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公开(公告)号：US20080204675A1
公开(公告)日：2008-08-28
申请号：US11958798
申请日：2007-12-18
CPC分类号： G03F7/162 , G03F7/168 , G03F7/3021
摘要： A coating/developing apparatus includes a process section including processing units to perform a series of processes for resist coating and development; an interface section disposed between the process section and immersion light exposure apparatus; and a drying section disposed in the interface section to dry the substrate immediately after the immersion light exposure process. The drying section includes a process container configured to accommodate the substrate, a substrate support member configured to place the substrate thereon, a temperature-adjusted gas supply mechanism configured to supply a temperature-adjusted gas into the process container, and an exhaust mechanism configured to exhaust the process container. The drying section is arranged to dry the substrate by supplying the temperature-adjusted gas into the process container with the substrate placed on the substrate support member, while exhausting the process container.
摘要翻译： 一种涂布/显影装置，包括：处理部，包括进行抗蚀剂涂布和显影的一系列处理的处理单元; 布置在处理部分和浸没曝光装置之间的界面部分; 以及设置在界面部分中的干燥部分，以在浸没曝光处理之后立即干燥基板。 所述干燥部包括被配置为容纳所述基板的处理容器，被配置为将所述基板放置在其上的基板支撑部件，被配置为将经温度调节的气体供应到所述处理容器中的温度调节气体供给机构，以及配置为 排出过程容器。 干燥部被布置成通过将衬底放置在基板支撑构件上的温度调节气体供给到处理容器中，同时排出处理容器来干燥基板。
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公开(公告)号：US07924396B2
公开(公告)日：2011-04-12
申请号：US11958798
申请日：2007-12-18
CPC分类号： G03F7/162 , G03F7/168 , G03F7/3021
摘要： A coating/developing apparatus includes a process section including processing units to perform a series of processes for resist coating and development; an interface section disposed between the process section and immersion light exposure apparatus; and a drying section disposed in the interface section to dry the substrate immediately after the immersion light exposure process. The drying section includes a process container configured to accommodate the substrate, a substrate support member configured to place the substrate thereon, a temperature-adjusted gas supply mechanism configured to supply a temperature-adjusted gas into the process container, and an exhaust mechanism configured to exhaust the process container. The drying section is arranged to dry the substrate by supplying the temperature-adjusted gas into the process container with the substrate placed on the substrate support member, while exhausting the process container.
摘要翻译： 一种涂布/显影装置，包括：处理部，包括进行抗蚀剂涂布和显影的一系列处理的处理单元; 布置在处理部分和浸没曝光装置之间的界面部分; 以及设置在界面部分中的干燥部分，以在浸没曝光处理之后立即干燥基板。 所述干燥部包括被配置为容纳所述基板的处理容器，被配置为将所述基板放置在其上的基板支撑部件，配置成将经温度调节的气体供给到所述处理容器中的温度调节气体供给机构，以及配置为 排出过程容器。 干燥部被布置成通过将衬底放置在基板支撑构件上的温度调节气体供给到处理容器中，同时排出处理容器来干燥基板。
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公开(公告)号：US08199406B2
公开(公告)日：2012-06-12
申请号：US13014268
申请日：2011-01-26
CPC分类号： G02B5/124 , G02B27/1006 , G02B27/1073 , G02B27/142 , G02B27/143
摘要： An optical element includes: a first optical layer having a concavo-convex surface; a wavelength-selective reflective layer provided on the concavo-convex surface of the first optical layer; a second optical layer provided on the concavo-convex surface on which the wavelength-selective reflective layer is provided so as to fill the concavo-convex surface, and in the optical element described above, the wavelength-selective reflective layer includes a metal layer, a protective layer provided on the metal layer and containing a metal oxide as a primary component, and a high refractive index layer provided on the protective layer and containing a metal oxide other than zinc oxide as a primary component, and the wavelength-selective reflective layer selectively directionally reflects light in a specific wavelength band while transmitting light other than that in the specific wavelength band.
