公开(公告)号：US4722090A

公开(公告)日：1988-01-26

申请号：US839145

申请日：1986-03-12

申请人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai

发明人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai

IPC分类号： H01S3/036 ,  H01S3/134 ,  H01S3/225 ,  H01S3/22

CPC分类号： H01S3/134 ,  H01S3/036 ,  H01S3/225

摘要： The present invention relates to excimer laser equipment which is one kind of gas laser, and in particular to a rare gas-halide excimer laser using rare gases and halogens as laser media, and adapted to control the concentration of halogens contained in laser media therewithin on the basis of the result of the measurement of the concentration of halogens in the laser media which is being used for the oscillation of laser rays therein, whereby the stabilized oscillation of the laser is always possible.

摘要翻译： 本发明涉及作为一种气体激光器的准分子激光设备，特别涉及使用稀有气体和卤素作为激光介质的稀有气体卤化物准分子激光器，并适用于控制激光介质中含有的卤素浓度 测量激光介质中用于激光射线的激光介质中的卤素浓度的结果的基础，由此激光器的稳定振荡总是可能的。

公开(公告)号：US4686682A

公开(公告)日：1987-08-11

申请号：US782568

申请日：1985-10-01

申请人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai ,  Hajime Nakatani ,  Hideki Kita

发明人： Kenyu Haruta ,  Hitoshi Wakata ,  Yukio Sato ,  Haruhiko Nagai ,  Hajime Nakatani ,  Hideki Kita

IPC分类号： H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/097

CPC分类号： H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/0384 ,  H01S3/225

摘要： A discharge excitation type short pulse laser device which is constructed with first and second main electrodes disposed in confrontation with the direction of the laser beam axis as their longitudinal direction, an auxiliary electrode provided on the rear surface part of the second main electrode and opposed to the second main electrode through the dielectric member, a pulse circuit for applying a pulse voltage across the first and second main electrodes, and a circuit for applying a voltage across the auxiliary electrode and the second main electrode, the circuit forming a part of the pulse circuit, or being independent of the pulse circuit, wherein the second main electrode is made of an electrically conductive material having a plurality of apertures therein, the second main electrode and the dielectric member are disposed in tight adhesion each other, and the second main electrode is thinly formed to enable creeping discharge to be produced on the surface of the dielectric member, thereby distributing electrons to be the seed for the main discharge to be generated across the main electrode.

摘要翻译： 一种放电激励型短脉冲激光器件，其由与激光束轴线的方向对置设置的第一和第二主电极作为其纵向方向构成，辅助电极设置在第二主电极的后表面部分上并与 通过电介质构件的第二主电极，用于在第一和第二主电极上施加脉冲电压的脉冲电路，以及用于在辅助电极和第二主电极之间施加电压的电路，形成脉冲的一部分的电路 电路或独立于脉冲电路，其中第二主电极由其中具有多个孔的导电材料制成，第二主电极和电介质构件彼此紧密地配置，第二主电极 被薄形成以能够在电介质构件的表面上产生爬电放电， 从而将电子分配成跨越主电极而产生的用于主放电的种子。

公开(公告)号：US4837773A

公开(公告)日：1989-06-06

申请号：US267629

申请日：1988-10-31

申请人： Hitoshi Wakata ,  Mitsuo Inoue ,  Yukio Sato ,  Kenyu Haruta ,  Haruhiko Nagai

发明人： Hitoshi Wakata ,  Mitsuo Inoue ,  Yukio Sato ,  Kenyu Haruta ,  Haruhiko Nagai

IPC分类号： H01S3/0971

CPC分类号： H01S3/09716

摘要： A discharge excitation type short pulse laser device is provided with a preliminary ionization circuit, the effeciency of preliminary ionization of which is remarkably improved. The laser device comprises a main discharge circuit including first and second main electrodes which are confronted with each other in a laser medium, main discharge capacitor means for storing energy for main discharge, and a discharge starting high voltage switch; and a preliminary ionization circuit connected to said high voltage switch, said preliminary ionization circuit including a discharging gap for preliminary ionization, a preliminary ionization capacitor and an inductance.

