公开(公告)号：US20110058655A1

公开(公告)日：2011-03-10

申请号：US12871192

申请日：2010-08-30

申请人： Katsuya OKUMURA ,  Katsuji Kadosawa ,  Tomofumi Kiyomoto ,  Motohiro Suyama ,  Atsushi Ishii

发明人： Katsuya OKUMURA ,  Katsuji Kadosawa ,  Tomofumi Kiyomoto ,  Motohiro Suyama ,  Atsushi Ishii

IPC分类号： H01J35/08 ,  B05D5/00 ,  B05D3/06

CPC分类号： H01J35/12 ,  H01J2235/081 ,  H01J2235/083 ,  H01J2235/087 ,  H01J2235/1204 ,  H01J2235/1291

摘要： A target for X-ray generation has a substrate and a target portion. The substrate is comprised of diamond and has a first principal surface and a second principal surface opposed to each other. A bottomed hole is formed from the first principal surface side in the substrate. The target portion is comprised of a metal deposited from a bottom surface of the hole toward the first principal surface. An entire side surface of the target portion is in close contact with an inside surface of the hole.

摘要翻译： 用于X射线产生的靶具有基底和目标部分。 衬底由金刚石构成，并具有彼此相对的第一主表面和第二主表面。 从基板的第一主面侧形成有底孔。 目标部分由从孔的底表面朝向第一主表面沉积的金属构成。 目标部分的整个侧表面与孔的内表面紧密接触。

公开(公告)号：US08416920B2

公开(公告)日：2013-04-09

申请号：US12871192

申请日：2010-08-30

申请人： Katsuya Okumura ,  Katsuji Kadosawa ,  Tomofumi Kiyomoto ,  Motohiro Suyama ,  Atsushi Ishii

发明人： Katsuya Okumura ,  Katsuji Kadosawa ,  Tomofumi Kiyomoto ,  Motohiro Suyama ,  Atsushi Ishii

IPC分类号： H01J35/08

CPC分类号： H01J35/12 ,  H01J2235/081 ,  H01J2235/083 ,  H01J2235/087 ,  H01J2235/1204 ,  H01J2235/1291

摘要： A target for X-ray generation has a substrate and a target portion. The substrate is comprised of diamond and has a first principal surface and a second principal surface opposed to each other. A bottomed hole is formed from the first principal surface side in the substrate. The target portion is comprised of a metal deposited from a bottom surface of the hole toward the first principal surface. An entire side surface of the target portion is in close contact with an inside surface of the hole.

摘要翻译： 用于X射线产生的靶具有基底和目标部分。 衬底由金刚石构成，并具有彼此相对的第一主表面和第二主表面。 从基板的第一主面侧形成有底孔。 目标部分由从孔的底表面朝向第一主表面沉积的金属构成。 目标部分的整个侧表面与孔的内表面紧密接触。

公开(公告)号：US20100032357A1

公开(公告)日：2010-02-11

申请号：US12377274

申请日：2007-08-14

申请人： Tomofumi Kiyomoto ,  Muneo Harada ,  Hiroyuki Moriyama ,  Katsuya Okumura

发明人： Tomofumi Kiyomoto ,  Muneo Harada ,  Hiroyuki Moriyama ,  Katsuya Okumura

IPC分类号： B01D15/08 ,  B44C1/22

CPC分类号： G01N30/6095 ,  G01N30/52 ,  G01N2030/525

摘要： A high separation efficiency column 10 for chromatography and a manufacturing method thereof are provided. The column 10 for chromatography includes a first substrate 11 having a plurality of pillars 22 formed on one surface thereof and a second substrate 12 bonded to the one surface of the first substrate 11 and constituting a flow path 13 together with the plurality of pillars 22 formed on the first substrate. At least a surface of each pillar is formed in a porous shape.

摘要翻译： 提供了用于色谱法的高分离效率柱10及其制造方法。 用于层析的柱10包括：第一基板11，其具有在其一个表面上形成的多个柱22;以及第二基板12，其与第一基板11的一个表面接合，并与形成的多个柱22一起构成流路13 在第一基板上。 每个柱的至少一个表面形成为多孔形状。

公开(公告)号：US20060255182A1

公开(公告)日：2006-11-16

申请号：US11411983

申请日：2006-04-27

申请人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

发明人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

IPC分类号： B05B1/26 ,  B05B1/34

CPC分类号： B41J2/1609 ,  B05C5/007 ,  B05C5/0212 ,  B05C5/027 ,  B41J2/1628 ,  B41J2/1631 ,  H01J9/242

摘要： Using a silicon single crystal with (100) plane orientation as a base material, a pectinate portion having a slope portion and a patterning material guiding groove is formed through photolithography process. A liquid reservoir for keeping a patterning material common to tooth portions of the pectinate portion is formed in the same step as a step for forming the guiding grooves. In forming slope portion, anisotropic wet etching allows easy and accurate formation of a slope portion with (111) plane orientation to (100) plane orientation, by taking advantage of differences in speed due to the plane orientations. In addition, by forming a groove portion using anisotropic dry etching, the patterning material guiding groove having a perpendicular sidewall reaching the slope portion may be formed at high accuracy. A pattern forming apparatus with high accuracy and low cost is provided.

