment error between the MR element and the resistance detector element with a high degree of accuracy.

    摘要翻译: 提供了一种测量从基板上切割的生条上形成的薄膜磁头的尺寸变化和对准误差的方法。 这种方法包括:照射MR元件和电阻检测器元件,该元件形成用于监测两者都是在原料条上形成的研磨过程,其中波长为300nm或更小的照明光; 通过对从元件反射的光进行成像来形成图像; 并且通过光电转换将图像转换成图像信号,以便检测形成在原始条上的MR元件和电阻检测器元件的尺寸变化,以及MR元件和电阻检测器元件之间的对准误差 准确性。

    Magnetic head with electro-lapping guide
    4.
    发明授权
    Magnetic head with electro-lapping guide 有权
    磁头与电动研磨导轨

    公开(公告)号:US07149061B2

    公开(公告)日:2006-12-12

    申请号:US10025154

    申请日:2001-12-18

    IPC分类号: G11B5/33

    摘要: A thin-film includes an inductive element and a first and second magneto-resistive effect elements in which the first and second magneto-resistive effect elements are arranged in proximity to each other on a substrate, and one surface of the substrate perpendicular to the surface formed with the first and second magneto-resistive effect elements constitutes a slider surface, thereby providing appropriate hight of the magneto-resistive effect elements.

    摘要翻译: 薄膜包括电感元件和第一和第二磁阻效应元件,其中第一和第二磁阻效应元件在衬底上彼此靠近地布置,并且衬底的垂直于表面的一个表面 形成有第一和第二磁阻效应元件构成滑块表面,从而提供适当的高阻抗效应元件。

    Thin film magnetic head
    7.
    发明授权
    Thin film magnetic head 失效
    薄膜磁头

    公开(公告)号:US06920016B2

    公开(公告)日:2005-07-19

    申请号:US10331662

    申请日:2002-12-31

    IPC分类号: G11B5/60 G11B21/21

    CPC分类号: G11B5/6005

    摘要: A thin film magnetic head includes a three-step configuration including deep and shallow groove surfaces, a super shallow groove surface, and an air bearing surface, and also, island-shaped center rail is provided in the center of the air outflow end of the disk-facing air bearing surface having a boundary on the surface of base alumina between a head element portion and a substrate, without including the surface of the substrate. Further, by providing in the surface of the substrate the super shallow groove surface shallower than a shallow groove surface, an alumina recession between the surface of the substrate and the head element portion, produced in a shallow dual step sub ambient slider, can be eliminated. Magnetic spacing between the head of the head element portion and the magnetic layer of the disk can be thereby reduced.

    摘要翻译: 薄膜磁头包括包括深浅槽表面,超浅槽表面和空气轴承表面的三步构造,并且岛状中心轨道设置在空气流出端的中心 面对面的空气轴承表面,其在基体氧化铝的表面上具有头部元件部分和基底之间的边界,而不包括基底的表面。 此外,通过在基板的表面设置比浅槽表面浅的超浅槽表面,可以消除在浅双步次环境滑块中产生的基板表面和头元件部分之间的氧化铝凹陷 。 因此,头元件部分的头部与盘的磁性层之间的磁性间隔可以减小。

    Method for manufacturing a thin film magnetic head
    8.
    发明授权
    Method for manufacturing a thin film magnetic head 有权
    薄膜磁头制造方法

    公开(公告)号:US07716811B2

    公开(公告)日:2010-05-18

    申请号:US11588866

    申请日:2006-10-27

    IPC分类号: G11B5/127 H04R31/00

    摘要: Head elements are formed on a wafer to suppress deterioration in pinning strength of a pinned layer, which is caused by ESD generated during air bearing surface polishing of a thin film magnetic head. The wafer is cut into rovers in each of which are connected head elements. Rover air bearing surfaces are polished until an MR elements attain a predetermined height. A final polishing step finishes air bearing surfaces by applying an electroconductive polishing liquid to achieve a predetermined shape and surface roughness with high accuracy. A pinning defect occurrence rate is reduced by suppressing deterioration in pinning strength of a pinned layer of a read element. To achieve this, a specific resistance of the electroconductive polishing liquid is controlled to 5 GΩ·cm or less. A shallow rail and a deep rail are formed on the air bearing surfaces, and the rover is cut into thin film magnetic heads.

    摘要翻译: 头元件形成在晶片上以抑制由薄膜磁头的空气轴承表面抛光期间产生的ESD引起的被钉扎层的钉扎强度的劣化。 将晶片切割成每个都连接的头元件的流动站。 流动车空气轴承表面被抛光直到MR元件达到预定高度。 最终的抛光步骤通过施加导电研磨液来完成空气轴承表面,以高精度实现预定的形状和表面粗糙度。 通过抑制读取元件的被钉扎层的钉扎强度的劣化来降低钉扎缺陷发生率。 为了达到这个目的,将导电研磨液的电阻值控制在5G&OHgr·cm以下。 在空气轴承表面上形成浅轨和深轨,并将流动车切成薄膜磁头。

    Method for manufacturing a thin film magnetic head
    9.
    发明申请
    Method for manufacturing a thin film magnetic head 有权
    薄膜磁头制造方法

    公开(公告)号:US20070119046A1

    公开(公告)日:2007-05-31

    申请号:US11588866

    申请日:2006-10-27

    IPC分类号: G11B5/127

    摘要: Head elements are formed on a wafer in order to suppress deterioration in pinning strength of a pinned layer, which is caused by ESD generated during a thin film magnetic head production process, particularly in an air bearing surface polishing step. The wafer is cut line by line into rovers in each of which the head elements are connected; surfaces to be used as air bearing surfaces of the rover are polished until an MR element height reaches to a predetermined value. After this air bearing surface polishing, an electroconductive polishing liquid is used in a final bearing surface polishing step of finishing the air bearing surfaces to achieve a predetermined shape with high accuracy and a predetermined value of a surface roughness. In order to suppress a pinning defect occurrence rate by suppressing deterioration in pinning strength of a pinned layer of a read element, a specific resistance of the electroconductive polishing liquid is controlled to GΩ·cm or less, preferably 1 GΩ·cm or less. After that, a shallow rail and a deep rail are formed on the air bearing surfaces, and the rover is cut to accomplish thin film magnetic heads.

    摘要翻译: 头元件形成在晶片上,以便抑制在薄膜磁头制造过程中产生的ESD引起的钉扎层的钉扎强度的劣化,特别是在空气轴承表面抛光步骤中。 每个头元件连接的晶片被逐行切割成流动站; 用作流动站的空气轴承表面的表面被抛光直到MR元件高度达到预定值。 在这种空气轴承表面抛光之后,在最终的轴承表面抛光步骤中使用导电研磨液,以完成空气轴承表面,以高精度和预定的表面粗糙度值达到预定的形状。 为了通过抑制读取元件的被钉扎层的钉扎强度的劣化来抑制钉扎缺陷发生率,导电研磨液的比电阻被控制在GOmea.cm以下,优选为1Ggga.cm以下。 之后,在空气轴承表面上形成浅轨和深轨,并且切割流动站以实现薄膜磁头。