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公开(公告)号：US20240200935A1
公开(公告)日：2024-06-20
申请号：US18089547
申请日：2022-12-27
Applicant: Industrial Technology Research Institute
Inventor： Hsiang-Chun Wei , Chun-Wei Lo , Chung-Lun Kuo , Chih-Hsiang Liu
CPC classification number: G01B11/254 , G01B11/2441
Abstract: A measurement system including an excitation light source, an image sensor, and a calculator is provided. The excitation light source is configured to emit an excitation light beam. The image sensor is configured to record an image of the excitation light beam passing through a glass substrate having a plurality of vias. The image is a 2D interference pattern. The calculator is electrically connected to the image sensor. The calculator analyzes a 3D geometric-structure image of the vias in the glass substrate according to the image. A measurement method is also provided.
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2.发明公开公开(公告)号：US20230152086A1
公开(公告)日：2023-05-18
申请号：US17562019
申请日：2021-12-27
Applicant: Industrial Technology Research Institute
Inventor： Hsiang-Chun Wei , Chih-Hsiang Liu , Yi-Sha Ku , Chung-Lun Kuo , Chun-Wei Lo , Chieh-Yi Lo
IPC: G01B11/22 , G01B9/02 , G01B9/02015
CPC classification number: G01B11/22 , G01B9/02049 , G01B9/0203
Abstract: A heterogeneous integration detecting method and a heterogeneous integration detecting apparatus are provided. The heterogeneous integration detecting method includes the following. Under the condition of maintaining the same relative distance between an interference objective lens and a sample, the relative posture of the interference objective lens and the sample is continuously adjusted according to the change of an image of the sample in the field of view of the interference objective lens until a first optical axis of the interference objective lens is determined to be substantially perpendicular to the surface of the sample according to the image. The interference objective lens is replaced with an imaging objective lens and the geometric profile of at least one via of the sample is detected. A second optical axis of the imaging objective lens after replacement overlaps with the first optical axis of the interference objective lens before replacement.
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公开(公告)号：US12203971B2
公开(公告)日：2025-01-21
申请号：US18075431
申请日：2022-12-06
Applicant: Industrial Technology Research Institute
Inventor： Yan-Rung Lin , Chih-Hsiang Liu , Chung-Lun Kuo
Abstract: A method for inspecting LED dies includes the following steps. First electrodes and second electrodes of LED dies to be inspected are short-circuited via a conductive layer on an inspection substrate, or an inspection bias voltage is applied between the first electrodes and the second electrodes of the LED dies. An excitation light is irradiated on the LED dies to be inspected on the inspection substrate such that the LED dies to be inspected emit a secondary light. When the first electrodes and the second electrodes of the LED dies to be inspected are open, short-circuited, and/or subjected to the inspection bias voltage, the secondary light is captured via an optical sensor. An output of the optical sensor is received via a computer and a spectrum difference of the secondary light is calculated to determine whether the LED dies are abnormal or to classify the LED dies to be inspected.
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公开(公告)号：US12099053B2
公开(公告)日：2024-09-24
申请号：US17563701
申请日：2021-12-28
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Hsiang-Chun Wei , Chih-Hsiang Liu , Chung-Lun Kuo , Chun-Wei Lo , Chia-Hung Cho , Wei-Hsiung Tsai
CPC classification number: G01N33/505 , G01N15/1433 , G03H1/0005 , G03H1/0443 , G03H1/0866 , G06T7/0012 , G03H2001/0033 , G03H2001/005 , G06T2207/10056 , G06T2207/10064 , G06T2207/20081 , G06T2207/20084 , G06T2207/30024
Abstract: A method of training AI for label-free cell viability determination includes a step of providing a cell sample, a step of obtaining a fluorescence image and a DHM image of the cell sample, a step of determining a first cell viability of the cell sample according to the fluorescence image of the cell sample, a step of labeling the DHM image of the cell sample as a model specifying the first cell viability, and a step of performing AI training by using the model containing the DHM image of the cell sample.
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公开(公告)号：US11474144B2
公开(公告)日：2022-10-18
申请号：US16907120
申请日：2020-06-19
Applicant: Industrial Technology Research Institute
Inventor： Yan-Rung Lin , Chung-Lun Kuo , Chih-Hsiang Liu , Shie-Chang Jeng
Abstract: An inspection apparatus including an illumination light source, a sensing probe and a processing device is provided. The illumination light source emits an illumination beam to simultaneously irradiate the plurality of light-emitting diode. The sensing probe is configured to measure a charge distribution, an electric field distribution, or a voltage distribution on the plurality of light-emitting diodes simultaneously irradiated by the illumination beam. The processing device determines a plurality of electro-optical characteristics of the plurality of light-emitting diodes through the charge distribution, the electric field distribution, or the voltage distribution on the plurality of light-emitting diodes simultaneously irradiated by the illumination beam. Moreover, a method of for inspecting light-emitting diodes is also provided.
