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    ION BEAM SCULPTING OF MULTIPLE DISTINCT MATERIALS
    1.
    发明申请
    ION BEAM SCULPTING OF MULTIPLE DISTINCT MATERIALS 有权
    多晶异质材料的离子束雕刻

    公开(公告)号：US20070172386A1

    公开(公告)日：2007-07-26

    申请号：US10367075

    申请日：2003-02-14

    申请人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    发明人： Jiali Li ,  Derek Stein ,  Gregor Schurmann ,  Gavin King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    IPC分类号： B01L3/00

    CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

    摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

    摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。

    Solid state molecular probe device
    4.
    发明授权
    Solid state molecular probe device 有权
    固态分子探针装置

    公开(公告)号：US07258838B2

    公开(公告)日：2007-08-21

    申请号：US10367075

    申请日：2003-02-14

    申请人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    发明人： Jiali Li ,  Derek M. Stein ,  Gregor M. Schurmann ,  Gavin M. King ,  Jene Golovchenko ,  Daniel Branton ,  Michael Aziz

    IPC分类号： H01L29/00 ,  H01L47/00 ,  G01N15/06 ,  G01N33/00 ,  G01N33/48

    CPC分类号： G01N33/48721 ,  Y10S977/70 ,  Y10S977/701 ,  Y10S977/712 ,  Y10S977/72 ,  Y10S977/762 ,  Y10S977/84 ,  Y10S977/902 ,  Y10S977/92 ,  Y10S977/953 ,  Y10S977/957

    摘要： A solid state nanopore device including two or more materials and a method for fabricating the same. The device includes a solid state insulating membrane having an exposed surface, a conductive material disposed on at least a portion of the exposed surface of the solid state membrane, and a nanopore penetrating an area of the conductive material and at least a portion of the solid state membrane. During fabrication a conductive material is applied on a portion of a solid state membrane surface, and a nanopore of a first diameter is formed. When the surface is exposed to an ion beam, material from the membrane and conductive material flows to reduce the diameter of the nanopore. A method for evaluating a polymer molecule using the solid state nanopore device is also described. The device is contacted with the polymer molecule and the molecule is passed through the nanopore, allowing each monomer of the polymer molecule to be monitored.

    摘要翻译： 包括两种或多种材料的固体纳米孔装置及其制造方法。 该装置包括具有暴露表面的固态绝缘膜，设置在固态膜的暴露表面的至少一部分上的导电材料，以及穿透导电材料区域的纳米孔和固体的至少一部分 状态膜。 在制造期间，将导电材料施加在固态膜表面的一部分上，并且形成第一直径的纳米孔。 当表面暴露于离子束时，来自膜的材料和导电材料流动以减小纳米孔的直径。 还描述了使用固态纳米孔装置评估聚合物分子的方法。 该装置与聚合物分子接触，分子通过纳米孔，允许监测聚合物分子的每个单体。

    Material deposition techniques for control of solid state aperture surface properties
    5.
    发明申请
    Material deposition techniques for control of solid state aperture surface properties 有权
    用于控制固态孔径表面性质的材料沉积技术

    公开(公告)号：US20050241933A1

    公开(公告)日：2005-11-03

    申请号：US11015349

    申请日：2004-12-17

    申请人： Daniel Branton ,  Roy Gordon ,  Peng Chen ,  Toshiyuki Mitsui ,  Damon Farmer ,  Jene Golovchenko

    发明人： Daniel Branton ,  Roy Gordon ,  Peng Chen ,  Toshiyuki Mitsui ,  Damon Farmer ,  Jene Golovchenko

    IPC分类号： C23C14/32

    CPC分类号： G01N33/48721 ,  B82Y15/00

    摘要： The invention provides a method for molecular analysis. In the method, sidewalls are formed extending through a structure between two structure surfaces, to define an aperture. A layer of material is deposited on the aperture sidewalls and the two structure surfaces. The aperture with the deposited material layer is then configured in a liquid solution with a gradient in a chemical potential, between the two structure surfaces defining the aperture, that is sufficient to cause molecular translocation through the aperture.

