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1.发明授权公开(公告)号：US11593930B2
公开(公告)日：2023-02-28
申请号：US17007146
申请日：2020-08-31
发明人： Hideaki Okano , Takeshi Morino , Yoshinori Honguh
摘要： An inspection apparatus including an image generation device which generates a second image corresponding to a first image, and a defect detection device which detects a defect in the second image. Each of the first and second image includes partial regions each including pixels. The defect detection device is configured to estimate a first value indicating a position difference between the first and second image for each of the partial regions, based on a luminance difference between the first and second image, estimate a second value indicating a reliability of the first value for each of the partial regions, and estimate a position difference between the first and second image for each of the pixels, based on the first and second value estimated for each of the partial regions.
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公开(公告)号：US10997713B2
公开(公告)日：2021-05-04
申请号：US16288621
申请日：2019-02-28
发明人： Takeshi Morino , Hideaki Okano , Yoshinori Honguh , Ryoichi Hirano , Masataka Shiratsuchi , Hideaki Hashimoto
摘要： According to one embodiment, an inspection device includes: an image generation device configured to generate a second image corresponding to a first image; and a defect detection device configured to estimate a nonlinear shift based on a plurality of partial region sets, each of the partial region sets including a first partial region in the first image and a second partial region in the second image corresponding to the first partial region, and detect a defect in the second image from the first image.
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公开(公告)号：US10451545B2
公开(公告)日：2019-10-22
申请号：US15899796
申请日：2018-02-20
发明人： Hiroshi Ohno , Hiroya Kano , Hideaki Okano , Yoshinori Honguh
摘要： According to one embodiment, an optical test apparatus includes a photodetector and a processing circuit. The photodetector outputs, as a light receiving signal, information concerning a light direction of received light. The processing circuit processes the light receiving signal to acquire information concerning a standard light direction as a standard and information concerning a passing light direction of passed light which has passed through an object; compares the information concerning the passing light direction with the information concerning the standard light direction, and on the basis of results of the comparison, acquires information concerning internal physical quantities of the object.
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公开(公告)号：US20150192258A1
公开(公告)日：2015-07-09
申请号：US14663596
申请日：2015-03-20
发明人： Hiroshi Ohno , Mitsuaki Kato , Katsumi Hisano , Yoshinori Honguh , Masataka Shiratsuchi , Yuichiro Yamamoto , Hiromichi Hayashihara , Masatoshi Hirono , Takeshi Morino
摘要： An LED lighting device of embodiment comprising an LED light source which generates an ultraviolet light or a visible light, an axisymmetric transparent member which is provided over the light source and which is transparent to visible light, and an axisymmetric light scattering member disposed in the transparent member apart from the light source. A distance of closest approach L2 between the light source and the light scattering member, and an area C of a light emitting surface of the light source satisfy the settled relation. A length L1 of the light scattering member, and an absorption coefficient μ (1/mm) of the light scattering member satisfy the settled relation. A diameter d1 of the bottom surface of the light scattering member, the distance of closest approach L2, and a refractive index n of the transparent member satisfy the settled relation.
摘要翻译： 一种实施方式的LED照明装置，其特征在于，包括产生紫外光或可见光的LED光源，设置在所述光源上且对所述可见光透明的轴对称透明构件，以及设置在所述透明体中的轴对称光散射构件 成员除光源外。 在光源和光散射部件之间的距离接近的距离L2，光源的发光面的面积C满足稳定关系。 光散射部件的长度L1和光散射部件的吸收系数μ（1 / mm）满足稳定关系。 光散射构件的底面的直径d1，最接近距离L2的距离和透明构件的折射率n满足确定关系。
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公开(公告)号：US09484382B2
公开(公告)日：2016-11-01
申请号：US14692449
申请日：2015-04-21
IPC分类号： H01L27/146
CPC分类号： H01L27/14643 , H01L27/14603 , H01L27/1463 , H01L27/14634 , H01L27/14689 , H01L27/1469 , H01L27/14698
摘要： According to one embodiment, an image sensor includes an image-sensing element region formed by arranging a plurality of image-sensing elements on a semiconductor substrate, and a logic circuit region formed in a region different from the image-sensing element region on the substrate and including a plurality of gate patterns. Further, dummy gate patterns are formed with a constant pitch on the image-sensing element region.
摘要翻译： 根据一个实施例，图像传感器包括通过在半导体衬底上布置多个图像感测元件而形成的图像感测元件区域，以及形成在与衬底上的图像感测元件区域不同的区域中的逻辑电路区域 并且包括多个栅极图案。 此外，在图像感测元件区域上以恒定的间距形成伪栅极图案。
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公开(公告)号：US20130221474A1
公开(公告)日：2013-08-29
申请号：US13737069
申请日：2013-01-09
IPC分类号： H01L27/146
CPC分类号： H01L27/14643 , H01L27/14603 , H01L27/1463 , H01L27/14634 , H01L27/14689 , H01L27/1469 , H01L27/14698
摘要： According to one embodiment, an image sensor includes an image-sensing element region formed by arranging a plurality of image-sensing elements on a semiconductor substrate, and a logic circuit region formed in a region different from the image-sensing element region on the substrate and including a plurality of gate patterns. Further, dummy gate patterns are formed with a constant pitch on the image-sensing element region.
