公开(公告)号：US20070172386A1

公开(公告)日：2007-07-26

申请号：US10367075

申请日：2003-02-14

申请人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

发明人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

IPC分类号： B01L3/00

CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。

公开(公告)号：US20070262050A1

公开(公告)日：2007-11-15

申请号：US11008402

申请日：2004-12-09

申请人： Jene Golovchenko ,  Gavin King ,  Gregor Schurmann ,  Daniel Branton

发明人： Jene Golovchenko ,  Gavin King ,  Gregor Schurmann ,  Daniel Branton

IPC分类号： C03C25/68 ,  B44C1/22

CPC分类号： C23C14/06 ,  B82Y10/00 ,  C23C14/5873 ,  H01J37/3005 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01L21/02238 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/31662 ,  H01L21/3185 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891

摘要： The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.

摘要翻译： 本发明提供了一种用于在结构上形成图案化材料层的方法，其通过将蒸汽冷凝在结构表面上的固体冷凝物层，然后通过将所选择的能量束引导到选定的区域来局部去除冷凝物层的选定区域 地区。 然后可以将结构加工成具有结构表面上的图案化固体冷凝物层的至少一部分，然后去除固体冷凝物层。 此外，通过在冷凝物层的至少一个选定区域处引导能量束，可以刺激固体冷凝物层和结构之间的局部反应。

公开(公告)号：US20070128357A1

公开(公告)日：2007-06-07

申请号：US11008438

申请日：2004-12-09

申请人： Daniel Branton ,  Jene Golovchenko ,  Gavin King ,  Warren MoberlyChan ,  Gregor Schurmann

发明人： Daniel Branton ,  Jene Golovchenko ,  Gavin King ,  Warren MoberlyChan ,  Gregor Schurmann

IPC分类号： C23C16/00

CPC分类号： C23C14/5873 ,  B82Y10/00 ,  C23C14/541 ,  H01L21/0331 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891

摘要： The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.

摘要翻译： 本发明提供了一种用于在结构上形成图案化材料层的方法，其通过将蒸汽冷凝在结构表面上的固体冷凝物层，然后通过将所选择的能量束引导到选定的区域来局部去除冷凝物层的选定区域 区域，在所选择的区域暴露结构。 然后将材料层沉积在固体冷凝物层的顶部和所选区域处的暴露结构。 然后去除沉积在固体冷凝物层上的固体冷凝物层和材料层的区域，在结构上留下图案化的材料层。