摘要:
A cleaning agent for a semiconductor device contains a hydroxide, water and a compound expressed in the following general formula (I) and/or the following general formula (II): HO—((EO)x—(PO)y)z—H (I) R—[(EO)x—(PO)y)z—H]m (II) Thus provided is a cleaning agent for a semiconductor device, which is so improved as not to disconnect a wire or an embedded conductive layer.
摘要:
There is provided a method of efficiently cleaning substrates without damaging a fine pattern formed thereon. It is a method of cleaning one or more substrates in a system processing one or more substrates as one batch by dipping one or more substrates as one batch, including the steps of: immersing one or more substrates as one batch in a wet etching solution; ultrasonically cleaning one or more substrates as one batch; and drying one or more substrates as one batch. The step of ultrasonically cleaning employs a cleaning solution having a gas dissolved therein to have a degree of saturation of 60% to 100% at an atmospheric pressure, and an ultrasonic wave having a frequency of at least 500 kHz and an energy of 0.02 W/cm2 to 0.5 W/cm2.
摘要翻译:提供了一种有效地清洁基板而不损害其上形成的精细图案的方法。 它是通过一次浸渍一个或多个基材来清洗一个或多个基材作为一个批次的系统中的一个或多个基材的方法,包括以下步骤:将一个或多个基材作为一批在一个湿蚀刻溶液中浸渍; 超声波清洗一个或多个基材作为一批; 并将一个或多个基材作为一批干燥。 超声波清洗的步骤使用溶解有气体的清洗液在大气压下具有60〜100%的饱和度,超声波的频率至少为500kHz,能量为0.02W / cm2〜0.5W / cm 2。
摘要:
The present invention provides an inter-bus-bar built-in capacitor capable of reducing the size of a capacitor used in an inverter or the like or downsizing the capacitor, and provides power equipment as well as a power converting apparatus. The inter-bus-bar built-in capacitor is provided between a pair of opposing bus bars and includes a high-dielectric-constant material which has a relative dielectric constant of at least 50 when a voltage of 1,000 V is applied at a temperature of 25° C. Thus, it is possible to provide the inter-bus-bar built-in capacitor capable of reducing the size of a capacitor used in an inverter or the like or downsizing the capacitor and provide the power equipment as well as the power converting apparatus.
摘要:
A surface electrode (5) is installed on the light receiving surface of a solar cell element, the surface electrode (5) comprises three bus bar electrodes (5a) for extracting light-produced at the solar cell element to the outside and collecting finger electrodes (5b) connected to these bus bar electrodes (5a), and the bus bar electrodes (5a) are not less than 0.5 mm and not more than 2 mm in width and the finger electrodes (5b) are not less than 0.05 mm and not more than 0.1 mm in width. A high-efficient solar cell module can be obtained with substantially lowered resistance by increasing the number of bus bar electrode (5a) and thereby decreasing the lengths of the finger electrodes (5b).
摘要:
Disclosed is an inorganic polysilazane that undergoes less shrinkage during a calcination step in an oxidizing agent such as water vapor and is less prone to allow a silica film to suffer from the formation of cracks or peel off from a semiconductor substrate, and a silica film-forming coating liquid containing the inorganic polysilazane, and also provides an inorganic polysilazane and a silica film-forming coating liquid containing the same. The value of A/(B+C) is 0.9-1.5 and the value of (A+B)/C is 4.2-50. A=peak area within the range of from 4.75 ppm to less than 5.4 ppm. B=peak area within the range of from 4.5 ppm to less than 4.75 ppm. Peak area within the range of from 4.2 ppm to less than 4.5 ppm is represented by C in a 1H-NMR spectrum; and the polystyrene-equivalent mass average molecular weight is 2000 to 20000.
