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    Magnetic sensor and manufacturing method therefor
    1.
    发明授权
    Magnetic sensor and manufacturing method therefor 有权
    磁传感器及其制造方法

    公开(公告)号：US09054028B2

    公开(公告)日：2015-06-09

    申请号：US13459644

    申请日：2012-04-30

    申请人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masayoshi Omura

    发明人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masayoshi Omura

    IPC分类号： G01R33/09 ,  H01L21/00 ,  H01L27/22 ,  B82Y25/00 ,  H01L43/12

    CPC分类号： H01L27/22 ,  B82Y25/00 ,  G01R33/09 ,  G01R33/093 ,  H01L43/12 ,  Y10T29/4902 ,  Y10T29/49075

    摘要： A magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming X-axis and Y-axis sensors are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels in the thick film. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.

    摘要翻译： 一种磁传感器，用于检测在单个半导体衬底上形成多个巨磁电阻元件的三个轴向的磁场强度。 在半导体衬底上形成厚膜; 在其平面上形成形成X轴和Y轴传感器的巨磁阻元件; 并且使用厚膜中的沟道的斜面形成形成Z轴传感器的巨磁阻元件。 通道的每个斜面都可以由第一斜面和第二斜面构成，从而在具有较大倾斜角的第二斜面上形成磁敏元件。 为了优化相对于每个通道的斜率形状和倾斜度，可以形成与形成巨磁阻元件没有直接关系的虚拟斜率。

    Magnetic Sensor and Manufacturing Method Therefor
    2.
    发明申请
    Magnetic Sensor and Manufacturing Method Therefor 有权
    磁传感器及其制造方法

    公开(公告)号：US20080169807A1

    公开(公告)日：2008-07-17

    申请号：US10584666

    申请日：2006-03-15

    申请人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masayoshi Omura

    发明人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masayoshi Omura

    IPC分类号： G01R33/02 ,  H01F7/06

    CPC分类号： H01L27/22 ,  B82Y25/00 ,  G01R33/09 ,  G01R33/093 ,  H01L43/12 ,  Y10T29/4902 ,  Y10T29/49075

    摘要： There is provided a small-size magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming an X-axis sensor and a Y-axis sensor are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels formed in the thick film. Regarding the channel formation, it is possible to use the reactive ion etching and high-density plasma CVD methods. In addition, an insulating film is formed between the thick film and passivation film and is used as an etching stopper. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.

    摘要翻译： 提供了一种用于检测三个轴向上的磁场强度的小型磁传感器，其中在单个半导体衬底上形成多个巨磁电阻元件。 在半导体衬底上形成厚膜; 在其平面上形成形成X轴传感器和Y轴传感器的巨磁阻元件; 并且使用形成在厚膜中的通道的斜面形成形成Z轴传感器的巨磁阻元件。 关于通道形成，可以使用反应离子蚀刻和高密度等离子体CVD方法。 此外，在厚膜和钝化膜之间形成绝缘膜，并用作蚀刻停止层。 通道的每个斜面可以由第一斜面和第二斜面构成，使得在具有较大倾斜角的第二斜面上形成磁敏元件。 为了优化相对于每个通道的斜率形状和倾斜度，可以形成与形成巨磁阻元件没有直接关系的虚拟斜率。

    THREE-AXIS MAGNETIC SENSOR AND METHOD FOR MANUFACTURING THE SAME
    3.
    发明申请
    THREE-AXIS MAGNETIC SENSOR AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    三轴磁传感器及其制造方法

    公开(公告)号：US20120268113A1

    公开(公告)日：2012-10-25

    申请号：US13517526

    申请日：2012-06-13

    申请人： Hideki Sato ,  Masayoshi Omura ,  Hiroshi Naito ,  Toshiyuki Oohashi ,  Yukio Wakui ,  Chihiro Osuga

    发明人： Hideki Sato ,  Masayoshi Omura ,  Hiroshi Naito ,  Toshiyuki Oohashi ,  Yukio Wakui ,  Chihiro Osuga

    IPC分类号： G01R33/09 ,  G01R3/00

    CPC分类号： H01L27/22 ,  B82Y25/00 ,  G01R33/09 ,  G01R33/093 ,  Y10T29/49002 ,  Y10T29/4902

    摘要： In a three-axis magnetic sensor, a plurality of magnetoresistive effect element bars are connected in series by means of bias magnets formed on a flat surface parallel to the flat surface of the substrate to constitute magnetoresistive effect elements. The sensitivity direction of magnetization is a direction perpendicular to the longitudinal direction of each of the magnetoresistive effect element bars. Magnetoresistive effect elements forming X-axis and Y-axis sensors have magnetization directions that are orthogonal to each other. Magnetoresistive effect elements of the Z-axis sensor are formed on a tilted surface substrate in such a way that the magnetization direction is inside the tilted surface. The sensitivity direction of the Z-axis sensor is perpendicular to the longitudinal direction of the magnetoresistive effect element bar.

