METHOD OF CLEANING SUBSTRATES AND SUBSTRATE CLEANER
    2.
    发明申请
    METHOD OF CLEANING SUBSTRATES AND SUBSTRATE CLEANER 审中-公开
    清洗基板和基板清洗器的方法

    公开(公告)号:US20090014028A1

    公开(公告)日:2009-01-15

    申请号:US12170823

    申请日:2008-07-10

    IPC分类号: B08B3/10 B08B3/12 B08B3/08

    CPC分类号: H01L21/67086 H01L21/6708

    摘要: There is provided a method of efficiently cleaning substrates without damaging a fine pattern formed thereon. It is a method of cleaning one or more substrates in a system processing one or more substrates as one batch by dipping one or more substrates as one batch, including the steps of: immersing one or more substrates as one batch in a wet etching solution; ultrasonically cleaning one or more substrates as one batch; and drying one or more substrates as one batch. The step of ultrasonically cleaning employs a cleaning solution having a gas dissolved therein to have a degree of saturation of 60% to 100% at an atmospheric pressure, and an ultrasonic wave having a frequency of at least 500 kHz and an energy of 0.02 W/cm2 to 0.5 W/cm2.

    摘要翻译: 提供了一种有效地清洁基板而不损害其上形成的精细图案的方法。 它是通过一次浸渍一个或多个基材来清洗一个或多个基材作为一个批次的系统中的一个或多个基材的方法,包括以下步骤:将一个或多个基材作为一批在一个湿蚀刻溶液中浸渍; 超声波清洗一个或多个基材作为一批; 并将一个或多个基材作为一批干燥。 超声波清洗的步骤使用溶解有气体的清洗液在大气压下具有60〜100%的饱和度,超声波的频率至少为500kHz,能量为0.02W / cm2〜0.5W / cm 2。

    Capacitor embedded between busbars, electric power device and electric power conversion device
    3.
    发明授权
    Capacitor embedded between busbars, electric power device and electric power conversion device 有权
    母线,电力装置和电力转换装置之间的电容器

    公开(公告)号:US09105397B2

    公开(公告)日:2015-08-11

    申请号:US13880895

    申请日:2011-10-11

    摘要: The present invention provides an inter-bus-bar built-in capacitor capable of reducing the size of a capacitor used in an inverter or the like or downsizing the capacitor, and provides power equipment as well as a power converting apparatus. The inter-bus-bar built-in capacitor is provided between a pair of opposing bus bars and includes a high-dielectric-constant material which has a relative dielectric constant of at least 50 when a voltage of 1,000 V is applied at a temperature of 25° C. Thus, it is possible to provide the inter-bus-bar built-in capacitor capable of reducing the size of a capacitor used in an inverter or the like or downsizing the capacitor and provide the power equipment as well as the power converting apparatus.

    摘要翻译: 本发明提供一种能够减小逆变器等中使用的电容器的尺寸的集成电路的内置电容器,或者使电容器小型化,并且提供电力设备以及电力转换装置。 母线间内置电容器设置在一对相对的母线之间,并且包括高介电常数材料,当在1000V的温度下施加1,000V的电压时,其具有至少50的相对介电常数 因此,可以提供能够减小逆变器等中使用的电容器的尺寸的母线间内置的电容器,或者使电容器的尺寸缩小,并提供电力设备以及功率 转换装置。

    INORGANIC POLYSILAZANE, SILICA FILM-FORMING COATING LIQUID CONTAINING SAME, AND METHOD FOR FORMING SILICA FILM
    5.
    发明申请
    INORGANIC POLYSILAZANE, SILICA FILM-FORMING COATING LIQUID CONTAINING SAME, AND METHOD FOR FORMING SILICA FILM 审中-公开
    无机多晶硅,二氧化硅薄膜成型液体及其形成硅胶膜的方法

    公开(公告)号:US20140106576A1

    公开(公告)日:2014-04-17

    申请号:US14113305

    申请日:2012-04-09

    IPC分类号: H01L21/02 C09D1/00 C01B21/087

    摘要: Disclosed is an inorganic polysilazane that undergoes less shrinkage during a calcination step in an oxidizing agent such as water vapor and is less prone to allow a silica film to suffer from the formation of cracks or peel off from a semiconductor substrate, and a silica film-forming coating liquid containing the inorganic polysilazane, and also provides an inorganic polysilazane and a silica film-forming coating liquid containing the same. The value of A/(B+C) is 0.9-1.5 and the value of (A+B)/C is 4.2-50. A=peak area within the range of from 4.75 ppm to less than 5.4 ppm. B=peak area within the range of from 4.5 ppm to less than 4.75 ppm. Peak area within the range of from 4.2 ppm to less than 4.5 ppm is represented by C in a 1H-NMR spectrum; and the polystyrene-equivalent mass average molecular weight is 2000 to 20000.

