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公开(公告)号：US4580522A
公开(公告)日：1986-04-08
申请号：US706184
申请日：1985-02-27
申请人： Kazumasa Fujioka , Sumio Okuno , Muneo Mizumoto , Hideaki Kamohara , Shinjiro Ueda , Takao Kuroda , Sumio Yamaguchi , Naoyuki Tamura
发明人： Kazumasa Fujioka , Sumio Okuno , Muneo Mizumoto , Hideaki Kamohara , Shinjiro Ueda , Takao Kuroda , Sumio Yamaguchi , Naoyuki Tamura
IPC分类号： H01L21/203 , C30B23/06 , C30B23/08 , B05C13/00
CPC分类号： C30B23/063
摘要： A rotary substrate holder of a molecular beam epitaxy apparatus including leads-cum-posts serving both as leads for passing a current to a heater for heating a substrate and as posts for supporting the heater. By this arrangement, heat transferred from the heater to a bearing disposed in the vicinity of the heater is minimized in amount, thereby prolonging the service life of the holder and minimizing a heat loss thereof.
摘要翻译： 分子束外延装置的旋转衬底保持器，其包括用作将电流传递到用于加热衬底的加热器的引线的辅助柱和用于支撑加热器的柱。 通过这种布置，从加热器传递到设置在加热器附近的轴承的热量最小化，从而延长保持器的使用寿命并最小化其热损失。
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公开(公告)号：US4664062A
公开(公告)日：1987-05-12
申请号：US792195
申请日：1985-10-28
IPC分类号： H01L21/203 , C30B23/02 , H01L21/00 , H01L21/677 , C23C14/02 , C23C14/56
CPC分类号： H01L21/67207 , C30B23/02 , H01L21/67213 , H01L21/67739
摘要： In a molecular beam epitaxy apparatus, the loading chamber for introducing the substrates is made separable from both the preparation chamber for cleaning the substrates and the growth chamber for forming thin films onto the respective substrates, so that the evacuation of the loading chamber is possible even when the loading chamber is separated from the apparatus, thus improving the productivity thereof.
摘要翻译： 在分子束外延装置中，用于引入基板的装载室与用于清洁基板的准备室和用于在各个基板上形成薄膜的生长室两者分开，从而甚至可以将装载室抽真空 当装载室与装置分离时，从而提高其生产率。
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公开(公告)号：US5259735A
公开(公告)日：1993-11-09
申请号：US873175
申请日：1992-04-24
IPC分类号： B01D19/00 , B01D8/00 , B01J3/00 , B01J3/02 , B01L7/00 , B01L99/00 , C23C14/54 , C23C14/56 , F04B23/14 , F04B37/08
CPC分类号： C23C14/564 , B01D8/00 , B01J3/006 , Y10S417/901
摘要： An evacuation system in an ultra-high vacuum sputtering apparatus capable of shortening the pumping time of the system. A main pump, composed of a turbo-molecular pump and a baffle is positioned upstream of a main pump and cooled to a temperature in which argon gas is not absorbed and only water is absorbed. The pump and a vacuum chamber are separated by a valve. A pipeline circulates a heating medium to rapidly heat and cool the vacuum chamber for enabling a gas discharge from the vacuum chamber whereby the pumping time can be reduced and the overall production of the system can be increased.
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公开(公告)号：US08647502B2
公开(公告)日：2014-02-11
申请号：US12731446
申请日：2010-03-25
IPC分类号： C02F9/14
CPC分类号： C02F3/30 , C02F1/441 , C02F3/06 , C02F3/1268 , C02F9/00 , C02F2209/42 , Y02W10/15 , Y02W10/33 , Y02W10/37
摘要： A sewage treatment apparatus includes a membrane separation active-sludge treating section which performs a biological treatment on a part of sewage, which is introduced by a water introducing section while flowing through a sewer trunk line, to generate first treated sewage; a membrane highly treating section which performs a membrane high treatment on the first treated sewage to generate second treated sewage; a membrane treating tank which stores the first treated sewage; a membrane highly treating tank which stores the second treated sewage; water level sensors which respectively measure water level of the membrane treating tank and the membrane highly treating tank; and a power-control section which controls water introducing quantity of the water introducing section on the basis of the water level data measured by the water level sensors.
