公开(公告)号：US20090314065A1

公开(公告)日：2009-12-24

申请号：US12441608

申请日：2008-05-08

申请人： Tomofumi Kiyomoto ,  Muneo Harada ,  Katsuyuki Ono

发明人： Tomofumi Kiyomoto ,  Muneo Harada ,  Katsuyuki Ono

IPC分类号： G01N30/60 ,  G01N30/64 ,  G01N30/74

CPC分类号： G01N30/6095 ,  G01N30/6004

摘要： A chromatography detector 11 includes a base substrate having a main surface 12a and a column flow path 15 formed on the main surface 12a, and a substrate block 13 and 14, which has a detection space 18 communicating with an outlet of the column flow path 15 and is stacked on the main surface 12a of the base substrate 12 so as to close a top surface of the column flow path 15.

摘要翻译： 色谱检测器11包括具有形成在主表面12a上的主表面12a和柱流路15的基底基板和具有与柱流路15的出口连通的检测空间18的基板块13和14 并且堆叠在基底基板12的主表面12a上，以封闭柱流路15的顶面。

公开(公告)号：US20100032357A1

公开(公告)日：2010-02-11

申请号：US12377274

申请日：2007-08-14

申请人： Tomofumi Kiyomoto ,  Muneo Harada ,  Hiroyuki Moriyama ,  Katsuya Okumura

发明人： Tomofumi Kiyomoto ,  Muneo Harada ,  Hiroyuki Moriyama ,  Katsuya Okumura

IPC分类号： B01D15/08 ,  B44C1/22

CPC分类号： G01N30/6095 ,  G01N30/52 ,  G01N2030/525

摘要： A high separation efficiency column 10 for chromatography and a manufacturing method thereof are provided. The column 10 for chromatography includes a first substrate 11 having a plurality of pillars 22 formed on one surface thereof and a second substrate 12 bonded to the one surface of the first substrate 11 and constituting a flow path 13 together with the plurality of pillars 22 formed on the first substrate. At least a surface of each pillar is formed in a porous shape.

摘要翻译： 提供了用于色谱法的高分离效率柱10及其制造方法。 用于层析的柱10包括：第一基板11，其具有在其一个表面上形成的多个柱22;以及第二基板12，其与第一基板11的一个表面接合，并与形成的多个柱22一起构成流路13 在第一基板上。 每个柱的至少一个表面形成为多孔形状。

公开(公告)号：US20060255182A1

公开(公告)日：2006-11-16

申请号：US11411983

申请日：2006-04-27

申请人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

发明人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

IPC分类号： B05B1/26 ,  B05B1/34

CPC分类号： B41J2/1609 ,  B05C5/007 ,  B05C5/0212 ,  B05C5/027 ,  B41J2/1628 ,  B41J2/1631 ,  H01J9/242

摘要： Using a silicon single crystal with (100) plane orientation as a base material, a pectinate portion having a slope portion and a patterning material guiding groove is formed through photolithography process. A liquid reservoir for keeping a patterning material common to tooth portions of the pectinate portion is formed in the same step as a step for forming the guiding grooves. In forming slope portion, anisotropic wet etching allows easy and accurate formation of a slope portion with (111) plane orientation to (100) plane orientation, by taking advantage of differences in speed due to the plane orientations. In addition, by forming a groove portion using anisotropic dry etching, the patterning material guiding groove having a perpendicular sidewall reaching the slope portion may be formed at high accuracy. A pattern forming apparatus with high accuracy and low cost is provided.

