公开(公告)号：US20080197282A1

公开(公告)日：2008-08-21

申请号：US12031754

申请日：2008-02-15

申请人： Yoshihiko Nakayama ,  Isao Nagaoki ,  Ryoichi Ishii

发明人： Yoshihiko Nakayama ,  Isao Nagaoki ,  Ryoichi Ishii

IPC分类号： G01N23/00

CPC分类号： H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/2804

摘要： There is provided a scanning transmission charged particle beam device by which charged particles of a bright-field image and charged particles of a dark-field image may be clearly separated, and bright-field images and dark-field images with high accuracy may be obtained even in a state in which the scanning range of a charged particle beams on a sample is changed.A deflecting coil is provided below a sample, and a charged particle detector for a dark-field image with an opening is provided below the deflecting coil. A charged particle detector for a bright-field image is provided below the above opening. By the deflecting coil below the sample, a charged particle beam for a bright-field image is configured to be synchronized with the scanning of a particle beam, and to be deflected in an opposite direction to the deflected direction of the particle beam. Thereby, a charged particles beam of a bright-field image passes through the opening of the charged particle detector for a dark-field image, and is detected by the charged particle detector for a bright-field image.

摘要翻译： 提供了一种扫描透射带电粒子束装置，通过该扫描透射带电粒子束装置可以清晰地分离亮场图像的带电粒子和暗场图像的带电粒子，并且可以获得高精度的亮场图像和暗视场图像 即使在样品上的带电粒子束的扫描范围发生变化的状态。 在样品下方设置偏转线圈，并且在偏转线圈的下方设置用于具有开口的暗场图像的带电粒子检测器。 在上述开口的下方设置用于明场图像的带电粒子检测器。 通过样品下方的偏转线圈，用于亮场图像的带电粒子束被配置为与粒子束的扫描同步，并且在与粒子束的偏转方向相反的方向上偏转。 因此，亮场图像的带电粒子束通过带电粒子检测器的开口进行暗场图像，并且由带电粒子检测器检测到用于亮场图像。

公开(公告)号：US07838834B2

公开(公告)日：2010-11-23

申请号：US12048775

申请日：2008-03-14

申请人： Isao Nagaoki ,  Yoshihiko Nakayama ,  Ryoichi Ishii

发明人： Isao Nagaoki ,  Yoshihiko Nakayama ,  Ryoichi Ishii

IPC分类号： G01N23/04

CPC分类号： H01J37/26 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/226 ,  H01J2237/2487 ,  H01J2237/2611 ,  H01J2237/2617 ,  H01J2237/262 ,  H01J2237/2802

摘要： As an image forming method including comparison between images for three-dimensional image construction or the like and an apparatus for forming such images, there are provided an image forming method and an electron microscope capable of obtaining with high accuracy or efficiency information required for comparison. In the image forming method, an image is formed on the basis of comparison between a plurality of images obtained by applying an electron beam to a specimen at different tilt angles. The method includes obtaining a first transmission image with the electron beam applied in a first direction and a second transmission image with the electron beam applied in a second direction, the second transmission image being formed within a region different from a peripheral blurred region resulting from tilting, and making a search in the first transmission image by using the second transmission image.

摘要翻译： 作为包括用于三维图像构造等的图像之间的比较的图像形成方法以及用于形成这种图像的装置，提供了能够以高精度或高效率获得比较所需的信息的图像形成方法和电子显微镜。 在图像形成方法中，基于通过以不同的倾斜角将电子束施加到样本而获得的多个图像之间的比较来形成图像。 该方法包括获得具有沿第一方向施加的电子束的第一透射图像和在第二方向上施加电子束的第二透射图像，第二透射图像形成在与由倾斜产生的周边模糊区域不同的区域内 ，并且通过使用第二传输图像在第一传输图像中进行搜索。

公开(公告)号：US08044352B2

公开(公告)日：2011-10-25

申请号：US12392732

申请日：2009-02-25

申请人： Kotaro Hosoya ,  Yoshihiko Nakayama ,  Isao Nagaoki

发明人： Kotaro Hosoya ,  Yoshihiko Nakayama ,  Isao Nagaoki

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/24485

摘要： Using, as a detector, a CCD detector having a CCD element to which a scintillator is closely fixed, a backscattered or scanning transmission image is obtained by the following method. The detector is disposed directly under an objective lens to obtain the backscattered electron image. When one point of a specimen is irradiated with an electron beam, backscattered or transmission electrons generated from the specimen collide with the scintillator to form a luminescent pattern. This pattern is detected by the CCD detector, and stored in a memory. This processing is sequentially repeated for each irradiation position to obtain all the patterns in an electron beam scanning range. Arithmetic processing is performed on each pattern to convert it into an image. Usually, image data for one pixel is calculated from one pattern. By sequentially repeating this, a backscattered or transmission electron image in the electronic beam scanning range can be obtained.

