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公开(公告)号：US07558238B1
公开(公告)日：2009-07-07
申请号：US11335439
申请日：2006-01-18
IPC分类号： H04B7/216
CPC分类号： H04B7/2615 , H04B7/2618 , H04W74/02
摘要： A method for partitioning communication resource among multiple users partitions a portion of an available communication resource into a series of time-frequency slots, and allows multiple users to transmit in one of at least two available modes within a time-frequency slot. Preferably, one mode is time division of the time-frequency slot into time sub-slots, and another mode is code division of the time-frequency slot according to different spreading codes that spread an individual user's signal only within the subject time-frequency slot. Further details as to pilot signals, guard intervals, and payloads are described.
摘要翻译： 一种用于在多个用户中分配通信资源的方法将可用通信资源的一部分划分成一系列时隙，并且允许多个用户以时隙内的至少两种可用模式之一进行发送。 优选地，一种模式是时间 - 时隙到时间子时隙的时分，另一种模式是根据不同的扩展码对时间 - 时隙进行码分割，这些扩展码仅在主体时隙内扩展单个用户的信号 。 对导频信号，保护间隔和有效负载的进一步细节进行了说明。
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公开(公告)号：US07768990B1
公开(公告)日：2010-08-03
申请号：US11351363
申请日：2006-02-09
IPC分类号： H04J3/00
CPC分类号： H04L25/03331 , H04B1/7077 , H04B1/71072 , H04L2025/03611
摘要： A method for acquiring signals received from multiple users in a single burst groups signals by power and sequentially processes the signal groups. A received sum of a plurality of user signals received in a burst is stored, and the transmitted symbols for each signal within a first group of the stored signals is estimated. A modified set of signals is then determined that excludes the signals of the first group. From the modified set of signals, the method continues by canceling multiuser interference among signals within a second group, and estimating transmitted symbols for each signal within the second group. The first and second groups includes all signals within a power band that defines the group, and the first band represents a higher power band than the second. Such iterative processing may continue for sequentially lower power bands until all signals are processed. A receiver is also detailed.
摘要翻译： 一种用于在单个脉冲串中获取从多个用户接收的信号的方法，用于通过功率获取信号并且顺序处理信号组。 存储在突发中接收的多个用户信号的接收和，并且估计所存储信号的第一组内的每个信号的发送符号。 然后确定排除第一组信号的经修改的一组信号。 根据修改的信号集合，该方法继续通过消除第二组内的信号之间的多用户干扰，并且估计第二组内的每个信号的传输符号。 第一组和第二组包括限定组的功率带内的所有信号，第一频带表示比第二频带更高的功率频带。 这种迭代处理可以持续下一个较低的功率带，直到所有信号被处理。 接收器也是详细的。
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3.发明授权Non-coherent multiuser receiver and method for aiding carrier acquisition in a spread spectrum system 有权非相干多用户接收机和用于辅助扩频系统中载波采集的方法公开(公告)号：US07701999B1
公开(公告)日：2010-04-20
申请号：US11416656
申请日：2006-05-02
IPC分类号： H04B1/00
CPC分类号： H04B1/7103 , H04L27/0014 , H04L27/2334 , H04L2027/0038 , H04L2027/0061 , H04L2027/0095
摘要： Disclosed is a method for acquiring a user signal from among several received from multiple users in a single burst. The method includes receiving a plurality of user signals in a single transmission burst, suppressing multiuser interference among at least some of the plurality of received signals, and determining a carrier frequency of at least one signal from among the interference suppressed plurality of received signals. Said signals may rotate due to a lack of synchronization while being equalized. Also described is a multiuser receiver for acquiring at least one user signal from among several user signals received from multiple users in a single burst. An antenna is for receiving a plurality of user signals in a single spread spectrum transmission burst, a matched filter is for despreading the signals, a multiuser equalizer is for suppressing mutual interference among at least a portion of the plurality of user signals, and a carrier lock circuit is for determining a carrier frequency of at least one user signal of the portion.
摘要翻译： 公开了一种用于从单个突发中从多个用户接收的几个中获取用户信号的方法。 所述方法包括以单个传输脉冲串接收多个用户信号，抑制所述多个接收信号中的至少一个中的多用户干扰，以及从干扰抑制的多个接收信号中确定至少一个信号的载波频率。 所述信号由于在均衡时缺少同步而旋转。 还描述了一种多用户接收器，用于从单个突发中从多个用户接收的几个用户信号中获取至少一个用户信号。 天线用于在单个扩展频谱传输脉冲串中接收多个用户信号，匹配滤波器用于解扩信号，多用户均衡器用于抑制多个用户信号的至少一部分与载波之间的相互干扰 锁定电路用于确定该部分的至少一个用户信号的载波频率。
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4.发明授权Adaptive power amplifier linearization in time division duplex communication systems 有权时分双工通信系统中的自适应功率放大器线性化公开(公告)号：US07529524B1
公开(公告)日：2009-05-05
申请号：US11259850
申请日：2005-10-26
IPC分类号： H04B1/04
CPC分类号： H03F1/3247 , H03F1/34 , H03F3/24 , H03F2200/204 , H03F2200/207 , H04B2001/0433
摘要： In an aspect of the invention, a method is performed in a transceiver for adaptive power amplifier linearization in time division duplex communication systems. The method comprises, in response to a first condition, performing, using a feedback signal generated by receiving subsystem circuitry, adaptive power amplifier linearization on a signal to be transmitted. The method additionally comprises, in response to a second condition, performing operations in order to determine receive data from a received radio frequency (RF) signal. The operations use at least the receiving subsystem circuitry. In a further aspect of the present invention, a transceiver is disclosed.
