Semiconductor device
    1.
    发明申请
    Semiconductor device 失效
    半导体器件

    公开(公告)号:US20090256235A1

    公开(公告)日:2009-10-15

    申请号:US12385407

    申请日:2009-04-07

    IPC分类号: H01L23/525

    摘要: A semiconductor device (200) includes: an electrical fuse (100) including: a lower layer interconnect (120) formed on a substrate; a via (130) provided on the lower layer interconnect (120) so as to be connected to the lower layer interconnect (120); and an upper layer interconnect (110) provided on the via (130) so as to be connected to the via (130), the electrical fuse being cut, in a state after being cut, through formation of a flowing-out portion, the flowing-out portion being formed when an electrical conductor forming the upper layer interconnect (110) flows outside the upper layer interconnect (110); and a guard upper layer interconnect (152) (conductive heat-absorbing member) formed in at least the same layer as the upper layer interconnect (110), for absorbing heat generated in the upper layer interconnect (110).

    摘要翻译: 一种半导体器件(200)包括:电熔丝(100),包括:形成在衬底上的下层互连(120); 设置在所述下层互连(120)上以便连接到所述下层互连(120)的通孔(130); 以及设置在所述通孔(130)上以便连接到所述通路(130)的上层互连(110),所述电熔丝在切割后通过形成流出部分被切割,所述电熔丝 当形成上层互连(110)的电导体流过上层互连(110)之外时形成流出部分; 以及形成在与上层互连件(110)至少相同的层中的保护层上层互连(152)(导电性吸热构件),用于吸收在上层互连件(110)中产生的热量。

    Semiconductor device
    2.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US09111934B2

    公开(公告)日:2015-08-18

    申请号:US13137032

    申请日:2011-07-15

    IPC分类号: H01L23/52 H01L23/525

    摘要: A semiconductor device includes an electric fuse and first and second large area wirings for applying a voltage to the electric fuse. The electric fuse includes a fuse unit which includes an upper-layer fuse wiring, a lower-layer fuse wiring, and a via connecting the upper-layer fuse wiring and the lower-layer fuse wiring, an upper-layer lead-out wiring which connects the upper-layer fuse wiring and the first large area wiring and has a bent pattern, and a lower-layer lead-out wiring which connects the lower-layer fuse wiring and the second large area wiring and has a bent pattern.

    摘要翻译: 半导体器件包括电熔丝和用于向电熔丝施加电压的第一和第二大面积布线。 电熔丝包括熔丝单元,其包括上层熔丝布线,下层熔丝布线和连接上层熔丝布线和下层熔丝布线的布线,上层引出布线 连接上层熔丝布线和第一大面积布线并具有弯曲图案,以及连接下层熔丝布线和第二大面积布线并具有弯曲图案的下层引出布线。

    Semiconductor device
    4.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US08080861B2

    公开(公告)日:2011-12-20

    申请号:US12588202

    申请日:2009-10-07

    IPC分类号: H01L23/52

    摘要: A semiconductor device includes an electric fuse and first and second large area wirings for applying a voltage to the electric fuse. The electric fuse includes a fuse unit which includes an upper-layer fuse wiring, a lower-layer fuse wiring, and a via connecting the upper-layer fuse wiring and the lower-layer fuse wiring, an upper-layer lead-out wiring which connects the upper-layer fuse wiring and the first large area wiring and has a bent pattern, and a lower-layer lead-out wiring which connects the lower-layer fuse wiring and the second large area wiring and has a bent pattern.

    摘要翻译: 半导体器件包括电熔丝和用于向电熔丝施加电压的第一和第二大面积布线。 电熔丝包括熔丝单元,其包括上层熔丝布线,下层熔丝布线和连接上层熔丝布线和下层熔丝布线的布线,上层引出布线 连接上层熔丝布线和第一大面积布线并具有弯曲图案,以及连接下层熔丝布线和第二大面积布线并具有弯曲图案的下层引出布线。

    Method of manufacturing semiconductor device and semiconductor device
    5.
    发明授权
    Method of manufacturing semiconductor device and semiconductor device 失效
    制造半导体器件和半导体器件的方法

    公开(公告)号:US08213209B2

    公开(公告)日:2012-07-03

    申请号:US12826100

    申请日:2010-06-29

    摘要: In a method of manufacturing a semiconductor device, element properties of an element property extraction pattern formed on a semiconductor wafer is extracted as element properties of a current control element corresponding to the element property extraction pattern. A supply energy to the current control element is set which is formed between nodes on the semiconductor wafer, based on the extracted element properties. The set supply energy is supplied to the current control element to irreversible control an electrical connection between the nodes through the device breakdown by the current control element.