摘要翻译： 污水处理装置包括：膜分离活性污泥处理部，其对通过下水道主干线流动的水引入部引入的一部分污水进行生物处理，生成第一处理污水; 膜处理部，其对所述第一处理污水进行膜高处理，生成第二处理污水; 储存第一处理污水的膜处理槽; 储存第二处理污水的膜高处理槽; 分别测量膜处理槽和膜高处理槽的水位的水位传感器; 以及功率控制部，其基于由水位传感器测量的水位数据来控制水引入部的水引入量。
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公开(公告)号：US07042210B2
公开(公告)日：2006-05-09
申请号：US09913362
申请日：2000-12-14
IPC分类号： G01B7/30
摘要： A non-contact position sensor includes a plurality of magnets, at least one magnetic sensor element, and an object to be detected. The plurality of magnets form a magnetic circuit which includes a U-shaped first magnetic body, a U-shaped second magnetic body, and the plurality of magnets. The plurality of magnets are disposed between the two U-shaped magnetic bodies. The magnetic sensor element is held by the two U-shaped magnetic bodies.
摘要翻译： 非接触位置传感器包括多个磁体，至少一个磁性传感器元件和待检测的物体。 多个磁体形成包括U形第一磁体，U形第二磁体和多个磁体的磁路。 多个磁体设置在两个U形磁体之间。 磁传感器元件由两个U形磁体保持。
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公开(公告)号：US4931744A
公开(公告)日：1990-06-05
申请号：US265702
申请日：1988-11-01
CPC分类号： H05H7/00
摘要： A synchrotron radiation source and a method of making the same. As assembly of a beam absorber for absorbing synchrotron radiation beams and a piping for cooling the beam absorber is mounted in a charged particle beam duct of a bending section of the synchrotron radiation source for bending a charged particle beam. Fixed to at least one straight duct that is connectable to either of the opposite ends of the charged particle beam duch is a piping guide duct through which the beam absorber cooling piping is drawn to the outside, so that the assembly of the beam absorber and the beam absorber cooling piping can readily be mounted in the synchrotron radiation source.
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公开(公告)号：US20050034528A1
公开(公告)日：2005-02-17
申请号：US10489511
申请日：2002-09-12
申请人： Akira Matsuura , Shinjiro Ueda , Toshiro Otobe , Yasunobu Kobayashi , Katsuhiko Omoto , Yasunori Matsukawa , Toshiharu Motofusa
发明人： Akira Matsuura , Shinjiro Ueda , Toshiro Otobe , Yasunobu Kobayashi , Katsuhiko Omoto , Yasunori Matsukawa , Toshiharu Motofusa
CPC分类号： G01L1/2206
摘要： A strain sensor improved in detection accuracy without variation of bending stresses applied to the strain detecting element. The sensor substrate has a first fixing hole at one end and a second fixing hole at the other end, a detecting hole at the center, and at least one strain detecting element on the upper surface or lower surfce thereof. The first fixing member is press-fitted into the first fixing hole. The second fixing member is press-fitted into the second fixing hole. The detecting member is press-fitted into the detecting hole. Further, when an external force is applied to the detecting member, strain generated due to the positional shift of the detecting member is detected by the strain detecting element with respect to the first fixing member and the second fixing member.
