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公开(公告)号：US20160064182A1
公开(公告)日：2016-03-03
申请号：US14803304
申请日：2015-07-20
发明人： Kazuki Ikeda , Wen Li , Ryo Kadoi , Hisaaki Kanai , Hajime Kawano , Hiroyuki Takahashi , Makoto Suzuki
CPC分类号： H01J37/222 , H01J37/06 , H01J37/244 , H01J37/28 , H01J37/292 , H01J2237/221 , H01J2237/24495 , H01J2237/24592 , H01J2237/28
摘要： There is provided a charged particle beam apparatus radiating a charged particle beam to a specimen so as to acquire an image of the specimen, the charged particle beam apparatus including: a charged particle gun that generates the charged particle beam; an electron optical system that radiates the charged particle beam emitted from the charged particle gun onto a surface of the specimen so as to scan the surface of the specimen; a detecting unit that detects secondary electrons or reflection electrons emitted from the specimen, and converts the electrons into pulse signals; a pulse signal detecting circuit that detects time detecting information regarding time of the pulse signals converted by the detecting unit, and peak value detecting information regarding each peak value of the pulse signals; and an image processing unit that generates luminance gradation of the acquired image based on a time detecting signal and a peak value detecting signal of the pulse signals detected by the pulse signal detecting circuit.
摘要翻译： 提供了一种带电粒子束装置，其将样品的带电粒子束照射以获取样本的图像，所述带电粒子束装置包括：产生带电粒子束的带电粒子枪; 电子光学系统，将从带电粒子枪发射的带电粒子辐射到样品的表面上，以扫描样品的表面; 检测单元，其检测从样本发射的二次电子或反射电子，并将电子转换为脉冲信号; 脉冲信号检测电路，检测关于由检测单元转换的脉冲信号的时间的时间检测信息，以及关于脉冲信号的每个峰值的峰值检测信息; 以及图像处理单元，其基于由脉冲信号检测电路检测的脉冲信号的时间检测信号和峰值检测信号，生成所获取的图像的亮度等级。
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公开(公告)号：US20150041643A1
公开(公告)日：2015-02-12
申请号：US14301403
申请日：2014-06-11
发明人： Wen Li , Ryo Kadoi , Hajime Kawano , Hiroyuki Takahashi
IPC分类号： H01J37/153 , H01J37/22 , H01J37/28
CPC分类号： H01J37/28 , H01J37/1471 , H01J37/265 , H01J2237/1504 , H01J2237/151 , H01J2237/1536
摘要： The present invention provides a processing apparatus using a scanning electron microscope, which includes the scanning electron microscope having an electron optical system radiating and scanning a focused electron beam on a sample placed on a stage to image the sample, and an image processing/control section which controls the scanning electron microscope and processes the image obtained by imaging with the scanning electron microscope. The electron optical system of the scanning electron microscope has image shift electrodes comprised of electrostatic electrodes, the image shift electrodes moving a position at which to apply the focused electron beam onto the sample with the stage stopped to thereby shift a region in which the sample is to be imaged.
摘要翻译： 本发明提供一种使用扫描型电子显微镜的处理装置，该扫描型电子显微镜具有扫描型电子显微镜，该扫描型电子显微镜具有电子光学系统，该放射线照射放置在载置台上的样品上以聚焦的电子束，以对图像进行成像，图像处理/ 其控制扫描电子显微镜并用扫描电子显微镜对通过成像获得的图像进行处理。 扫描电子显微镜的电子光学系统具有由静电电极构成的图像移动电极，图像移动电极移动将聚焦电子束施加到样品上的位置，停止载体，从而移动样品的区域 被成像。
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公开(公告)号：US09478392B2
公开(公告)日：2016-10-25
申请号：US14803304
申请日：2015-07-20
发明人： Kazuki Ikeda , Wen Li , Ryo Kadoi , Hisaaki Kanai , Hajime Kawano , Hiroyuki Takahashi , Makoto Suzuki
CPC分类号： H01J37/222 , H01J37/06 , H01J37/244 , H01J37/28 , H01J37/292 , H01J2237/221 , H01J2237/24495 , H01J2237/24592 , H01J2237/28
摘要： There is provided a charged particle beam apparatus radiating a charged particle beam to a specimen so as to acquire an image of the specimen, the charged particle beam apparatus including: a charged particle gun that generates the charged particle beam; an electron optical system that radiates the charged particle beam emitted from the charged particle gun onto a surface of the specimen so as to scan the surface of the specimen; a detecting unit that detects secondary electrons or reflection electrons emitted from the specimen, and converts the electrons into pulse signals; a pulse signal detecting circuit that detects time detecting information regarding time of the pulse signals converted by the detecting unit, and peak value detecting information regarding each peak value of the pulse signals; and an image processing unit that generates luminance gradation of the acquired image based on a time detecting signal and a peak value detecting signal of the pulse signals detected by the pulse signal detecting circuit.