摘要翻译： 光学元件包括：具有凹凸表面的第一光学层; 设置在第一光学层的凹凸表面上的波长选择性反射层; 设置在其上设置有波长选择反射层的凹凸表面以填充凹凸表面的第二光学层，在上述光学元件中，波长选择反射层包括金属层， 设置在金属层上并含有金属氧化物作为主要成分的保护层和设置在保护层上并含有除氧化锌以外的金属氧化物作为主要成分的高折射率层，以及波长选择反射层 选择性地定向反射特定波长带中的光，同时透射特定波长带以外的光。
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公开(公告)号：US20110188125A1
公开(公告)日：2011-08-04
申请号：US13014268
申请日：2011-01-26
IPC分类号： G02B5/26
CPC分类号： G02B5/124 , G02B27/1006 , G02B27/1073 , G02B27/142 , G02B27/143
摘要： An optical element includes: a first optical layer having a concavo-convex surface; a wavelength-selective reflective layer provided on the concavo-convex surface of the first optical layer; a second optical layer provided on the concavo-convex surface on which the wavelength-selective reflective layer is provided so as to fill the concavo-convex surface, and in the optical element described above, the wavelength-selective reflective layer includes a metal layer, a protective layer provided on the metal layer and containing a metal oxide as a primary component, and a high refractive index layer provided on the protective layer and containing a metal oxide other than zinc oxide as a primary component, and the wavelength-selective reflective layer selectively directionally reflects light in a specific wavelength band while transmitting light other than that in the specific wavelength band.
摘要翻译： 光学元件包括：具有凹凸表面的第一光学层; 设置在第一光学层的凹凸表面上的波长选择性反射层; 设置在其上设置有波长选择反射层的凹凸表面以填充凹凸表面的第二光学层，在上述光学元件中，波长选择反射层包括金属层， 设置在金属层上并含有金属氧化物作为主要成分的保护层和设置在保护层上并含有除氧化锌以外的金属氧化物作为主要成分的高折射率层，以及波长选择反射层 选择性地定向反射特定波长带中的光，同时透射特定波长带以外的光。
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公开(公告)号：US20100177380A1
公开(公告)日：2010-07-15
申请号：US12634383
申请日：2009-12-09
IPC分类号： G02B5/26
CPC分类号： G02B5/26 , B32B3/30 , B32B7/12 , B32B15/08 , B32B15/20 , B32B17/06 , B32B17/064 , B32B27/20 , B32B27/308 , B32B27/365 , B32B2264/10 , B32B2307/302 , B32B2307/412 , B32B2307/416 , B32B2307/418 , B32B2307/712 , B32B2307/752 , B32B2605/006 , E06B3/66 , E06B3/6715 , E06B9/24 , E06B2009/2417 , G02B5/0231 , G02B5/0294 , G02B5/045 , G02B5/12 , G02B5/124 , G02B5/208 , G02B5/23 , G02B5/282 , G02B27/126
摘要： An optical element is provided includes an optical layer having a flat incident surface on which light is incident and a wavelength-selective reflective layer disposed in the optical layer. Of light incident on the incident surface at an incident angle (θ, φ), the optical element selectively directionally reflects light in at least one specific wavelength range in at least one direction other than a specular reflection direction (−θ, φ+180°) while transmitting light in at least one wavelength range other than the specific wavelength range, and is transparent to light in at least one wavelength range other than the specific wavelength range.
