Acoustic sensor, acoustic transducer, microphone using the acoustic transducer, and method for manufacturing the acoustic transducer
    8.
    发明授权
    Acoustic sensor, acoustic transducer, microphone using the acoustic transducer, and method for manufacturing the acoustic transducer 有权
    声传感器,声换能器,使用声换能器的麦克风,以及用于制造声换能器的方法

    公开(公告)号:US08952468B2

    公开(公告)日:2015-02-10

    申请号:US13699989

    申请日:2011-04-20

    IPC分类号: H01L29/84 H04R19/00 H04R19/04

    摘要: In an acoustic sensor, a conductive vibrating membrane and a fixed electrode plate are disposed above a silicon substrate with an air gap provided therebetween, and the substrate has an impurity added to a surface thereof. A microphone includes an acoustic transducer; and an acquiring section that acquires a change in pressure as detected by the acoustic transducer. A method for manufacturing an acoustic transducer including a semiconductor substrate, a vibrating membrane, which is conductive, and a fixed electrode plate and detecting a pressure according to a change in capacitance between the vibrating membrane and the fixed electrode plate, the method includes an impurity adding step of adding an impurity to a surface of the semiconductor substrate; and a forming step of forming the vibrating membrane and the fixed electrode plate above the semiconductor substrate to which the impurity has been added.

    摘要翻译: 在声学传感器中,导电振动膜和固定电极板设置在硅衬底之上,其间设置有气隙,并且衬底具有添加到其表面的杂质。 麦克风包括声换能器; 以及获取部,其获取由所述声换能器检测出的压力变化。 一种用于制造包括半导体衬底,导电的振动膜和固定电极板并根据振动膜和固定电极板之间的电容变化来检测压力的声学换能器的方法,所述方法包括杂质 向半导体衬底的表面添加杂质的步骤; 以及在已经添加有杂质的半导体衬底上形成振动膜和固定电极板的形成步骤。

    ACOUSTIC SENSOR AND METHOD FOR MANUFACTURING SAME
    9.
    发明申请
    ACOUSTIC SENSOR AND METHOD FOR MANUFACTURING SAME 审中-公开
    声学传感器及其制造方法

    公开(公告)号:US20140225204A1

    公开(公告)日:2014-08-14

    申请号:US14112219

    申请日:2012-08-29

    IPC分类号: B81B3/00 B81C1/00

    摘要: A cavity is provided in a substrate so as to penetrate from a front surface to a back surface of the substrate. A thin-film diaphragm for sensing acoustic vibrations above the substrate is provided over the cavity. At least one wall surface of the cavity is configured of a first inclined surface between the front surface of the substrate and a middle portion in the thickness direction, the first inclined surface gradually widening toward the outside of the substrate as the first inclined surface goes from the front surface of the substrate toward the middle portion, and a second inclined surface between the middle portion and the back surface of the substrate, the second inclined surface gradually narrowing toward the inside of the substrate as the second inclined surface goes from the middle portion toward the back surface of the substrate.

    摘要翻译: 在基板上设置有从基板的表面到背面贯通的空腔。 用于感测基板上方的声振动的薄膜隔膜设置在空腔上。 空腔的至少一个壁面由基板的前表面和厚度方向的中间部分之间的第一倾斜面构成,随着第一倾斜面从第一倾斜面朝向基板的外侧逐渐变宽 基板朝向中间部分的前表面,以及在基板的中间部分和后表面之间的第二倾斜表面,随着第二倾斜表面从中间部分开始,第二倾斜表面朝向基板的内部逐渐变窄 朝向基板的背面。

    ACOUSTIC SENSOR, ACOUSTIC TRANSDUCER, MICROPHONE USING THE ACOUSTIC TRANSDUCER, AND METHOD FOR MANUFACTURING THE ACOUSTIC TRANSDUCER
    10.
    发明申请
    ACOUSTIC SENSOR, ACOUSTIC TRANSDUCER, MICROPHONE USING THE ACOUSTIC TRANSDUCER, AND METHOD FOR MANUFACTURING THE ACOUSTIC TRANSDUCER 有权
    声学传感器,声音传感器,使用声学传感器的麦克风以及制造声学传感器的方法

    公开(公告)号:US20130069179A1

    公开(公告)日:2013-03-21

    申请号:US13699989

    申请日:2011-04-20

    IPC分类号: H01L29/84 H01L21/02

    摘要: In an acoustic sensor, a conductive vibrating membrane and a fixed electrode plate are disposed above a silicon substrate with an air gap provided therebetween, and the substrate has an impurity added to a surface thereof. A microphone includes an acoustic transducer; and an acquiring section that acquires a change in pressure as detected by the acoustic transducer. A method for manufacturing an acoustic transducer including a semiconductor substrate, a vibrating membrane, which is conductive, and a fixed electrode plate and detecting a pressure according to a change in capacitance between the vibrating membrane and the fixed electrode plate, the method includes an impurity adding step of adding an impurity to a surface of the semiconductor substrate; and a forming step of forming the vibrating membrane and the fixed electrode plate above the semiconductor substrate to which the impurity has been added.

    摘要翻译: 在声学传感器中,导电振动膜和固定电极板设置在硅衬底之上,其间设置有气隙,并且衬底具有添加到其表面的杂质。 麦克风包括声换能器; 以及获取部,其获取由所述声换能器检测出的压力变化。 一种用于制造包括半导体衬底,导电的振动膜和固定电极板并根据振动膜和固定电极板之间的电容变化来检测压力的声学换能器的方法,所述方法包括杂质 向半导体衬底的表面添加杂质的步骤; 以及在已经添加有杂质的半导体衬底上形成振动膜和固定电极板的形成步骤。