公开(公告)号：US20060255182A1

公开(公告)日：2006-11-16

申请号：US11411983

申请日：2006-04-27

申请人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

发明人： Katsuya Okumura ,  Manabu Yabe ,  Yasuyuki Koyagi ,  Muneo Harada ,  Tomofumi Kiyomoto

IPC分类号： B05B1/26 ,  B05B1/34

CPC分类号： B41J2/1609 ,  B05C5/007 ,  B05C5/0212 ,  B05C5/027 ,  B41J2/1628 ,  B41J2/1631 ,  H01J9/242

摘要： Using a silicon single crystal with (100) plane orientation as a base material, a pectinate portion having a slope portion and a patterning material guiding groove is formed through photolithography process. A liquid reservoir for keeping a patterning material common to tooth portions of the pectinate portion is formed in the same step as a step for forming the guiding grooves. In forming slope portion, anisotropic wet etching allows easy and accurate formation of a slope portion with (111) plane orientation to (100) plane orientation, by taking advantage of differences in speed due to the plane orientations. In addition, by forming a groove portion using anisotropic dry etching, the patterning material guiding groove having a perpendicular sidewall reaching the slope portion may be formed at high accuracy. A pattern forming apparatus with high accuracy and low cost is provided.

摘要翻译： 使用具有（100）面取向的硅单晶作为基材，通过光刻工艺形成具有倾斜部分和图案形成材料引导槽的果胶部分。 在与用于形成导向槽的步骤相同的步骤中形成用于保持图形材料的共同于图形部分的牙齿部分的图案材料的液体储存器。 在形成斜坡部分时，通过利用由于平面取向的速度差异，各向异性湿蚀刻允许容易且准确地形成具有（111）面取向到（100）面取向的斜面部分。 此外，通过使用各向异性干蚀刻形成槽部，可以高精度地形成具有到达斜面部的垂直侧壁的图案形成材料导向槽。 提供了一种高精度，低成本的图案形成装置。

公开(公告)号：US20060043892A1

公开(公告)日：2006-03-02

申请号：US11197294

申请日：2005-08-05

申请人： Manabu Yabe ,  Nobuo Ichinobe

发明人： Manabu Yabe ,  Nobuo Ichinobe

IPC分类号： H01J11/02

CPC分类号： H01J11/12 ,  H01J9/242 ,  H01J11/36

摘要： A panel (1) for a plasma display includes a substrate (2). Linear first ribs (31) each extending in the y direction are arranged in the x direction perpendicular to the y direction on a main surface of the substrate (2) at a predetermined pitch. Linear second ribs (32) each extending in the x direction are arranged in the y direction on the main surface of the substrate (2) at a predetermined pitch. A clearance (4) exists between each of the second ribs (32) and the substrate (2) in a space formed by two adjacent ones of the first ribs (31). Two adjacent cells arranged in the y direction are continuous through the clearance (4). Thus, it is possible to supply a light emitting material, and feed gas necessary for light emission, to each cell using the clearance (4) in a suitable manner in the panel (1).

摘要翻译： 用于等离子体显示器的面板（1）包括基板（2）。 在y方向上延伸的线状的第一肋（31）以规定的间距配置于与基板（2）的主面垂直的y方向的x方向上。 在x方向延伸的线状的第二肋条32沿着y方向以规定的间距配置在基板的主面上。 在由两个相邻的第一肋（31）形成的空间中，在每个第二肋（32）和基板（2）之间存在间隙（4）。 沿y方向排列的两个相邻的单元通过间隙（4）连续。 因此，可以以适当的方式在面板（1）中使用间隙（4）向每个电池单元提供发光材料和发光所需的进料气体。

公开(公告)号：US5726074A

公开(公告)日：1998-03-10

申请号：US569842

申请日：1995-12-08

申请人： Manabu Yabe

发明人： Manabu Yabe

IPC分类号： G01R31/26 ,  H01L21/66 ,  H01L23/544 ,  H01L21/00

CPC分类号： H01L21/6836 ,  H01L22/20 ,  H01L23/544 ,  H01L2221/68327 ,  H01L2223/54406 ,  H01L2223/54413 ,  H01L2223/5442 ,  H01L2223/54433 ,  H01L2223/54453 ,  H01L2223/54473 ,  H01L2223/5448 ,  H01L2223/54493 ,  H01L2924/0002

