公开(公告)号：US20050271261A1

公开(公告)日：2005-12-08

申请号：US11137554

申请日：2005-05-26

申请人： Hiroyuki Onishi ,  Yasushi Sasa ,  Hiroaki Kakuma

发明人： Hiroyuki Onishi ,  Yasushi Sasa ,  Hiroaki Kakuma

IPC分类号： G01N21/956 ,  G06K9/00 ,  G06K9/68 ,  G06T7/00 ,  H01L21/66

CPC分类号： G06T7/001 ,  G06T2207/30141 ,  G06T2207/30152

摘要： In a defect detection apparatus (1) acquired is two-dimensional image data of a swath which is a strip-like area corresponding to one of a plurality of divided patterns which are obtained by dividing a pattern block on one die of a substrate (9). In the defect detection apparatus (1), a reference image acquired from one swath in a reference die is stored in an image memory (51) and the reference image is compared with an inspection image acquired from a swath corresponding to a reference image on an inspection die by a defect detector (52) to detect defects of the inspection image. As a result, it is possible to easily achieve a defect detection of a fine pattern formed on a swath of the inspection die while reducing storage capacity required for the image memory (51).

摘要翻译： 在获取的缺陷检测装置（1）中，作为与通过将基板的一个管芯（9）上的图案块分割而得到的多个分割图案中的一个划分的图案的条状区域的条带的二维图像数据 ）。 在缺陷检测装置（1）中，将从参考管芯中的一个条带获取的参考图像存储在图像存储器（51）中，并将参考图像与从对应于参考图像的条纹获取的检查图像进行比较 由缺陷检测器（52）检查模具，以检测检查图像的缺陷。 结果，能够容易地实现在检查模具的条带上形成的精细图案的缺陷检测，同时降低图像存储器（51）所需的存储容量。

公开(公告)号：US07440605B2

公开(公告)日：2008-10-21

申请号：US10657107

申请日：2003-09-09

申请人： Yasushi Sasa ,  Hiroyuki Onishi

发明人： Yasushi Sasa ,  Hiroyuki Onishi

IPC分类号： G06K9/00

CPC分类号： G01N21/9501 ,  G01N21/8851 ,  G01N21/95607 ,  G01N2021/95615 ,  G06T7/0002 ,  G06T7/001 ,  G06T2207/30148

摘要： A reference image and an inspection image indicating pattern on a substrate are acquired and a specified pixel value range (63) is set on the basis of a histogram (62a) of pixel values of the reference image. Then, a transfer curve (71) having a large inclination in the specified pixel value range (63) is obtained. The inspection image and the reference image are converted in accordance with an LUT having transfer characteristics indicated by the transfer curve (71), an enhanced differential image between a converted inspection image and a converted reference image is generated and each pixel value of the enhanced differential image is compared with a predetermined threshold value, to thereby perform a detection of defective pixel. With this, a value of pixel in the enhanced differential image which corresponds to a pixel in the reference image (or inspection image) having the pixel value in the specified pixel value range (63) is enhanced, and appropriate inspection is thereby performed.

摘要翻译： 获取基板上的参考图像和检查图像指示图案，并且基于参考图像的像素值的直方图（62a）来设定指定的像素值范围（63）。 然后，获得在指定像素值范围（63）中具有大倾斜度的转印曲线（71）。 检查图像和参考图像根据具有由传送曲线（71）表示的传送特性的LUT进行转换，产生经转换的检查图像和转换的参考图像之间的增强的差分图像，并且增强差分的每个像素值 将图像与预定阈值进行比较，从而执行缺陷像素的检测。 由此，增强了对应于具有指定像素值范围（63）中的像素值的参考图像（或检查图像）中的像素的增强差分图像中的像素的值，从而进行适当的检查。

公开(公告)号：US20050232478A1

公开(公告)日：2005-10-20

申请号：US11079331

申请日：2005-03-15

申请人： Hiroyuki Onishi ,  Yasushi Sasa

发明人： Hiroyuki Onishi ,  Yasushi Sasa

IPC分类号： G01N21/956 ,  G06K9/00 ,  G06T7/00

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： In a defect detection apparatus, images of first to third inspection areas on a substrate are picked up to acquire first to third images. A positional difference acquisition part (51) acquires a first difference vector between the first image and the second image and a second difference vector between the second image and the third image. A differential image generation part (52) generates a first differential image between the first image and the second image while adjusting a position of the first image to the second image on the basis of the first difference vector and a second differential image between the second image and the third image while adjusting a position of the second image to the third image on the basis of the second difference vector. Then, a position of the second differential image is adjusted to the first differential image on the basis of the second difference vector and the second differential image after position adjustment and the first differential image are compared with each other, to detect a defect in a periodic pattern on the substrate with high accuracy.

