公开(公告)号：US20110089137A1

公开(公告)日：2011-04-21

申请号：US12902721

申请日：2010-10-12

申请人： Hiroshi TANAKA ,  Teruomi MINAMI ,  Yosuke KAWABUCHI ,  Norihiro ITO ,  Fumihiro KAMIMURA ,  Takashi YABUTA ,  Kazuki KOSAI ,  Takeshi UNO ,  Kenji SEKIGUCHI ,  Yasushi FUJII

发明人： Hiroshi TANAKA ,  Teruomi MINAMI ,  Yosuke KAWABUCHI ,  Norihiro ITO ,  Fumihiro KAMIMURA ,  Takashi YABUTA ,  Kazuki KOSAI ,  Takeshi UNO ,  Kenji SEKIGUCHI ,  Yasushi FUJII

IPC分类号： H05K3/00

CPC分类号： H01L21/02057 ,  H01L21/67051

摘要： Provided are a substrate liquid processing apparatus, a substrate liquid processing method, and a computer readable storage medium having a substrate liquid processing program stored therein that can prevent the occurrence of the electrostatic breakdown caused by the discharge of electric charges in a substrate. The substrate liquid processing apparatus processes a circuit-forming surface of the substrate with a chemical liquid. Furthermore, prior to processing the substrate with the chemical liquid, the substrate liquid processing apparatus performs an anti-static process for an surface opposite to the circuit-forming surface of the substrate by an anti-static liquid, thereby emitting the electric charges on the substrate.

摘要翻译： 提供一种基板液体处理装置，基板液体处理方法以及其中存储有基板液体处理程序的计算机可读存储介质，其可以防止由基板中的电荷放电引起的静电破坏的发生。 基板液体处理装置用化学液体处理基板的电路形成表面。 此外，在用化学液体处理基板之前，基板液体处理装置通过防静电液体对与基板的电路形成面相反的表面进行防静电处理，从而将电荷 基质。

公开(公告)号：US20110050111A1

公开(公告)日：2011-03-03

申请号：US12868776

申请日：2010-08-26

申请人： Hiroshi TANAKA ,  Mitsuhisa Ohnishi ,  Akihisa Yamada ,  Takayoshi Tanaka ,  Manabu Onozaki

发明人： Hiroshi TANAKA ,  Mitsuhisa Ohnishi ,  Akihisa Yamada ,  Takayoshi Tanaka ,  Manabu Onozaki

IPC分类号： H05B37/02

CPC分类号： G02F1/133603 ,  G02F2001/133612 ,  G09G3/3406 ,  G09G2300/0426 ,  G09G2320/02 ,  G09G2320/064

摘要： A light source device which is used as the backlight device and does not generate sound is provided. One or more flat substrates each having a light emitting element on its surface side are supported by a chassis having a conductive flat plate surface so that back surfaces of the substrates are opposed to the flat plate surface. The substrate comprises first wiring conductive thin films on a surface side of an insulation substrate, and one or more second radiating or wiring conductive thin films on a back surface side of the insulation substrate. Two terminals of the light emitting element are connected to the two adjacent first conductive thin films. A potential of at least one of the second conductive thin films is fixed to have a constant potential difference or preferably fixed to the same potential with respect to that of the flat plate surface of the chassis.

摘要翻译： 提供用作背光装置并且不产生声音的光源装置。 在其表面侧具有发光元件的一个或多个平面基板由具有导电平板表面的底架支撑，使得基板的背面与平板表面相对。 基板包括在绝缘基板的表面侧上的第一布线导电薄膜和在绝缘基板的背面侧上的一个或多个第二辐射或布线导电薄膜。 发光元件的两个端子连接到两个相邻的第一导电薄膜。 第二导电薄膜中的至少一个的电位被固定为具有恒定的电位差，或者优选地相对于底盘的平板表面固定在相同的电位上。