摘要翻译:公开了一种无机聚硅氮烷,其在诸如水蒸气的氧化剂中在煅烧步骤中经历较少的收缩,并且不容易使二氧化硅膜发生裂纹或从半导体衬底剥离而形成二氧化硅膜 - 形成含有无机聚硅氮烷的涂布液,并且还提供无机聚硅氮烷和含有该聚硅氮烷的二氧化硅成膜涂布液。 A /(B + C)的值为0.9-1.5,(A + B)/ C的值为4.2〜50。 A = 4.75ppm至小于5.4ppm范围内的峰面积。 B = 4.5ppm至小于4.75ppm范围内的峰面积。 在4.2ppm至小于4.5ppm的范围内的峰面积在1H-NMR光谱中由C表示; 聚苯乙烯当量的质均分子量为2000〜20000。
摘要:
A silicon wafer after being cleaned by using a cleaning liquid is rinsed by using carbonic water. According to such a silicon wafer cleaning method, generation of static due to a rinsing treatment is not caused, so that an electrostatic breakdown is not caused, adhesion of dirt to a cleaned silicon wafer surface due to the static is not caused, adhesion of metal impurities can be prevented in the rinsing treatment of the silicon wafer and, while giving consideration to the cost, furthermore, a rinsing treatment using a clean rinsing liquid free from causing any residue can be performed.
摘要:
A wheel truing apparatus adapted for use in a cylindrical grinding machine wherein a work head with a work spindle for support of a workpiece and a wheel head with a grinding wheel for grinding the workpiece are mounted on a bed for relative movement in a Z-axis direction parallel with the rotation axis of the work spindle and in an X-axis direction crossing the Z-axis direction, characterized in that the wheel truing apparatus comprises a rotary drive portion mounted on the work head or a member united therewith, and a wheel truing tool supported on the rotary drive portion for rotation therewith, the wheel truing tool being provided at its outer periphery with a truing portion for truing a grinding surface of the wheel brought into contact therewith, wherein the rotary drive portion is placed in a position adjacent to said work head in a tooling area defined by a stroke of the relative movements of said wheel head and said work head in the Z-axis direction and apart from said work spindle radially outward and is arranged in such a manner that the rotation axis line of said truing tool is oriented toward the rotation axis line of said grinding wheel in a condition where said truing portion is retained in contact with the grinding surface of said wheel, whereby the truing portion of said tool is brought into contact with the grinding surface of said wheel by relative movement of said wheel head to said work head for truing the grinding surface.
摘要:
A magnetic gear comprises a first permanent magnet field having a plurality of permanent magnet magnetic poles, a second permanent magnet field having a plurality of permanent magnet magnetic poles, number of poles of which magnet is different from that of the first permanent magnet field, and a modulating magnetic pole arranged between the first permanent magnet field and the second permanent magnet field and having a plurality of pole pieces to modulate the number of poles of the first and second permanent magnet fields. Non-magnetic bars are provided between the plurality of pole pieces. One ends of the non-magnetic bars are fixed to a first non-magnetic end holding member and the other ends of the non-magnetic bars are electrically insulated from and fixed to a second non-magnetic end holding member.
摘要:
In a charged particle accelerator, voltage of several tens of kV is applied between accelerating electrodes. In such a case, electric discharge is sometimes generated between the accelerating electrodes. In the charged particle accelerator, part or entirety of the accelerating electrodes is coated with an electric discharge suppressing layer made of ceramics or alloy having a high melting point as compared with metal. When impurity fine particles are accelerated by an electric field and collide with the electrodes, the electric discharge suppressing layer made of ceramics or alloy prevents metal vapor from being easily generated from the electrodes and an ionized plasma from being easily produced, thus suppressing electric discharge between the electrodes.
摘要:
A totally enclosed motor which includes a rotor disposed inside a housing and a heat of the rotor is transferred to the housing, a stator disposed inside the housing and a heat of the stator is transferred to the housing, and an inner fin which is disposed in the rotor and agitates air inside the housing. The totally enclosed motor is cooled by a forced convection by an outer fan disposed outside the housing, or by a natural convention in the vicinity of an outer surface of the housing, and a shape of the rotor is different between one end side and the other end side of the rotor in an extending direction of a rotary shaft of the rotor.