摘要翻译： 在缺陷检测装置中，拾取基板上的第一至第三检查区域的图像以获取第一至第三图像。 位置差异获取部（51）获取第一图像和第二图像之间的第一差分矢量和第二图像与第三图像之间的第二差分矢量。 差分图像生成部件（52）在第一图像和第二图像之间生成第一差分图像，同时基于第一差分矢量和第二图像之间的第二差分图像来调整第一图像的位置到第二图像 以及第三图像，同时基于第二差分矢量调整第二图像的位置与第三图像。 然后，基于第二差分矢量和位置调整之后的第二差分图像将第二差分图像的位置调整为第一差分图像，并将第一差分图像彼此进行比较，以检测周期性的缺陷 图案高精度的衬底。

公开(公告)号：US07436993B2

公开(公告)日：2008-10-14

申请号：US11079331

申请日：2005-03-15

申请人： Hiroyuki Onishi ,  Yasushi Sasa

发明人： Hiroyuki Onishi ,  Yasushi Sasa

IPC分类号： G06K9/00

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： In a defect detection apparatus, images of first to third inspection areas on a substrate are picked up to acquire first to third images. A positional difference acquisition part (51) acquires a first difference vector between the first image and the second image and a second difference vector between the second image and the third image. A differential image generation part (52) generates a first differential image between the first image and the second image while adjusting a position of the first image to the second image on the basis of the first difference vector and a second differential image between the second image and the third image while adjusting a position of the second image to the third image on the basis of the second difference vector. Then, a position of the second differential image is adjusted to the first differential image on the basis of the second difference vector and the second differential image after position adjustment and the first differential image are compared with each other, to detect a defect in a periodic pattern on the substrate with high accuracy.

摘要翻译： 在缺陷检测装置中，拾取基板上的第一至第三检查区域的图像以获取第一至第三图像。 位置差异获取部（51）获取第一图像和第二图像之间的第一差分矢量和第二图像与第三图像之间的第二差分矢量。 差分图像生成部件（52）在第一图像和第二图像之间生成第一差分图像，同时基于第一差分矢量和第二图像之间的第二差分图像来调整第一图像的位置到第二图像 以及第三图像，同时基于第二差分矢量调整第二图像的位置与第三图像。 然后，基于第二差分矢量和位置调整之后的第二差分图像将第二差分图像的位置调整为第一差分图像，并将第一差分图像彼此进行比较，以检测周期性的缺陷 图案高精度的衬底。

公开(公告)号：US20050244049A1

公开(公告)日：2005-11-03

申请号：US11097139

申请日：2005-04-04

申请人： Hiroyuki Onishi ,  Yasushi Sasa ,  Manabu Tsujimura ,  Toshifumi Kinba ,  Katsuya Okumura

发明人： Hiroyuki Onishi ,  Yasushi Sasa ,  Manabu Tsujimura ,  Toshifumi Kinba ,  Katsuya Okumura

IPC分类号： G01N23/225 ,  G06K9/00 ,  G06T1/00 ,  G06T5/00 ,  G06T7/00 ,  H01L21/66

CPC分类号： H01J37/26 ,  G06T7/001 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/29 ,  H01J2237/24592

摘要： In a pattern inspection apparatus (1), an electron beam emission part (31) emits an electron beam onto a substrate (9) and an image acquisition part (33) detects electrons from the substrate (9) to acquire a grayscale inspection image of the substrate (9). A binary reference image generated from design data (81) is multivalued by a grayscale image generator (52) on the basis of a histogram of pixel values in the inspection image to generate a grayscale reference image. A comparator (53) compares the inspection image with the reference image. The pattern inspection apparatus (1) can thereby perform an inspection of a very small pattern on the substrate (9) on the basis of the design data (81).

