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    Load sensor with shock relaxation material to protect semiconductor strain sensor
    1.
    发明授权
    Load sensor with shock relaxation material to protect semiconductor strain sensor 有权
    带减震材料的负载传感器，用于保护半导体应变传感器

    公开(公告)号：US07793551B2

    公开(公告)日：2010-09-14

    申请号：US12184426

    申请日：2008-08-01

    申请人： Hiromi Shimazu ,  Yohei Tanno ,  Hiroyuki Ohta ,  Ryuji Takada ,  Takayuki Shimodaira

    发明人： Hiromi Shimazu ,  Yohei Tanno ,  Hiroyuki Ohta ,  Ryuji Takada ,  Takayuki Shimodaira

    IPC分类号： G01B7/16

    CPC分类号： G01L1/2225 ,  G01L1/18 ,  G01L1/26 ,  G01L5/162 ,  Y10T29/49103

    摘要： The invention provides a load sensor which is driven by a low electric power consumption, can measure at a high precision, and has a high reliability without being broken. The load sensor is structured such that a detection rod for detecting a strain is provided in an inner portion of a hole formed near a center of a pin via a shock relaxation material and a semiconductor strain sensor is provided in the detection rod, in a load sensor detecting a load applied to the pin from a strain generated in an inner portion of the pin.

    摘要翻译： 本发明提供了一种由低功耗驱动的负载传感器，可以高精度地测量，并且具有高可靠性而不被破坏。 负载传感器被构造成使得用于检测应变的检测杆通过冲击松弛材料设置在靠近销的中心的孔的内部，并且半导体应变传感器设置在检测棒中，在负载 传感器检测从销的内部产生的应变施加到销的负载。

    Load Sensor
    2.
    发明申请
    Load Sensor 有权
    负载传感器

    公开(公告)号：US20090031819A1

    公开(公告)日：2009-02-05

    申请号：US12184426

    申请日：2008-08-01

    申请人： Hiromi Shimazu ,  Yohei Tanno ,  Hiroyuki Ohta ,  Ryuji Takada ,  Takayuki Shimodaira

    发明人： Hiromi Shimazu ,  Yohei Tanno ,  Hiroyuki Ohta ,  Ryuji Takada ,  Takayuki Shimodaira

    IPC分类号： G01B7/16 ,  H01C10/28 ,  G01N3/24

    CPC分类号： G01L1/2225 ,  G01L1/18 ,  G01L1/26 ,  G01L5/162 ,  Y10T29/49103

    摘要： The invention provides a load sensor which is driven by a low electric power consumption, can measure at a high precision, and has a high reliability without being broken. The load sensor is structured such that a detection rod for detecting a strain is provided in an inner portion of a hole formed near a center of a pin via a shock relaxation material and a semiconductor strain sensor is provided in the detection rod, in a load sensor detecting a load applied to the pin from a strain generated in an inner portion of the pin.

    摘要翻译： 本发明提供了一种由低功耗驱动的负载传感器，可以高精度地测量，并且具有高可靠性而不被破坏。 负载传感器被构造成使得用于检测应变的检测杆通过冲击松弛材料设置在靠近销的中心的孔的内部，并且半导体应变传感器设置在检测棒中，在负载 传感器检测从销的内部产生的应变施加到销的负载。

    Method of and device for driving piezo-electric elements and system for controlling micromotion mechanism
    3.
    发明授权
    Method of and device for driving piezo-electric elements and system for controlling micromotion mechanism 失效
    用于驱动压电元件的方法和装置以及用于控制微动作机构的系统

    公开(公告)号：US5384507A

    公开(公告)日：1995-01-24

    申请号：US90218

    申请日：1993-07-19

    申请人： Ryuji Takada ,  Eiichi Hazaki

    发明人： Ryuji Takada ,  Eiichi Hazaki

    IPC分类号： H01L41/04 ,  H01L41/09

    CPC分类号： B82Y15/00 ,  H01L41/042 ,  H02N2/062 ,  Y10S977/85 ,  Y10S977/872

    摘要： Set with respect to the piezo-electric element (1) is an approximate expression representing a relationship between the amplitude (.DELTA.V) of the applied voltage range, a reference voltage (Vo) relative to the applied voltage range and an amount of displacement (G) of the piezo-electric element per unit voltage. There is obtained the amplitude (.DELTA.V) of the applied voltage range for producing the target amount of displacement in the reference voltage by inputting the target amount of displacement (.DELTA.X) and the reference voltage (Vo) and using the approximate expression. The applied voltage range (Vmin.about.Vmax) for producing the target amount of displacement is determined from the obtained amplitude of the applied voltage range and the inputted reference voltage (Vo). The voltage is applied to the piezo-electric element on the basis of the applied voltage range determined. It is therefore possible to cause highly accurate displacements without using a special displacement measuring device. Prepared are approximate expressions utilizing a linear expression and a quadratic expression depending on the accuracies required.

    摘要翻译： PCT No.PCT / JP92 / 01569 Sec。 371日期：1993年7月19日 102（e）日期1993年7月19日PCT 1991年11月30日提交。关于压电元件（1），是表示施加电压范围的幅度（DELTA V）之间的关系的近似表达式， 相对于所施加的电压范围的参考电压（Vo）和每单位电压的压电元件的位移量（G）。 通过输入目标偏移量（DELTA X）和参考电压（Vo）并使用近似表达式，获得用于产生参考电压中的目标偏移量的施加电压范围的幅度（DELTA V）。 根据所获得的施加电压范围的振幅和输入的基准电压（Vo）确定用于产生目标移动量的施加电压范围（Vmin DIFFERENCE Vmax）。 根据所确定的施加电压范围，对压电元件施加电压。 因此，可以在不使用特殊的位移测量装置的情况下进行高精度位移。 根据所需的准确度，准备使用线性表达式和二次表达式的近似表达式。

    Multi-axis load sensor
    4.
    发明授权
    Multi-axis load sensor 失效
    多轴负载传感器

    公开(公告)号：US4674339A

    公开(公告)日：1987-06-23

    申请号：US769722

    申请日：1985-08-27

    申请人： Yotaro Hatamura ,  Kozo Ono ,  Ryuji Takada ,  Takami Kusaki

    发明人： Yotaro Hatamura ,  Kozo Ono ,  Ryuji Takada ,  Takami Kusaki

    IPC分类号： G01L5/16

    CPC分类号： G01L5/161

    摘要： A multi-axis load sensor is composed of at least one of a parallel plate structure connecting two members to each other by means of a plurality of flexible beams arranged in parallel to one another and a radial plate structure connecting the two members to each other by means of a plurality of flexible beams arranged radially relative to a given point and equipped with detection means for detecting deformations of the associated flexible beams. The deformations are of the bending deformation mode and are developed by a load applied to the associated flexible beams. At least one of the associated flexible beams is provided with another detection means for detecting deformations of a deformation mode different from the bending mode. The multi-axis load sensor is simple in structure and easily machined.

    摘要翻译： 多轴负载传感器由平行板结构中的至少一个构成，该平行板结构通过彼此平行布置的多个柔性梁相互连接两个构件，以及径向板结构，该两个构件通过 多个柔性梁的装置，其相对于给定点径向布置，并且装备有用于检测相关联的柔性梁的变形的检测装置。 变形是弯曲变形模式，并通过施加到相关联的柔性梁的载荷来展开。 相关联的柔性梁中的至少一个设置有用于检测不同于弯曲模式的变形模式的变形的另一检测装置。 多轴负载传感器结构简单，加工容易。