摘要翻译： 提供了一种光学元件，其包括具有入射光的平坦入射表面的光学层和设置在光学层中的波长选择性反射层。 以入射角入射到入射面上的光（＆amp;＆phnt;＆pht;），光学元件选择性地定向反射至少一个特定波长范围内的光，除了镜面反射方向以外的至少一个方向（ - ＆Thetas;＆phgr ; + 180°），同时透射除了特定波长范围之外的至少一个波长范围的光，并且对于除特定波长范围之外的至少一个波长范围的光是透明的。
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6.发明申请Ion-conductive polymer, solid polyelectrolyte, and cell employing the same 审中-公开离子导电聚合物，固体聚电解质和使用其的电池公开(公告)号：US20060014066A1
公开(公告)日：2006-01-19
申请号：US10515522
申请日：2004-05-24
IPC分类号： H01M8/10
CPC分类号： H01B1/122 , C08F8/44 , H01M4/60 , H01M4/602 , H01M6/181 , H01M8/0289 , H01M8/1004 , H01M10/052 , H01M10/0565 , H01M2300/0082 , C08F8/36 , C08F112/08
摘要： The present invention relates to an ion conductive polymer which is expressed by a below-described chemical formula and has at least one or more kinds of stereospecific structures of a syndiotactic or isotactic structure. (In the above described formula, n designates an integer of 2 or more, R designates an organic residue having 1 to 20 carbon atoms or an organic residue having 1 to 20 carbon atoms and hetero atoms such as N, O, P, S, etc., X designates an anion part, and Y designates an alkali metal, an alkaline earth metal, a transition metal, a rare-earth element, an ammonium or a hydrogen.)
摘要翻译： 本发明涉及由下述化学式表示的具有间同立构或全同立构结构的至少一种或多种立体特异性结构的离子导电聚合物。 （在上述式中，n表示2以上的整数，R表示碳原子数1〜20的有机残基或碳原子数1〜20的有机残基和N，O，P，S， 等等，X表示阴离子部分，Y表示碱金属，碱土金属，过渡金属，稀土元素，铵或氢。）
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7.发明申请Photoelectric conversion device fabrication method, photoelectric conversion device, electronic apparatus manufacturing method, electronic apparatus, metal film formation method and layer structure, and semiconductor fine particle layer and layer structure 审中-公开光电转换装置制造方法，光电转换装置，电子装置制造方法，电子装置，金属成膜方法和层结构以及半导体微粒层和层结构公开(公告)号：US20050016578A1
公开(公告)日：2005-01-27
申请号：US10822556
申请日：2004-04-12
申请人： Masashi Enomoto , Toshio Honda
发明人： Masashi Enomoto , Toshio Honda
CPC分类号： H01G9/2022 , H01G9/2031 , H01L51/0037 , Y02E10/542
摘要： With respect to a photoelectric conversion device comprising a semiconductor electrode composed of semiconductor fine particles and a metal film to be an opposite electrode, a polyethylene dioxythiophene (PEDOT)/polystyrenesulfonic acid (PSS) film is formed by spin coating on a transparent electrode of a metal oxide such as ITO to remarkably improve the adhesion property of the metal film to the metal oxide film and the pollution by the different type metal of the metal film to be the opposite electrode can be prevented in the photoelectric conversion device. Further, a semiconductor electrode composed of semiconductor fine particles can be formed well on the metal oxide film by low temperature process while elution of the metal oxide film is prevented to obtain the photoelectric conversion device.
摘要翻译： 对于包含由半导体细颗粒构成的半导体电极和作为相对电极的金属膜的光电转换装置，通过旋涂在聚对苯二甲酸乙二醇酯的透明电极上形成聚乙烯二氧噻吩（PEDOT）/聚苯乙烯磺酸（PSS） 可以在光电转换装置中防止金属氧化物如ITO，从而显着地提高金属膜与金属氧化物膜的粘附性以及金属膜的不同类型的金属作为相对电极的污染。 此外，可以通过低温工艺在金属氧化物膜上良好地形成由半导体细颗粒构成的半导体电极，同时防止金属氧化物膜的溶出以获得光电转换装置。
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8.发明申请公开(公告)号：US20140233104A1
公开(公告)日：2014-08-21
申请号：US14351275
申请日：2012-08-24
申请人： Tsutomu NAGAHAMA , Masaki SUZUKI , Hironori YOSHIDA , Masashi ENOMOTO , Toru YATABE , Masamitsu KAGEYAMA
发明人： Tsutomu Nagahama , Masaki Suzuki , Hironori Yoshida , Masashi Enomoto , Toru Yatabe , Masamitsu Kageyama
IPC分类号： G02B5/28
CPC分类号： G02B5/282 , C03C17/36 , C03C17/3657 , E06B9/24 , E06B2009/2417 , G02B5/0231 , G02B5/0242 , G02B5/045 , G02B5/26 , G02B5/285
摘要： An optical element is provided with a wavelength-selective reflection layer having a five-layer configuration in which high-refractive-index layers and metal layers are alternately stacked. The present invention is designed so that the ratio α of an optical film thickness db of the entire metal layer relative to an optical film thickness da of the high-refractive-index layers as a whole, and the ratio β (=d3/d1) of an optical film thickness d3 of the third high-refractive-index layer with respect to the optical film thickness d1 of the first high-refractive-index layer as viewed from either the first optical layer side or the second optical layer side are included within a predetermined range.
