MULTI-CHANNEL STACK NANOWIRE
    1.
    发明申请

    公开(公告)号:US20250081571A1

    公开(公告)日:2025-03-06

    申请号:US18238594

    申请日:2023-08-28

    Abstract: A semiconductor structure includes a plurality of gate-all-around field effect transistors, each of the gate-all-around field effect transistors including: first and second source-drain regions; a plurality of nanowire channels interconnecting the first and second source-drain regions; and a common gate. The common gate includes an upper gate portion above the plurality of nanowire channels and a lower gate portion surrounding the plurality of nanowire channels. A unitary spacer structure includes an upper spacer portion between the upper gate portion and the first and second source-drain regions and a lower spacer portion between the lower gate portion and first and second source-drain regions. The upper spacer portion and the lower spacer portion have aligned left and right edges.

    SEMICONDUCTOR STRUCTURE WITH DIFFERENT CRYSTALLINE ORIENTATIONS

    公开(公告)号:US20230090017A1

    公开(公告)日:2023-03-23

    申请号:US17479522

    申请日:2021-09-20

    Abstract: A semiconductor structure comprises a semiconductor substrate including a first silicon substrate component having a first crystalline orientation and a second silicon substrate component over the first silicon substrate and having a second crystalline orientation different from the first crystalline orientation. The semiconductor substrate defines a trench extending through the second silicon substrate component and at least partially within the first silicon substrate component. A gallium nitride structure is disposed within the trench of the semiconductor substrate.

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