Polymer for forming organic anti-reflective coating layer
    1.
    发明授权
    Polymer for forming organic anti-reflective coating layer 失效
    用于形成有机抗反射涂层的聚合物

    公开(公告)号:US08178639B2

    公开(公告)日:2012-05-15

    申请号:US12485480

    申请日:2009-06-16

    摘要: A polymer for forming an organic anti-reflective coating layer, which is soluble in alkali solutions so that an additional etching process of anti-reflective coating layer is not required, and a composition including the same are disclosed. The polymer for forming an organic anti-reflective coating layer has the following formula. Wherein, R1 is a hydrogen atom (H) or a methyl group (—CH3), R2 is a sulfur atom (S) or an oxygen atom (O), R3 is a group containing 1 to 20 carbon atoms and a terminal hydroxyl group, R4 is an alkylene group or a cycloalkylene group, and if necessary, a hetero atom is contained therein, and a, b and c independently represent weight % of repeating units constituting the polymer, and are 1 to 98 weight %, 1 to 98 weight %, and 1 to 98 weight %, respectively.

    摘要翻译: 公开了一种用于形成有机抗反射涂层的聚合物,其可溶于碱溶液,使得不需要抗反射涂层的另外的蚀刻工艺,以及包含其的组合物。 用于形成有机抗反射涂层的聚合物具有下式。 其中,R 1为氢原子(H)或甲基(-CH 3),R 2为硫原子(S)或氧原子(O),R 3为含有1〜20个碳原子的末端羟基 ,R4为亚烷基或亚环烷基,根据需要,含有杂原子,a,b和c分别表示构成聚合物的重复单元的重量%,为1〜98重量%,1〜98 重量%和1至98重量%。

    POLYMER FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER
    2.
    发明申请
    POLYMER FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER 失效
    用于形成有机抗反射涂层的聚合物

    公开(公告)号:US20100266967A1

    公开(公告)日:2010-10-21

    申请号:US12485480

    申请日:2009-06-16

    摘要: A polymer for forming an organic anti-reflective coating layer, which is soluble in alkali solutions so that an additional etching process of anti-reflective coating layer is not required, and a composition including the same are disclosed. The polymer for forming an organic anti-reflective coating layer has the following formula. Wherein, R1 is a hydrogen atom (H) or a methyl group (—CH3), R2 is a sulfur atom (S) or an oxygen atom (O), R3 is a group containing 1 to 20 carbon atoms and a terminal hydroxyl group, R4 is an alkylene group or a cycloalkylene group, and if necessary, a hetero atom is contained therein, and a, b and c independently represent weight % of repeating units constituting the polymer, and are 1 to 98 weight %, 1 to 98 weight %, and 1 to 98 weight %, respectively.

    摘要翻译: 公开了一种用于形成有机抗反射涂层的聚合物,其可溶于碱溶液,使得不需要抗反射涂层的另外的蚀刻工艺,以及包含其的组合物。 用于形成有机抗反射涂层的聚合物具有下式。 其中,R 1为氢原子(H)或甲基(-CH 3),R 2为硫原子(S)或氧原子(O),R 3为含有1〜20个碳原子的末端羟基 ,R4为亚烷基或亚环烷基,根据需要,含有杂原子,a,b和c分别表示构成聚合物的重复单元的重量%,为1〜98重量%,1〜98 重量%和1至98重量%。

    ISOCYANURATE COMPOUND FOR FORMING ORGANIC ANTI-REFLECTIVE LAYER AND COMPOSITION INCLUDING SAME
    3.
    发明申请
    ISOCYANURATE COMPOUND FOR FORMING ORGANIC ANTI-REFLECTIVE LAYER AND COMPOSITION INCLUDING SAME 有权
    用于形成有机抗反射层的异氰酸酯化合物和包括其的组合物

    公开(公告)号:US20120164338A1

    公开(公告)日:2012-06-28

    申请号:US13393682

    申请日:2010-09-14

    摘要: An isocyanurate compound for forming an organic anti-reflective coating layer, which has superior stability and etch rate at a high temperature, and which has a high refractive index, is represented by following Formula 1. In Formula 1, R is independently a hydrogen atom or a methyl group, R1 is independently a chain type or ring type saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 6 of hetero atoms, and R2 independently a chain type or ring type saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 15 of hetero atoms, wherein, R1 can have at least two bonding parts, and in the case that R1 has at least two bonding parts, the rest parts except R1 of the compounds represented by Formula 1 can connect to the R1 to form a polymer structure.

    摘要翻译: 用于形成有机抗反射涂层的异氰脲酸酯化合物,其在高温下具有优异的稳定性和蚀刻速率,并且具有高折射率,由下式1表示。在式1中,R独立地为氢原子 或甲基,R 1独立地为含有0〜6个杂原子的1〜15个碳原子的链型或环型饱和或不饱和烃基,R2独立地为1〜1的链型或环型饱和或不饱和烃基 含有0〜15个杂原子的15个碳原子,其中,R1可以具有至少两个键合部分,并且在R1具有至少两个键合部分的情况下,由式1表示的化合物除了R1之外的其余部分可以连接到 R1形成聚合物结构。

    Monomer for forming organic anti-reflective coating layer, polymer thereof and composition including the same
    5.
    发明授权
    Monomer for forming organic anti-reflective coating layer, polymer thereof and composition including the same 失效
    用于形成有机抗反射涂层的单体,其聚合物和包含其的组合物