摘要翻译： 提供了一种带电粒子束装置，其将样品的带电粒子束照射以获取样本的图像，所述带电粒子束装置包括：产生带电粒子束的带电粒子枪; 电子光学系统，将从带电粒子枪发射的带电粒子辐射到样品的表面上，以扫描样品的表面; 检测单元，其检测从样本发射的二次电子或反射电子，并将电子转换为脉冲信号; 脉冲信号检测电路，检测关于由检测单元转换的脉冲信号的时间的时间检测信息，以及关于脉冲信号的每个峰值的峰值检测信息; 以及图像处理单元，其基于由脉冲信号检测电路检测的脉冲信号的时间检测信号和峰值检测信号，生成所获取的图像的亮度等级。
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公开(公告)号：US09679740B2
公开(公告)日：2017-06-13
申请号：US15109230
申请日：2014-12-16
发明人： Wen Li , Ryo Kadoi , Kazuki Ikeda , Hiroyuki Takahashi , Hajime Kawano
IPC分类号： H01J37/26 , G21K5/04 , H01J37/147 , H01J37/244 , H01J37/28
CPC分类号： H01J37/1472 , H01J37/244 , H01J37/28 , H01J2237/1504 , H01J2237/1508 , H01J2237/152 , H01J2237/1534 , H01J2237/2804 , H01J2237/2806
摘要： A processing apparatus and a processing method are provided, which use a charged particle beam device that achieves defection of secondary electrons/reflected electrons at a large angle and cancels out noises of an electromagnetic deflector and an electrostatic deflector to suppress a position shift of a primary electron beam caused by circuit noises of a primary beam/secondary beam separation circuit. In the charged particle beam device that includes an electronic optical system radiating a concentrated electron beam onto a sample placed on a stage to perform scanning and captures an image of the sample, a reference signal and a signal generation unit of a voltage-source control signal applied to the electrostatic deflector generating the electrostatic deflector and a reference signal and a signal generation unit of a current-source control signal applied to the electromagnetic deflector generating a magnetic field are made common in an overlapping-electromagnetic-deflector control unit that controls a path of the secondary electrons/reflected electrons incident on a detector, and frequency characteristics and phase characteristics of the voltage control signal are coincident with those of the current-source control signal.
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5.发明授权公开(公告)号：US09337822B2
公开(公告)日：2016-05-10
申请号：US14390096
申请日：2013-04-01
发明人： Ryo Kadoi , Yoshikazu Sugiyama
IPC分类号： H03K17/10 , H03K17/687 , H01J49/02
CPC分类号： H03K17/102 , H01J49/022 , H03K17/10 , H03K17/687 , Y10T307/747
摘要： To provide a switch circuit in which ON/OFF control can be realized even in a state where high voltage is not applied, and high voltage can be completely lowered to the ground.Provided is a switch circuit that includes plural MOS switches connected in series in such a manner that the source of one element is connected to the drain of another between high voltage and a system ground and that switches a connection state between the high voltage and the system ground, the switch circuit including: a MOS switch 101 the source of which is connected to the system ground among the plural MOS switches; a MOS switch 102 the source of which is connected to the drain of the MOS switch 101 in a shared manner and the drain of which is connected to the high voltage side among the plural MOS switches; a MOS switch 103 the drain of which is connected to the gate of the MOS switch 102 in a shared manner; and a resistor 104 that is connected in parallel between the gate and the source of the MOS switch 102.
摘要翻译： 为了提供即使在不施加高电压的状态下也可以实现开/关控制的开关电路，并且高电压可以完全降低到地。 提供一种开关电路，其包括串联连接的多个MOS开关，其中一个元件的源极连接到高压和系统地之间的另一个元件的漏极，并且切换高电压和系统之间的连接状态 接地，开关电路包括：MOS开关101，其源极连接到多个MOS开关之间的系统地; MOS开关102，其源极以共享的方式连接到MOS开关101的漏极，并且其漏极连接到多个MOS开关中的高压侧; MOS开关103，其漏极以共用方式连接到MOS开关102的栅极; 以及并联连接在MOS开关102的栅极和源极之间的电阻器104。
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6.发明申请公开(公告)号：US20150108340A1
公开(公告)日：2015-04-23
申请号：US14390096
申请日：2013-04-01
发明人： Ryo Kadoi , Yoshikazu Sugiyama
IPC分类号： H03K17/10 , H03K17/687 , H01J49/02
CPC分类号： H03K17/102 , H01J49/022 , H03K17/10 , H03K17/687 , Y10T307/747
摘要： To provide a switch circuit in which ON/OFF control can be realized even in a state where high voltage is not applied, and high voltage can be completely lowered to the ground.Provided is a switch circuit that includes plural MOS switches connected in series in such a manner that the source of one element is connected to the drain of another between high voltage and a system ground and that switches a connection state between the high voltage and the system ground, the switch circuit including: a MOS switch 101 the source of which is connected to the system ground among the plural MOS switches; a MOS switch 102 the source of which is connected to the drain of the MOS switch 101 in a shared manner and the drain of which is connected to the high voltage side among the plural MOS switches; a MOS switch 103 the drain of which is connected to the gate of the MOS switch 102 in a shared manner; and a resistor 104 that is connected in parallel between the gate and the source of the MOS switch 102.
