公开(公告)号：US07153335B2

公开(公告)日：2006-12-26

申请号：US10683232

申请日：2003-10-10

申请人： Junaid Ahmed Siddiqui ,  Timothy Frederick Compton ,  Bin Hu ,  Robin Edward Richards

发明人： Junaid Ahmed Siddiqui ,  Timothy Frederick Compton ,  Bin Hu ,  Robin Edward Richards

IPC分类号： C09G1/02 ,  C09G1/04 ,  C09K13/14 ,  B24B1/00

CPC分类号： C09G1/02

摘要： A composition and associated method for chemical mechanical planarization (or other polishing) are described which afford high tantalum to copper selectivity in copper CMP and which are tunable (in relation to polishing performance). The composition comprises an abrasive and an N-acyl-N-hydrocarbonoxyalkyl aspartic acid compound and/or a tolyltriazole derivative.

摘要翻译： 描述了用于化学机械平面化（或其他抛光）的组合物和相关方法，其在铜CMP中提供高的钽到铜选择性，并且其可调谐（相对于抛光性能）。 该组合物包含磨料和N-酰基-N-烃氧烷基天冬氨酸化合物和/或甲苯基三唑衍生物。

公开(公告)号：US07351662B2

公开(公告)日：2008-04-01

申请号：US11233110

申请日：2005-09-22

申请人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo, II ,  Robin Edward Richards ,  Timothy Frederick Compton

发明人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo, II ,  Robin Edward Richards ,  Timothy Frederick Compton

IPC分类号： H01L21/302

CPC分类号： H01L21/31053 ,  B24B37/044 ,  C09G1/02 ,  C09K3/1463

摘要： A low solids-content slurry for polishing (e.g., chemical mechanical planarization) of substrates comprising a dielectric and an associated method using the slurry are described. The slurry and associated method afford high removal rates of dielectric during polishing even though the slurry has low solids-content. The slurry comprises a bicarbonate salt, which acts as a catalyst for increasing removal rates of dielectric films during polishing of these substrates.

摘要翻译： 描述了一种用于抛光（例如化学机械平面化）的含固体含量低的浆料，其包含电介质和使用该浆料的相关方法。 浆料和相关方法在抛光过程中提供高电介质的去除速率，即使浆料具有低的固体含量。 该浆料包括碳酸氢盐，其作为用于在抛光这些基材期间提高介电膜的去除速率的催化剂。

公开(公告)号：US07691287B2

公开(公告)日：2010-04-06

申请号：US11700526

申请日：2007-01-31

申请人： Junaid Ahmed Siddiqui ,  Timothy Frederick Compton ,  Robin Edward Richards

发明人： Junaid Ahmed Siddiqui ,  Timothy Frederick Compton ,  Robin Edward Richards

IPC分类号： C09K13/00

CPC分类号： C09G1/02 ,  B24B37/044

摘要： A method of polishing a substrate with a polishing composition comprising an oxidizing agent and abrasive particles having a surface, said surface of the abrasive particles being at least partially modified with 1) at least one stabilizer compound comprising aluminum, boron, tungsten, or both, said stabilizer compound being bound via a covalent bond to said abrasive particles, and 2) an organic chelating compound, said chelating compound being bound via a covalent bond to said stabilizer compound. The organic chelating compounds include one or more of 1) a nitrogen-containing moiety and between one and five other polar groups; 2) a sulfur-containing moiety and between one and five other polar groups; and 3) between two and five polar groups selected from carboxylic acid groups or salts thereof and hydroxyl groups.