摘要翻译： 放电励磁型短脉冲激光装置具有初电离电路，其初步电离效果显着提高。 激光装置包括：主放电电路，包括在激光介质中彼此面对的第一和第二主电极，用于存储用于主放电的能量的主放电电容器装置和放电启动高压开关; 以及与所述高电压开关连接的初步电离电路，所述初步电离电路包括用于初步电离的放电间隙，初步电离电容器和电感。

公开(公告)号：US4914662A

公开(公告)日：1990-04-03

申请号：US248900

申请日：1988-09-26

申请人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata ,  Haruhiko Nagai ,  Kenyu Haruta

发明人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hitoshi Wakata ,  Haruhiko Nagai ,  Kenyu Haruta

IPC分类号： H01S3/131

CPC分类号： H01S3/131

摘要： A laser wavelength is stabilized by deriving a portion of laser beam emitted from a wavelength variable laser oscillator, spectroscopically processing the laser beam portion by means of a wavelength monitor mechanism, measuring a spatial intensity distribution of the spectroscopically processed beam portion, spectroscopically processing light having a specific wavelength and measuring a spatial intensity distribution thereof, analyzing the measured spatial intensity distribution of the spectroscopically processed beam portion on the basis of the measured spatial intensity distribution of the spectroscopically processed light having the specific wavelength, and controlling wavelength of the laser oscillator according to a result of the analysis.

摘要翻译： 通过导出从波长可变激光振荡器发射的激光束的一部分来稳定激光波长，通过波长监测机构对激光束部分进行光谱处理，测量光谱处理的光束部分的空间强度分布，光谱处理具有 特定波长并测量其空间强度分布，基于所测量的具有特定波长的光谱处理光的空间强度分布，并根据测量的激光振荡器的波长控制光谱处理光束部分的测量空间强度分布， 分析结果。

公开(公告)号：US5107511A

公开(公告)日：1992-04-21

申请号：US381723

申请日：1989-08-25

申请人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hiromi Kaneko ,  Hitoshi Wakata ,  Kenyu Haruta ,  Haruhiko Nagai ,  Kenichi Yasuda ,  Hiroyuki Mukumoto

发明人： Hajime Nakatani ,  Yoshibumi Minowa ,  Hiromi Kaneko ,  Hitoshi Wakata ,  Kenyu Haruta ,  Haruhiko Nagai ,  Kenichi Yasuda ,  Hiroyuki Mukumoto

IPC分类号： H01S3/137 ,  H01S3/225

CPC分类号： H01S3/137 ,  H01S3/225

摘要： A method and apparatus for stabilizing the wavelength in a laser. The apparatus includes a first and second etalon for fine and rough tuning, respectively, of a laser oscillator. The output power and wavelength of the laser beam, for example, can be used to adjust these etalons to provide a constant output power and to counteract the change in etalon characteristics due to heat.

公开(公告)号：US5305338A

公开(公告)日：1994-04-19

申请号：US757419

申请日：1991-09-10

申请人： Hitoshi Wakata ,  Akihiro Suzuki ,  Kenyu Haruta ,  Haruhiko Nagai ,  Akihiko Iwata ,  Shinji Murata ,  Isamu Tanakura ,  Tomohiro Sasagawa ,  Yuito Kimura

发明人： Hitoshi Wakata ,  Akihiro Suzuki ,  Kenyu Haruta ,  Haruhiko Nagai ,  Akihiko Iwata ,  Shinji Murata ,  Isamu Tanakura ,  Tomohiro Sasagawa ,  Yuito Kimura