摘要翻译： 在图案检查装置（1）中，电子束发射部（31）将电子束发射到基板（9）上，图像获取部（33）从基板（9）检测电子，获得灰度检查图像 基板（9）。 基于检查图像中的像素值的直方图，通过灰度图像生成器（52）将从设计数据（81）生成的二进制参考图像多值化以生成灰度参考图像。 比较器（53）将检查图像与参考图像进行比较。 因此，图案检查装置（1）能够基于设计数据（81）在基板（9）上进行非常小的图案的检查。

公开(公告)号：US20060133660A1

公开(公告)日：2006-06-22

申请号：US11289708

申请日：2005-11-30

申请人： Hiroshi Ogi ,  Hiroyuki Onishi ,  Yasushi Sasa ,  Yuichiro Hikida

发明人： Hiroshi Ogi ,  Hiroyuki Onishi ,  Yasushi Sasa ,  Yuichiro Hikida

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： In a defect detection apparatus 1, in a reference image inspection circuit 42 compared are a reference image representing a pattern in a die which is determined as a reference on a substrate 9 and a plurality of supervisory images which represent patterns in selected block areas, respectively, to detect defects included in the reference image. Subsequently, in the target image inspection circuit 44, a target image representing a pattern in another die and the reference image are compared to detect a plurality of defect candidates included in the target image. Then, a defect detector 45 excludes defect candidates overlapping with the defects included in the reference image from the plurality of defect candidates on the basis of at least positional information of the defects included in the reference image. This makes it possible to detect defects existing in the pattern in another die accurately while eliminating effects of the defects existing in the pattern in the die which is determined as the reference.

摘要翻译： 在缺陷检测装置1中，在比较的参照图像检查电路42中，分别表示作为基板9的基准的芯片中的图案的参考图像和分别表示所选块区域中的图案的多个监视图像 以检测参考图像中包含的缺陷。 随后，在目标图像检查电路44中，比较表示另一管芯中的图案的目标图像和参考图像，以检测包括在目标图像中的多个缺陷候选。 然后，缺陷检测器45至少基于包含在参考图像中的缺陷的位置信息，排除与来自多个缺陷候补的参考图像中包含的缺陷重叠的缺陷候选。 这使得可以精确地检测存在于另一个模具中的图案中的缺陷，同时消除存在于作为基准的芯片中的图案中存在的缺陷的影响。

公开(公告)号：US08529009B2

公开(公告)日：2013-09-10

申请号：US13039452

申请日：2011-03-03

申请人： Hiroyuki Onishi

发明人： Hiroyuki Onishi

IPC分类号： B41J29/38

CPC分类号： B41J11/002 ,  B41J2/2114 ,  B41J11/0015

摘要： A printing device includes a nozzle, a radiation unit and a control unit. The nozzle is configured to eject metallic ink including metal fragments onto a medium. The radiation unit is configured to irradiate the medium with light to temporarily cure the metallic ink. The control unit is configured to control irradiation of the light by the radiation unit so that a film thickness formed by the metallic ink is equal to or less than a length of a long side of the metal fragments when the metallic ink is temporarily cured on the medium.

摘要翻译： 打印装置包括喷嘴，辐射单元和控制单元。 喷嘴构造成将包括金属碎片的金属墨喷射到介质上。 辐射单元被配置成用光照射介质以临时固化金属墨。 所述控制单元被配置为控制由所述辐射单元照射的光，使得当所述金属墨水在所述金属墨水暂时固化时，由所述金属墨水形成的膜厚度等于或小于所述金属碎片的长边的长度 中。

公开(公告)号：US08040707B2

公开(公告)日：2011-10-18

申请号：US12397215

申请日：2009-03-03

申请人： Hiroyuki Onishi ,  Toshiaki Nagase ,  Jun Ishikawa ,  Kazuyoshi Kontani ,  Toshinari Fukatsu

发明人： Hiroyuki Onishi ,  Toshiaki Nagase ,  Jun Ishikawa ,  Kazuyoshi Kontani ,  Toshinari Fukatsu

IPC分类号： H02M1/00 ,  H01B11/02 ,  H02B1/26

CPC分类号： H02M7/003 ,  H01L24/73 ,  H01L25/072 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/30107 ,  H05K3/301 ,  H05K2201/068 ,  H05K2201/10272 ,  H05K2201/10522 ,  H05K2201/2018 ,  H01L2924/00012 ,  H01L2924/00

摘要： A power converter includes a base plate having thereon a switching device, and positive and negative conductors respectively including main portions disposed parallel to the base plate. One of the main portions is placed over the other of the main portions. The main portions are disposed adjacent to and parallel to each other. The main portions are insulated from each other. The power converter includes a capacitor having positive and negative terminals electrically connected to the respective main portions of the positive and negative conductors. Each of the positive and negative conductors includes a side portion extending from the main portion toward the base plate, and a terminal portion extending from the side portion and joined to the base plate. The side portion is formed with a cutout extending from the end adjacent to the base plate to the opposite end connected to the main portion.