摘要翻译： 使用具有（100）面取向的硅单晶作为基材，通过光刻工艺形成具有倾斜部分和图案形成材料引导槽的果胶部分。 在与用于形成导向槽的步骤相同的步骤中形成用于保持图形材料的共同于图形部分的牙齿部分的图案材料的液体储存器。 在形成斜坡部分时，通过利用由于平面取向的速度差异，各向异性湿蚀刻允许容易且准确地形成具有（111）面取向到（100）面取向的斜面部分。 此外，通过使用各向异性干蚀刻形成槽部，可以高精度地形成具有到达斜面部的垂直侧壁的图案形成材料导向槽。 提供了一种高精度，低成本的图案形成装置。

公开(公告)号：US20120034566A1

公开(公告)日：2012-02-09

申请号：US13259840

申请日：2010-03-29

申请人： Hiroo Wada ,  Hiroshi Tamura ,  Hiroshi Kobayashi ,  Tomofumi Kiyomoto ,  Seokhyoung Hong

发明人： Hiroo Wada ,  Hiroshi Tamura ,  Hiroshi Kobayashi ,  Tomofumi Kiyomoto ,  Seokhyoung Hong

IPC分类号： B01L3/00 ,  B23P17/04 ,  G01N30/00 ,  G03F7/20

CPC分类号： G01N30/6095 ,  B01J19/0093 ,  B01J2219/00826 ,  B01J2219/00828 ,  B01J2219/00833 ,  B01J2219/0086 ,  B01J2219/00984 ,  B01L3/502746 ,  B01L2300/0816 ,  B01L2300/0883 ,  B01L2400/0487 ,  G01N27/44704 ,  G01N27/44791 ,  G01N30/6086 ,  Y10T29/49

摘要： A micro-channel device provided in a solution analysis system using pressure liquid feed comprises a plurality of straight-line channels and curved channels connecting the ends of the neighboring straight-line channels. The width w of each curved channel is smaller than the width t of each straight-line channel. The radius of curvature r of each curved channel is set so that the value of a expressed by formula (1) is equal to or smaller than the value of a at a local maximum point of the theoretical step height H expressed by formula (2) and based on the shape of the curved channel. a=w/r  (1) H = u c  w 2 64  γ   D m × a 2  ( a + 2 ) a + 1 ( 2 ) Where, w is a width of the curved channel, uc is a channel passing speed of a solution in the curved channel, γ is a molecular diffusion inhibition factor by basic members present in the curved channel, and Dm is a molecular diffusion coefficient of the solution.

摘要翻译： 设置在使用压力液体进料的溶液分析系统中的微通道装置包括多个直线通道和连接相邻直线通道的端部的弯曲通道。 每个弯曲通道的宽度w小于每个直线通道的宽度t。 每个弯曲通道的曲率半径r被设定为使由公式（1）表示的a的值等于或小于由公式（2）表示的理论台阶高度H的局部最大点处的a值， 并基于弯曲通道的形状。 a = w / r（1）H = uc w w 2 64γD m×a 2（a + 2）a + 1（2）其中，w是弯曲通道的宽度，uc是 弯曲通道中溶液的通道通过速度，γ是弯曲通道中存在的碱性成分的分子扩散抑制因子，Dm是溶液的分子扩散系数。

公开(公告)号：US20090314065A1

公开(公告)日：2009-12-24

申请号：US12441608

申请日：2008-05-08

申请人： Tomofumi Kiyomoto ,  Muneo Harada ,  Katsuyuki Ono

发明人： Tomofumi Kiyomoto ,  Muneo Harada ,  Katsuyuki Ono

IPC分类号： G01N30/60 ,  G01N30/64 ,  G01N30/74

CPC分类号： G01N30/6095 ,  G01N30/6004

摘要： A chromatography detector 11 includes a base substrate having a main surface 12a and a column flow path 15 formed on the main surface 12a, and a substrate block 13 and 14, which has a detection space 18 communicating with an outlet of the column flow path 15 and is stacked on the main surface 12a of the base substrate 12 so as to close a top surface of the column flow path 15.

摘要翻译： 色谱检测器11包括具有形成在主表面12a上的主表面12a和柱流路15的基底基板和具有与柱流路15的出口连通的检测空间18的基板块13和14 并且堆叠在基底基板12的主表面12a上，以封闭柱流路15的顶面。

公开(公告)号：US20120318049A1

公开(公告)日：2012-12-20

申请号：US13581418

申请日：2010-12-24

申请人： Seokhyoung Hong ,  Tomofumi Kiyomoto ,  Hiroshi Kobayashi

发明人： Seokhyoung Hong ,  Tomofumi Kiyomoto ,  Hiroshi Kobayashi

IPC分类号： B01D15/22 ,  B31D3/00 ,  G01N30/60

CPC分类号： G01N30/6095 ,  B01L3/502761 ,  B01L2400/0487 ,  B01L2400/086 ,  G01N30/6069

摘要： A column for chromatography includes a flow path for allowing a mobile phase, the flow path including mutually-opposing sidewalls and a bottom wall joined to the sidewalls and arranged at bottom ends of the sidewalls; and a plurality of pillars provided to extend along the sidewalls from the bottom wall and regularly arranged at a specified interval. The column is configured to separate individual components from a mixture sample containing multiple kinds of components by using the pillars as a stationary phase. Each of the pillars includes a curved outer surface and the sidewalls partially include a curved surface conforming to the outer surface of each of the pillars. The shortest distance between each of the sidewalls and a pillar positioned closest to said each of the sidewalls is equal to the shortest distance between the pillars in a flow direction of the mobile phase.

摘要翻译： 用于层析的柱包括用于允许流动相的流动路径，流动路径包括相互相对的侧壁和连接到侧壁并且布置在侧壁的底端处的底壁; 以及设置成沿着所述侧壁从所述底壁延伸并且以规定的间隔规则地布置的多个柱。 该柱被配置为通过使用柱作为固定相从单独的组分与含有多种组分的混合物样品分离。 每个支柱包括弯曲的外表面，并且侧壁部分地包括符合每个支柱的外表面的弯曲表面。 每个侧壁和最靠近所述每个侧壁的柱之间的最短距离等于在流动相的流动方向上柱之间的最短距离。