摘要:
The disclosure provides methods and structures for preventing exposing polysilicon layer and silicon substrate on the substrate backside to polysilicon etching chemistry during removal of the dummy polysilicon layer in replacement gate structures. A thermal deposition process or processes are used to deposit a dielectric layer for offset spacers and/or a contact etch stop layer (CESL) to cover the polysilicon layer on the substrate backside. Such mechanisms reduce or eliminate particles originated at bevel of substrate backside, due to complete removal of the polysilicon layer at the backside bevel and the resultant etching of silicon substrate.
摘要:
An integrated circuit device and method for manufacturing an integrated circuit device is disclosed. The integrated circuit device comprises a core device and an input/output circuit. Each of the core device and input/output circuit includes a PMOS structure and an NMOS structure. Each of the PMOS includes a p-type metallic work function layer over a high-k dielectric layer, and each of the NMOS structure includes an n-type metallic work function layer over a high-k dielectric layer. There is an oxide layer under the high-k dielectric layer in the input/output circuit.
摘要:
A micro electric generator is disclosed, which comprises: at least one electrically conductive fiber, and at least one piezoelectric ceramic layer covering on the surface of that at least one electrically conductive fiber. When a mechanical force is applied to deform the electrically conductive fiber covered with the piezoelectric ceramic layer, electric energy is generated. Also, a method of fabricating the said micro electric generator and an electric generating device are disclosed.
摘要:
A heat dissipation module is disclosed, including a fan and a fastening structure. The fastening structure includes housing and at least one fixing element. The fixing element is disposed on the sidewall of the housing and has a first protruding part extruding from the inner side of the sidewall. When the fan is assembled with the fastening structure, the first protruding part partially enters into at least one molding hole of the frame of the fan and the first protruding part is placed against the edge of the molding hole.