    摘要翻译: 在制造半导体器件的方法中,提取形成在半导体晶片上的元素特性提取图案的元素性质作为与元素特性提取图案对应的电流控制元件的元素特性。 基于所提取的元件特性,设置在半导体晶片上的节点之间形成对电流控制元件的供给能量。 设定的供给能量被提供给电流控制元件,以通过由电流控制元件击穿的装置不可逆地控制节点之间的电连接。

    Semiconductor device
    6.
    发明申请
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US20100096724A1

    公开(公告)日:2010-04-22

    申请号:US12588223

    申请日:2009-10-08

    IPC分类号: H01L23/525

    摘要: A semiconductor device (200) includes an electric fuse (100) including: an upper layer fuse interconnect (112) formed on a substrate (not shown); a lower layer fuse interconnect (122); and a via (130) which is connected to one end of the upper layer fuse interconnect (112) and connects the upper layer fuse interconnect (112) and the lower layer fuse interconnect (122). The upper fuse interconnect (112) includes a width varying region (118) having a small interconnect width on a side of the one end.

    摘要翻译: 半导体器件(200)包括电熔丝(100),包括:形成在衬底(未示出)上的上层熔丝互连(112); 下层熔丝互连(122); 以及连接到上层熔丝互连(112)的一端并连接上层熔丝互连(112)和下层熔丝互连(122)的通孔(130)。 上部熔丝互连(112)包括在一端的一侧具有小互连宽度的宽度变化区(118)。

    Semiconductor device with electric fuse having interconnects and via
    8.
    发明授权
    Semiconductor device with electric fuse having interconnects and via 有权
    具有电熔丝的半导体器件具有互连和通孔

    公开(公告)号:US08274134B2

    公开(公告)日:2012-09-25

    申请号:US12588223

    申请日:2009-10-08

    IPC分类号: H01L23/525

    摘要: A semiconductor device (200) includes an electric fuse (100) including: an upper layer fuse interconnect (112) formed on a substrate (not shown); a lower layer fuse interconnect (122); and a via (130) which is connected to one end of the upper layer fuse interconnect (112) and connects the upper layer fuse interconnect (112) and the lower layer fuse interconnect (122). The upper fuse interconnect (112) includes a width varying region (118) having a small interconnect width on a side of the one end.

    摘要翻译: 半导体器件(200)包括电熔丝(100),包括:形成在衬底(未示出)上的上层熔丝互连(112); 下层熔丝互连(122); 以及连接到上层熔丝互连(112)的一端并连接上层熔丝互连(112)和下层熔丝互连(122)的通孔(130)。 上部熔丝互连(112)包括在一端的一侧具有小互连宽度的宽度变化区(118)。

    Semiconductor device
    10.
    发明授权
    Semiconductor device 有权
    半导体器件

    公开(公告)号:US08354731B2

    公开(公告)日:2013-01-15

    申请号:US12461160

    申请日:2009-08-03

    IPC分类号: H01L29/00

    摘要: The semiconductor device includes: a substrate; an electric fuse that includes a lower-layer wiring formed on the substrate, a first via provided on the lower-layer wiring and connected to the lower-layer wiring, and an upper-layer wiring provided on the first via and connected to the first via, a flowing-out portion of a conductive material constituting the electric fuse being formed in a cut-off state of the electric fuse; and a heat diffusion portion that includes a heat diffusion wiring that is formed in the same layer as one of the upper-layer wiring and the lower-layer wiring and is placed on a side of the one of the upper-layer wiring and the lower-layer wiring, the heat diffusion portion being electrically connected to the one of the upper-layer wiring and the lower-layer wiring.

    摘要翻译: 半导体器件包括:衬底; 包括形成在所述基板上的下层布线的电熔丝,设置在所述下层布线上并连接到所述下层布线的第一通孔,以及设置在所述第一通孔上并连接到所述第一通孔的第一通孔 通过构成电熔丝的导电材料的流出部分形成在电熔丝的切断状态; 以及热扩散部,其包括形成在与上层布线和下层布线之一相同的层中的热扩散布线,并且布置在上层布线和下层布线中的一个布线的一侧 所述热扩散部分电连接到所述上层布线和所述下层布线之一。