摘要翻译： 一种用包含氧化剂和具有表面的磨料颗粒的抛光组合物抛光基材的方法，所述磨料颗粒的所述表面至少部分地用1）至少一种包含铝，硼，钨或两者的稳定剂化合物进行改性， 所述稳定剂化合物通过共价键与所述研磨颗粒结合，和2）有机螯合化合物，所述螯合化合物通过共价键与所述稳定剂化合物结合。 有机螯合化合物包括1）含氮部分和1至5个其它极性基团中的一种或多种; 2）含硫部分和1至5个其它极性基团; 和3）选自羧酸基团或其盐和羟基的两个和五个极性基团之间。

公开(公告)号：US20080182485A1

公开(公告)日：2008-07-31

申请号：US11700526

申请日：2007-01-31

申请人： Junaid Ahmed Siddiqui ,  Timothy Frederick Compton ,  Robin Edward Richards

发明人： Junaid Ahmed Siddiqui ,  Timothy Frederick Compton ,  Robin Edward Richards

IPC分类号： C09K3/00 ,  B24B1/00

CPC分类号： C09G1/02 ,  B24B37/044

摘要： A method of polishing a substrate with a polishing composition comprising an oxidizing agent and abrasive particles having a surface, said surface of the abrasive particles being at least partially modified with 1) at least one stabilizer compound comprising aluminum, boron, tungsten, or both, said stabilizer compound being bound via a covalent bond to said abrasive particles, and 2) an organic chelating compound, said chelating compound being bound via a covalent bond to said stabilizer compound. The organic chelating compounds include one or more of 1) a nitrogen-containing moiety and between one and five other polar groups; 2) a sulfur-containing moiety and between one and five other polar groups; and 3) between two and five polar groups selected from carboxylic acid groups or salts thereof and hydroxyl groups.

摘要翻译： 一种用包含氧化剂和具有表面的磨料颗粒的抛光组合物抛光基材的方法，所述磨料颗粒的所述表面至少部分地用1）至少一种包含铝，硼，钨或两者的稳定剂化合物进行改性， 所述稳定剂化合物通过共价键与所述研磨颗粒结合，和2）有机螯合化合物，所述螯合化合物通过共价键与所述稳定剂化合物结合。 有机螯合化合物包括1）含氮部分和1至5个其它极性基团中的一种或多种; 2）含硫部分和1至5个其它极性基团; 和3）选自羧酸基团或其盐和羟基的两个和五个极性基团之间。

公开(公告)号：US06979252B1

公开(公告)日：2005-12-27

申请号：US11030503

申请日：2005-01-06

申请人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo, II ,  Rajat Kapoor ,  Tara Ranae Keefover ,  Robin Edward Richards

发明人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo, II ,  Rajat Kapoor ,  Tara Ranae Keefover ,  Robin Edward Richards

IPC分类号： B24B1/00 ,  B24B37/04 ,  C09G1/02 ,  H01L21/3105

CPC分类号： C09G1/02 ,  B24B37/044 ,  H01L21/31053

摘要： A low defectivity colloidal silica-based product slurry for use in chemical mechanical planarization (CMP) and an associated production method are described. The product slurry is produced using centrifugation of and optionally with addition of a surfactant to a starting colloidal silica (which can be a commercially available colloidal silica). The product slurry has substantially lower levels of soluble polymeric silicates than does the starting colloidal silica and affords lower defectivity levels when used in a slurry for CMP processing than does the starting colloidal silica.

摘要翻译： 描述了用于化学机械平面化（CMP）的低缺陷性胶体二氧化硅基产物浆料和相关的生产方法。 产物浆料通过离心和任选加入表面活性剂至起始胶态二氧化硅（其可以是可商购的胶体二氧化硅）来制备。 与起始胶体二氧化硅相比，产物浆料在起始胶态二氧化硅中的可溶性聚合物硅酸盐含量基本上较低，并且在用于CMP加工的浆料中时比起始胶体二氧化硅提供较低的缺陷率水平。

公开(公告)号：US08114775B2

公开(公告)日：2012-02-14

申请号：US12352700

申请日：2009-01-13

申请人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo ,  Steven Masami Aragaki ,  Robin Edward Richards

发明人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo ,  Steven Masami Aragaki ,  Robin Edward Richards

