Process for preparing coumarin sulfonates
    8.
    发明授权
    Process for preparing coumarin sulfonates 失效
    香豆素磺酸盐的制备方法

    公开(公告)号:US5773591A

    公开(公告)日:1998-06-30

    申请号:US813106

    申请日:1997-03-07

    CPC分类号: C07D311/56

    摘要: A novel process for preparing sulfonic acid esters and amides of benzo-heterocyclic diazo diketo compounds, such as substituted diazo-4-oxo-3,4-dihydrocoumarins, which are useful synthetic intermediates in a wide variety of applications including photoresists, opto-electronics, agricultural, and pharmaceutical applications is disclosed and claimed. The process comprises the steps of (a) subjecting a substituted benzo-heterocyclic .beta.-keto-enol compound to suitable diazo transfer conditions in the presence of a diazo transfer agent; (b) subjecting the so formed diazo diketo compound to suitable halosulfonation conditions in the presence of a halosulfonation agent; and (c) subjecting the so formed halosulfonyl aromatic compound to suitable substitution reaction in the presence of an alcohol or an amine to form the corresponding sulfonic acid ester or amide of benzo-heterocyclic diazo diketo compound. The compounds formed from the process of the present invention exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.

    摘要翻译: 一种用于制备苯并杂环重氮二酮化合物的磺酸酯和酰胺的新方法,例如取代的重氮-4-氧代-3,4-二氢香豆素,其在各种应用中是有用的合成中间体,包括光致抗蚀剂,光电子 ,农业和药物应用被公开和要求保护。 该方法包括以下步骤:(a)在重氮转移剂存在下使取代的苯并杂环的β-酮 - 烯醇化合物进行合适的重氮转移条件; (b)在卤代磺化剂的存在下使如此形成的重氮二酮化合物进行适当的卤代磺化条件; 和(c)使这样形成的卤代磺酰基芳族化合物在醇或胺的存在下进行适当的取代反应,形成相应的苯并杂环重氮二酮化合物的磺酸酯或酰胺。 由本发明方法形成的化合物在深紫外(DUV)区域(约250nm)中表现出非常高的光敏性,因此可用作DUV光致抗蚀剂制剂中的光活性化合物。