摘要： In a method and an apparatus for manufacturing a semiconductor integrated circuit, including a wafer test process, an assembling process and a sorting process, electric characteristics of a plurality of semiconductor integrated circuits formed on a wafer, is measured, and then stored in a memory means together with data of the position of each semiconductor integrated circuit. The plurality of semiconductor integrated circuits on the wafer are cut into individual semiconductor integrated circuit chips. On the basis of the position data and the electric characteristics of each of the semiconductor integrated circuit chips read from the memory means, the semiconductor integrated circuit chips are classified into at least two subsets each consisting of non-defective semiconductor integrated circuit chips having the same electric characteristics different from that of products included in the other subset, and the non-defective semiconductor integrated circuit chips included in each of the at least two subsets, are packaged for each of the at least two subsets, so that the sorting is simultaneously carried out.

摘要翻译： 在制造半导体集成电路的方法和装置中，包括晶片测试处理，组装处理和分选处理，测量形成在晶片上的多个半导体集成电路的电特性，然后存储在存储器 与每个半导体集成电路的位置的数据一起表示。 将晶片上的多个半导体集成电路切割成单独的半导体集成电路芯片。 基于从存储装置读取的每个半导体集成电路芯片的位置数据和电特性，半导体集成电路芯片被分成至少两个子集，每个子​​集由具有相同的无缺陷半导体集成电路芯片组成 电子特性与包括在另一子集中的产品的电特性不同，并且包括在至少两个子集中的每一个中的无缺陷半导体集成电路芯片被封装为至少两个子集中的每一个，使得分类被同时传送 出来

公开(公告)号：US20080220682A1

公开(公告)日：2008-09-11

申请号：US12149888

申请日：2008-05-09

申请人： Manabu Yabe ,  Nobuo Ichinobe

发明人： Manabu Yabe ,  Nobuo Ichinobe

IPC分类号： H01J9/02

CPC分类号： H01J11/12 ,  H01J9/242 ,  H01J11/36

摘要： A panel (1) for a plasma display includes a substrate (2). Linear first ribs (31) each extending in the y direction are arranged in the x direction perpendicular to the y direction on a main surface of the substrate (2) at a predetermined pitch. Linear second ribs (32) each extending in the x direction are arranged in the y direction on the main surface of the substrate (2) at a predetermined pitch. A clearance (4) exists between each of the second ribs (32) and the substrate (2) in a space formed by two adjacent ones of the first ribs (31). Two adjacent cells arranged in the y direction are continuous through the clearance (4). Thus, it is possible to supply a light emitting material, and feed gas necessary for light emission, to each cell using the clearance (4) in a suitable manner in the panel (1).

摘要翻译： 用于等离子体显示器的面板（1）包括基板（2）。 在y方向上延伸的线状的第一肋（31）以规定的间距配置于与基板（2）的主面垂直的y方向的x方向上。 在x方向延伸的线状的第二肋条32沿着y方向以规定的间距配置在基板的主面上。 在由两个相邻的第一肋（31）形成的空间中，在每个第二肋（32）和基板（2）之间存在间隙（4）。 沿y方向排列的两个相邻的单元通过间隙（4）连续。 因此，可以以适当的方式在面板（1）中使用间隙（4）向每个电池单元提供发光材料和发光所需的进料气体。

公开(公告)号：US06966538B2

公开(公告)日：2005-11-22

申请号：US10796211

申请日：2004-03-10

申请人： Yuzo Hayashi ,  Tatsuo Saito ,  Manabu Yabe ,  Masaharu Nakagawa

发明人： Yuzo Hayashi ,  Tatsuo Saito ,  Manabu Yabe ,  Masaharu Nakagawa

IPC分类号： F16K3/18 ,  F16K3/02 ,  F16K3/16 ,  F16K31/163 ,  F16K31/524 ,  F16K51/02 ,  F16K1/16

CPC分类号： F16K3/16 ,  F16K51/02 ,  Y10T137/87997

摘要： A gate valve has a valve rod equipped with a valve plate having a pair of valve plate surfaces, wherein the valve rod is tilted by an actuator to thereby effect highly reliable valve opening/closing operation with a simple construction. In the gate valve, the valve rod, which is equipped with the valve plate with the pair of valve plate surfaces, is rotatably supported, and raised and lowered by a raising/lowering cylinder, the valve rod being tilted by an actuator, a combination of a cam member and a cam raising/lowering cylinder, a combination of a driving block and a cylinder, or a combination of a connection member and a driving device (not shown) to thereby effect valve opening/closing with the pair of valve plate surfaces.