摘要翻译： 为了提供即使在不施加高电压的状态下也可以实现开/关控制的开关电路，并且高电压可以完全降低到地。 提供一种开关电路，其包括串联连接的多个MOS开关，其中一个元件的源极连接到高压和系统地之间的另一个元件的漏极，并且切换高电压和系统之间的连接状态 接地，开关电路包括：MOS开关101，其源极连接到多个MOS开关之间的系统地; MOS开关102，其源极以共享的方式连接到MOS开关101的漏极，并且其漏极连接到多个MOS开关中的高压侧; MOS开关103，其漏极以共用方式连接到MOS开关102的栅极; 以及并联连接在MOS开关102的栅极和源极之间的电阻器104。
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公开(公告)号：US10559447B2
公开(公告)日：2020-02-11
申请号：US15562810
申请日：2016-04-06
发明人： Ryo Kadoi , Wen Li , Kazuki Ikeda , Hajime Kawano , Hiroyuki Takahashi
IPC分类号： H01J37/20 , H01J37/04 , H01J37/147 , H01J37/28 , G01B15/00
摘要： A charged particle apparatus including a charged particle source unit; a blanking electrode unit that blanks a charged particle beam launched from the charged particle source unit; a deflecting electrode unit that deflects the charged particle beam; an objective lens unit that converges the charged particle beam deflected by the deflecting electrode unit and radiates the charged particle beam to a surface of a sample; a secondary charged particle detection unit that detects a secondary charged particle generated from the sample; a signal processing unit that processes a signal obtained by detecting the secondary charged particle; and a control unit that corrects a transient signal when the blanking of the charged particle beam is turned off by the blanking electrode, such that an image with no distortion can be obtained even when the blanking electrode is operated to turn on and off at a high speed.
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公开(公告)号：US10424459B2
公开(公告)日：2019-09-24
申请号：US15613941
申请日：2017-06-05
发明人： Wen Li , Ryo Kadoi , Kazuki Ikeda , Hiroyuki Takahashi , Hajime Kawano
IPC分类号： H01J37/147 , H01J37/28 , H01J37/244
摘要： A processing apparatus and a processing method are provided, which use a charged particle beam device that achieves defection of secondary electrons/reflected electrons at a large angle and cancels out noises of an electromagnetic deflector and an electrostatic deflector to suppress a position shift of a primary electron beam caused by circuit noises of a primary beam/secondary beam separation circuit. In the charged particle beam device that includes an electronic optical system radiating a concentrated electron beam onto a sample placed on a stage to perform scanning and captures an image of the sample, a reference signal and a signal generation unit of a voltage-source control signal applied to the electrostatic deflector generating the electrostatic deflector and a reference signal and a signal generation unit of a current-source control signal applied to the electromagnetic deflector generating a magnetic field are made common in an overlapping-electromagnetic-deflector control unit that controls a path of the secondary electrons/reflected electrons incident on a detector, and frequency characteristics and phase characteristics of the voltage control signal are coincident with those of the current-source control signal.
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公开(公告)号：US09177759B2
公开(公告)日：2015-11-03
申请号：US14301403
申请日：2014-06-11
发明人： Wen Li , Ryo Kadoi , Hajime Kawano , Hiroyuki Takahashi
IPC分类号： H01J37/26 , H01J37/28 , H01J37/147
CPC分类号： H01J37/28 , H01J37/1471 , H01J37/265 , H01J2237/1504 , H01J2237/151 , H01J2237/1536
摘要： The present invention provides a processing apparatus using a scanning electron microscope, which includes the scanning electron microscope having an electron optical system radiating and scanning a focused electron beam on a sample placed on a stage to image the sample, and an image processing/control section which controls the scanning electron microscope and processes the image obtained by imaging with the scanning electron microscope. The electron optical system of the scanning electron microscope has image shift electrodes comprised of electrostatic electrodes, the image shift electrodes moving a position at which to apply the focused electron beam onto the sample with the stage stopped to thereby shift a region in which the sample is to be imaged.
摘要翻译： 本发明提供一种使用扫描型电子显微镜的处理装置，该扫描型电子显微镜具有扫描型电子显微镜，该扫描型电子显微镜具有电子光学系统，该放射线照射放置在载置台上的样品上以聚焦的电子束，以对图像进行成像，图像处理/ 其控制扫描电子显微镜并用扫描电子显微镜对通过成像获得的图像进行处理。 扫描电子显微镜的电子光学系统具有由静电电极构成的图像移动电极，图像移动电极移动将聚焦电子束施加到样品上的位置，停止载体，从而移动样品的区域 被成像。
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