摘要:
A vacuum switch having a fixed side electrode unit and a movable side electrode unit mounted in a vacuum vessel. Each electrode unit includes an arc electrode, an arc electrode supporting member for supporting the arc electrode, a coil electrode and a conducting rod. Joining portions between the arc electrode and the arc electrode supporting member, the coil electrode and the conducting rod are integrally and directly formed metallurgically by solid phase diffusion using a hot isostatic process. A vacuum circuit breaker may be constructed incorporating the vacuum switch.
摘要:
According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.
摘要:
According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.
摘要:
According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.
摘要:
According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.
摘要:
A vacuum circuit breaker comprising an external coil which is arranged outside a vacuum interrupter, and a power supply circuit which causes current to flow through the external coil. An overcurrent flowing through the main circuit of the circuit breaker, which leads to a load, is detected by an overcurrent tripping device so as to separate the movable electrode of the vacuum interrupter from the fixed electrode thereof and to subject a striking electric arc to a magnetic flux generated axially of the vacuum interrupter by the electrodes themselves. Thereafter, a trigger gap is ignited by a signal delivered from the overcurrent tripping device, so as to introduce a reverse current into the vacuum interrupter. Herein, the trigger gap is ignited by a signal delivered from the overcurrent tripping device, in order that the zero point of currents may be formed at the point of time at which the axial magnetic flux has been canceled by the resulting current of the external coil. Since the axial magnetic flux remaining at the zero point of the currents is nullified, charged particles are not hindered from diffusing radially of the vacuum interrupter, and hence, an enhanced breaking performance is attained.
摘要:
An ion source for producing an ion beam utilized for fabrication and processing of semiconductors, thin films or the like includes a plasma producing chamber equipped with first magnetic means for limiting a plasma region and a plasma expansion chamber provided in combination with the plasma producing chamber on the side where a beam extracting electrode is disposed. The plasma expansion chamber is provided with second magnet array for confining and holding a plasma region therein which is of a larger area than that of the plasma region formed in the plasma producing chamber.
摘要:
An apparatus for generating plasma by making use of electron cyclotron resonance employs permanent magnets for forming magnetic fields, and the permanent magnets are arranged in such a manner as to form stronger magnetic fields in peripheral portion of a plasma chamber than in a central portion of the same. in addition, a cross-sectional area of the plasma chamber is gradually increased. Furthermore, electrons are introduced into an additional plasma chamber in which an electric field is not applied so as to generate low-temperature plasma.
摘要:
An ion source application device comprising a gas tight plasma formation chamber sustaining a plasma produced by high frequency discharge, a high frequency coil producing the high frequency discharge, and means for extracting an ion beam from the plasma thus produced, characterized in that it comprises further an electron beam generator or a laser light generator as means for obtaining electrons serving as seeds for starting the high frequency discharge.
摘要:
An ion source device comprises a plasma generating vessel for generating plasma therein, a plurality of magnets arranged on an outer periphery of the plasma generating vessel to establish a cusp field in the plasma generating vessel, means for supplying a power to generate the plasma in the plasma generating vessel, and an anode electrode arranged on an inner wall of the plasma generating vessel and adapted to be heated by electrons emitted from the plasma and maintain the heat.