    摘要翻译: 公开了一种无机聚硅氮烷,其在诸如水蒸气的氧化剂中在煅烧步骤中经历较少的收缩,并且不容易使二氧化硅膜发生裂纹或从半导体衬底剥离而形成二氧化硅膜 - 形成含有无机聚硅氮烷的涂布液,并且还提供无机聚硅氮烷和含有该聚硅氮烷的二氧化硅成膜涂布液。 A /(B + C)的值为0.9-1.5,(A + B)/ C的值为4.2〜50。 A = 4.75ppm至小于5.4ppm范围内的峰面积。 B = 4.5ppm至小于4.75ppm范围内的峰面积。 在4.2ppm至小于4.5ppm的范围内的峰面积在1H-NMR光谱中由C表示; 聚苯乙烯当量的质均分子量为2000〜20000。

    METHOD FOR CLEANING SILICON WAFER AND APPARATUS FOR CLEANING SILICON WAFER
    6.
    发明申请
    METHOD FOR CLEANING SILICON WAFER AND APPARATUS FOR CLEANING SILICON WAFER 有权
    用于清洁硅波的方法和用于清洁硅波的装置

    公开(公告)号:US20130291891A1

    公开(公告)日:2013-11-07

    申请号:US13884350

    申请日:2011-11-11

    IPC分类号: H01L21/02

    摘要: A silicon wafer after being cleaned by using a cleaning liquid is rinsed by using carbonic water. According to such a silicon wafer cleaning method, generation of static due to a rinsing treatment is not caused, so that an electrostatic breakdown is not caused, adhesion of dirt to a cleaned silicon wafer surface due to the static is not caused, adhesion of metal impurities can be prevented in the rinsing treatment of the silicon wafer and, while giving consideration to the cost, furthermore, a rinsing treatment using a clean rinsing liquid free from causing any residue can be performed.

    摘要翻译: 通过使用清洗液清洗后的硅晶片通过使用碳酸水进行冲洗。 根据这样的硅晶片清洗方法,不会产生由于进行漂洗处理而产生的静电,所以不会产生静电击穿,不会引起由静电引起的污物对清洗过的硅晶片表面的附着,金属的附着 可以防止在硅晶片的漂洗处理中产生杂质,并且在考虑成本的同时,可以进行使用不产生任何残留物的清洁冲洗液的漂洗处理。

    Truing apparatus of grinding wheel
    7.
    发明授权
    Truing apparatus of grinding wheel 有权
    砂轮修整装置

    公开(公告)号:US08342911B2

    公开(公告)日:2013-01-01

    申请号:US12158465

    申请日:2006-12-20

    IPC分类号: B24B21/18

    CPC分类号: B24B53/053 B24B5/35

    摘要: A wheel truing apparatus adapted for use in a cylindrical grinding machine wherein a work head with a work spindle for support of a workpiece and a wheel head with a grinding wheel for grinding the workpiece are mounted on a bed for relative movement in a Z-axis direction parallel with the rotation axis of the work spindle and in an X-axis direction crossing the Z-axis direction, characterized in that the wheel truing apparatus comprises a rotary drive portion mounted on the work head or a member united therewith, and a wheel truing tool supported on the rotary drive portion for rotation therewith, the wheel truing tool being provided at its outer periphery with a truing portion for truing a grinding surface of the wheel brought into contact therewith, wherein the rotary drive portion is placed in a position adjacent to said work head in a tooling area defined by a stroke of the relative movements of said wheel head and said work head in the Z-axis direction and apart from said work spindle radially outward and is arranged in such a manner that the rotation axis line of said truing tool is oriented toward the rotation axis line of said grinding wheel in a condition where said truing portion is retained in contact with the grinding surface of said wheel, whereby the truing portion of said tool is brought into contact with the grinding surface of said wheel by relative movement of said wheel head to said work head for truing the grinding surface.

    摘要翻译: 一种适用于圆柱形磨床的车轮修整装置,其中具有用于支撑工件的工作主轴的工作头和具有用于研磨工件的砂轮的砂轮头安装在床上以在Z轴上相对运动 方向平行于工作主轴的旋转轴线并且在与Z轴方向交叉的X轴方向上,其特征在于,所述车轮修整装置包括安装在工作头上的旋转驱动部分或与其结合的构件,以及轮 修整工具支撑在旋转驱动部分上以与其一起旋转,轮修整工具在其外周设置有用于修整与其接触的轮的研磨表面的修整部分,其中旋转驱动部分被放置在相邻的位置 在由所述轮头和所述工作头在Z轴方向上的相对运动的行程限定的加工区域中的所述工作头部,并且与所述工件sp 以径向向外的方式设置,使得所述修整工具的旋转轴线在所述修整部保持与所述轮的研磨表面接触的状态下朝向所述砂轮的旋转轴线定向,由此 所述工具的修整部分通过所述轮头相对于所述工作头的相对移动而与所述车轮的磨削表面接触,用于修整研磨表面。