IPC分类号： H01L21/302

CPC分类号： C09K3/1463 ,  C09G1/02 ,  H01L21/02074 ,  H01L21/3212 ,  H01L21/32125

摘要： A chemical mechanical polishing composition contains 1) water, 2) optionally an abrasive material, 3) an oxidizer, preferably a per-type oxidizer, 4) a small amount of soluble metal-ion oxidizer/polishing accelerator, a metal-ion polishing accelerator bound to particles such as to abrasive particles, or both; and 5) at least one of the group selected from a) a small amount of a chelator, b) a small amount of a dihydroxy enolic compound, and c) a small amount of an organic accelerator. Ascorbic acid in an amount less than 800 ppm, preferably between about 100 ppm and 500 ppm, is the preferred dihydroxy enolic compound. The polishing compositions and processes are useful for substantially all metals and metallic compounds found in integrated circuits, but is particularly useful for tungsten. The present invention also pertains to surface-modified colloidal abrasive polishing compositions and associated methods of using these compositions, particularly for chemical mechanical planarization, wherein the slurry comprises low levels of chelating free radical quenchers, non-chelating free radical quenchers, or both.

摘要翻译： 化学机械抛光组合物包含1）水，2）任选的研磨材料，3）氧化剂，优选每种型氧化剂，4）少量可溶性金属离子氧化剂/抛光促进剂，金属离子抛光促进剂 与颗粒结合，例如磨料颗粒或两者; 和5）选自a）少量螯合剂中的至少一种，b）少量的二羟基烯醇化合物，和c）少量的有机促进剂。 少于800ppm，优选在约100ppm和500ppm之间的抗坏血酸是优选的二羟基烯醇化合物。 抛光组合物和方法对于在集成电路中发现的基本上所有的金属和金属化合物都是有用的，但对钨尤其有用。 本发明还涉及表面改性的胶体研磨抛光组合物以及使用这些组合物，特别是用于化学机械平面化的相关方法，其中浆料包含低水平的螯合自由基猝灭剂，非螯合自由基猝灭剂或二者。

公开(公告)号：US07476620B2

公开(公告)日：2009-01-13

申请号：US11387934

申请日：2006-03-24

申请人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo ,  Steven Masami Aragaki ,  Robin Edward Richards

发明人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo ,  Steven Masami Aragaki ,  Robin Edward Richards

IPC分类号： H01L21/302

CPC分类号： C09K3/1463 ,  C09G1/02 ,  H01L21/02074 ,  H01L21/3212 ,  H01L21/32125

摘要： A chemical mechanical polishing composition contains 1) water, 2) optionally an abrasive material, 3) an oxidizer, preferably a per-type oxidizer, 4) a small amount of soluble metal-ion oxidizer/polishing accelerator, a metal-ion polishing accelerator bound to particles such as to abrasive particles, or both; and 5) at least one of the group selected from a) a small amount of a chelator, b) a small amount of a dihydroxy enolic compound, and c) a small amount of an organic accelerator. Ascorbic acid in an amount less than 800 ppm, preferably between about 100 ppm and 500 ppm, is the preferred dihydroxy enolic compound. The polishing compositions and processes are useful for substantially all metals and metallic compounds found in integrated circuits, but is particularly useful for tungsten. The present invention also pertains to surface-modified colloidal abrasive polishing compositions and associated methods of using these compositions, particularly for chemical mechanical planarization, wherein the slurry comprises low levels of chelating free radical quenchers, non-chelating free radical quenchers, or both.