摘要翻译： 功率转换器包括其上具有开关装置的基板，以及分别包括平行于基板设置的主要部分的正和负极导体。 其中一个主要部分放置在另一个主要部分上。 主要部分相邻并平行设置。 主要部分彼此绝缘。 功率转换器包括电容器，其正极和负极电连接到正和负导体的相应主要部分。 正导体和负极中的每一个包括从主体部朝向基板延伸的侧部，以及从侧部延伸并与基板接合的端子部。 侧部形成有从与基板相邻的端部延伸到连接到主要部分的相对端的切口。

公开(公告)号：US08031479B2

公开(公告)日：2011-10-04

申请号：US12397191

申请日：2009-03-03

申请人： Takashi Nagashima ,  Hiroyuki Onishi ,  Toshiaki Nagase ,  Jun Ishikawa ,  Kazuyoshi Kontani ,  Toshinari Fukatsu

发明人： Takashi Nagashima ,  Hiroyuki Onishi ,  Toshiaki Nagase ,  Jun Ishikawa ,  Kazuyoshi Kontani ,  Toshinari Fukatsu

IPC分类号： H05K7/00

CPC分类号： H02M7/003 ,  H01L23/642 ,  H01L24/73 ,  H01L25/072 ,  H01L25/165 ,  H01L2224/32225 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/30107 ,  H01L2924/00012 ,  H01L2924/00

摘要： A power converter apparatus that includes a substrate, plate-like positive and negative interconnection members, and capacitors is disclosed. Pairs of groups of switching elements are mounted on the substrate. Each of the positive interconnection member and the negative interconnection member has a terminal portion. The terminal portion has a joint portion that is electrically joined to a circuit pattern on the substrate. The switching elements are arranged in the same number on both sides of the joint portion of at least the positive interconnection member of the positive and negative interconnection members.

摘要翻译： 公开了一种包括基板，板状正和互连构件以及电容器的电力转换装置。 一组开关元件安装在基板上。 正互连构件和负互连构件中的每一个具有端子部。 端子部具有与基板上的电路图形电连接的接合部。 开关元件在正和负互连构件的至少正互连构件的接合部分的两侧以相同的数量布置。

公开(公告)号：US20110096130A1

公开(公告)日：2011-04-28

申请号：US12882462

申请日：2010-09-15

申请人： Hiroyuki Onishi

发明人： Hiroyuki Onishi

IPC分类号： B41J2/01

CPC分类号： B41J11/002 ,  B41J3/543

摘要： Disclosed herein is a printing device including: a plurality of heads configured to discharge inks cured by light irradiation and arranged in a transport direction of a medium; a plurality of pre-curing light sources provided in correspondence with the plurality of heads and configured to irradiate pre-curing light to dots formed on the medium by the heads; and a completely-curing light source configured to irradiate completely-curing light to the dots to which the light from the plurality of pre-curing light sources is irradiated, wherein a first printing mode in which a background ink is discharged from a head of an upstream side of the transport direction of the heads for discharging color inks and a second printing mode in which the background ink is discharged from a head of a downstream side of the transport direction of the heads for discharging the color inks are present.

摘要翻译： 本文公开了一种打印装置，包括：多个头部，其构造成排出通过光照射固化并沿介质的传送方向布置的墨; 多个预固化光源，其设置成与所述多个头相对应并且被配置为将预固化光照射到由所述头部形成在所述介质上的点; 以及完全固化的光源，被配置为将完全固化的光照射到照射来自多个预固化光源的光的点，其中第一印刷模式，其中背景油墨从 存在用于排出彩色油墨的喷墨头的输送方向的上游侧和背景油墨从用于排出彩色油墨的喷墨头的输送方向的下游侧的喷头排出的第二打印模式。