    MAGNETIC GEAR
    8.
    发明申请
    MAGNETIC GEAR 失效
    磁齿轮

    公开(公告)号:US20120194021A1

    公开(公告)日:2012-08-02

    申请号:US13353345

    申请日:2012-01-19

    IPC分类号: H02K49/10

    CPC分类号: H02K49/102

    摘要: A magnetic gear comprises a first permanent magnet field having a plurality of permanent magnet magnetic poles, a second permanent magnet field having a plurality of permanent magnet magnetic poles, number of poles of which magnet is different from that of the first permanent magnet field, and a modulating magnetic pole arranged between the first permanent magnet field and the second permanent magnet field and having a plurality of pole pieces to modulate the number of poles of the first and second permanent magnet fields. Non-magnetic bars are provided between the plurality of pole pieces. One ends of the non-magnetic bars are fixed to a first non-magnetic end holding member and the other ends of the non-magnetic bars are electrically insulated from and fixed to a second non-magnetic end holding member.

    摘要翻译: 磁齿轮包括具有多个永磁体磁极的第一永久磁场,具有多个永磁体磁极的第二永久磁场,磁体的数量与第一永久磁场的极数不同,以及 调制磁极,布置在第一永久磁场和第二永久磁场之间,并且具有多个极片以调制第一和第二永久磁场的极数。 非磁性棒设置在多个极片之间。 非磁性棒的一端被固定到第一非磁性端部保持构件,非磁性棒的另一端与第二非磁性端部保持构件电绝缘并固定到第二非磁性端部保持构件。

    Charged particle accelerator
    9.
    发明授权
    Charged particle accelerator 有权
    带电粒子加速器

    公开(公告)号:US08067907B2

    公开(公告)日:2011-11-29

    申请号:US12388135

    申请日:2009-02-18

    IPC分类号: H05H9/00

    摘要: In a charged particle accelerator, voltage of several tens of kV is applied between accelerating electrodes. In such a case, electric discharge is sometimes generated between the accelerating electrodes. In the charged particle accelerator, part or entirety of the accelerating electrodes is coated with an electric discharge suppressing layer made of ceramics or alloy having a high melting point as compared with metal. When impurity fine particles are accelerated by an electric field and collide with the electrodes, the electric discharge suppressing layer made of ceramics or alloy prevents metal vapor from being easily generated from the electrodes and an ionized plasma from being easily produced, thus suppressing electric discharge between the electrodes.

    摘要翻译: 在带电粒子加速器中,在加速电极之间施加几十kV的电压。 在这种情况下,有时会在加速电极之间产生放电。 在带电粒子加速器中,加速电极的一部分或全部涂覆有与金属相比具有高熔点的陶瓷或合金制成的放电抑制层。 当杂质微粒被电场加速并与电极碰撞时,由陶瓷或合金制成的放电抑制层防止金属蒸气容易地从电极产生,并且电离等离子体容易产生,从而抑制 电极。

    TOTALLY ENCLOSED MOTOR
    10.
    发明申请
    TOTALLY ENCLOSED MOTOR 有权
    全封闭电机

    公开(公告)号:US20110181138A1

    公开(公告)日:2011-07-28

    申请号:US13014079

    申请日:2011-01-26

    IPC分类号: H02K9/08

    CPC分类号: H02K9/08 H02K1/32 H02K9/14

    摘要: A totally enclosed motor which includes a rotor disposed inside a housing and a heat of the rotor is transferred to the housing, a stator disposed inside the housing and a heat of the stator is transferred to the housing, and an inner fin which is disposed in the rotor and agitates air inside the housing. The totally enclosed motor is cooled by a forced convection by an outer fan disposed outside the housing, or by a natural convention in the vicinity of an outer surface of the housing, and a shape of the rotor is different between one end side and the other end side of the rotor in an extending direction of a rotary shaft of the rotor.

    摘要翻译: 包括设置在壳体内的转子和转子的热量的全封闭电动机被传递到壳体,设置在壳体内部的定子并且定子的热量被传递到壳体,并且内部翅片设置在 转子并搅动壳体内的空气。 全封闭马达通过外壳的外部风扇的强制对流或外壳外表面附近的自然惯例进行冷却,转子的形状在一端和另一端之间是不同的 在转子的旋转轴的延伸方向上的转子的端侧。