PERHYDROPOLYSILAZANE, COMPOSITION CONTAINING SAME, AND METHOD FOR FORMING SILICA FILM USING SAME
    5.
    发明申请
    PERHYDROPOLYSILAZANE, COMPOSITION CONTAINING SAME, AND METHOD FOR FORMING SILICA FILM USING SAME 有权
    PERHYDROOLYSILAZANE,包含它们的组合物和使用其形成二氧化硅膜的方法

    公开(公告)号:US20160379817A1

    公开(公告)日:2016-12-29

    申请号:US15039440

    申请日:2014-12-08

    IPC分类号: H01L21/02 C09D1/00 C01B21/087

    摘要: [Problem] To provide a perhydropolysilazane making it possible to form a siliceous film with minimal defects, and a curing composition comprising the perhydropolysilazane.[Means for Solution] The present invention provides a perhydropolysilazane having a weight-average molecular weight of 5,000 to 17,000, characterized in that when 1H-NMR of a 17% by weight solution of said perhydropolysilazane dissolved in xylol is measured, the ratio of the amount of SiH1,2 based on the aromatic ring hydrogen content of the xylol is 0.235 or less and the ratio of the amount of NH based on the aromatic ring hydrogen content of the xylol is 0.055 or less, and a curing composition comprising the perhydropolysilazane. The present invention also provides a method for forming a siliceous film, comprising coating the curing composition on a substrate and heating.

    摘要翻译: [解决方案]本发明提供重均分子量为5,000〜17,000的全氢聚硅氮烷,其特征在于,测定17重量%的所述全氢聚硅氮烷溶解在二甲苯中的溶液的1H-NMR, 基于二甲苯的芳环氢含量的SiH1.2的量为0.235或更小,并且基于二羟甲基的芳环氢含量的NH的量的比例为0.055或更小,以及包含全氢聚硅氮烷的固化组合物。 本发明还提供一种形成硅质膜的方法,其包括将固化组合物涂覆在基材上并加热。

    GAS BARRIER FILM AND METHOD FOR PRODUCING THE SAME
    10.
    发明申请
    GAS BARRIER FILM AND METHOD FOR PRODUCING THE SAME 审中-公开
    气体阻隔膜及其制造方法

    公开(公告)号:US20160108282A1

    公开(公告)日:2016-04-21

    申请号:US14893824

    申请日:2014-05-26

    发明人: Hirohide ITO

    摘要: [Object] To provide a means capable of further improving gas barrier capabilities and durability of gas barrier capabilities for a gas barrier film.[Solving Means] A gas barrier film having: a substrate; a first barrier layer that is arranged on at least one surface of the substrate, has a film density of 1.5 to 2.1 g/cm3, and includes an inorganic compound; and a second barrier layer that is formed on the surface of the substrate on the same side where the first barrier layer is formed and includes silicon atoms, oxygen atoms, and at least one added element selected from the group consisting of elements of Groups 2-14 of the long form of the periodic table (excluding silicon and carbon), the abundance ratio of oxygen atoms to silicon atoms (O/Si) being 1.4 to 2.2, and the abundance ratio of nitrogen atoms to silicon atoms (N/Si) being 0 to 0.4.

    摘要翻译: 提供能够进一步提高气体阻隔性能的气体阻隔性能和耐气体阻隔性能的耐久性的手段。 [解决方案]一种阻气膜,具有:基材; 布置在基板的至少一个表面上的第一阻挡层具有1.5至2.1g / cm 3的膜密度,并且包括无机化合物; 以及第二阻挡层,其形成在与形成有第一阻挡层的同一侧的基板的表面上,并且包括硅原子,氧原子和至少一种添加元素,所述添加元素选自2- 14周期表(不包括硅和碳),氧原子与硅原子(O / Si)的丰度比为1.4〜2.2,氮原子与硅原子的丰度比(N / Si) 为0至0.4。