公开(公告)号：US06561484B2

公开(公告)日：2003-05-13

申请号：US09964339

申请日：2001-09-28

申请人： Masaharu Nakagawa ,  Hiroshi Minamoto ,  Manabu Yabe ,  Yuuzou Hayashi ,  Norikimi Irie

发明人： Masaharu Nakagawa ,  Hiroshi Minamoto ,  Manabu Yabe ,  Yuuzou Hayashi ,  Norikimi Irie

IPC分类号： F16K2502

CPC分类号： F16K3/188 ,  F16K51/02

摘要： A gate valve according to the present invention including a first valve plate having a valve opening, a second valve plate connected to the first valve plate via first bellows, and an actuator provided between the first valve plate and the second valve plate, wherein the first valve plate is moved by the operation of the actuator, thereby enabling the valve plate, a valve rod, and the like to be made small and lightweight.

摘要翻译： 根据本发明的闸阀，包括具有阀开口的第一阀板，经由第一波纹管连接到第一阀板的第二阀板和设置在第一阀板和第二阀板之间的致动器，其中第一阀板 阀板通过致动器的操作而移动，从而使得阀板，阀杆等被制造得小而轻。

公开(公告)号：US20050092953A1

公开(公告)日：2005-05-05

申请号：US10796211

申请日：2004-03-10

申请人： Yuzo Hayashi ,  Tatsuo Saito ,  Manabu Yabe ,  Masaharu Nakagawa

发明人： Yuzo Hayashi ,  Tatsuo Saito ,  Manabu Yabe ,  Masaharu Nakagawa

IPC分类号： F16K3/18 ,  F16K3/02 ,  F16K3/16 ,  F16K31/163 ,  F16K31/524 ,  F16K51/02 ,  F16K25/00

CPC分类号： F16K3/16 ,  F16K51/02 ,  Y10T137/87997

摘要： A gate valve has a valve rod equipped with a valve plate having a pair of valve plate surfaces, wherein the valve rod is tilted by an actuator to thereby effect highly reliable valve opening/closing operation with a simple construction. In the gate valve, the valve rod, which is equipped with the valve plate with the pair of valve plate surfaces, is rotatably supported, and raised and lowered by a raising/lowering cylinder, the valve rod being tilted by an actuator, a combination of a cam member and a cam raising/lowering cylinder, a combination of a driving block and a cylinder, or a combination of a connection member and a driving device (not shown) to thereby effect valve opening/closing with the pair of valve plate surfaces.

摘要翻译： 闸阀具有装备有具有一对阀板表面的阀板的阀杆，其中阀杆由致动器倾斜，从而以简单的结构实现高度可靠的阀打开/关闭操作。 在闸阀中，配备有具有一对阀板面的阀板的阀杆由升降缸可旋转地支撑并升降，阀杆由致动器倾斜，组合 凸轮构件和凸轮升降缸，驱动块和气缸的组合，或连接构件和驱动装置（未示出）的组合，从而通过一对阀板来实现阀打开/关闭 表面。

公开(公告)号：US5779928A

公开(公告)日：1998-07-14

申请号：US799478

申请日：1997-02-12

申请人： Tetsuro Yamashita ,  Tsuyoshi Mitsuhashi ,  Manabu Yabe

发明人： Tetsuro Yamashita ,  Tsuyoshi Mitsuhashi ,  Manabu Yabe

IPC分类号： B05C11/08 ,  B05D3/10 ,  B08B3/08 ,  C11D7/50 ,  C11D11/00 ,  H01L21/00 ,  H01L21/311 ,  B44C1/22 ,  B08B6/00

CPC分类号： H01L21/6715 ,  B08B3/08 ,  C11D11/0047 ,  C11D7/5022 ,  H01L21/31133

摘要： A film dissolving liquid is ejected from a needle-shaped nozzle onto a peripheral edge portion of a substrate surface of a SOG film, while being subjected to the film dissolving liquid. The substrate is rotated in order to dissolve and remove the SOG film from the peripheral edge portion of the substrate. The film dissolving liquid is a solvent or mixture of two or more solvents selected from the group cyclohexanone, .gamma.-butyrolactone, ethyl lactate or ethyl pyruvate. As a result, a swelling of the SOG film is not created at the edge portion of the substrate. A crack is not therefore created at the edge portion of the SOG film, and generation of particles due to a damage at the film swelling portion thereof is prevented.