摘要翻译： 光学元件设置有具有高折射率层和金属层交替层叠的五层结构的波长选择反射层。 本发明设计成使得整个金属层的光学膜厚度db相对于高折射率层的光学膜厚度da整体的比率α和比率＆bgr; 第三高折射率层的光学膜厚度d3相对于从第一高折射率层的第一光学层侧或第二高折射率层观察的光学膜厚度d1的（= d3 / d1） 光学层侧包含在预定范围内。
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公开(公告)号：US08520305B2
公开(公告)日：2013-08-27
申请号：US13196053
申请日：2011-08-02
申请人： Masaki Suzuki , Hayato Hasegawa , Masashi Enomoto
发明人： Masaki Suzuki , Hayato Hasegawa , Masashi Enomoto
IPC分类号： G02B27/14
CPC分类号： B29D11/0073 , B29D11/00605 , E04D13/033 , E04D2013/0345 , F21S11/00 , F21S19/00 , G02B1/115 , G02B5/201 , G02B5/205 , G02B5/285 , G02B5/287 , G02B17/006 , G02B19/0028 , G02B19/0042 , Y02B10/20 , Y10T156/1036 , Y10T156/1039
摘要： An optical element includes a first surface, a second surface positioned to face the first surface, and a plurality of reflecting surfaces arrayed in a first region defined by the first surface and the second surface, wherein the reflecting surfaces have a first length in a first direction vertical to the first surface and are arrayed at a pitch in a second direction perpendicular to the first direction, light incident on one of the first surface and the second surface is reflected by the reflecting surfaces toward the other surface, and predetermined parameters satisfy predetermined relational formulae representing conditions for ensuring total reflection at the reflecting surfaces and for avoiding total reflection at a light emergent surface.
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10.发明申请OPTICAL BODY, WINDOW MEMBER, FITTING, SOLAR SHADING DEVICE, AND BUILDING 有权光学体系，窗户会员，配件，太阳能遮光装置和建筑物公开(公告)号：US20120154921A1
公开(公告)日：2012-06-21
申请号：US13388856
申请日：2011-06-02
IPC分类号： G02B27/14
CPC分类号： G02B5/208 , B32B7/12 , B32B27/08 , B32B27/36 , B32B2255/10 , B32B2255/26 , B32B2307/416 , C03C2217/77 , G02B5/045 , G02B5/23 , G02B5/26 , G02B5/282
摘要： An optical body includes a first optical layer having a concave-convex surface, a wavelength selective reflecting layer formed on the concave-convex surface, and a second optical layer formed on the wavelength selective reflecting layer and embedding the concave-convex surface. The wavelength selective reflecting layer selectively directionally reflects light in a particular wavelength band while transmitting light other than the particular wavelength band therethrough. The concave-convex surface is made up of a plurality of triangular pillars arrayed in a one-dimensional pattern, and the triangular pillar has an apex angle α and a slope angle β, the apex angle α and the slope angle βsatisfying a predetermined relationship.
摘要翻译： 光学体包括具有凹凸表面的第一光学层，形成在凹凸表面上的波长选择反射层，以及形成在波长选择反射层上并嵌入凹凸表面的第二光学层。 波长选择反射层选择性地定向反射特定波长带中的光，同时透射除特定波段之外的光。 凹凸面由排列成一维图案的多个三角柱构成，三角柱具有顶角α和倾斜角＆bgr，顶角α和斜角bgr满足a 预定关系。
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