公开(公告)号：US20100234176A1

公开(公告)日：2010-09-16

申请号：US12695593

申请日：2010-01-28

申请人： Hiroshi TANAKA ,  Teruaki Naito

发明人： Hiroshi TANAKA ,  Teruaki Naito

IPC分类号： F16H61/38

CPC分类号： F16H61/143 ,  F16H61/0021 ,  F16H2061/0037 ,  Y10T477/631 ,  Y10T477/63385

摘要： A hydraulic control device for an automatic transmission that prevents the introduction of foreign materials from a starter into the lubricant path and also reduces duct resistance at a non-lockup time when the oil temperature is low. Oil is provided to an oil cooler for cooling the oil, and is also provided to the automatic transmission for lubricating the transmission. The device includes a switching valve that is switched between a lockup state and a non-lockup state of the clutch. In the lockup state, the switching valve is switched to a first position at which a first input pressure is supplied to the starter and a second input pressure is supplied through the oil cooler to the transmission. In the non-lockup state, the switching valve is switched to a second position at which the first input pressure is discharged through the starter and the oil cooler to an oil pan, and the second input pressure is supplied to the transmission.

摘要翻译： 一种用于自动变速器的液压控制装置，其防止异种材料从起动器引入润滑剂路径，并且还在油温低时在非锁定时间降低管道阻力。 油被提供给用于冷却油的油冷却器，并且还被提供给用于润滑变速器的自动变速器。 该装置包括在离合器的锁定状态和非锁定状态之间切换的切换阀。 在锁止状态下，切换阀切换到第一位置，在该第一位置向起动器提供第一输入压力，并通过油冷却器向变速器供给第二输入压力。 在非锁定状态下，切换阀切换到第二位置，在第二位置，第一输入压力通过起动器和油冷却器排出到油盘，并且第二输入压力被提供给变速器。

公开(公告)号：US20090179007A1

公开(公告)日：2009-07-16

申请号：US12403286

申请日：2009-03-12

申请人： Kotaro TSURUSAKI ,  Hiroshi TANAKA ,  Takayuki TOSHIMA ,  Kazuyoshi ESHIMA

发明人： Kotaro TSURUSAKI ,  Hiroshi TANAKA ,  Takayuki TOSHIMA ,  Kazuyoshi ESHIMA

IPC分类号： B44C1/22

CPC分类号： H01L21/67086 ,  H01L21/6708

摘要： A plurality of process liquid supply nozzles 10 are arranged at different levels on right and left sides of a semiconductor wafer W in a process bath 1. A discharge port of each of the nozzles 10 is directed toward the semiconductor wafer W. In accordance with a predetermined procedure, a process liquid is discharged from one or more nozzles 10 selected from the plurality of nozzles 10. In order to perform a chemical liquid treatment, a chemical liquid is discharged from the lowermost nozzle 10, for example, and thereafter, the nozzles 10 on the upper levels sequentially discharge the chemical liquid. In order to perform a rinse liquid treatment by replacing the chemical liquid in the process bath 1 with a rinse liquid, the rinse liquid is discharged from the lowermost nozzle 10 at first, for example. Thereafter, the rinse liquid is discharged from all the nozzles 10. In this manner, efficiency and uniformity in the liquid treatment can be improved.

摘要翻译： 多个处理液供给喷嘴10在处理槽1中的半导体晶片W的左右两侧以不同的水平配置。各喷嘴10的排出口朝向半导体晶片W.按照 从多个喷嘴10中选择的一个以上的喷嘴10排出处理液。为了进行药液处理，例如从最下面的喷嘴10喷出化学液，之后，喷嘴 10上方依次排出化学液体。 为了通过用冲洗液更换处理槽1中的化学液体进行冲洗液处理，首先例如从最下面的喷嘴10排出冲洗液。 此后，冲洗液体从所有喷嘴10排出。这样可以提高液体处理的效率和均匀性。

公开(公告)号：US20150168848A1

公开(公告)日：2015-06-18

申请号：US14629282

申请日：2015-02-23

申请人： Hiroshi TANAKA ,  Akihiko KUROSU ,  Hiroyuki MASUDA ,  Hideyuki OCHIAI ,  Osamu WAKABAYASHI ,  Masato MORIYA

发明人： Hiroshi TANAKA ,  Akihiko KUROSU ,  Hiroyuki MASUDA ,  Hideyuki OCHIAI ,  Osamu WAKABAYASHI ,  Masato MORIYA

IPC分类号： G03F7/20 ,  H01L21/268 ,  H01L21/67 ,  H01L21/66

CPC分类号： G03F7/70483 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70358 ,  H01L21/268 ,  H01L21/67115 ,  H01L21/67253 ,  H01L22/10 ,  H01L22/26