    公开(公告)号:US07629110B2

    公开(公告)日:2009-12-08

    申请号:US11945895

    申请日:2007-11-27

    摘要: A monomer for forming an organic anti-reflective coating layer, a polymer thereof and a composition including the same are disclosed. In a photolithography process, the organic anti-reflective coating layer absorbs an exposed light between a layer to be etched and a photoresist layer, and prevents a photoresist pattern from collapsing due to a standing wave generated under the photoresist layer. The polymer for forming an organic anti-reflective coating layer includes a repeating unit represented by Formula wherein, R1 is a hydrogen atom, a methyl group or an ethyl group, R2 is a C1˜C20 alkylene group, a C3˜C20 cycloalkylene group or a C6˜C20 aromatic hydrocarbon group, POSS is a polyhedral-oligomeric-silsesquioxane, and m is an integer of 2 to 110.

    摘要翻译: 公开了用于形成有机抗反射涂层的单体,其聚合物和包含其的组合物。 在光刻工艺中,有机抗反射涂层吸收被蚀刻层和光致抗蚀剂层之间的暴露光,并且防止光致抗蚀剂图案由于在光致抗蚀剂层下产生的驻波而塌陷。 用于形成有机抗反射涂层的聚合物包括由式表示的重复单元,其中R1是氢原子,甲基或乙基,R2是C1〜C20亚烷基,C3〜C20亚环烷基或 C6〜C20芳香族烃基,POSS为多面体 - 低聚倍半硅氧烷,m为2〜110的整数。

    Polymer for organic anti-reflective coating layer and composition including the same
    6.
    发明授权
    Polymer for organic anti-reflective coating layer and composition including the same 失效
    用于有机抗反射涂层的聚合物及包含其的组合物

    公开(公告)号:US07829650B2

    公开(公告)日:2010-11-09

    申请号:US11952324

    申请日:2007-12-07

    IPC分类号: G03F7/11 C08G77/00

    摘要: A polymer which has siloxane group at a main chain thereof and a composition including the same, for forming an organic anti-reflective coating layer are disclosed. The polymer for forming an organic anti-reflective coating layer is represented by following Formula. In Formula, R is hydrogen atom, C1˜C20 alkyl group, C1˜C10 alcohol group or epoxy group, R1 is independently hydrogen atom, n is an integer of 1-50, R2 is C1˜C20 alkyl group, C3˜C20 cycloalkyl group, C6˜C20 aryl group or C7˜C12 arylalkyl group, R3 is hydrogen atom, C1˜C10 alcohol group or epoxy group and POSS is a polyhedral oligosilsesquioxane.

    摘要翻译: 公开了一种在其主链上具有硅氧烷基团的聚合物及其组合物,用于形成有机抗反射涂层。 用于形成有机抗反射涂层的聚合物由下式表示。 在式中,R为氢原子,C 1 -C 20烷基,C 1〜C 10醇基或环氧基,R 1独立地为氢原子,n为1-50的整数,R 2为C 1〜C 20烷基,C 3〜C 20环烷基 基团,C 6〜C 20芳基或C 7〜C 12芳烷基,R 3为氢原子,C 1〜C 10醇基或环氧基,POSS为多面体低聚倍半硅氧烷。

    POLYMER FOR ORGANIC ANTI-REFLECTIVE COATING LAYER AND COMPOSITION INCLUDING THE SAME
    8.
    发明申请
    POLYMER FOR ORGANIC ANTI-REFLECTIVE COATING LAYER AND COMPOSITION INCLUDING THE SAME 失效
    有机抗反射涂层用聚合物及其组合物

    公开(公告)号:US20080213701A1

    公开(公告)日:2008-09-04

    申请号:US11952324

    申请日:2007-12-07

    IPC分类号: G03F7/30 F21V9/04 C08G77/04

    摘要: A polymer which has siloxane group at a main chain thereof and a composition including the same, for forming an organic anti-reflective coating layer are disclosed. The polymer for forming an organic anti-reflective coating layer is represented by following Formula. In Formula, R is hydrogen atom, C1˜C20 alkyl group, C1˜C10 alcohol group or epoxy group, R1 is independently hydrogen atom, n is an integer of 1-50, R2 is C1˜C20 alkyl group, C3˜C20 cycloalkyl group, C6˜C20 aryl group or C7˜C12 arylalkyl group, R3 is hydrogen atom, C1˜C10 alcohol group or epoxy group and POSS is a polyhedral oligosilsesquioxane.

    摘要翻译: 公开了一种在其主链上具有硅氧烷基团的聚合物及其组合物,用于形成有机抗反射涂层。 用于形成有机抗反射涂层的聚合物由下式表示。 在式中,R是氢原子,C 1 -C 20烷基,C 1 -C 10烷基 基团或环氧基团,R 1独立地是氢原子,n是1-50的整数,R 2是C 1 -C 6烷基, C 20 -C 20烷基,C 3 -C 20环烷基,C 6 -C 20烷基,C 1 -C 20烷基,C 3 -C 20环烷基,C 6 -C 20 >芳基或C 7-12 C 12芳烷基,R 3是氢原子,C 1 -C 4 醇基或环氧基,POSS是多面体低聚倍半硅氧烷。