    摘要翻译： 在三轴磁传感器中，多个磁阻效应元件棒通过形成在平行于基板的平坦表面的平坦表面上的偏置磁铁串联连接，以构成磁阻效应元件。 磁化的灵敏度方向是垂直于每个磁阻效应元件棒的纵向的方向。 形成X轴和Y轴传感器的磁阻效应元件具有彼此正交的磁化方向。 Z轴传感器的磁阻效应元件形成在倾斜表面基板上，使得磁化方向在倾斜表面内。 Z轴传感器的灵敏度方向垂直于磁阻效应元件棒的纵向方向。

    Magnetic sensor and manufacturing method therefor
    4.
    发明授权
    Magnetic sensor and manufacturing method therefor 有权
    磁传感器及其制造方法

    公开(公告)号：US08178361B2

    公开(公告)日：2012-05-15

    申请号：US10584666

    申请日：2006-03-15

    申请人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masayoshi Omura

    发明人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masayoshi Omura

    IPC分类号： H01L21/00 ,  G01R33/09

    CPC分类号： H01L27/22 ,  B82Y25/00 ,  G01R33/09 ,  G01R33/093 ,  H01L43/12 ,  Y10T29/4902 ,  Y10T29/49075

    摘要： There is provided a small-size magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming an X-axis sensor and a Y-axis sensor are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels formed in the thick film. Regarding the channel formation, it is possible to use the reactive ion etching and high-density plasma CVD methods. In addition, an insulating film is formed between the thick film and passivation film and is used as an etching stopper. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.

    摘要翻译： 提供了一种用于检测三个轴向上的磁场强度的小型磁传感器，其中在单个半导体衬底上形成多个巨磁电阻元件。 在半导体衬底上形成厚膜; 在其平面上形成形成X轴传感器和Y轴传感器的巨磁阻元件; 并且使用形成在厚膜中的通道的斜面形成形成Z轴传感器的巨磁阻元件。 关于通道形成，可以使用反应离子蚀刻和高密度等离子体CVD方法。 此外，在厚膜和钝化膜之间形成绝缘膜，并用作蚀刻停止层。 通道的每个斜面可以由第一斜面和第二斜面构成，使得在具有较大倾斜角的第二斜面上形成磁敏元件。 为了优化相对于每个通道的斜率形状和倾斜度，可以形成与形成巨磁阻元件没有直接关系的虚拟斜率。

    Three-Axis Magnetic Sensor and Method for Manufacturing the Same
    5.
    发明申请
    Three-Axis Magnetic Sensor and Method for Manufacturing the Same 审中-公开
    三轴磁传感器及其制造方法

    公开(公告)号：US20090027048A1

    公开(公告)日：2009-01-29

    申请号：US11908549

    申请日：2006-03-17

    申请人： Hideki Sato ,  Masayoshi Omura ,  Hiroshi Naito ,  Toshiyuki Oohashi ,  Yukio Wakui ,  Chihiro Osuga

    发明人： Hideki Sato ,  Masayoshi Omura ,  Hiroshi Naito ,  Toshiyuki Oohashi ,  Yukio Wakui ,  Chihiro Osuga

    IPC分类号： G01R33/09 ,  G01R3/00

    CPC分类号： H01L27/22 ,  B82Y25/00 ,  G01R33/09 ,  G01R33/093 ,  Y10T29/49002 ,  Y10T29/4902

    摘要： In the three-axis magnetic sensor of the present invention, a plurality of magnetoresistive effect element bars are connected in series by means of bias magnets to constitute magnetoresistive effect elements, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed on a flat surface parallel to the flat surface of the substrate. The sensitivity direction of magnetization is a direction vertical to the longitudinal direction of each of the magnetoresistive effect element bars, and magnetoresistive effect elements of the X-axis sensor and those of the Y-axis sensor are formed in such a way that the magnetization directions are orthogonal to each other. Further, magnetoresistive effect elements of the Z-axis sensor are formed on a tilted surface of the projection projected from the flat surface of the substrate in such a way that the magnetization direction is inside the tilted surface. The Z-axis sensor is provided in such a way that the sensitivity direction is vertical to the longitudinal direction of the magnetoresistive effect element bar.

