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1.发明申请Piezoelectric element, piezoelectric actuator, piezoelectric pump, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 审中-公开压电元件，压电致动器，压电泵，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US20050275696A1
公开(公告)日：2005-12-15
申请号：US11136311
申请日：2005-05-24
申请人： Hiromu Miyazawa , Motohisa Noguchi , Eiju Hirai , Takeshi Kijima
发明人： Hiromu Miyazawa , Motohisa Noguchi , Eiju Hirai , Takeshi Kijima
IPC分类号： B41J2/16 , B41J2/04 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , C04B35/46 , C04B35/472 , C04B35/49 , C04B35/493 , F04B9/00 , F04B43/04 , F04B53/00 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/311 , H01L41/319 , H01L41/39 , H03B5/30 , H03H9/17 , H03H9/25
CPC分类号： H01L41/0815 , B41J2/14233 , B41J2002/14258 , F04B43/046 , H01L41/1875 , H01L41/318 , H01L41/319
摘要： A piezoelectric element in accordance with the present invention includes a base substrate, and a piezoelectric film formed above the base substrate, wherein the piezoelectric film is composed of a plurality of layers, at least two layers among the plurality of layers are composed of different relaxor materials, and the relaxor materials have a perovskite structure.
摘要翻译： 根据本发明的压电元件包括基底基板和形成在基底基板上的压电膜，其中压电膜由多个层组成，多个层中的至少两个层由不同的弛豫元件组成 材料，弛豫材料具有钙钛矿结构。
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2.发明申请Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator and electronic apparatus 有权压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US20050253903A1
公开(公告)日：2005-11-17
申请号：US11130342
申请日：2005-05-16
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , C04B35/49 , C04B35/491 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/319 , H01L41/39 , H02N2/00 , H03B5/30 , H03H3/02 , H03H3/08 , H03H9/02 , H03H9/05 , H03H9/17
CPC分类号： H01L41/1875 , B41J2/14233 , H01L41/0815 , H01L41/1876 , H01L41/318 , H03H3/02 , H03H3/08 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, and a piezoelectric film formed above the buffer layer, wherein the buffer layer is formed of Pb ((Zr1-xTix)1-yNby)O3 of a perovskite type, where x is in a range of 0≦x≦1, and y is in a range of 0.05≦y≦0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.
摘要翻译： 压电元件包括基底基板，形成在基底基板上的缓冲层，以及形成在缓冲层之上的压电膜，其中缓冲层由Pb（（Zr 1-x Ti） 其中x在0的范围内的钙钛矿型，其中x在0的范围内 <= x <= 1，y在0.05 <= y <0.3的范围内，并且压电膜由钙钛矿型的弛豫材料形成。
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3.发明授权Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator and electronic apparatus 有权压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US07291959B2
公开(公告)日：2007-11-06
申请号：US11130342
申请日：2005-05-16
IPC分类号： H01L41/187 , H01L41/09
CPC分类号： H01L41/1875 , B41J2/14233 , H01L41/0815 , H01L41/1876 , H01L41/318 , H03H3/02 , H03H3/08 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, and a piezoelectric film formed above the buffer layer, wherein the buffer layer is formed of Pb ((Zr1-xTix)1-yNby)O3 of a perovskite type, where x is in a range of 0≦x≦1, and y is in a range of 0.05≦y≦0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.
摘要翻译： 压电元件包括基底基板，形成在基底基板上的缓冲层，以及形成在缓冲层之上的压电膜，其中缓冲层由Pb（（Zr 1-x Ti） 其中x在0的范围内的钙钛矿型，其中x在0的范围内 <= x <= 1，y在0.05 <= y <0.3的范围内，并且压电膜由钙钛矿型的弛豫材料形成。
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4.发明授权Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator and electronic apparatus 有权压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US07287840B2
公开(公告)日：2007-10-30
申请号：US11130348
申请日：2005-05-16
CPC分类号： H01L41/1875 , B41J2/14233 , B41J2202/03 , H01L41/0815 , H01L41/318
摘要： A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, a piezoelectric film formed above the buffer layer, and a barrier layer formed above the piezoelectric film, wherein the buffer layer and the barrier layer are formed of Pb((Zr1-xTix)1-yNby)O3 of a perovskite type, where x is in a range of 0≦x≦1, and y is in a range of 0.05≦y≦0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.
