Process for self-aligned flare point and shield throat definition prior to main pole patterning
    2.
    发明授权
    Process for self-aligned flare point and shield throat definition prior to main pole patterning 有权
    在主极图案化之前,自对准耀斑和屏蔽喉定义的过程

    公开(公告)号:US07881010B2

    公开(公告)日:2011-02-01

    申请号:US11956277

    申请日:2007-12-13

    IPC分类号: G11B5/187

    摘要: A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.

    摘要翻译: 一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。 该方法包括将磁性写入极材料沉积在衬底上,然后将磁性材料沉积在写入极材料上,随后是非磁性材料。 形成第一掩模,其具有前边缘以限定次级火炬点的位置,并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。 第一个掩模由配置为定义写入极的第二个掩模代替,并且执行离子铣削来定义写入极点。 从磁性层和非磁性层的阴影形成扩张的次级耀斑点。

    Magnetic write head having a stair notched, steep shouldered pole and a write gap bump
    3.
    发明授权
    Magnetic write head having a stair notched, steep shouldered pole and a write gap bump 失效
    磁性写头具有阶梯式切口,陡峭的肩部极点和写入间隙凸起

    公开(公告)号:US07675709B2

    公开(公告)日:2010-03-09

    申请号:US11525789

    申请日:2006-09-21

    IPC分类号: G11B5/31 G11B5/187

    摘要: A magnetic write head structure that maximizes write field strength while minimizing stray fields. The write pole structure maximizes write field strength by minimizing saturation of the magnetic pole tips, and minimizes stray field writing by preventing magnetic fields from extending laterally from the sides of the magnetic pole. The write head structure includes a write pole having a pole tip configured with a stair notched shape and a steep shouldered base beneath the stair notched portion. This configuration maximizes the amount of flux that can be delivered to the pole tip while also avoiding stray fields. The magnetic pole can also be configured with wing shaped extensions that extend laterally from the pole tip region but which are recessed from the ABS by a desired amount. The magnetic write head structure can be manufactured by forming a magnetic pole with a raised portion, depositing a write gap material over the magnetic pole and then forming a magnetic pedestal over the magnetic pole and write gap, the pedestal having a width significantly smaller than the width of the raised portion of the magnetic pole, a first ion mill can then be performed to notch and trim the magnetic pole. Then a non-magnetic layer such as alumina can be deposited and a second ion mill performed to form a stair notched configuration. An alumina bump can be formed prior to ion milling to provide a mask for forming the laterally extending, recessed wings in the pole tip of the magnetic pole.

    摘要翻译: 磁写头结构,使写入场强度最大化,同时最小化杂散场。 写磁极结构通过最小化磁极尖端的饱和度来最大化写入场强度,并且通过防止磁场从磁极的侧面横向延伸来最小化杂散磁场写入。 写头结构包括具有构造为具有阶梯形切口形状的极尖的写入极和在阶梯切口部下方的陡峭的肩部基座。 该配置最大化可以传送到极尖的通量,同时也避免杂散场。 磁极还可以配置有翼形延伸部,其从极尖区域横向延伸,但是从ABS凹入所需量。 可以通过形成具有凸起部分的磁极来制造磁性写入头结构,在磁极上沉积写入间隙材料,然后在磁极和写入间隙上形成磁性基座,该基座具有明显小于 磁极的凸起部分的宽度,然后可以执行第一离子磨机来切割和修整磁极。 然后可以沉积诸如氧化铝的非磁性层,并且执行第二离子磨,以形成阶梯形缺口构型。 可以在离子研磨之前形成氧化铝凸块,以提供用于在磁极的极尖中形成横向延伸的凹入的翼的掩模。

    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge
    6.
    发明申请
    Perpendicular magnetic write head having a magnetic write pole with a concave trailing edge 有权
    具有磁写入磁极的垂直磁性写头具有凹形后缘

    公开(公告)号:US20070258167A1

    公开(公告)日:2007-11-08

    申请号:US11411556

    申请日:2006-04-25

    IPC分类号: G11B5/147

    摘要: A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

    摘要翻译: 用于垂直磁记录的磁写头,具有带有凹后缘的写极。 磁性写入极可以具有梯形形状,其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽,并且如果包括后屏蔽,则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能,例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极,掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层,并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层,并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

    P1 write pole with shoulder formation and method of fabrication
    7.
    发明申请
    P1 write pole with shoulder formation and method of fabrication 失效
    P1写杆与肩部形成和制造方法

    公开(公告)号:US20060171069A1

    公开(公告)日:2006-08-03

    申请号:US11046740

    申请日:2005-01-31

    IPC分类号: G11B5/147

    CPC分类号: G11B5/1871 G11B5/3116

    摘要: A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.

    摘要翻译: 公开了一种包括写头的磁盘驱动器头,该写头包括具有基座部分的P 1层,在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。 还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器,以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

    Fabricating perpendicular write elements in perpendicular magnetic recording heads
    10.
    发明授权
    Fabricating perpendicular write elements in perpendicular magnetic recording heads 失效
    在垂直磁记录头中制造垂直写入元件

    公开(公告)号:US07648731B2

    公开(公告)日:2010-01-19

    申请号:US11380154

    申请日:2006-04-25

    IPC分类号: B05D5/12

    CPC分类号: G11B5/1278 G11B5/3163

    摘要: Methods of fabricating perpendicular write elements for perpendicular magnetic recording heads are discussed. In write element fabrication, write poles are fabricated according to one of many desired methods. The write poles during fabrication are typically covered by a hard mask and a photolithographic soft mask. According to the methods described herein, the soft mask is removed such as by chemical etching. The hard mask is then removed, such as by CMP and ion etching, to expose the write poles. Shield gap material may then be deposited on the write poles to define the shield gap between the write poles and the trailing shields. Trailing shield material may then be deposited on the shield gap material to form the trailing shields corresponding with the write poles.

    摘要翻译: 讨论了制造垂直磁记录头垂直写入元件的方法。 在写入元件制造中,根据许多期望的方法之一制造写入极。 制造期间的写入极通常被硬掩模和光刻软掩模覆盖。 根据本文描述的方法,例如通过化学蚀刻去除软掩模。 然后去除硬掩模,例如通过CMP和离子蚀刻,以暴露写入极。 然后可以将屏蔽间隙材料沉积在写入极上以限定写入极和后部屏蔽之间的屏蔽间隙。 然后可以将后挡板材料沉积在屏蔽间隙材料上以形成对应于写入极的后挡板。