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Patent Agency Ranking
6.发明授权公开(公告)号：US12007221B2
公开(公告)日：2024-06-11
申请号：US17562019
申请日：2021-12-27
Applicant: Industrial Technology Research Institute
Inventor： Hsiang-Chun Wei , Chih-Hsiang Liu , Yi-Sha Ku , Chung-Lun Kuo , Chun-Wei Lo , Chieh-Yi Lo
IPC: G01B11/22 , G01B9/02 , G01B9/02015
CPC classification number: G01B11/22 , G01B9/0203 , G01B9/02049
Abstract: A heterogeneous integration detecting method and a heterogeneous integration detecting apparatus are provided. The heterogeneous integration detecting method includes the following. Under the condition of maintaining the same relative distance between an interference objective lens and a sample, the relative posture of the interference objective lens and the sample is continuously adjusted according to the change of an image of the sample in the field of view of the interference objective lens until a first optical axis of the interference objective lens is determined to be substantially perpendicular to the surface of the sample according to the image. The interference objective lens is replaced with an imaging objective lens and the geometric profile of at least one via of the sample is detected. A second optical axis of the imaging objective lens after replacement overlaps with the first optical axis of the interference objective lens before replacement.
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公开(公告)号：US20230184819A1
公开(公告)日：2023-06-15
申请号：US18075431
申请日：2022-12-06
Applicant: Industrial Technology Research Institute
Inventor： Yan-Rung Lin , Chih-Hsiang Liu , Chung-Lun Kuo
CPC classification number: G01R31/2635 , G06T7/0004 , G06T2207/30148
Abstract: A method for inspecting LED dies includes the following steps. First electrodes and second electrodes of LED dies to be inspected are short-circuited via a conductive layer on an inspection substrate, or an inspection bias voltage is applied between the first electrodes and the second electrodes of the LED dies. An excitation light is irradiated on the LED dies to be inspected on the inspection substrate such that the LED dies to be inspected emit a secondary light. When the first electrodes and the second electrodes of the LED dies to be inspected are open, short-circuited, and/or subjected to the inspection bias voltage, the secondary light is captured via an optical sensor. An output of the optical sensor is received via a computer and a spectrum difference of the secondary light is calculated to determine whether the LED dies are abnormal or to classify the LED dies to be inspected.
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公开(公告)号：US11507020B2
公开(公告)日：2022-11-22
申请号：US17028012
申请日：2020-09-22
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor： Hsiang-Chun Wei , Chung-Lun Kuo , Chia-Hung Cho , Chun-Wei Lo , Chih-Hsiang Liu
IPC: G03H1/04 , G06T15/08 , G01B9/02091 , G03H1/00
Abstract: An optical measurement system comprises a polarization beam splitter for dividing an incident beam into a reference beam and a measurement beam, a first beam splitter for reflecting the measurement beam to form a first reflected measurement beam, a spatial light modulator for modulating the first reflected measurement beam to form a modulated measurement beam, a condenser lens for focusing the modulated measurement beam to an object to form a penetrating measurement beam, an objective lens for converting the penetrating measurement beam into a parallel measurement beam, a mirror for reflecting the parallel measurement beam to form an object beam, a second beam splitter for reflecting the reference beam to a path coincident with that of the object beam, and a camera for receiving an interference signal generated by the reference beam and the object beam to generate an image of the object.
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公开(公告)号：US11002783B2
公开(公告)日：2021-05-11
申请号：US16231607
申请日：2018-12-24
Applicant: Industrial Technology Research Institute
Inventor： Yan-Rung Lin , Chih-Hsiang Liu , Shie-Chang Jeng
Abstract: A method for inspecting light-emitting diodes (LEDs) including following steps is provided. A plurality of LEDs are provided. A charge distribution, an electrical field distribution, or a voltage distribution on the LEDs that are irradiated by an illumination beam at the same time are inspected by a sensing probe, so as to determine electro-optical characteristics of the LEDs. Besides, an inspection apparatus is also provided.
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公开(公告)号：US20200371152A1
公开(公告)日：2020-11-26
申请号：US16907120
申请日：2020-06-19
Applicant: Industrial Technology Research Institute
Inventor： Yan-Rung Lin , Chung-Lun Kuo , Chih-Hsiang Liu , Shie-Chang Jeng
Abstract: An inspection apparatus including an illumination light source, a sensing probe and a processing device is provided. The illumination light source emits an illumination beam to simultaneously irradiate the plurality of light-emitting diode. The sensing probe is configured to measure a charge distribution, an electric field distribution, or a voltage distribution on the plurality of light-emitting diodes simultaneously irradiated by the illumination beam. The processing device determines a plurality of electro-optical characteristics of the plurality of light-emitting diodes through the charge distribution, the electric field distribution, or the voltage distribution on the plurality of light-emitting diodes simultaneously irradiated by the illumination beam. Moreover, a method of for inspecting light-emitting diodes is also provided.
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