摘要翻译： 化学机械抛光组合物包含1）水，2）任选的研磨材料，3）氧化剂，优选每种型氧化剂，4）少量可溶性金属离子氧化剂/抛光促进剂，金属离子抛光促进剂 与颗粒结合，例如磨料颗粒或两者; 和5）选自a）少量螯合剂中的至少一种，b）少量的二羟基烯醇化合物，和c）少量的有机促进剂。 少于800ppm，优选在约100ppm和500ppm之间的抗坏血酸是优选的二羟基烯醇化合物。 抛光组合物和方法对于在集成电路中发现的基本上所有的金属和金属化合物都是有用的，但对钨尤其有用。 本发明还涉及表面改性的胶体研磨抛光组合物以及使用这些组合物，特别是用于化学机械平面化的相关方法，其中浆料包含低水平的螯合自由基猝灭剂，非螯合自由基猝灭剂或二者。

公开(公告)号：US20090308836A1

公开(公告)日：2009-12-17

申请号：US12352700

申请日：2009-01-13

申请人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo ,  Steven Masaml Aragaki ,  Robin Edward Richards

发明人： Junaid Ahmed Siddiqui ,  Daniel Hernandez Castillo ,  Steven Masaml Aragaki ,  Robin Edward Richards

IPC分类号： B44C1/22 ,  C09K13/00

CPC分类号： C09K3/1463 ,  C09G1/02 ,  H01L21/02074 ,  H01L21/3212 ,  H01L21/32125

摘要： A chemical mechanical polishing composition contains 1) water, 2) optionally an abrasive material, 3) an oxidizer, preferably a per-type oxidizer, 4) a small amount of soluble metal-ion oxidizer/polishing accelerator, a metal-ion polishing accelerator bound to particles such as to abrasive particles, or both; and 5) at least one of the group selected from a) a small amount of a chelator, b) a small amount of a dihydroxy enolic compound, and c) a small amount of an organic accelerator. Ascorbic acid in an amount less than 800 ppm, preferably between about 100 ppm and 500 ppm, is the preferred dihydroxy enolic compound. The polishing compositions and processes are useful for substantially all metals and metallic compounds found in integrated circuits, but is particularly useful for tungsten. The present invention also pertains to surface-modified colloidal abrasive polishing compositions and associated methods of using these compositions, particularly for chemical mechanical planarization, wherein the slurry comprises low levels of chelating free radical quenchers, non-chelating free radical quenchers, or both.

摘要翻译： 化学机械抛光组合物包含1）水，2）任选的研磨材料，3）氧化剂，优选每种型氧化剂，4）少量可溶性金属离子氧化剂/抛光促进剂，金属离子抛光促进剂 与颗粒结合，例如磨料颗粒或两者; 和5）选自a）少量螯合剂中的至少一种，b）少量的二羟基烯醇化合物，和c）少量的有机促进剂。 少于800ppm，优选在约100ppm和500ppm之间的抗坏血酸是优选的二羟基烯醇化合物。 抛光组合物和方法对于在集成电路中发现的基本上所有的金属和金属化合物都是有用的，但对钨尤其有用。 本发明还涉及表面改性的胶体研磨抛光组合物以及使用这些组合物，特别是用于化学机械平面化的相关方法，其中浆料包含低水平的螯合自由基猝灭剂，非螯合自由基猝灭剂或二者。

公开(公告)号：US6090265A

公开(公告)日：2000-07-18

申请号：US141909

申请日：1998-08-28

申请人： Stuart Adler ,  Robin Edward Richards ,  Paul Nigel Dyer

发明人： Stuart Adler ,  Robin Edward Richards ,  Paul Nigel Dyer

IPC分类号： B01D53/22 ,  B01D53/00 ,  B01D53/32 ,  B01D71/02 ,  C01B13/02 ,  C01B23/00 ,  C04B35/053 ,  C04B35/111 ,  H01M8/02 ,  C25C1/00 ,  C25C1/10

CPC分类号： C04B35/053 ,  B01D53/326 ,  C01B13/0251 ,  H01M8/0271 ,  B01D2257/104 ,  C01B2210/0046 ,  C01B2210/0082

摘要： An electrochemical device for separating oxygen from an oxygen-containing gas comprises a plurality of planar ion-conductive solid electrolyte plates and electrically-conductive gas-impermeable interconnects assembled in a multi-cell stack. Electrically-conductive anode and cathode material is applied to opposite sides of each electrolyte plate. A gas-tight anode seal is bonded between the anode side of each electrolyte plate and the anode side of the adjacent interconnect. A regulating electrode, applied to the anode side of each electrolyte plate between the anode seal and the edge of the anode, eliminates anode seal failure by maintaining the 24-hour anode seal power density below about 1.5 .mu.W/cm.sup.2. A gas-tight seal is applied between the cathode sides of each electrolyte plate and the adjacent interconnect such that the anode and cathode seals are radially offset on opposite sides of the plate. The combination of regulating electrodes and offset seals is particularly effective in eliminating anode seal failure.

