公开(公告)号：US20080073982A1

公开(公告)日：2008-03-27

申请号：US11793332

申请日：2005-12-22

申请人： Kazuya Ono ,  Hisashi Tanimura ,  Hiroaki Takaiwa

发明人： Kazuya Ono ,  Hisashi Tanimura ,  Hiroaki Takaiwa

IPC分类号： G03F7/20 ,  H01L21/68 ,  H02K41/02

CPC分类号： G03F7/70725 ,  G03F7/70816 ,  H01L21/682 ,  H02K7/09 ,  H02K41/03 ,  H02K2201/18

摘要： A magnetic guide apparatus includes a guide member that has a guide plane provided along a first direction, and a moving body that has a facing plane facing the guide plane to be spaced apart from the guide plane. Magnetic attractive force is permitted to operate between the guide plane and the facing plane, such that the moving body is moved along the first direction while movement to a second direction, which is orthogonal to the first direction and parallel to the guide plane, is controlled. A first groove section is formed along the first direction on the guide plane and a second groove section is formed along the first direction so as to face the first groove section on the facing plane.

摘要翻译： 导引装置包括具有沿着第一方向设置的导向面的引导构件和具有面向导向面的面向与导向面间隔开的面对面的移动体。 磁吸引力被允许在引导平面和面对平面之间操作，使得移动体沿着第一方向移动，同时向与第一方向正交且平行于引导平面的第二方向的移动被控制 。 沿着第一方向在引导平面上形成第一槽部分，并且沿着第一方向形成第二槽部分，以面对面对面上的第一槽部分。

公开(公告)号：US20090190117A1

公开(公告)日：2009-07-30

申请号：US12320267

申请日：2009-01-22

申请人： Kazuya Ono ,  Toshimasa Shimoda ,  Yoichi Arai ,  Jin Nishikawa

发明人： Kazuya Ono ,  Toshimasa Shimoda ,  Yoichi Arai ,  Jin Nishikawa

IPC分类号： G03B27/54

CPC分类号： G03F7/709 ,  G03F7/70833

摘要： An exposure apparatus includes an illumination optical system that guides illumination light to a mask; a projection optical system that projects the pattern irradiated with the illumination light, onto a substrate; and a supporting device that integrally suspendingly supports at least part of the illumination optical system and the projection optical system, with a supporting member having a flexible structure.

摘要翻译： 曝光装置包括将照明光引导到面罩的照明光学系统; 将照射光照射的图案投影到基板上的投影光学系统; 以及支撑装置，其利用具有柔性结构的支撑构件一体地悬挂地支撑照明光学系统和投影光学系统的至少一部分。

公开(公告)号：US20060285092A1

公开(公告)日：2006-12-21

申请号：US11412079

申请日：2006-04-27

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： G03B27/52 ,  G03B27/42 ,  G01J1/00

CPC分类号： G03F7/706 ,  G03F7/70266 ,  G03F7/70341 ,  G03F7/70591 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70825 ,  G03F7/7085

摘要： An exposure apparatus for forming a predetermined pattern on a substrate by using exposure light, includes a stage apparatus which is movable with respect to an optical axis of the exposure light; a light-transmissive member provided at the stage apparatus, wherein a liquid is supplied on an upper surface of the light-transmissive member; and a measurement device which is settable below the light-transmissive member when measurement using the measurement device is performed. Leakage or entrance of a liquid used for exposure into an optical measurement device such as a wavefront aberration measurement device can be prevented, thereby enabling preferable optical adjustment such as imaging performance or optical characteristics.

公开(公告)号：US20060126045A1

公开(公告)日：2006-06-15

申请号：US11350937

申请日：2006-02-10

申请人： Kazuya Ono ,  Yuichi Shibazaki

发明人： Kazuya Ono ,  Yuichi Shibazaki

IPC分类号： G03B27/42

CPC分类号： G03F7/70341 ,  G03F7/70833

摘要： An exposure apparatus is an exposure apparatus that exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting a pattern image onto the substrate via the projection optical system and the liquid, wherein the projection optical system has a first group comprising an optical member that contacts the liquid, and a second group that differs from that first group; the first group is supported by a first support member; and the second group is separated from the first group and is supported by the second support member that differs from the first support member.