摘要翻译： 压电元件包括基底基板，形成在基底基板上的缓冲层，形成在缓冲层之上的压电薄膜和形成在压电薄膜上的阻挡层，其中缓冲层和阻挡层由Pb（（ Zr 1-x Ti x 1）y-1 x Y y O 3） 的钙钛矿型，其中x在0 <= x <= 1的范围内，y在0.05 <= y <0.3的范围内，并且压电膜由钙钛矿型的弛豫材料形成。
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5.发明申请Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator and electronic apparatus 有权压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US20050253904A1
公开(公告)日：2005-11-17
申请号：US11130348
申请日：2005-05-16
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , C04B35/49 , C04B35/491 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/311 , H01L41/319 , H02N2/00 , H03B5/30 , H03H9/17 , H03H9/25 , H03H9/64
CPC分类号： H01L41/1875 , B41J2/14233 , B41J2202/03 , H01L41/0815 , H01L41/318
摘要： A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, a piezoelectric film formed above the buffer layer, and a barrier layer formed above the piezoelectric film, wherein the buffer layer and the barrier layer are formed of Pb((Zr1-xTix)1-yNby)O3 of a perovskite type, where x is in a range of 0≦x≦1, and y is in a range of 0.05≦y≦0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.
摘要翻译： 压电元件包括基底基板，形成在基底基板上的缓冲层，形成在缓冲层之上的压电薄膜和形成在压电薄膜上的阻挡层，其中缓冲层和阻挡层由Pb（（ Zr 1-x Ti x 1）y-1 x Y y O 3） 的钙钛矿型，其中x在0 <= x <= 1的范围内，y在0.05 <= y <0.3的范围内，并且压电膜由钙钛矿型的弛豫材料形成。
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6.发明授权Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US07350904B2
公开(公告)日：2008-04-01
申请号：US11043029
申请日：2005-01-25
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： B41J2/45
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译： 提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。 种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。 压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。
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7.发明申请Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US20050185026A1
公开(公告)日：2005-08-25
申请号：US11043029
申请日：2005-01-25
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/311 , H01L41/319 , H01L41/39 , H02N2/00 , H03B5/30 , H03H3/02 , H03H3/08 , H03H9/02 , H03H9/05 , H03H9/17 , H03H9/25 , H03H9/64 , B41J29/38
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译： 提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。 种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。 压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。
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8.发明授权Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US07766464B2
公开(公告)日：2010-08-03
申请号：US12070737
申请日：2008-02-21
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译： 提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。 种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。 压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。
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9.发明申请Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备公开(公告)号：US20080157629A1
公开(公告)日：2008-07-03
申请号：US12070737
申请日：2008-02-21
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： H01L41/187 , H01L41/08
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译： 提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。 种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。 压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。
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公开(公告)号：US20050128681A1
公开(公告)日：2005-06-16
申请号：US11004591
申请日：2004-12-03
IPC分类号： H01L27/04 , H01G4/06 , H01L21/02 , H01L21/822
CPC分类号： H01L28/55
摘要： A capacitor is provided having a structure in which an insulation film is interposed between a first electrode and a second electrode. The insulation film includes SrTiO3 as a main component, and at least one of Si and Ge added thereto.
摘要翻译： 提供一种电容器，其具有绝缘膜插入在第一电极和第二电极之间的结构。 绝缘膜包括SrTiO 3 3主要成分，并添加至少一种Si和Ge。
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