    摘要翻译： 本发明提供了一种分子分析方法。 在该方法中，形成延伸穿过两个结构表面之间的结构的侧壁，以限定孔。 一层材料沉积在孔侧壁和两个结构表面上。 然后将具有沉积材料层的孔配置在具有化学势的梯度的液体溶液中，限定孔的两个结构表面之间，足以使分子易位穿过孔。

    Controlled Fabrication of Nanopores in Nanometric Solid State Materials
    7.
    发明申请
    Controlled Fabrication of Nanopores in Nanometric Solid State Materials 有权
    纳米固体材料中纳米孔的控制制备

    公开(公告)号：US20140079936A1

    公开(公告)日：2014-03-20

    申请号：US14004743

    申请日：2012-03-14

    申请人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

    发明人： Christopher John Russo ,  Jene Golovchenko ,  Daniel Branton

    IPC分类号： B81C1/00

    CPC分类号： B81B1/002 ,  B81B2201/0214 ,  B81B2203/0127 ,  B81B2207/056 ,  B81C1/00087 ,  G01N33/48721

    摘要： In a method of forming a nanopore in a nanometric material, a nanopore nucleation site is formed at a location that is interior to lateral edges of the nanometric material by directing a first energetic beam, selected from the group of ion beam and neutral atom beam, at the interior location for a first time duration that imposes a first beam dose which causes removal of no more than five interior atoms from the interior location to produce at the interior location a nanopore nucleation site having a plurality of edge atoms. A nanopore is then formed at the nanopore nucleation site by directing a second energetic beam, selected from the group consisting of electron beam, ion beam, and neutral atom beam, at the nanopore nucleation site with a beam energy that removes edge atoms at the nanopore nucleation site but does not remove bulk atoms from the nanometric material.

    摘要翻译： 在纳米孔内形成纳米孔的方法中，通过引导选自离子束和中性原子束组的第一能量束，在纳米材料的横向边缘内部的位置处形成纳米孔成核位点， 在内部位置处施加第一束剂量，其引起从内部位置移除不超过五个内部原子，以在内部位置产生具有多个边缘原子的纳米孔成核位点。 然后在纳米孔成核位置通过在纳米孔成核位置引入从由电子束，离子束和中性原子束组成的组中选择的第二能量束，以纳米孔成核位点形成纳米孔，该束能量去除纳米孔上的边缘原子 但不能从纳米材料中去除体原子。

    Control of solid state dimensional features
    10.
    发明授权
    Control of solid state dimensional features 有权
    控制固态尺寸特征

    公开(公告)号：US06464842B1

    公开(公告)日：2002-10-15

    申请号：US09599137

    申请日：2000-06-22

    申请人： Jene A. Golovchenko ,  Daniel Branton ,  Derek M. Stein ,  Ciaran J. McMullan ,  Jiali Li

    发明人： Jene A. Golovchenko ,  Daniel Branton ,  Derek M. Stein ,  Ciaran J. McMullan ,  Jiali Li

    IPC分类号： C23C1434

    CPC分类号： B81C99/0065 ,  G01N33/48721

    摘要： There is provided controlled fabrication of a solid state structural feature on a solid state structure by exposing the structure to a fabrication process environment the conditions of which are selected to produce a prespecified feature in the structure. A physical detection species is directed toward a designated structure location during process environment exposure of the structure, and the detection species is detected in a trajectory from traversal of the designated structure location, to indicate changing physical dimensions of the prespecified feature. The fabrication process environment is then controlled in response to the physical species detection to fabricate the structural feature. Also provided is a method for controlling a physical dimension of a structural feature or to form a feature by exposing the structure to a flux of ions at a selected structure temperature, the exposure conditions being controlled to cause formation of the feature or to cause at least one physical dimension of the feature to be changed, substantially by transport of material of the structure to the structural feature in response to the ion flux exposure.

    摘要翻译： 通过将结构暴露于制造工艺环境中来提供在固态结构上的固态结构特征的受控制造，其制造过程环境被选择以在结构中产生预先指定的特征。 在结构的过程环境暴露期间，物理检测物质指向指定的结构位置，并且在从指定结构位置的遍历的轨迹中检测检测物种，以指示预先指定的特征的变化的物理尺寸。 然后响应于物理物种检测来控制制造工艺环境以制造结构特征。 还提供了一种用于通过在所选择的结构温度下将结构暴露于离子通量来控制结构特征的物理尺寸或形成特征的方法，所述暴露条件被控制以引起特征的形成或至少引起 基本上通过将结构材料转移到响应于离子通量暴露的结构特征而要改变的特征的一个物理尺寸。