公开(公告)号：US06724466B2

公开(公告)日：2004-04-20

申请号：US10107663

申请日：2002-03-26

申请人： Kazuya Ono ,  Andrew J. Hazelton

发明人： Kazuya Ono ,  Andrew J. Hazelton

IPC分类号： G03B2758

CPC分类号： G03F7/70766 ,  G03F7/70716

摘要： A stage assembly (10) for moving and positioning a device (30) includes a stage (14), a stage mover assembly (16), a device table (18), a table mover assembly (20) and a damping assembly (22). The table mover assembly (20) moves the device table (18) along a Z axis, about an X axis and about a Y axis relative to the stage (14) and generates reaction forces. The damping assembly (22) is coupled to the table mover assembly (20). Uniquely, the damping assembly (22) reduces the reaction forces created by the table mover assembly (20) that are transferred to the stage (14).

摘要翻译： 用于移动和定位装置（30）的平台组件（10）包括台架（14），平台移动器组件（16），装置台（18），台动机组件（20）和阻尼组件（22） ）。 台式移动器组件（20）沿Z轴围绕X轴移动设备台（18），并相对于平台（14）绕Y轴移动并产生反作用力。 阻尼组件（22）联接到台式推动器组件（20）。 唯一地，阻尼组件（22）减小了由移动器组件（20）产生的反作用力，这些反作用力被传递到载物台（14）。

公开(公告)号：US06333572B1

公开(公告)日：2001-12-25

申请号：US09702887

申请日：2000-11-01

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： B65G4907

CPC分类号： G03F7/70716 ,  G03F9/70

摘要： There is disclosed an article positioning apparatus for positioning an article composed of an electric conductive material over a predetermined base, the apparatus comprising: levitating means for levitating the article over the base; driving force generating means including current generating means for inducing a current in the article and magnetic field generating means for generating a magnetic field in a direction perpendicular to the current induced by the current generating means, and the driving force generating means being for generating a driving force composed of Lorentz force to the article in the direction perpendicular to the current and the magnetic field; and displacement detecting means for detecting a displacement of the article, wherein the article is positioned through the driving force generating means in accordance with a result detected by the displacement detecting means.

摘要翻译： 公开了一种用于将由导电材料构成的制品定位在预定基底上的物品定位装置，该装置包括：用于将物品悬浮在基座上的悬浮装置; 驱动力产生装置，包括用于产生物品中的电流的电流产生装置和用于在垂直于由电流产生装置感应的电流的方向上产生磁场的磁场产生装置，并且驱动力产生装置用于产生驱动 力由洛伦兹力组成的物品在垂直于电流和磁场的方向上; 以及位移检测装置，用于检测物品的位移，其中根据由位移检测装置检测到的结果，物品通过驱动力产生装置定位。

公开(公告)号：US5780943A

公开(公告)日：1998-07-14

申请号：US831940

申请日：1997-04-02

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： F16F15/03 ,  G03F7/20 ,  H01J37/20 ,  H01L21/68 ,  H02N15/00 ,  H02K41/00

CPC分类号： G03F7/70691 ,  F16F15/035 ,  H01J37/20 ,  H01L21/682 ,  H02N15/00 ,  H01J2237/202 ,  H01J2237/3175

摘要： A stage apparatus has a pair of permanent-magnets fixed to a magnet holder and a coil fixed to a coil holder and positioned between the permanent-magnets. When electric current is supplied to the coil, an attractive force is generated between the coil and the upper permanent-magnet, while a repulsive force is generated between the coil and the lower permanent-magnet, thereby moving the coil holder in the vertical direction relative to the magnet holder. When the attractive force and repulsive force act on the coil simultaneously, the resultant force has high linearity with respect to the electric current because the attractive force and the repulsive force cancel the nonlinear characteristics of each other.

摘要翻译： 舞台装置具有固定到磁体保持器的一对永磁体和固定到线圈架并且定位在永磁体之间的线圈。 当向线圈提供电流时，在线圈和上永磁体之间产生吸引力，同时在线圈和下永磁体之间产生排斥力，从而使线圈架在垂直方向相对移动 到磁铁架。 当吸引力和排斥力同时作用于线圈时，合力相对于电流具有高线性度，因为吸引力和排斥力抵消了彼此的非线性特性。

公开(公告)号：US5598927A

公开(公告)日：1997-02-04

申请号：US442107

申请日：1995-05-16

申请人： Tadakatsu Ikenoya ,  Kazuya Ono

发明人： Tadakatsu Ikenoya ,  Kazuya Ono

IPC分类号： B65D5/40 ,  B29D22/00 ,  B31B1/74 ,  B32B27/08 ,  B65B51/00 ,  B65D5/42 ,  B65D5/56 ,  B65D65/40 ,  B65D85/72 ,  B65D3/22

