Reactive Ion Etching chamber design for flip chip interconnections
    1.
    发明授权
    Reactive Ion Etching chamber design for flip chip interconnections 失效
    反向离子蚀刻室设计用于倒装芯片互连

    公开(公告)号:US06531069B1

    公开(公告)日:2003-03-11

    申请号:US09599761

    申请日:2000-06-22

    IPC分类号: C03C1500

    CPC分类号: H01J37/3244 H01J37/32623

    摘要: RIE processing chambers includes arrangements of gas outlets which force gas-flow-shadow elimination. Means are provided to control and adjust the direction of gases to the outlet to modify and control the direction of plasma flow at the wafer surface during processing. Means are provided to either move the exhaust paths for exhaust gases or to open and close exhaust paths sequentially, in a controlled manner, to modify flow directions of ions in the etching plasma. A combination of rotation/oscillation of a magnetic field imposed on the RIE chamber can be employed by rotation of permanent magnetic dipoles about the periphery of the RIE chamber or by controlling current through a coil wrapped around the periphery of the RIE process chamber to enhance the removal of the residues attributable to gas-flow-shadows formed by linear ion paths in the plasma.

    摘要翻译: RIE处理室包括迫使气体流动阴影消除的气体出口的布置。 提供了用于控制和调节气体到出口的方向的装置,以在处理期间修改和控制晶片表面处的等离子体流动的方向。 提供装置以便以排气的方式移动排气路径或以受控的方式依次打开和关闭排气路径,以改变蚀刻等离子体中离子的流动方向。 施加在RIE室上的磁场的旋转/振荡的组合可以通过围绕RIE室的周边的永久磁偶极子的旋转或通过围绕RIE处理室的周边缠绕的线圈进行控制来增强 去除归因于等离子体中的线性离子路径形成的气流阴影的残留物。

    2-Substituted-1H-benz[de]-isoquinoline-1,3(2H)-diones
    7.
    发明授权
    2-Substituted-1H-benz[de]-isoquinoline-1,3(2H)-diones 失效
    2-取代的1H-苯并[d] {{{{{(异喹啉-1,3(2H) - 二酮)

    公开(公告)号:US4115555A

    公开(公告)日:1978-09-19

    申请号:US812886

    申请日:1977-07-05

    CPC分类号: C07D221/14 C07H19/048

    摘要: Compounds of the following formula ##STR1## wherein R.sup.1 and R.sup.2 are independently selected from hydrogen, halogen, lower alkyl, lower alkoxy, lower alkylthio, nitro, cyano, and trifluoromethyl, and R is selected from a triacetyl substituted pentose, pentose, a tetraacetyl substituted hexose, hexose, a hydroxy substituted cycloalkyl of 5 to 7 carbons, ##STR2## wherein n is 1 or 2 ad R.sup.3 is hydrogen, an alkali metal or alkaline earth metal ion; are disclosed. These compounds possess useful anti-inflammatory activity.

    摘要翻译: 下式的化合物其中R 1和R 2独立地选自氢,卤素,低级烷基,低级烷氧基,低级烷硫基,硝基,氰基和三氟甲基,R选自三乙酰基取代的戊糖,戊糖,四乙酰 取代的己糖,己糖,5至7个碳的羟基取代的环烷基,其中n为1或2,R 3为氢,碱金属或碱土金属离子; 被披露。 这些化合物具有有用的抗炎活性。

    3-(Arylcycloiminoalkyl)benzisothiazole 1,1-dioxides
    8.
    发明授权
    3-(Arylcycloiminoalkyl)benzisothiazole 1,1-dioxides 失效
    3-(芳基环亚氨基烷基)苯并异噻唑1,1-二氧化物

    公开(公告)号:US4104387A

    公开(公告)日:1978-08-01

    申请号:US799865

    申请日:1977-05-23

    CPC分类号: C07D275/06 C07D417/12

    摘要: 3-(Arylcycloiminoalkyl)benzisothiazole 1,1-dioxides are provided having the structure ##STR1## wherein R is hydrogen, halogen, lower alkyl, lower alkoxy or nitro; R.sup.1 is hydrogen, lower alkoxy or halogen with the proviso that R.sup.1 can be lower alkoxy or halogen only when R is lower alkoxy or halogen, respectively; A is O or NH; X is hydrogen, halogen lower alkyl, lower alkoxy, or trifluoromethyl; Y is C or N, where Y is C, is a double bond, and when Y is N, represents a single bond, B is an alkylene group containing 2 to 5 carbons in the normal chain; Q is a single bond or an alkylene group containing 1 to 3 carbons in the normal chain; and physiologically acceptable acid-addition salts thereof. These compounds are useful as antiinflammatory agents.

    摘要翻译: 提供3-(芳基环亚氨基烷基)苯并异噻唑1,1-二氧化物,其结构为:其中R为氢,卤素,低级烷基,低级烷氧基或硝基; R1是氢,低级烷氧基或卤素,条件是仅当R分别是低级烷氧基或卤素时,R 1可以是低级烷氧基或卤素; A是O或NH; X是氢,卤素低级烷基,低级烷氧基或三氟甲基; Y是C或N,其中Y是C,是双键,当Y是N时,表示单键,B是正链中含有2至5个碳的亚烷基; Q是正链中含有1〜3个碳原子的单键或亚烷基; 和其生理上可接受的酸加成盐。 这些化合物可用作抗炎剂。

    Various 2-(substituted piperazinyl)-1H-benz [de]isoquinoline-1,3 (2H)
-diones
    9.
    发明授权
    Various 2-(substituted piperazinyl)-1H-benz [de]isoquinoline-1,3 (2H) -diones 失效
    各种2-(取代的哌嗪基)-1H-苯并[{[{{{{{(异喹啉-1,3(2H) - 二酮)

    公开(公告)号:US4070465A

    公开(公告)日:1978-01-24

    申请号:US699723

    申请日:1976-06-24

    CPC分类号: C07D221/14

    摘要: Compounds of the following formula and their acid addition salts ##STR1## Z is ##STR2## A is straight or branched chain alkylene of 2 to 6 carbons; B is straight chain alkylene of 2 to 4 carbons; X is straight or branched chain alkyl of 1 to 8 carbons, phenyl, benzyl, phenethyl, substituted phenyl, substituted benzyl, or substituted phenethyl, R.sub.1 and R.sub.2 are located at the 7 or 8 and 5 or 6 position respectively and are independently selected from the group consisting of hydrogen, straight or branched chain alkyl of 1 to 4 carbons, straight or branched chain alkoxy of 1 to 4 carbons, Cl, Br, F, amino, nitro, CF.sub.3, and cyano; are disclosed. These compounds possess antiprotozoal activity.

    摘要翻译: 下式的化合物及其酸加成盐:A是2至6个碳的直链或支链亚烷基; B是2至4个碳的直链亚烷基; X是1至8个碳的直链或支链烷基,苯基,苄基,苯乙基,取代的苯基,取代的苄基或取代的苯乙基,R1和R2分别位于7或8和5或6位,并且独立地选自 由氢,1至4个碳的直链或支链烷基,1至4个碳的直链或支链烷氧基,Cl,Br,F,氨基,硝基,CF 3和氰基组成的组; 被披露。 这些化合物具有抗原虫活性。