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1.发明授权Method for optimizing electrodeposition process of a plurality of vias in wafer 有权用于优化晶片中多个通孔的电沉积工艺的方法公开(公告)号：US09075941B2
公开(公告)日：2015-07-07
申请号：US13894420
申请日：2013-05-14
发明人： Yaofeng Sun , Bin Xie , Xunqing Shi , Ou Dong
IPC分类号： G06F17/50
CPC分类号： G06F17/5009 , G06F17/5077
摘要： The presently claimed invention provides a method for optimizing an electrodeposition process of a plurality of vias in a wafer. Instead of simulating a large number of via on the wafer for via filling, a representative via is selected with the maximum value of critical factor, which is a function of process parameters. The filling of the representative via is simulated with different sampling points to find out the filling goodness in order to find out the optimized process windows of process parameters. An optimizer is also disclosed, which either provides sampling points or reduces sampling points under artificial neural network method. Calculation of filling goodness is used for evaluating via filling quality and further comparing among via fillings simulated at different sampling points. Consequently, the method of present invention is able to shorten the simulation time for via filling as well as provide a process window with high accuracy.
摘要翻译： 本发明提供一种用于优化晶片中多个通孔的电沉积工艺的方法。 代替在晶片上模拟大量通孔以进行通孔填充，代表性通孔被选择为关键因素的最大值，其是过程参数的函数。 通过不同的采样点模拟代表通孔的填充，以找出填充性，以便找出工艺参数的优化过程窗口。 还公开了一种优化器，其可以在人工神经网络方法下提供采样点或减少采样点。 填充质量计算用于通过灌装质量进行评估，并进一步比较不同采样点模拟的通孔填充。 因此，本发明的方法能够缩短通孔填充的模拟时间，并且能够提供高精度的处理窗口。
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公开(公告)号：US10234419B2
公开(公告)日：2019-03-19
申请号：US15162609
申请日：2016-05-23
发明人： Yaofeng Sun , Sha Xu
IPC分类号： G01N27/416 , C25D21/12 , G01N27/30 , G01N27/28
摘要： The presently claimed invention provides an electrochemical analytical apparatus for electrochemical bath analysis. The apparatus comprise a static electrode and a rotatable unit. As steady liquid flow can be generated on the electrolytic surface of the static electrode by the rotatable unit through rotation, the static disk electrode does not involve any movement during the bath analysis such that the design of the electrical contact in the electrode can be substantially simplified.
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3.发明授权公开(公告)号：US11656291B2
公开(公告)日：2023-05-23
申请号：US17169675
申请日：2021-02-08
发明人： Minjie Xu , Liya Zheng , Yaofeng Sun
IPC分类号： G01R31/392 , H02J7/00 , B07C5/344 , G01R31/367 , G01R31/3828 , G01R31/3842
CPC分类号： G01R31/392 , B07C5/344 , G01R31/367 , G01R31/3828 , G01R31/3842 , H02J7/005 , H02J7/0068
摘要： Used batteries are screened based on a measured Constant-Current Impulse Ratio. A used battery is charged using a Constant Current (CC) until a voltage target is reached, and the current integrated to obtain the CC charge applied, QCC. Then the battery continues to be charged using a Constant Voltage (CV) of the voltage target until the charging current falls to a minimum current target. The current is integrated over the CV period to obtain the CV charge applied, QCV. The measured CCIR is the ratio of QCC to (QCC+QCV). The measured CCIR is input to a calibration curve function to obtain a modeled State of Health (SOH) value. The used battery is sorted for reuse or disposal based on the modeled SOH value. The calibration curve function is obtained by aging new batteries to obtain CCIR and SOH data that are modeled using a neural network.
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公开(公告)号：US11422199B1
公开(公告)日：2022-08-23
申请号：US17351207
申请日：2021-06-17
发明人： Minjie Xu , Yaofeng Sun
IPC分类号： G01R31/392 , G01R31/36 , G01R31/374 , H01M10/613 , H02J7/00 , H01M10/54 , G01R31/367
摘要： A used battery is discharged for a short time from a first Open Circuit Voltage (OCV1) to a second OCV2 and the discharge current ΔQ measured. OCV1 is input to a calibration curve model to obtain a first modeled State of Charge (SOC1) value, and OCV2 is input to the calibration curve model to obtain a second modeled SOC2 value. The State of Health (SOH) is calculated as ΔQ/[Qnew×(SOC1−SOC2)], where Qnew is the battery capacity when new. The used battery is sorted for reuse or disposal based on the SOH value. The calibration curve model is obtained by Artificial Intelligence (AI) modeling of OCV, SOC datapoints from fully charging and discharging used batteries. Only OCV values within a target region having a low first derivative of SOC as a function of OCV are modeled, and OCV1 and OCV2 are within this target region.