摘要翻译： 使用具有闪烁体紧密固定的CCD元件的CCD检测器作为检测器，通过以下方法获得反向散射或扫描透射图像。 检测器直接设置在物镜的下面，以获得背散射的电子图像。 当用电子束照射样品的一个点时，从样品产生的反向散射或透射电子与闪烁体碰撞以形成发光图案。 该图案由CCD检测器检测，并存储在存储器中。 对于每个照射位置依次重复该处理，以获得电子束扫描范围内的所有图案。 对每个图案进行算术处理，将其转换为图像。 通常，从一个图案计算一个像素的图像数据。 通过顺序地重复该操作，可以获得电子束扫描范围内的反向散射或透射电子图像。

公开(公告)号：US20090242792A1

公开(公告)日：2009-10-01

申请号：US12392732

申请日：2009-02-25

申请人： KOTARO HOSOYA ,  Yoshihiko Nakayama ,  Isao Nagaoki

发明人： KOTARO HOSOYA ,  Yoshihiko Nakayama ,  Isao Nagaoki

IPC分类号： H01J3/14

CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/24485

摘要： Using, as a detector, a CCD detector having a CCD element to which a scintillator is closely fixed, a backscattered or scanning transmission image is obtained by the following method. The detector is disposed directly under an objective lens to obtain the backscattered electron image. When one point of a specimen is irradiated with an electron beam, backscattered or transmission electrons generated from the specimen collide with the scintillator to form a luminescent pattern. This pattern is detected by the CCD detector, and stored in a memory. This processing is sequentially repeated for each irradiation position to obtain all the patterns in an electron beam scanning range. Arithmetic processing is performed on each pattern to convert it into an image. Usually, image data for one pixel is calculated from one pattern. By sequentially repeating this, a backscattered or transmission electron image in the electronic beam scanning range can be obtained.

摘要翻译： 使用具有闪烁体紧密固定的CCD元件的CCD检测器作为检测器，通过以下方法获得反向散射或扫描透射图像。 检测器直接设置在物镜的下面，以获得背散射的电子图像。 当用电子束照射样品的一个点时，从样品产生的反向散射或透射电子与闪烁体碰撞以形成发光图案。 该图案由CCD检测器检测，并存储在存储器中。 对于每个照射位置依次重复该处理，以获得电子束扫描范围内的所有图案。 对每个图案进行算术处理，将其转换为图像。 通常，从一个图案计算一个像素的图像数据。 通过顺序地重复该操作，可以获得电子束扫描范围内的反向散射或透射电子图像。

公开(公告)号：US20140103208A1

公开(公告)日：2014-04-17

申请号：US14002141

申请日：2012-02-29

申请人： Hiroyuki Noda ,  Mitsuru Onuma ,  Isao Nagaoki ,  Shuichi Mamishin

发明人： Hiroyuki Noda ,  Mitsuru Onuma ,  Isao Nagaoki ,  Shuichi Mamishin

IPC分类号： H01J37/22

CPC分类号： H01J37/224 ,  H01J37/16 ,  H01J37/244 ,  H01J37/26

摘要： This electron microscope (20) comprises: a first imaging device (291); a second imaging device (240) that can be moved away from transmitted light (P); and another detection device (260). The second imaging device is disposed in an observation chamber (230) above the first imaging device, and an attachment portion (231) of the other detection device is disposed at a position rotated 90 degrees from the attachment position of the second imaging device on the same plane on which the second imaging device is disposed. Thus, the second imaging means and the other detector can be attached compactly to the observation chamber disposed on the table surface of a mount housing, whereby an electron microscope can be provided in which workability of the devices and effective use of the table surface are achieved.

摘要翻译： 该电子显微镜（20）包括：第一成像装置（291）; 可以远离透射光（P）移动的第二成像装置（240）; 和另一检测装置（260）。 第二成像装置设置在第一成像装置上方的观察室（230）中，另一检测装置的安装部（231）设置在与第二成像装置的安装位置相对旋转90度的位置 设置有第二成像装置的同一平面。 因此，第二成像装置和另一个检测器可以紧凑地附接到设置在安装壳体的台面上的观察室，由此可以提供电子显微镜，其中可以实现装置的可操作性和桌面的有效使用 。

公开(公告)号：US20070176103A1

公开(公告)日：2007-08-02

申请号：US11594222

申请日：2006-11-08

申请人： Hiromi Inada ,  Isao Nagaoki ,  Hiroyuki Kobayashi

发明人： Hiromi Inada ,  Isao Nagaoki ,  Hiroyuki Kobayashi

IPC分类号： G21K7/00

CPC分类号： G01N23/04 ,  G01N23/225 ,  G06K9/00127 ,  H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/223

摘要： The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.