摘要： A light source apparatus according to an embodiment may be used for an exposure apparatus which exposes a plurality of wafers by repeating a wafer exposure for exposing a total exposure area of each wafer. The wafer exposure may include a sequential execution of scanning exposures in which each divided area defined by dividing the total exposure area of each wafer is scanned by pulsed light. The apparatus may comprise: a light source controller configured to execute a control for outputting the pulsed light based on a luminescence trigger signal received from the exposure apparatus; a detector configured to detect a characteristic of the pulsed light; and a data collection processor configured to collect at least a piece of data in data included in a pulse light data group related to the pulsed light detected by the detector and a control data group related to the control, and execute a mapping process of mapping the collected data by at least one of scanning exposure basis and wafer exposure basis.

摘要翻译： 根据实施例的光源装置可以用于通过重复用于暴露每个晶片的总曝光区域的晶片曝光而暴露多个晶片的曝光装置。 晶片曝光可以包括扫描曝光的顺序执行，其中通过用脉冲光扫描每个晶片的总曝光面积所限定的每个划分区域。 该装置可以包括：光源控制器，被配置为基于从曝光装置接收的发光触发信号执行用于输出脉冲光的控制; 检测器，被配置为检测所述脉冲光的特性; 以及数据收集处理器，被配置为收集与由所述检测器检测到的脉冲光有关的脉冲光数据组中包含的数据中的至少一条数据以及与所述控制相关的控制数据组，并执行映射处理 通过扫描曝光基础和晶片曝光基础中的至少一个来收集数据。

公开(公告)号：US20120236885A1

公开(公告)日：2012-09-20

申请号：US13401734

申请日：2012-02-21

申请人： Hidenori WATANABE ,  Hiroshi TANAKA ,  Osamu WAKABAYASHI

发明人： Hidenori WATANABE ,  Hiroshi TANAKA ,  Osamu WAKABAYASHI

IPC分类号： H01S3/13

CPC分类号： H01S3/03 ,  G03F7/70025 ,  H01S3/036 ,  H01S3/134 ,  H01S3/2316 ,  H01S3/2366

摘要： A laser device for an exposure apparatus may include: a MOPA-type or MOPO-type laser device including a seed laser and at least one gas discharge-pumped amplifier stage that receives output light from the seed laser as an input, amplifies the light, and outputs the amplified light; and at least one of a laser gas control device that at least changes the total pressure of a laser gas in said amplifier stage in accordance with requested energy and a laser power source control device that at least changes pump intensity of discharge electrodes in said amplifier stage in accordance with said requested energy, in a case where the energy of laser output light from said laser device is to be changed discontinuously in response to a request from an exposure apparatus,

摘要翻译： 用于曝光装置的激光装置可以包括：MOPA型或MOPO型激光装置，其包括种子激光器和至少一个气体放电泵浦放大器级，其接收来自种子激光器的输出光作为输入，放大光， 并输出放大的光; 以及激光气体控制装置中的至少一个，所述激光气体控制装置至少根据所要求的能量来改变所述放大器级中的激光气体的总压力，激光电源控制装置至少改变放大器级中的放电电极的泵浦强度 根据所述要求的能量，在来自所述激光装置的激光输出光的能量响应于来自曝光装置的请求而不连续地改变的情况下，

公开(公告)号：US20110058076A1

公开(公告)日：2011-03-10

申请号：US12822757

申请日：2010-06-24

申请人： Hiroshi TANAKA

发明人： Hiroshi TANAKA

IPC分类号： H04N5/335 ,  H01L31/18

CPC分类号： H01L27/14818 ,  H01L27/14627 ,  H01L27/14685 ,  H01L27/14843

摘要： A solid state imaging device includes: a light receiving portion and a transfer channel formed in a semiconductor substrate; a transfer electrode formed on the transfer channel; an anti-reflection film formed on the light receiving portion; and a light shielding film which covers the transfer electrode, and is in contact with a side surface of the anti-reflection film. An upper surface of the light shielding film at a contact between the light shielding film and a side surface of the anti-reflection film is located below an upper surface of the light shielding film on the transfer electrode.