CPC分类号： B65D5/563 ,  B31B1/00 ,  B32B27/08 ,  B65D5/4279 ,  B31B2201/621

摘要： A packaging container having an enhanced sealing performance includes a packaging material, an outside strip and a strip tape. The opposite side edges of the packaging material are overlapped with each other so that the outermost layer and the innermost layer of the packaging material face each other. The outside strip is interposed between the outermost layer and the innermost layer and is fused and joined with these layers so that a longitudinal sealing portion is formed. The outside strip has an outside layer and an inside layer. The strip tape is placed on the inner surface of the packaging container along the sealing portion, and is joined thereto by heat fusion. The innermost layer of the packaging material and the outside layer of the outside strip are made of a non-olefin flavor-retaining resin, and the outermost layer of the packaging material and the inside layer of the outside strip are made of a polyolefin resin. Since portions to be joined at the longitudinal sealing portion are both polyolefin, an enhanced sealing performance can be obtained.

摘要翻译： 具有增强的密封性能的包装容器包括包装材料，外部条带和剥离带。 包装材料的相对侧边缘彼此重叠，使得包装材料的最外层和最内层彼此面对。 外侧带介于最外层和最内层之间，并与这些层熔合并接合，从而形成纵向密封部。 外部带有外层和内层。 带状带沿密封部分放置在包装容器的内表面上，并通过热熔接合在一起。 包装材料的最内层和外带的外层由非烯烃香味保持树脂制成，包装材料的最外层和外带的内层由聚烯烃树脂制成。 由于在纵向密封部分处连接的部分都是聚烯烃，因此可以获得增强的密封性能。

公开(公告)号：US4966928A

公开(公告)日：1990-10-30

申请号：US232989

申请日：1988-08-17

申请人： Katugi Kitagawa ,  Ichiro Akutagawa ,  Kazuya Ono

发明人： Katugi Kitagawa ,  Ichiro Akutagawa ,  Kazuya Ono

IPC分类号： C09D5/03 ,  C08G59/42 ,  C09D163/00

CPC分类号： C08G59/4215 ,  C09D163/00

摘要： An epoxy resin based powder coating composition is disclosed, comprising an epoxy resin, a reaction product of dicyclopentadiene and maleic anhydride, and a cure accelerator.The coating composition may further comprise an aromatic acid anhydride based curing agent, an impact modifier and a surface smoothing agent.The coating composition has stable powder characteristic and provides good heat resistance and electrical insulation.

摘要翻译： 公开了一种环氧树脂基粉末涂料组合物，其包含环氧树脂，二环戊二烯与马来酸酐的反应产物和固化促进剂。 涂料组合物可以进一步包括基于芳族酸酐的固化剂，抗冲改性剂和表面平滑剂。 涂料组合物具有稳定的粉末特性，提供良好的耐热性和电绝缘性。

公开(公告)号：US09312159B2

公开(公告)日：2016-04-12

申请号：US12795939

申请日：2010-06-08

申请人： Kazuya Ono

发明人： Kazuya Ono

IPC分类号： H01L21/677 ,  G03B27/52 ,  H01L21/67 ,  G03F7/20

CPC分类号： H01L21/67748 ,  G03B27/52 ,  G03F7/7075 ,  H01L21/67126

摘要： A substrate is transported between a first space and a second space, which are separated by a partition wall, through an opening portion formed in the partition wall. A transport apparatus includes a support device having a support portion which supports the substrate, the support device being provided so as to block the opening portion while a clearance between the partition wall and the support device is formed, the support device moving the support portion from a state where the support portion faces the first space to a state where the support portion faces the second space; and an adjustment device which adjusts an amount of the clearance, thereby suppressing the movement of fluid from the first space to the second space.

摘要翻译： 基板通过形成在分隔壁上的开口部分在第一空间和第二空间之间传输，第一空间和第二空间被分隔壁隔开。 一种输送装置，具备支撑装置，该支撑装置具有支撑基板的支撑部，支撑装置设置成在形成分隔壁与支撑装置之间的间隙的同时阻挡开口部，支撑装置将支撑部从 支撑部分面向第一空间到支撑部分面向第二空间的状态; 以及调节装置，其调节间隙的量，从而抑制流体从第一空间到第二空间的移动。