摘要翻译： 在本发明的一个方面，在用于时分双工通信系统中的自适应功率放大器线性化的收发器中执行一种方法。 该方法包括响应于第一条件，使用由接收子系统电路产生的反馈信号，对要发送的信号进行自适应功率放大器线性化。 该方法还包括响应于第二条件执行操作以便从接收到的射频（RF）信号确定接收数据。 该操作至少使用接收子系统电路。 在本发明的另一方面，公开了一种收发器。
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5.发明授权Methods and apparatus for transferring substrates during electronic device manufacturing 有权在电子设备制造过程中传送基板的方法和装置公开(公告)号：US07927062B2
公开(公告)日：2011-04-19
申请号：US11554530
申请日：2006-10-30
IPC分类号： G06F15/00
CPC分类号： H01L21/67748 , H01L21/67742 , H01L21/67745 , H01L21/68707
摘要： In one aspect, a first apparatus is provided that is adapted to transfer a substrate between a transfer chamber and a processing chamber. The first apparatus includes a robot having a first blade, a second blade spaced from the first blade, and a central hub coupled to the first blade by at least a first arm and coupled to the second blade by at least a second arm. The first blade and the second blade are spaced so as to allow (a) both blades to simultaneously extend through a slit valve that separates a transfer chamber from a processing chamber coupled to the transfer chamber when the robot is positioned within the transfer chamber; and (b) the first and second blades to transfer substrates to and remove substrates from the processing chamber without raising or lowering the first and second blades or the robot. Numerous other aspects are provided.
摘要翻译： 在一个方面，提供了适于在传送室和处理室之间传送衬底的第一设备。 第一装置包括具有第一叶片的机器人，与第一叶片间隔开的第二叶片，以及通过至少第一臂联接到第一叶片并通过至少第二臂联接到第二叶片的中心轮毂。 第一叶片和第二叶片间隔开以便（a）当机器人位于传送室内时，两个叶片同时延伸通过狭缝阀，该狭缝阀将传送室与耦合到传送室的处理室分离; 以及（b）第一和第二刀片，用于将基板转移到处理室中并从基板移除基板，而不会升高或降低第一和第二刀片或机器人。 提供了许多其他方面。
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公开(公告)号：US20090064929A1
公开(公告)日：2009-03-12
申请号：US12254784
申请日：2008-10-20
申请人： Tetsuya Ishikawa , Rick J. Roberts , Helen R. Armer , Leon Volfovski , Jay D. Pinson , Michael Rice , David H. Quach , Mohsen S. Salek , Robert Lowrance , John A. Backer , William Tyler Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lu
发明人： Tetsuya Ishikawa , Rick J. Roberts , Helen R. Armer , Leon Volfovski , Jay D. Pinson , Michael Rice , David H. Quach , Mohsen S. Salek , Robert Lowrance , John A. Backer , William Tyler Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lu
IPC分类号： B05C13/02
CPC分类号： H01L21/67225 , G03B27/32 , G03D13/006 , G03F7/40 , G05B19/41825 , G05B2219/40476 , G05B2219/45031 , G05B2219/49137 , H01L21/67109 , H01L21/6715 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/6831 , H01L21/6838 , H01L21/68707 , H01L22/26 , Y02P90/087 , Y10S414/135 , Y10S414/136 , Y10T29/53187 , Y10T29/5323
摘要： Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.
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公开(公告)号：US20090064928A1
公开(公告)日：2009-03-12
申请号：US12254750
申请日：2008-10-20
申请人： Tetsuya Ishikawa , Rick J. Roberts , Helen R. Armer , Leon Volfovski , Jay D. Pinson , Michael Rice , David H. Quach , Mohsen S. Salek , Robert Lowrance , John A. Backer , William Tyler Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lue
发明人： Tetsuya Ishikawa , Rick J. Roberts , Helen R. Armer , Leon Volfovski , Jay D. Pinson , Michael Rice , David H. Quach , Mohsen S. Salek , Robert Lowrance , John A. Backer , William Tyler Weaver , Charles Carlson , Chongyang Wang , Jeffrey Hudgens , Harald Herchen , Brian Lue
IPC分类号： B05C13/02
CPC分类号： H01L21/67225 , G03B27/32 , G03D13/006 , G03F7/40 , G05B19/41825 , G05B2219/40476 , G05B2219/45031 , G05B2219/49137 , H01L21/67109 , H01L21/6715 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/6831 , H01L21/6838 , H01L21/68707 , H01L22/26 , Y02P90/087 , Y10S414/135 , Y10S414/136 , Y10T29/53187 , Y10T29/5323
摘要： Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership, is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.
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8.发明申请公开(公告)号：US20070274813A1
公开(公告)日：2007-11-29
申请号：US11838155
申请日：2007-08-13
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
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公开(公告)号：US20070108019A1
公开(公告)日：2007-05-17
申请号：US11619181
申请日：2007-01-02
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
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10.发明申请公开(公告)号：US20070061042A1
公开(公告)日：2007-03-15
申请号：US11555240
申请日：2006-10-31
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。
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