摘要翻译： 应变传感器提高了检测精度，而不会对应变检测元件施加弯曲应力的变化。 传感器基板的一端具有第一固定孔，另一端具有第二固定孔，中心具有检测孔，以及在其上表面或下表面上的至少一个应变检测元件。 第一固定构件压配合到第一固定孔中。 第二固定构件压配合到第二固定孔中。 检测部件压配合到检测孔中。 此外，当对检测部件施加外力时，由应变检测元件相对于第一固定部件和第二固定部件检测由于检测部件的位置偏移而产生的应变。
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公开(公告)号：US5451147A
公开(公告)日：1995-09-19
申请号：US767666
申请日：1991-09-30
申请人： Seiji Sakagami , Shinjiro Ueda , Masahiro Mase , Takashi Nagaoka
发明人： Seiji Sakagami , Shinjiro Ueda , Masahiro Mase , Takashi Nagaoka
IPC分类号： F04D29/056 , F04D19/04 , F04D29/04 , F04D29/057 , F04D29/059 , F01D1/36
CPC分类号： F04D29/057 , F04D17/168 , F04D19/04 , F04D23/008 , F04D29/0513
摘要： A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.
摘要翻译： 紧凑，易于操作的涡轮真空泵包括具有入口和出口的壳体; 设置在所述壳体中并且具有阶梯状周面的圆柱形转子和固定到所述台阶的突出角部的多个叶片; 以及泵送机构部，在该泵机构部分中，通过定子面对泵送级，所述定子面对转子的叶片横跨狭窄的间隙，并且其中在定子内部的阶梯状凹陷中设置有周边泵流路。 所述涡轮真空泵还包括旋转轴，其连接到所述转子并且由径向气体轴承和推进气体轴承可旋转地支撑; 以及用于操作转子的马达部分。 通过入口吸入的气体可以通过出口排出到大气中。
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公开(公告)号：US5036290A
公开(公告)日：1991-07-30
申请号：US490450
申请日：1990-03-08
申请人： Tadasi Sonobe , Mamoru Katane , Takashi Ikeguchi , Manabu Matsumoto , Shinjiro Ueda , Toshiaki Kobari , Takao Takahashi , Toa Hayasaka , Toyoki Kitayama
发明人： Tadasi Sonobe , Mamoru Katane , Takashi Ikeguchi , Manabu Matsumoto , Shinjiro Ueda , Toshiaki Kobari , Takao Takahashi , Toa Hayasaka , Toyoki Kitayama
摘要： Synchrotron radiation is generated when a base of charged particles is bent by a bending magnet. The synchrotron radiation passes down a lead-out duct as the total number of pumps is limited by the size of the apparatus and many pumps are needed in order to achieve a good vacuum. An ion pump has a main magnetic field, normally generated by a magnet of the ion pump which controls the behavior of the electrons in the ion pump. However, the leakage magnetic field of the bending magnet affects the ion pump, and therefore the ion pump is arranged so that its main magnetic field is aligned with the leakage magnetic field at the ion pump, or at least with a main component thereof. In this way, the effect of the leakage magnetic field on the ion pump is reduced. Indeed, it is possible to use the leakage magnetic field as the main magnetic field of the ion pump.
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公开(公告)号：US4395197A
公开(公告)日：1983-07-26
申请号：US171268
申请日：1980-07-22
申请人： Yoichi Yoshinaga , Hideo Nishida , Shinjiro Ueda
发明人： Yoichi Yoshinaga , Hideo Nishida , Shinjiro Ueda
CPC分类号： F04D29/441 , Y10S415/914
摘要： A centrifugal compressor includes an impeller and a diffuser arranged around the outer periphery of the impeller and including a pair of annular, spaced diffuser plates defining a diffuser channel therebetween. A plurality of guide vanes are provided on at least one of the pair of diffuser plates to guide a low flow angle portion of a fluid flow introduced into the diffuser channel from the outlet of the impeller. The guide vanes each extend from the inlet of the diffuser channel to a position which does not exceed about one half the distance between the inlet and the outlet of the diffuser channel and have a height which is less than one half the spacing between the pair of diffuser plates.
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