摘要翻译： 本发明提供了一种在电子显微镜的视野中观察样本的方法，包括用具有第一角度的电子束照射样本的动作，并且在视场中形成样本的第一透射图像并调整 电子束到第二角度，并且在视场中形成样本的第二透射图像，并且计算第一透射图像与第二透射图像之间的一致度。

公开(公告)号：US07022989B2

公开(公告)日：2006-04-04

申请号：US10800872

申请日：2004-03-16

申请人： Hiromi Inada ,  Isao Nagaoki ,  Hiroyuki Kobayashi

发明人： Hiromi Inada ,  Isao Nagaoki ,  Hiroyuki Kobayashi

IPC分类号： G01N23/00

CPC分类号： G01N23/04 ,  G01N23/225 ,  G06K9/00127 ,  H01J37/222 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/223

摘要： The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.

公开(公告)号：US06875983B2

公开(公告)日：2005-04-05

申请号：US10098774

申请日：2002-03-19

申请人： Eiko Nakazawa ,  Isao Nagaoki

发明人： Eiko Nakazawa ,  Isao Nagaoki

IPC分类号： H01J37/22 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265 ,  H01J37/28

摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.

摘要翻译： 本发明的目的是提供一种能够在重新开始样品观察时提高工作效率的电子显微镜。 一种用于控制观察条件设置装置的控制单元，包括电子枪控制单元，照射透镜控制单元，物镜控制单元，放大透镜系统控制单元和样本台控制单元 ，被提供。 当指定某个样品的图像数据时，检索样品的观察条件数据。 然后，根据观察条件数据，在电子显微镜上自动恢复与保存样品的图像数据时相同的观察条件。 结果，与存储的图像相同的图像被忠实地恢复。

公开(公告)号：US08928485B2

公开(公告)日：2015-01-06

申请号：US13055589

申请日：2009-06-15

申请人： Hideki Kikuchi ,  Isao Nagaoki ,  Katsuyuki Minakawa

发明人： Hideki Kikuchi ,  Isao Nagaoki ,  Katsuyuki Minakawa

IPC分类号： H01J37/28 ,  H01J37/285 ,  H01J37/21 ,  H01J37/20 ,  H01J37/22

CPC分类号： H01J37/21 ,  H01J37/20 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/20207 ,  H01J2237/226 ,  H01J2237/31749

摘要： The present invention relates to the acquisition of tilted series images of a minute sample in a short time.The present invention relates to: measuring in advance the relation between an amount of focus shift and a degree of coincidence at the time of acquiring tilted series images; calculating backwards a focus shift from the degree of coincidence on the basis of this relation; correcting the focus shift by controlling a stage, an objective lens, and the like; and thus acquiring the tilted series images. In addition, the present invention relates to: acquiring a reference image in advance at the time of photographing the tilted series images; obtaining the correlation between an acquired image and the reference image; and performing, if the degree of coincidence is equal to or smaller than a set value, processing such as the transmission of a warning message and the stop of an image acquisition sequence. According to the present invention, it becomes possible to perform focusing at the time of photographing the tilted series images at high speed, so that the length of time for photographing the tilted series images can be shortened. In addition, an image inappropriate for three-dimensional reconstruction can be removed. This makes it possible to enhance the throughput of failure analysis of a semiconductor and an advanced material.

摘要翻译： 本发明涉及在短时间内采集微小样品的倾斜系列图像。 本发明涉及：在获取倾斜的串联图像时预先测量焦点偏移量与一致度之间的关系; 根据这种关系从巧合程度向后计算重点转移; 通过控制舞台，物镜等来校正焦点偏移; 从而获得倾斜的系列图像。 此外，本发明涉及：在拍摄倾斜的串联图像时预先获取参考图像; 获得所获取的图像和参考图像之间的相关性; 并且如果一致度等于或小于设定值，则执行诸如发送警告消息和停止图像获取序列的处理。 根据本发明，可以高速拍摄倾斜的串联图像时进行聚焦，从而可以缩短用于拍摄倾斜的系列图像的时间长度。 此外，可以去除不适于三维重建的图像。 这使得可以提高半导体和先进材料的故障分析的吞吐量。

公开(公告)号：US20110062327A1

公开(公告)日：2011-03-17

申请号：US12906361

申请日：2010-10-18

申请人： Akiko FUJISAWA ,  Eiko Nakazawa ,  Isao Nagaoki

发明人： Akiko FUJISAWA ,  Eiko Nakazawa ,  Isao Nagaoki

IPC分类号： G01N23/00

CPC分类号： G01N23/04

摘要： There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, in which each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. When the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to another gradation scale and a scanning transmission electron microscope image is obtained.

摘要翻译： 提供了一种带电粒子束装置，其可以防止由于在扫描透射电子显微镜图像的每个像素是视场中的网格的一部分网格进入而不能观察到样本 基于预定灰度级的灰度值显示。 在预定灰度值的像素数不小于预定百分比的情况下，判断网格图像包含在扫描透射电子显微镜图像中。 当扫描透射电子显微镜图像中不再包括网格图像时，将预定灰度级别转换为另一灰度级，并获得扫描透射电子显微镜图像。