摘要翻译： 使用具有（100）面取向的硅单晶作为基材，通过光刻工艺形成具有倾斜部分和图案形成材料引导槽的果胶部分。 在与用于形成导向槽的步骤相同的步骤中形成用于保持图形材料的共同于图形部分的牙齿部分的图案材料的液体储存器。 在形成斜坡部分时，通过利用由于平面取向的速度差异，各向异性湿蚀刻允许容易且准确地形成具有（111）面取向到（100）面取向的斜面部分。 此外，通过使用各向异性干蚀刻形成槽部，可以高精度地形成具有到达斜面部的垂直侧壁的图案形成材料导向槽。 提供了一种高精度，低成本的图案形成装置。

公开(公告)号：US20150214088A1

公开(公告)日：2015-07-30

申请号：US13819033

申请日：2011-06-30

申请人： Ken Nakao ,  Michikazu Nakamura ,  Itaru Iida ,  Muneo Harada

发明人： Ken Nakao ,  Michikazu Nakamura ,  Itaru Iida ,  Muneo Harada

IPC分类号： H01L21/683 ,  B32B43/00 ,  H01L21/67 ,  B25J15/06

CPC分类号： H01L21/6835 ,  B25J15/0616 ,  B32B43/006 ,  H01L21/67011 ,  H01L21/67132 ,  H01L21/6836 ,  H01L21/6838 ,  H01L2221/68327 ,  Y10T156/1132 ,  Y10T156/1933

摘要： Disclosed is a pickup method in which a first suction unit is caused to approach and come into contact with a chip adhered to an adhesive sheet, and a second suction unit which is formed with a concavity on a contact surface configured to come into contact with the adhesive sheet is caused to approach and come into contact with the adhesive sheet in such a manner as to be opposite to the first suction unit. The adhesive sheet is sucked by the second suction unit that is in contact with the adhesive sheet, and a fluid is injected between the adhesive sheet and the chip by an injection unit. As a result, the adhesive sheet is detached from a portion of the chip opposite to the concavity, and in the state where the chip is being sucked by the first suction unit, the first suction unit is caused to be spaced away from the adhesive sheet that is being sucked by the second suction unit. In this manner, the chip is detached and picked up from the adhesive sheet.

摘要翻译： 公开了一种拾取方法，其中使第一吸引单元接近并与粘附到粘合片上的芯片接触;以及第二抽吸单元，其形成在接触表面上的与凹部接触的接触表面上的凹部 使粘合片以与第一抽吸单元相对的方式接近并与粘合片接触。 通过与粘合片接触的第二抽吸单元吸附粘合片，并且通过注射单元将流体注入粘合片和芯片之间。 结果，粘合片与芯片的与凹部相反的部分分离，并且在芯片被第一吸引单元吸附的状态下，使第一吸引单元与粘合片隔开 其被第二抽吸单元吸入。 以这种方式，将芯片从粘合片上分离并拾取。

公开(公告)号：US08470720B2

公开(公告)日：2013-06-25

申请号：US12934165

申请日：2009-03-16

申请人： Ken Nakao ,  Muneo Harada

发明人： Ken Nakao ,  Muneo Harada

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： C23C14/12 ,  B05D1/60 ,  B05D3/0473 ,  B05D3/0493 ,  C23C14/243 ,  H01L21/02126 ,  H01L21/02312 ,  H01L21/312

摘要： A wall surface of a film forming container is heated to or above a vaporization temperature of a material monomer, which is used to form an organic film, by using an external heater formed along the wall surface of the film forming container, substrates are heated to a thermal polymerization reaction temperature by using an internal heater that is disposed apart from the external heater and near a substrate-supporting container in which the substrates are received, and the organic film is formed through thermal polymerization occurring on the substrates by supplying the material monomer into the film forming container.

摘要翻译： 通过使用沿着成膜容器的壁面形成的外部加热器将成膜容器的壁面加热至或高于用于形成有机膜的材料单体的蒸发温度，将基板加热至 通过使用与外部加热器隔离的内部加热器和接收基板的基板支撑容器附近的内部加热器，形成热聚合反应温度，并且通过在基板上进行热聚合而形成有机膜，所述热聚合通过供给材料单体 进入成膜容器。

公开(公告)号：US20070259506A1

公开(公告)日：2007-11-08

申请号：US11661349

申请日：2005-08-29

申请人： Tomohisa Hoshino ,  Hiroyuki Hashimoto ,  Muneo Harada

发明人： Tomohisa Hoshino ,  Hiroyuki Hashimoto ,  Muneo Harada

IPC分类号： G01R1/067 ,  H01L21/76

CPC分类号： G01R1/06716 ,  G01R1/06727 ,  Y10T29/49002

摘要： A method for manufacturing a probe needle having beams and a contactor placed on tips of the beams comprises preparing a Si wafer 20, forming a seed layer 21 on the Si wafer 20, and forming grooves in a desired shape of the beams on the seed layer 21 by patterning a photoresist 23. Subsequently, the grooves are filled up with metal-plated layers 24a, 24b to form the desired shape of beams.