摘要翻译： 固态成像装置包括：形成在半导体衬底中的光接收部分和传输沟道; 形成在所述转移通道上的转移电极; 形成在所述光接收部分上的防反射膜; 以及覆盖转印电极并与抗反射膜的侧面接触的遮光膜。 遮光膜与防反射膜的侧面的接触处的遮光膜的上表面位于转印电极上的遮光膜的上表面的下方。

公开(公告)号：US20090125509A1

公开(公告)日：2009-05-14

申请号：US12265753

申请日：2008-11-06

申请人： Hiroaki TAKEBE ,  Noriaki OZAWA ,  Akihiro MINAGAWA ,  Yusaku FUJII ,  Yoshinobu HOTTA ,  Hiroshi TANAKA ,  Katsuhito FUJIMOTO ,  Junichi HIRAI ,  Seiji TAKAHASHI

发明人： Hiroaki TAKEBE ,  Noriaki OZAWA ,  Akihiro MINAGAWA ,  Yusaku FUJII ,  Yoshinobu HOTTA ,  Hiroshi TANAKA ,  Katsuhito FUJIMOTO ,  Junichi HIRAI ,  Seiji TAKAHASHI

IPC分类号： G06F17/30

CPC分类号： G06K9/2081 ,  G06K2209/01

摘要： A document recognizing apparatus includes a display control unit which displays a document data including a character string related to a character string selected by a user, and an area that includes at least a character string of the document data.

摘要翻译： 文件识别装置包括：显示控制单元，显示包括与用户选择的字符串相关的字符串的文档数据和至少包括文档数据的字符串的区域。

公开(公告)号：US20070069400A1

公开(公告)日：2007-03-29

申请号：US11611177

申请日：2006-12-15

申请人： Hiroshi TANAKA

发明人： Hiroshi TANAKA

IPC分类号： H01L23/544

CPC分类号： G03F9/7003 ,  G03F9/7011 ,  G03F9/7076 ,  H01L23/544 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2223/5446 ,  H01L2223/54493 ,  H01L2924/0002 ,  H01L2924/00

摘要： An alignment mark including a first mark usable for both coarse alignment measurement in a first direction and fine alignment measurement in the first direction, and a second mark usable for coarse alignment measurement in a second direction different from the first direction.

摘要翻译： 对准标记包括可用于在第一方向进行粗略对准测量的第一标记和在第一方向上的精细对准测量，以及可在不同于第一方向的第二方向上用于粗略对准测量的第二标记。

公开(公告)号：US20120251147A1

公开(公告)日：2012-10-04

申请号：US13429782

申请日：2012-03-26

申请人： Akihiro GOMI ,  Masashi OBA ,  Yuki OGUCHI ,  Hiroshi TANAKA ,  Kunihiro KAWADA ,  Mitsukazu KUROSE ,  Ken IKUMA

发明人： Akihiro GOMI ,  Masashi OBA ,  Yuki OGUCHI ,  Hiroshi TANAKA ,  Kunihiro KAWADA ,  Mitsukazu KUROSE ,  Ken IKUMA

IPC分类号： G03G15/08

CPC分类号： G03G15/0189 ,  G03G15/105

摘要： In order to provide a developer reservoir that allows the liquid level to be accurately detected and with which the device does not end up being bulkier, the developer reservoir of the present invention includes a holder for holding a liquid developer containing toner and a carrier, an electrostatic capacitance type of liquid level sensor that detects electrostatic capacitance and has a first sensor electrode provided to the holder and a second sensor electrode that is opposite the first sensor electrode with liquid developer in between, and a calculator for calculating the level of the liquid developer held in the holder on the basis of the electrostatic capacitance detected by the electrostatic capacitance type of liquid level sensor.

摘要翻译： 为了提供允许精确检测液面并且装置不会变得更加庞大的显影剂储存器，本发明的显影剂储存器包括用于保持含有调色剂和载体的液体显影剂的保持器， 检测静电电容的液位传感器的静电电容型，并且具有设置在保持器上的第一传感器电极和与第一传感器电极相对的第二传感器电极和液体显影剂之间的第二传感器电极，以及用于计算液体显影剂的液位的计算器 基于由静电电容型液位传感器检测到的静电电容保持在保持器中。