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公开(公告)号：US11644513B1
公开(公告)日：2023-05-09
申请号：US17570527
申请日：2022-01-07
发明人： Wenlong Ding , Meng Chen , Yaofeng Sun , Manxin Chen
IPC分类号： G01R31/389 , H02J7/00 , H02J7/34 , G01R31/392 , G01R31/367 , H02M3/04
CPC分类号： G01R31/389 , G01R31/367 , G01R31/392 , H02J7/005 , H02J7/0068 , H02J7/00711 , H02J7/345 , H02M3/04
摘要： A Battery Management System (BMS) inspects a battery pack using AC impedance. A controller on the BMS drives a Pulse-Width Modulation (PWM) output signal to an on-board excitation regulator such as a synchronous buck converter that modulates a limited energy unit such as a capacitor with a swept frequency of a PWM input signal. The capacitor modulations are applied to a terminal of the battery pack as an AC excitation signal. Synchronous sampling of the battery pack provides responses to the AC excitation signal. An AC excitation signal current and a battery response voltage are processed and Fourier-transformed to generate a Nyquist plot of the excitation-response data. Curve shifts can indicate worn battery cells. The capacitor generating the AC excitation signal draws little energy from the battery pack so AC impedance inspection can occur during all modes: charging, discharging, and idle modes without an external power supply.
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公开(公告)号：US20180258243A1
公开(公告)日：2018-09-13
申请号：US15455208
申请日：2017-03-10
发明人： Wenwei Zheng , Hailong Wu , Yaofeng Sun
CPC分类号： C08J5/124 , B05D1/18 , B05D3/007 , B05D3/10 , C08J5/12 , C08J2365/04 , C08J2443/04 , C09J4/00 , C09J4/06 , H05K1/00
摘要： The invention provides a composition for adhering one or more polymers to a substrate. The composition comprises at least one first compound adapted to be coated on a surface of the substrate. The first compound comprises one or more first units each having at least one functional group adapted to chemically react with at least one monomer to form the one or more polymers. Said composition also comprises at least one second compound adapted to be coated on the surface of the substrate. The second compound comprising one or more second units interspersed among the one or more first units of the first compound. Each of the one or more second units is not chemically reactive to the at least one monomer. The invention also provides a method of preparing a polymer coated surface on a substrate using the composition described.
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7.发明授权公开(公告)号：US09575032B2
公开(公告)日：2017-02-21
申请号：US14453636
申请日：2014-08-07
发明人： Yaofeng Sun , Minghui Gao , Hai Xia
摘要： The presently claimed invention provides an accurate, fast, and cost effective method for determining the additive concentrations of at least two inhibitors simultaneously in an electroplating bath by using different electrical load conditions. The method of the present invention is able to determine additive concentrations of different inhibitors effectively during on-line feedback control for adjusting the amount of additives in the electroplating bath to maintain the additive concentrations within pre-defined limits during device production.
摘要翻译： 本发明提供了通过使用不同的电负载条件在电镀浴中同时确定至少两种抑制剂的添加剂浓度的精确，快速和成本有效的方法。 本发明的方法能够在在线反馈控制期间有效地测定不同抑制剂的添加剂浓度，以调节电镀槽中的添加剂的量，以在装置生产期间将添加剂浓度保持在预定限度内。
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公开(公告)号：US12044737B2
公开(公告)日：2024-07-23
申请号：US17568695
申请日：2022-01-04
发明人： Minjie Xu , Meng Chen , Yaofeng Sun
IPC分类号： G01R31/367 , G01R31/3842 , G01R31/392
CPC分类号： G01R31/367 , G01R31/392
摘要： Used batteries are screened based on a measured Sectional Constant-Current Impulse Ratio (SCCIR). A used battery is partially charged over a small voltage range using a Constant Current (CC) until a voltage target is reached, and the current integrated to obtain the CC charge applied, Qcc. Then the battery continues to be charged using a Constant Voltage (CV) of the voltage target until the charging current falls to a midrange current target before the battery is fully charged. The current is integrated over the CV period to obtain the CV charge applied, Qcv. The measured SCCIR is the ratio of Qcc to (Qcc+Qcv) and is input to a calibration curve function to obtain a modeled State of Health (SOH) value for sorting. The calibration curve function is obtained by aging new batteries to obtain SCCIR and SOH data that are modeled using a neural network.
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公开(公告)号：US11124890B2
公开(公告)日：2021-09-21
申请号：US16398339
申请日：2019-04-30
发明人： Yaofeng Sun , Shaoqin Xie , Liya Zheng
IPC分类号： C25D21/14 , G01N27/42 , G01N33/208
摘要： Provided herein is a method for measuring a concentration of a metal ion in an electrodeposition solution. The method of the present disclosure can substantially reduce the interference of organic additives and different electrode conditions on voltammetric metal ion concentration measurements.
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公开(公告)号：US10100420B2
公开(公告)日：2018-10-16
申请号：US14983508
申请日：2015-12-29
发明人： Yaofeng Sun , Minjie Xu , Shun Yee Lao , Shu Kin Yau
IPC分类号： C25D3/38
摘要： The presently claimed invention provides a plating additive for electrodeposition, and the corresponding fabrication method thereof. The plating additive of the present invention enables to electroplate holes on a substrate with good height uniformity within a feature and among features at different diameters.
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