摘要翻译： 将薄膜溶解液从针状喷嘴喷射到SOG膜的基板表面的周边部分上，同时进行溶解液体。 旋转基板以从基板的周边部分溶解并除去SOG膜。 膜溶解液是选自环己酮，γ-丁内酯，乳酸乙酯或丙酮酸乙酯的两种或更多种溶剂的溶剂或混合物。 结果，在基板的边缘部分处不产生SOG膜的膨胀。 因此，在SOG膜的边缘部分处不产生裂纹，并且防止了由于其在膜膨胀部分处的损坏而产生的颗粒。

公开(公告)号：US5599394A

公开(公告)日：1997-02-04

申请号：US312733

申请日：1994-09-27

申请人： Manabu Yabe ,  Masaru Kitagawa ,  Takafumi Ohki ,  Mitsuhiro Fujita

发明人： Manabu Yabe ,  Masaru Kitagawa ,  Takafumi Ohki ,  Mitsuhiro Fujita

IPC分类号： B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  F04B43/073 ,  H01L21/00 ,  H01L21/316

CPC分类号： H01L21/67011 ,  B05C11/08 ,  B05C11/1002 ,  F04B43/0733

摘要： A dispensing apparatus for delivering a silica coating solution in a fixed quantity from a liquid container to a surface of a substrate to form a silica film thereon. The liquid container storing the silica coating solution is connected to a diaphragm pump through a suction pipe. The diaphragm pump is connected to a nozzle through a delivery pipe. The coating solution in the liquid container is supplied to the nozzle by sucking and delivering action of the diaphragm pump. The coating solution is discharged from the nozzle to a surface of a substrate supported by a spin chuck of a spin coating apparatus.

摘要翻译： 一种用于将固定量的二氧化硅涂层溶液从液体容器输送到基底表面以在其上形成二氧化硅膜的分配装置。 储存二氧化硅涂布液的液体容器通过抽吸管连接到隔膜泵。 隔膜泵通过输送管连接到喷嘴。 液体容器中的涂布液通过隔膜泵的吸引和输送动作被供给到喷嘴。 涂布溶液从喷嘴排出到由旋涂装置的旋转卡盘支撑的基板的表面上。

公开(公告)号：US20060099535A1

公开(公告)日：2006-05-11

申请号：US11222736

申请日：2005-09-12

申请人： Manabu Yabe

发明人： Manabu Yabe

IPC分类号： B05D5/00 ,  B05C5/00 ,  G03C5/00

CPC分类号： H01J9/241 ,  B05C5/0216 ,  B05C9/14

摘要： A pattern forming apparatus (1) comprises an ejection part (41) for ejecting a patterning material to a main surface of a substrate (9) from a plurality of outlets. The ejection part (41) moves relative to the substrate (9) in a direction along the main surface of the substrate (9) by a stage moving mechanism (2) and a plurality of linear pattern elements are formed on the substrate (9). In forming the linear pattern elements, moving speed of the plurality of outlets relative to the substrate (9) is changed periodically by an outlets moving mechanism (44) and gnarl portions each of which spreads in a direction perpendicular to a direction extending the linear pattern elements (91) are formed in each linear pattern element (91). This makes it possible to form a pattern similar to parallel crosses on the substrate 9 appropriately while ejecting the patterning material from the plurality of outlets.

摘要翻译： 图案形成装置（1）包括用于从多个出口将图案形成材料喷射到基板（9）的主表面的喷射部（41）。 喷射部（41）通过台移动机构（2）沿着基板（9）的主表面的方向相对于基板（9）移动，并且在基板（9）上形成多个线状图案元件， 。 在形成线状图案元件时，多个出口相对于基板（9）的移动速度由出口移动机构（44）周期性地改变，并且每个孔在与延伸线性图案的方向垂直的方向上扩展 元件（91）形成在每个线性图案元件（91）中。 这使得可以在从多个出口排出图案形成材料的同时适当地形成与基板9上的平行十字相似的图案。