摘要:
A method for removing one or more particles from a surface of an object is provided. The method has first and second steps of detecting and locating the one or more particles on the surface of the object. In a third step, focused energy is directed onto one or more of the detected particles to break a bond energy between the one or more particles and the surface thereby removing the one or more particles from the surface. In preferred variations of the method of the present invention, the object is a semiconductor wafer and the directed focused energy is in the form of a laser. Also provided is an apparatus for removing the plurality of particles from the surface of the object. The apparatus includes a detector for detecting and locating the plurality of particles on the surface of the object, and a laser for directing focused energy on one or more of the detected particles to break a bond energy between the one or more particles and the surface thereby removing the one or more particles from the surface.
摘要:
A device, system, and method are directed towards communicating mobile information over a network. A mobile message (MM) is generated by an Internet Protocol (IP) enabled application interface. The MM may include advertising information. The MM is received at a routing server and comprises a destination phone number and/or advertising information. If the MM is determined to be locally processed, the routing server selectively routes the MM to a destination carrier associated with the destination phone number. If the MM is determined to be remotely processed, the MM is recursively forwarded until the MM reaches another routing server associated with the destination phone number. The other routing server is configured to selectively route the MM to the destination carrier. A response MM may be received at a boundary routing server.
摘要:
A network device, method, and apparatus are directed towards intercepting a message, such as an SMS, EMS, MMS message, email message, or the like, from a source device directed towards a mobile device. The intercepted message's contents are analyzed. In addition, a mobile user profile is determined from characteristics of the mobile device and tracked usage of a mobile user of the mobile device. An actionable event may then be inserted into the intercepted message based, in part, on the analysis and the mobile user profile. The modified message is then provided to the mobile device, where the mobile user may select the actionable event to receive non-requested content.
摘要:
A device, system, and method are directed towards communicating mobile information over a network. A mobile message (MM) is generated by an Internet Protocol (IP) enabled application interface. The MM may include advertising information. The MM is received at a routing server and comprises a destination phone number and/or advertising information. If the MM is determined to be locally processed, the routing server selectively routes the MM to a destination carrier associated with the destination phone number. If the MM is determined to be remotely processed, the MM is recursively forwarded until the MM reaches another routing server associated with the destination phone number. The other routing server is configured to selectively route the MM to the destination carrier. A response MM may be received at a boundary routing server. The response MM may be sent to the API if at least a portion of the response MM matches information associated with the MM.
摘要:
The present invention is an apparatus and method for extending the life of abrasive disks used in the conditioning of polishing pads used in chemical mechanical planarization (CMP) of polishing pads used to polish and/or planarize the surfaces of semiconductor wafers during the production of integrated circuits. The invention consists of the a disk comprising a plurality of abrasive segments, each of which is fixed in tangential and radial relationship to one another about the common axis of rotation of the conditioning disk. Means are provided for movement of the abrasive segments, individually or in sets, into or out of the plane of the active abrasive surface of the conditioning disk according to the present invention.
摘要:
Reduction of a wafer removing force on a chemical mechanical planarization (CMP) tool that includes planarizing a wafer on a platen at a wafer/platen interface; applying carbonated water to the wafer/platen interface so as to reduce the removing force; and removing the wafer from the platen.
摘要:
An apparatus and method are provided for cleaning (removing) contaminating particles and/or films from substrate surfaces such as semiconductor wafers during the fabrication process for making electronic components. The method and apparatus use a liquified gas contained in a distributor which has been energized with megasonic energy in the distributor and the energized liquefied gas directed as a stream against the surface to be cleaned from an outlet distribution nozzle of the distributor. The stream is preferably impinged on the substrate surface at an acute angle. The preferred liquified gas is carbon dioxide.
摘要:
A device, system, and method are directed towards communicating mobile information over a network. A mobile message (MM) is generated by an Internet Protocol (IP) enabled application interface. The MM may include advertising information. The MM is received at a routing server and comprises a destination phone number and/or advertising information. If the MM is determined to be locally processed, the routing server selectively routes the MM to a destination carrier associated with the destination phone number. If the MM is determined to be remotely processed, the MM is recursively forwarded until the MM reaches another routing server associated with the destination phone number. The other routing server is configured to selectively route the MM to the destination carrier. A response MM may be received at a boundary routing server. The response MM may be sent to the API if at least a portion of the response MM matches information associated with the MM.
摘要:
Methods and apparatus are described by which one or more input words may be predicted based on partial input from a user using a predictive model that employs contextual metadata which characterizes the user in a multi-dimensional space in which the dimensions are defined by one or more of a spatial aspect, a temporal aspect, a social aspect, or a topical aspect.
摘要:
Processes and apparatuses are disclosed for detecting and characterizing SiCOH-based dielectric materials during integrated circuit fabrication. The processes generally include chromatographically analyzing a fluid stream generated during a process employed for device fabrication, e.g., during a wet strip, a chemical mechanical planarization process and the like.