摘要翻译： 用于制造具有光束的探针的方法和放置在光束的尖端上的接触器包括准备Si晶片20，在Si晶片20上形成晶种层21，并且在晶种层上形成期望形状的光束的凹槽 通过图案化光致抗蚀剂23。 随后，用金属镀层24a，24b填充凹槽以形成所需的梁形状。

公开(公告)号：US20070181928A1

公开(公告)日：2007-08-09

申请号：US11508141

申请日：2006-08-23

申请人： Yoshiki Yamanishi ,  Muneo Harada ,  Takahiro Kitano ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Kinji Yamada ,  Tomotaka Shinoda ,  Katsuya Okumura ,  Shuichi Kawano

发明人： Yoshiki Yamanishi ,  Muneo Harada ,  Takahiro Kitano ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Kinji Yamada ,  Tomotaka Shinoda ,  Katsuya Okumura ,  Shuichi Kawano

IPC分类号： H01L29/94

CPC分类号： H01L23/50 ,  H01G4/228 ,  H01G4/33 ,  H01L23/481 ,  H01L24/81 ,  H01L2224/81801 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01056 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/30105 ,  H05K1/162 ,  H05K3/002 ,  H05K2201/09509 ,  H05K2201/096 ,  H05K2201/10378

摘要： A capacitor having a high quality and a manufacturing method of the same are provided. A capacitor has a lower electrode formed on an oxide film, a dielectric layer formed on the lower electrode, an upper electrode formed so as to face the lower electrode with the dielectric layer between, and an upper electrode formed so as to cover the upper electrode, an opening portion of the upper electrode and an opening portion of the dielectric layer. By forming the upper electrode on the dielectric layer, it is possible to pattern the dielectric layer by using the upper electrode as a mask, and provide a capacitor having a high-quality dielectric layer by preventing impurity diffusion into the dielectric layer. By forming the upper electrode on the dielectric layer, it is possible to prevent the dielectric layer from being exposed to etching liquid, liquid developer, etc.

摘要翻译： 提供了具有高质量的电容器及其制造方法。 电容器具有形成在氧化膜上的下电极，形成在下电极上的电介质层，形成为与电极之间介电层相对的下电极的上电极和形成为覆盖上电极的上电极 ，上电极的开口部分和电介质层的开口部分。 通过在电介质层上形成上电极，可以通过使用上电极作为掩模对电介质层进行图案化，并且通过防止杂质扩散到电介质层中来提供具有高质量电介质层的电容器。 通过在电介质层上形成上部电极，可以防止电介质层暴露于蚀刻液体，液体显影剂等

公开(公告)号：US20070126041A1

公开(公告)日：2007-06-07

申请号：US11508204

申请日：2006-08-23

申请人： Tomotaka Shinoda ,  Kinji Yamada ,  Takahiro Kitano ,  Yoshiki Yamanishi ,  Muneo Harada ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Katsuya Okumura ,  Shuichi Kawano

发明人： Tomotaka Shinoda ,  Kinji Yamada ,  Takahiro Kitano ,  Yoshiki Yamanishi ,  Muneo Harada ,  Tatsuzo Kawaguchi ,  Yoshihiro Hirota ,  Katsuya Okumura ,  Shuichi Kawano

IPC分类号： H01L29/94 ,  H01L21/00

CPC分类号： H01L28/65 ,  H01L27/11507 ,  H01L28/55 ,  Y10T29/435

摘要： A dielectric film capacitor includes a lower electrode having an opening and formed of a material including platinum, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film. The planar area of the lower electrode is 50% or more of the area of a formation region of the dielectric film. A dielectric film capacitor includes a lower electrode formed of a material including platinum and having a thickness of 10 to 100 nm, a dielectric film provided over the lower electrode and including an oxide having an ABOx crystal structure, and an upper electrode provided over the dielectric film.