IPC分类号： H01S3/0971 ,  H01S3/00 ,  H03K17/08

CPC分类号： H01S3/0971 ,  H01L2924/0002

摘要： A switch device used for a laser device, includes series-parallel connected switch elements or modules. The switch elements or modules are simultaneously turned on by trigger signals from trigger circuits. The transmission lines for connecting the trigger circuits to respective switch elements are equal to one another in length. A protecting circuit is provided for the switch elements, and indicators are provided for indicating the shortcircuit of the switch elements. In the switch device, the number of wires for the switch elements is made small and heat generated from the switch elements is effectively radiated. The modules are easily stacked, and firmly connected to a control unit for controlling the switch elements. A discharge excited laser device using the switch device has a high efficiency and a long lifetime and is reliable.

摘要翻译： 用于激光装置的开关装置包括串联并联的开关元件或模块。 开关元件或模块通过来自触发电路的触发信号同时导通。 用于将触发电路连接到各个开关元件的传输线的长度彼此相等。 为开关元件提供保护电路，并且提供用于指示开关元件的短路的指示器。 在开关装置中，用于开关元件的导线的数量变小，并且从开关元件产生的热量被有效地辐射。 模块容易堆叠，并且牢固地连接到用于控制开关元件的控制单元。 使用开关器件的放电激发激光器具有高效率和长寿命，并且是可靠的。

公开(公告)号：US5181217A

公开(公告)日：1993-01-19

申请号：US727432

申请日：1991-07-09

申请人： Yukio Sato ,  Akihiro Suzuki ,  Mitsuo Inoue ,  Kenyu Haruta ,  Haruhiko Nagai

发明人： Yukio Sato ,  Akihiro Suzuki ,  Mitsuo Inoue ,  Kenyu Haruta ,  Haruhiko Nagai

IPC分类号： H01S3/0971

CPC分类号： H01S3/0971

摘要： A discharge pumping circuit of spiker/sustainer type for the Excimer laser oscillator, wherein spiker unit is isolated from the sustainer unit by a switching device such as a magnetic isolator is disclosed. In the pumping circuit, the switching device shifts from its OFF state to its ON state, during the process of charging a spiker capacitor, before its terminal voltage reaches a voltage which initiates the discharge, and a sharp-rise pulse voltage is applied by a transfer of electric charge from said sustainer capacitor to said spiker capacitor, to initiate the discharge for the pumping. In another discharge-pumping circuit which also has a means for preionizing the laser gas, the timing for the preionization is set to start after the initiation of charging the sustainer capacitor and before the initiation of charging the spiker capacitor in a polarity opposite to that of the sustainer capacitor, and is controlled for maintaining the discharge initiating voltage constant for the repetition frequency. In another discharge-pumping circuit, a power source for charging the sustainer capacitor is structured to include a magnetic pulse compression circuit to reduce the stress on a high voltage switch such as a thyratron in the circuit to realize an excellent performance, a long service life and a high reliability.

摘要翻译： 公开了一种用于准分子激光振荡器的尖头/持续器类型的放电泵浦电路，其中尖头单元通过诸如磁隔离器的开关装置与维持器单元隔离。 在泵浦电路中，在尖端电容器的充电过程中，在其端电压达到开始放电的电压之前，开关器件从其OFF状态转换到ON状态，并且尖锐的脉冲电压由 将电荷从所述持续电容器转移到所述尖头电容器，以启动用于泵送的放电。 在还具有用于预激化激光气体的装置的另一个放电 - 泵浦电路中，预先去离子化的定时被设置为在对维持电容器充电开始之后并且在尖晶石电容器开始充电之前开始，其极性与 并且被控制为使重放频率的放电起始电压保持恒定。 在另一个放电泵浦电路中，用于对持续电容器充电的电源被构造成包括磁脉冲压缩电路，以减小电路中诸如闸流管之类的高压开关上的应力，以实现优异的性能，长的使用寿命 并具有高可靠性。