摘要翻译： 用于从含氧气体中分离氧的电化学装置包括多个平面离子导电固体电解质板和组装在多电池堆中的导电气体不可渗透互连。 将导电阳极和阴极材料施加到每个电解质板的相对侧。 在每个电解质板的阳极侧和相邻互连件的阳极侧之间结合气密阳极密封。 施加到阳极密封件和阳极边缘之间的每个电解质板的阳极侧的调节电极通过将24小时的阳极密封功率密度维持在约1.5μW/ cm 2以下来消除阳极密封故障。 在每个电解质板的阴极侧和相邻的互连件之间施加气密密封，使得阳极和阴极密封件在板的相对侧上径向偏移。 调节电极和偏移密封的组合在消除阳极密封故障方面特别有效。

公开(公告)号：US5868918A

公开(公告)日：1999-02-09

申请号：US721640

申请日：1996-09-26

申请人： Stuart Adler ,  Brett Tamatea Henderson ,  Robin Edward Richards ,  Dale M. Taylor ,  Merrill Anderson Wilson

发明人： Stuart Adler ,  Brett Tamatea Henderson ,  Robin Edward Richards ,  Dale M. Taylor ,  Merrill Anderson Wilson

IPC分类号： B01D53/22 ,  B01D53/32 ,  B01D71/02 ,  C01B13/02 ,  C01B23/00 ,  C04B35/053 ,  C04B35/111 ,  H01M8/02 ,  C25B1/00 ,  C25B1/02

CPC分类号： H01M8/0271 ,  B01D53/326 ,  C01B13/0251 ,  C04B35/053 ,  B01D2257/104 ,  C01B2210/0046 ,  C01B2210/0082

摘要： An electrochemical device for separating oxygen from an oxygen-containing gas comprises a plurality of planar ion-conductive solid electrolyte plates and electrically-conductive gas-impermeable interconnects assembled in a multi-cell stack. Electrically-conductive anode and cathode material is applied to opposite sides of each electrolyte plate. A gas-tight anode seal is bonded between the anode side of each electrolyte plate and the anode side of the adjacent interconnect. A biasing electrode, applied to the anode side of each electrolyte plate between the anode seal and the edge of the anode, eliminates anode seal failure by minimizing the electrical potential across the seal. The seal potential is maintained below about 40 mV and preferably below about 25 mV. A gas-tight seal is applied between the cathode sides of each electrolyte plate and the adjacent interconnect such that the anode and cathode seals are radially offset on opposite sides of the plate. The combination of biasing electrodes and offset seals is particularly effective in eliminating anode seal failure.

摘要翻译： 用于从含氧气体中分离氧的电化学装置包括多个平面离子导电固体电解质板和组装在多电池堆中的导电气体不可渗透互连。 将导电阳极和阴极材料施加到每个电解质板的相对侧。 在每个电解质板的阳极侧和相邻互连件的阳极侧之间结合气密阳极密封。 施加到阳极密封件和阳极边缘之间的每个电解质板的阳极侧的偏置电极通过使密封件两端的电位最小化来消除阳极密封故障。 密封电位保持在约40mV以下，优选低于约25mV。 在每个电解质板的阴极侧和相邻的互连件之间施加气密密封，使得阳极和阴极密封件在板的相对侧上径向偏移。 偏置电极和偏移密封的组合在消除阳极密封故障方面特别有效。