    摘要翻译： 在本发明的三轴磁传感器中，多个磁阻效应元件棒通过偏置磁铁串联连接，构成磁阻效应元件，X轴传感器和Y轴传感器的磁阻效应元件， 轴传感器形成在平行于基板的平坦表面的平坦表面上。 磁化的灵敏度方向是垂直于每个磁阻效应元件棒的纵向的方向，并且X轴传感器和Y轴传感器的磁阻效应元件以这样的方式形成，使得磁化方向 彼此正交。 此外，Z轴传感器的磁阻效应元件形成在从基板的平坦表面突出的突起的倾斜表面上，使得磁化方向在倾斜表面内。 Z轴传感器以灵敏度方向垂直于磁阻效应元件棒的纵向的方式设置。

    Magnetic Sensor and Manfacturing Method Therefor
    6.
    发明申请
    Magnetic Sensor and Manfacturing Method Therefor 审中-公开
    磁传感器及其制造方法

    公开(公告)号：US20120272514A1

    公开(公告)日：2012-11-01

    申请号：US13459644

    申请日：2012-04-30

    申请人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masaysoshi Omura

    发明人： Hiroshi Naito ,  Hideki Sato ,  Yukio Wakui ,  Masaysoshi Omura

    IPC分类号： H01F7/06

    CPC分类号： H01L27/22 ,  B82Y25/00 ,  G01R33/09 ,  G01R33/093 ,  H01L43/12 ,  Y10T29/4902 ,  Y10T29/49075

    摘要： A magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming X-axis and Y-axis sensors are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels in the thick film. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.

    摘要翻译： 一种磁传感器，用于检测在单个半导体衬底上形成多个巨磁电阻元件的三个轴向的磁场强度。 在半导体衬底上形成厚膜; 在其平面上形成形成X轴和Y轴传感器的巨磁阻元件; 并且使用厚膜中的沟道的斜面形成形成Z轴传感器的巨磁阻元件。 通道的每个斜面都可以由第一斜面和第二斜面构成，从而在具有较大倾斜角的第二斜面上形成磁敏元件。 为了优化相对于每个通道的斜率形状和倾斜度，可以形成与形成巨磁阻元件没有直接关系的虚拟斜率。

    Magnetic sensor and manufacturing method therefor
    7.
    发明授权
    Magnetic sensor and manufacturing method therefor 有权
    磁传感器及其制造方法

    公开(公告)号：US07687284B2

    公开(公告)日：2010-03-30

    申请号：US11328255

    申请日：2006-01-10

    申请人： Hiroshi Naito ,  Hideki Sato ,  Hiroaki Fukami ,  Syuusei Takami

    发明人： Hiroshi Naito ,  Hideki Sato ,  Hiroaki Fukami ,  Syuusei Takami

    IPC分类号： H01L21/00 ,  G01R33/09

    CPC分类号： H01L43/12 ,  G01R33/0206 ,  H01L27/22

    摘要： A small-size magnetic sensor comprises three axial sensors each configured using plural giant magnetoresistive elements, wherein an X-axis sensor and a Y-axis sensor are arranged on the planar surface of an embedded layer of a substrate, and giant magnetoresistive elements forming a Z-axis sensor are formed on slopes of projections, which are formed by etching the embedded layer. It is possible to form an elongated projection on a substrate by way of the high-density plasma CVD method or by way of plasma etching and microwave etching, so that giant magnetoresistive elements are formed on the slopes of the elongated projection.

    摘要翻译： 一种小型磁传感器包括三个轴向传感器，每个轴向传感器使用多个巨磁阻元件构成，其中X轴传感器和Y轴传感器布置在基板的嵌入层的平面上，并且巨磁阻元件形成 Z轴传感器形成在通过蚀刻嵌入层形成的突起的斜面上。 可以通过高密度等离子体CVD方法或通过等离子体蚀刻和微波蚀刻在衬底上形成细长突起，从而在细长突起的斜面上形成巨磁电阻元件。