公开(公告)号：US5187716A

公开(公告)日：1993-02-16

申请号：US725098

申请日：1991-07-03

申请人： Kenyu Haruta ,  Haruhiko Nagai ,  Hajime Nakatani ,  Yoshihiko Yamamoto ,  Taketoshi Takemura ,  Takashi Eura ,  Shungo Tsuboi ,  Yoshifumi Matsushita ,  Tadao Minagawa

发明人： Kenyu Haruta ,  Haruhiko Nagai ,  Hajime Nakatani ,  Yoshihiko Yamamoto ,  Taketoshi Takemura ,  Takashi Eura ,  Shungo Tsuboi ,  Yoshifumi Matsushita ,  Tadao Minagawa

IPC分类号： H01S3/038 ,  H01S3/0971 ,  H01S3/225

CPC分类号： H01S3/225 ,  H01S3/0388 ,  H01S3/0971

摘要： At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.

公开(公告)号：US5313487A

公开(公告)日：1994-05-17

申请号：US887770

申请日：1992-05-22

申请人： Shuichi Fujikawa ,  Mitsuo Inoue ,  Yukio Sato ,  Haruhiko Nagai

发明人： Shuichi Fujikawa ,  Mitsuo Inoue ,  Yukio Sato ,  Haruhiko Nagai

IPC分类号： H01S3/0977 ,  H01S3/097

CPC分类号： H01S3/0977 ,  H01S3/09775

摘要： At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing a large area, spatially uniform main discharge in a laser gas therebetween. This improves efficiency and stability in laser oscillations under repeated operations at a high rate of tens to hundreds of shots per second. In addition, without using the laser output power, the preionization timing is controlled such that an optimal preionization timing is realized. The optimal preionization timing is determined on the basis of a minimum discharge starting voltage between the primary electrodes or a minimum required time from the time of applying a high voltage between said first and second primary electrodes until the time the main discharge commences.

摘要翻译： 在一对主电极之一的背面设置至少两种类型的预电离系统，这些主电极相对于彼此以间隔开的相对关系设置，以在它们之间的激光气体中引起大面积的空间均匀的主放电。 这样可以在每秒数十到数百次的高速率重复操作下提高激光振荡的效率和稳定性。 此外，在不使用激光输出功率的情况下，控制预定时定时，从而实现最佳的初步化定时。 基于初级电极之间的最小放电起始电压或从在所述第一和第二主电极之间施加高电压直到主放电开始时的最小所需时间来确定最佳预电离定时。

公开(公告)号：US4606035A

公开(公告)日：1986-08-12

申请号：US592207

申请日：1984-03-22

申请人： Masao Hishii ,  Masaaki Tanaka ,  Yukio Sato ,  Haruhiko Nagai ,  Norikazu Tabata

发明人： Masao Hishii ,  Masaaki Tanaka ,  Yukio Sato ,  Haruhiko Nagai ,  Norikazu Tabata

IPC分类号： H01S3/038 ,  H01S3/0971 ,  H01S3/097

CPC分类号： H01S3/0971 ,  H01S3/038

摘要： A lateral excitation type gas laser device having a small size and high output. An anode and a cathode are arranged opposite one another with a flow of laser gas therebetween. A high DC voltage is applied between the anode and cathode to cause a glow discharge therebetween. A dielectric electrode is disposed in the flow of laser gas upstream of the anode and cathode, and a high frequency high voltage is applied between the dielectric electrode on one hand and the anode and cathode on the other for causing a silent discharge therebetween. The dielectric electrode has a diameter of 3 mm

摘要翻译： 具有小尺寸和高输出的横向激励型气体激光装置。 阳极和阴极彼此相对布置，其间具有激光气流。 在阳极和阴极之间施加高的直流电压以在它们之间产生辉光放电。 在阳极和阴极的上游的激光气流中设置有电介质电极，一方面在介电电极与另一方的阳极和阴极之间施加高频高压，使其之间产生静音放电。 电介质电极的直径为3mm