摘要翻译： 电介质膜电容器包括具有开口并由包括铂的材料形成的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜和设置在电介质膜上的上电极。 下部电极的平面面积为电介质膜的形成区域的面积的50％以上。 电介质膜电容器包括由包括铂的材料形成的厚度为10至100nm的下电极，设置在下电极上并包括具有ABOx晶体结构的氧化物的电介质膜，以及设置在电介质上的上电极 电影。

公开(公告)号：US06438243B1

公开(公告)日：2002-08-20

申请号：US09085047

申请日：1998-05-27

申请人： Naoki Ikeuchi ,  Muneo Harada ,  Shoichi Fukui ,  Takahiko Oasa ,  Shigeru Ando ,  Kenji Tanaka

发明人： Naoki Ikeuchi ,  Muneo Harada ,  Shoichi Fukui ,  Takahiko Oasa ,  Shigeru Ando ,  Kenji Tanaka

IPC分类号： H04R2500

CPC分类号： H04R15/02

摘要： A vibration wave detector having a first diaphragm for receiving vibration waves, such as sound waves and so on, to be propagated in a medium, a resonant unit having a plurality of cantilever resonators each having such a length as to resonate at an individual predetermined frequency, a retaining rod for retaining the resonant unit, a second diaphragm positioned on the opposite side of the first diaphragm with respect to the retaining rod, and a vibration intensity detector for detecting the vibration intensity, for each predetermined frequency, of each of the resonators, by the vibration waves received by the first diaphragm and propagated to the resonant unit through the retaining rod.

摘要翻译： 一种振动波检测器，具有用于接收诸如声波等的振动波在介质中传播的第一振动膜，具有多个悬臂谐振器的谐振单元，每个悬臂谐振器具有以各个预定频率谐振的长度 ，用于保持谐振单元的保持杆，相对于保持杆定位在第一隔膜相对侧的第二隔膜，以及用于检测每个谐振器的每个预定频率的振动强度的振动强度检测器 通过由第一隔膜接收的振动波并通过保持杆传播到谐振单元。

公开(公告)号：US08716130B2

公开(公告)日：2014-05-06

申请号：US13643102

申请日：2011-04-04

申请人： Kippei Sugita ,  Kenji Matsuda ,  Hiroyuki Hashimoto ,  Muneo Harada

发明人： Kippei Sugita ,  Kenji Matsuda ,  Hiroyuki Hashimoto ,  Muneo Harada

IPC分类号： H01L21/44

CPC分类号： H01L21/283 ,  H01L21/0206 ,  H01L21/02063 ,  H01L21/31058 ,  H01L21/31138 ,  H01L21/76826 ,  H01L21/76828 ,  H01L21/76831 ,  H01L21/76898

摘要： The method includes forming a hole penetrating from one surface of a substrate to an electrode formed on the other surface of the substrate; forming an organic insulating film in the hole; removing at least a part of the organic insulating film formed in a bottom portion of the hole and not the organic insulating film formed on a side wall portion of the hole, to expose the electrode; cleaning an exposed surface of the electrode by using plasma of an inert gas; filling a conductive metal in the hole; removing at least a part of a surface of the organic insulating film by the reaction of oxygen plasma; and annealing the substrate in a dysoxidative atmosphere.

摘要翻译： 该方法包括形成从衬底的一个表面穿透到形成在衬底的另一个表面上的电极的孔; 在孔中形成有机绝缘膜; 除去形成在孔的底部的有机绝缘膜的至少一部分，而不是形成在孔的侧壁部上的有机绝缘膜，以露出电极; 通过使用惰性气体的等离子体清洁电极的暴露表面; 在孔中填充导电金属; 通过氧等离子体的反应去除有机绝缘膜的至少一部分表面; 并在氧化性气氛中退火底物。