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7.发明授权Image sensor that includes a boundary region formed between a logic circuit region and an image-sensing element region and manufacturing method thereof 有权图像传感器，其包括在逻辑电路区域和图像感测元件区域之间形成的边界区域及其制造方法公开(公告)号：US09281328B2
公开(公告)日：2016-03-08
申请号：US13737079
申请日：2013-01-09
IPC分类号： H01L27/00 , H01J40/14 , H01L27/146 , H04N5/335 , H04N5/369
CPC分类号： H01L27/14601 , H01L27/146 , H01L27/1463 , H01L27/14643 , H01L27/14683 , H04N5/335 , H04N5/369
摘要： According to one embodiment, an image sensor includes an image-sensing element region formed by arranging a plurality of image-sensing elements on a semiconductor substrate and element isolation portions formed to isolate the image-sensing elements, and a logic circuit region formed in a region different from the image-sensing element region on the substrate and including a plurality of gate patterns. Further, dummy element isolation portions are arranged with a constant pitch in the boundary region between the image-sensing element region and the logic circuit region.
摘要翻译： 根据一个实施例，图像传感器包括通过在半导体衬底上布置多个图像感测元件而形成的图像感测元件区域和形成为隔离图像感测元件的元件隔离部分，以及形成在图像感测元件区域中的逻辑电路区域 区域与衬底上的图像感测元件区域不同，并且包括多个栅极图案。 此外，虚像元件隔离部分在图像感测元件区域和逻辑电路区域之间的边界区域中以恒定的间距排列。
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8.发明授权Image sensor including an image-sensing element region and logic circuit region and manufacturing method thereof 有权图像传感器，包括图像感测元件区域和逻辑电路区域及其制造方法公开(公告)号：US09059060B2
公开(公告)日：2015-06-16
申请号：US13737069
申请日：2013-01-09
IPC分类号： H01L31/00 , H01L27/146
CPC分类号： H01L27/14643 , H01L27/14603 , H01L27/1463 , H01L27/14634 , H01L27/14689 , H01L27/1469 , H01L27/14698
摘要： According to one embodiment, an image sensor includes an image-sensing element region formed by arranging a plurality of image-sensing elements on a semiconductor substrate, and a logic circuit region formed in a region different from the image-sensing element region on the substrate and including a plurality of gate patterns. Further, dummy gate patterns are formed with a constant pitch on the image-sensing element region.
摘要翻译： 根据一个实施例，图像传感器包括通过在半导体衬底上布置多个图像感测元件而形成的图像感测元件区域，以及形成在与衬底上的图像感测元件区域不同的区域中的逻辑电路区域 并且包括多个栅极图案。 此外，在图像感测元件区域上以恒定的间距形成伪栅极图案。
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9.发明授权公开(公告)号：US09466517B2
公开(公告)日：2016-10-11
申请号：US13859153
申请日：2013-04-09
CPC分类号： H01L21/67115 , H01L21/324 , H01L21/67248 , H05B6/6455 , H05B6/68 , H05B6/806
摘要： According to one embodiment, a microwave annealing apparatus is provided, including a housing shielding electromagnetic waves, a first electromagnetic wave source configured to apply a first electromagnetic wave into the housing, a second electromagnetic wave source configured to apply, into the housing, a second electromagnetic wave having a higher frequency than the first electromagnetic wave, a susceptor configured to hold a semiconductor substrate, made of a material transparent to the first electromagnetic wave and provided in the housing, a temperature measuring device configured to measure the temperature of the semiconductor substrate, and a control unit configured to control the power of each of the first and second electromagnetic wave sources in accordance with the temperature measured by the temperature measuring device.
摘要翻译： 根据一个实施例，提供一种微波退火装置，其包括外壳屏蔽电磁波，被配置为将第一电磁波施加到外壳中的第一电磁波源，被配置为将第二电磁波施加到壳体中的第二电磁波源 具有比第一电磁波高的频率的电磁波，被配置为保持由对第一电磁波透明并且设置在壳体中的材料制成的半导体衬底的基座，配置成测量半导体衬底的温度的温度测量装置 以及控制单元，其被配置为根据由所述温度测量装置测量的温度来控制所述第一和第二电磁波源中的每一个的功率。
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公开(公告)号：US20140049986A1
公开(公告)日：2014-02-20
申请号：US14061471
申请日：2013-10-23
IPC分类号： F21V8/00
CPC分类号： G02B6/0011 , G02B6/0051 , G02B6/0053
摘要： According to one embodiment, a light guide body includes a light guide plate and a prism array unit. The light guide plate has a major surface, a first side surface, and a second side surface on an opposite side to the first side surface. The prism array unit is provided on the major surface to be in contact with the major surface. The prism array unit includes a plurality of prism bodies. Each of the prism bodies extends along a first direction from the first side surface to the second side surface. The prism bodies are disposed to align along a second direction parallel to the major surface and perpendicular to the first direction. A vertex angle of the prism bodies is a substantially right angle. A refractive index of the prism bodies is higher than a refractive index of the light guide plate.
摘要翻译： 根据一个实施例，导光体包括导光板和棱镜阵列单元。 导光板具有主表面，第一侧表面和与第一侧表面相对的一侧的第二侧表面。 棱镜阵列单元设置在主表面上以与主表面接触。 棱镜阵列单元包括多个棱镜体。 每个棱镜体沿着第一方向从第一侧表面延伸到第二侧表面。 棱镜体设置成沿着平行于主表面并垂直于第一方向的第二方向排列。 棱镜体的顶角是大致直角。 棱镜体的折射率高于导光板的折射率。
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